• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.4
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• pp.261-266
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• 1998

In developing the high density memory device, the etching of fine pattern is becoming increasingly important. Therefore, definition of ultra fine line and space pattern and minimization of damage and contamination are essential process. Also, the high density plasma in low operating pressure is necessary. The candidates of high density plasma sources are electron cyclotron resonance plasma, helicon wave plasma, helical resonator, and inductively coupled plasma. In this study, planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, flow rate, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2002.11a
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• pp.39-43
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• 2002

In this thesis, a λ/4 hair-pin resonator is proposed to reduce the size of resonators. A LTCC MLC bandpass filter is designed using the λ/4 hair-pin resonators. The electromagnetic coupling structure between two planar resonators is analysed. The equivalent circuit is derived to explain the behavior of the LTCC MLC bandpass filter using λ/4 hair-pin resonators. A design procedure is also described. The simulated and measured results of 2-pole bandpass filter are presented.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.389-392
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• 1996

The recent development of high temperature superconducting epitaxial thin film offer great potential for planar passive microwave application such as ring resonator, filters, transmission lines, and antennas. This paper describes the fundamental properties of Microstrip Band-Pass Filter using HTS Thin Film and its application to microwave devices. In order to fabricate HTS microstrip multiple filters, We have grown laser ablated HTS thin films, patterned by photolithographic process and wet etching processes intro HTS microwave devices.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.8 no.4
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• pp.243-248
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• 2015

Since phase noise is one of the most important parameters in the design of microwave oscillators, several methods have been proposed to reduce the phase noise. These methods have focused on improving the quality factor of resonators, which result in low phase noise oscillators. Dielectric resonators have been widely used for low phase noise in microwave oscillators due to their high quality factor. However this cannot be used in MMIC oscillators because they have a 3D structure. In this paper, to overcome this problem a novel resonator using open ring type DGS is proposed for improvement of phase noise characteristics that is weak point of oscillator using planar type microstrip line resonator, and oscillator for 5.8GHz band is designed using proposed DGS resonator. The open ring type DGS resonator is composed of DGS cell etched on ground plane under $50{\Omega}$ microstrip line. At the fundamental frequency of 5.8GHz, 6.1dBm output power and -82.7 dBc@100kHz phase noise have been measured for oscillator with ring type DGS resonator. The phase noise characteristics of oscillator is improved about 96.5dB compared to one using the general ${\lambda}/4$ microstrip resonator.

• Journal of Sensor Science and Technology
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• v.10 no.1
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• pp.1-8
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• 2001

Conventional microgyroscopes of vibrating type require resonant frequency tuning of the driving and sensing modes to achieve high sensitivity. These tuning conditions depend on each fabricated microgyroscopes, even though the microgyroscopes are identically designed. A new micromachined resonator, which is applicable to microgyroscopes with self-toning characteristics, is presented. Since the laterally driven two degrees of freedom (2DOF) resonator was designed as a symmetric structure with identical stiffness in two orthogonal axes, the resonator is applicable to vibrating microgyroscopes, which do not need mode tuning. A dynamic model of the resonator was derived considering gyroscopic application. The dynamic model was evaluated by experimental comparison with fabricated resonators. The microgyroscopes were fabricated using a simple 2-mask-process of a single polysilicon layer deposited on an insulator layer. The feasibility of the resonator as a vibrating microgyroscopes with self-tuning capability is discussed. The fabricated resonators of a particular design have process-induced non-uniformities that cause different resonant frequencies. For several resonators, the standard deviations of the driving and sensing frequencies were as high as 1232Hz and 1214Hz, whereas the experimental average detuning frequency was 91.75Hz. The minimum detuned frequency was 68Hz with $0.034mVsec/^{\circ}$ sensitivity. The sensitivity of the microgyroscopes was low due to process-induced non-uniformity; the angular rate bandwidth, however, was wide. This resonator could be successfully applicable to a vibrating microgyroscopes with high sensitivity, if improvements in uniformity of the fabrication process are achieved. Further developments in improved integrated circuits are expected to lower the noise level even more.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.19 no.10
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• pp.1104-1114
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• 2008

In the output of a mixer, spurious appears with the desired signal, and a filter is necessary to suppress the spurious. In this paper, the planar filter for Ka-band frequency synthesizer was designed and fabricated. In this procedure, the frequency response becomes asymmetric because of discontinuities at the high frequency. Using this, we designed short-end PCLF by using a individual resonator tuning method. The fabricated 5th-order Ka-band pass filter is compared with the result of EM simulation through measurement. The performance agrees with the simulation. Finally spurious suppression was examined through the measurement of output spectrum of the mixer with the filter.

• Journal of electromagnetic engineering and science
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• v.16 no.1
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• pp.24-28
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• 2016

This study presents a conductivity measurement technique that is applicable at radio frequencies (RF). Of particular interest is the measurement of the RF conductivity of a flexible Zell fabric, which is often used to implement wearable antennas on clothes. First, the transmission coefficient is measured using a planar microstrip ring resonator, where the ring is made of a Zell fabric. Then, the fabric's conductivity is determined by comparing the measured transmission coefficient to a set of simulation data. Specifically, a MATLAB-based root-searching algorithm is used to find the minimum of an error function composed of measured and simulation data. Several error functions have been tested, and the results showed that an error function employing only the magnitude of the transmission coefficient was the best for determining the conductivity. The effectiveness of this technique is verified by the measurement of a known copper foil before characterizing the Zell fabric. The conductivity of the Zell fabric at 2 GHz appears to be within the order of $10^4S/m$, which is lower than the DC conductivity of $5{\times}10^5S/m$.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.1
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• pp.11-19
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• 2013

In this paper, we designed and implemented the planar monopole antenna using the coupling effect for the multi-band characteristic. A parasitic element for the multi-band characteristic based on a rectangular patch with single resonance is inserted. Spiral shaped parasitic element is used for minimizing the antenna size and obtaining the multi-resonance characteristic. The frequency characteristics are modified and optimized by varying specific parameters. By inserting an L-shaped resonator at both sides of the feed line which connected through the via hole to the ground plane, unnecessary frequency bands are eliminated. Proposed antenna dimension is $40{\times}60{\times}1mm^3$. It is fabricated on the FR-4 substrate(${\varepsilon}_r$=4.4) using a microstrip line of $50{\Omega}$ for impedance matching. By measurement results, the characteristic of the return loss under -10 dB are 1.714~2.496 GHz, 2.977~4.301 GHz, and 4.721~6.315 GHz, and the radiation patterns have omni-directional shapes.

• Journal of Advanced Navigation Technology
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• v.12 no.2
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• pp.122-131
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• 2008

In this paper, an S-band oscillator of the low phase noise property using miniaturized microstrip hairpin shaped ring resonator has been designed and implemented. The TACONIC's RF-35 substrate has a dielectric constant ${\varepsilon}_r$=3.5 a thickness h=20mil a copper thickness t=17 um and loss tangent $tan{\delta}$=0.0025. The designed and implemented 2.45 GHz oscillator shows low phase performance of -100.5 dBc/Hz a 100kHz offset. Output power 20.9 dBm at center frequency 2.45 GHz and harmonic suppression -32 dBc. The circuit was implemented with hