• Title/Summary/Keyword: Plasma Coating

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Emission Characteristics of Discharge Tube with Mixed Gases

  • Jo, Ju-Ung;Park, Yong-Sung;Lee, Jong-Chan;Masaharu Aono;Park, Dae-Hee
    • KIEE International Transactions on Electrophysics and Applications
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    • v.3C no.4
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    • pp.136-139
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    • 2003
  • The positive column of a discharge tube filled with a mixture of mercury-xenon has a tendency to become contracted at room temperature. However, once the tube temperature is raised over 50 [$^{\circ}C$], the positive column changes from a contracted state to a diffused state. The xenon emission is stronger in the contracted positive column than in the diffused column. Alternatively, the mercury emission is more intense in the diffused positive column, and the luminance of the phosphor coating on the inner surface of the tube is higher than that in the contracted positive column. Moreover, higher luminance can be obtained by increasing the xenon pressure.

Fluidic Manipulating in Microchannels Using Hydrophobic Patterns (소수성 패턴을 이용한 미세유로에서의 유체 조작)

  • Lee, Sang-Ho;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 2000.11c
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    • pp.583-585
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    • 2000
  • This study reports the fluidic handling method using hydrophobic patterns inside PDMS microchannels. In order to obtain hydrophobic patterns, we pattern fluorcarbon(FC) film surfaces by lift-off process. FC films are deposited by spin coating method and plasma polymerization method. Hydrophobic surfaces are used as the barriers to control fluid flow. Injected liquid is spontaneously filled up inside PDMS-microchannels by the capillary action. Liquid flow stops when it meets hydrophobic regions which can be the barrier against fluid flow. Then, again, when liquid is pressurized externally, liquid can move toward another hydrophilic region by external air pressure. Contact angle analyses are performed on fluorocarbon films to estimate the wettability of film surfaces.

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Effect of Microstructure on Corrosion Behavior of TiN Hard Coatings Produced by Two Grid-Attached Magnetron Sputtering

  • Kim, Jung Gu;Hwang, Woon Suk
    • Corrosion Science and Technology
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    • v.5 no.1
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    • pp.15-22
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    • 2006
  • The introduction of two-grid inside a conventional process system produces a reactive coating deposition and increases metal ion ratio in the plasma, resulting in denser and smoother films. The corrosion behaviors of TiN coatings were investigated by electrochemical methods, such as potentiodynamic polarization test and electrochemical impedance spectroscopy (EIS) in deaerated 3.5% NaCl solution. Electrochemical tests were used to evaluate the effect of microstructure on the corrosion behavior of TiN coatings exposed to a corrosive environment. The crystal structure of the coatings was examined by X-ray diffractometry (XRD) and the microstructure of the coatings was investigated by scanning electron microscopy (SEM) and transmission electron spectroscopy (TEM). In the potentiodynamic polarization test and EIS measurement, the corrosion current density of TiN deposited by two grid-attached magnetron sputtering was lower than TiN deposited by conventional magnetron type and also presented higher Rct values during 240 h immersion time. It is attributed to the formation of a dense microstructure, which promotes the compactness of coatings and yields lower porosity.

DEVELOPMENT OF MEMBRANE AND COLD-CONDENSATION PROCESS FOR REMOVAL AND RECOVERY OF VOLATILE ORGANIC COMPOUNDS

  • Kim, Sung-Soo;Lee, Jong-Hwa;Kim, Hyunki;Kim, Sang-Yong
    • Proceedings of the Membrane Society of Korea Conference
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    • 2003.07a
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    • pp.69-72
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    • 2003
  • Volatile organic compounds (VOC) cause air pollution problem and deterioration of atmosphere of petrochemical and fine chemical plants. Hybrid process of membrane and cold-condensation were developed and it effectively removed and recycled the VOC. Operation parameters of the process were optimized to attain hish removal and recycle of VOC. Composite membranes for organic vapor separation were developed in this work by PDMS coating and plasma polymerization on polypropylene and polysulfone support membranes. PDMS and various silicone monomers were tested for several organic vapors such as benzene, toluene, TCE, and HCFC, which are produced in petrochemical and fine chemical industry and causes air pollution problems if are released to atmosphere. Composite membranes prepared in this work showed appreciable performance in terms of organic vapor removal and reuse. Performance variation of the membranes was correlated with their surface characteristics.

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Growth of Transferable Polycrystalline Si Film on Mica Substrate (운모기판을 이용한 다결정 Si 전이막 성장 연구)

  • Park Jin Woo;Eom Ji Hye;Ahn Byung Tae;Jun Young Kwon
    • Korean Journal of Materials Research
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    • v.14 no.5
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    • pp.343-347
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    • 2004
  • We investigated the growth feasibility of polycrystalline Si film on mica substrate for the transfer of the layer to a plastic substrate. The annealing temperature was limited up to $600^{\circ}C$ because of crack development in the mica substrate. Amorphous Si film was deposited on mica substrate by PECVD and was crystallized by furnace annealing. During the annealing, bubbles were formed at the Si/mica interface. The bubble formation was avoided by the Ar-plasma treatment before amorphous Si deposition. A uniform and clean polycrystalline Si film was obtained by coating $NiCl_2$ on the amorphous Si film and annealing at $500^{\circ}C$ for 10 h. The conventional Si lithography was possible on the mica substrate and the devices fabricated on the substrate could be transferred to a plastic substrate.

A study on the Etching and electrical Properties of PZT Thin Films (PZT(53/47) 박막의 식각 및 전기적 특성에 관한 연구)

  • 김경태;이성갑;이영희;김창일
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.39-42
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    • 2000
  • The effect of excess Pb contents on the etching of PZT thin films and their electrical properties has been investigated. Ferroelectric PZT(53/47) thin films were prepared by the metal alkoxide-based Sol-Gel method, in which they were spin-coating on P7Ti/Si02/Si substrate using the PZT(53/47) stock solutions with various excess Pb contents. Etching of PZT film was performed using planar inductively coupled Ar/Cl$_2$/BCl$_3$ plasma. The etch rate of PZT film was 2450 $\AA$/min at Ar(20)/BCl$_3$(80) gas mixing ratio and substrate temperature of 8$0^{\circ}C$.

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Mechanical Behavior of Layered YSZ Thermal Barrier Coatings using Indentation Test (압입시험법에 의한 YSZ 층상 열차폐 코팅재의 기계적 거동)

  • Lee, Dong-Heon;Lee, Kee-Sung
    • Journal of the Korean Ceramic Society
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    • v.48 no.5
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    • pp.396-403
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    • 2011
  • In this study, we investigated the mechanical behaviors of layered thermal barrier coatings by indentations. Various single and double-layered thermal barrier coatings were deposited by air plasma spray process using different type of commercialized YSZ (Yttria stabilized zirconia) starting powders. Indentation stress-strain curve, load-displacement curve and hardness of the single and the double-layered thermal barrier coatings were obtained experimentally and analyzed. The indentation damages at the same loads were compared, and thus, the results depend on the structure of each coating. The result indicates improvement in damage resistances from tailoring of layered structures in the component of gas turbine system is expected.

Microstructural Changes of NiCrAlY/ZrO$_2$-Y$_2$O$_3$ Composite Coatings By Oxidation (NiCrAlY/ZrO$_2$-Y$_2$O$_3$ 복합코팅의 산화에 따른 조직관찰)

  • 박기범;박진오;이동복
    • Journal of the Korean institute of surface engineering
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    • v.35 no.2
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    • pp.101-106
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    • 2002
  • The microstructural changes of $NiCrAlY/ZrO_2$-$Y_2$$O_3$ composite coatings that were manufactured by air-plasma-spraying were investigated using XRD and SEM/EDS. The as-sprayed microstructure consisted of (Ni,Cr)-rich regions, ($ZrO_2$-$Y_2$$O_3$)-rich regions, and $Al_2$$O_3$-rich layers that were formed during spraying owing to the oxidation of Al in NiCrAlY. During oxidation between 900 and $1100^{\circ}C$ in air, Cr in the (Ni,Cr)-rich regions diffused toward the $Al_2$$O_3$-rich layers, and oxidized to be dissolved in $A1_2$$O_3$-rich layers. The oxidation of Ni in the (Ni,Cr)-rich regions was less distinct, except at the outer surface of the coating.

Ni-BASE ALLOY SYSTEMS AS ALTERNATIVE TO HEXAVALENT CHROMIUM (경질크롬도금 대체용 Ni계 합금도금 기술)

  • Chang, Do-Yon;Lee, Kyu-Hwan;Kwon, Sik-Chol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.10a
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    • pp.11-11
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    • 2003
  • Electroplated hexavalent chromium coatings have been used in many technical applications since it was invented by G.J. Sargent in 1920. Because of the environmental problems and health risks associated with the use of hexavalent chromium, there has been an extensive search for alternative coatings with properties such as corrosion resistance and wear resistance, at a reasonable cost. However there is no single substitute that meets all the desirable performance characteristics of chromium. Advanced techniques, such as alloy plating, electroless plating, trivalent chromium plating, plasma and thermal spray coating, PVD and ion implantation, have been applied for replacing hexavalent chromium plating.

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Fabrication of refractive PMMA microlens array using transparent acrylic resin (투명 아크릴 레진을 이용한 초소형 PMMA 렌즈 배열의 제작)

  • Ahn, Si-Hong;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 1999.07g
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    • pp.3316-3318
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    • 1999
  • PMMA(poly-methyl methacrylate) microlens array is fabricated using transparent acrylic resin. PMMA is commonly used material for plastic lens due to its excellent visibility larger than 90% and other optical characteristics so much close to those of glass. Orthodontic resin (DENTSPLY International Inc.), commonly used in dentistry, is an transparent acrylic resin kit including MMA liquid and polymerization powder. Their mixture results in PMMA through polymerization. Using the resin PMMA layer is formed on the substrate through spin-coating. Designed pattern of lens structure is transferred to PMMA layer by RIE (Reactive Ion Etching) with oxygen plasma. Final lens shape is formed by thermal treatment that causes PMMA to reflow, The thickness of PMMA spun on the substrate is $17{\mu}m$ that is also final sag of microlens, Designed diameters of the microlenses are $200{\mu}m$, $300{\mu}m$,and $500{\mu}m$, respectively.

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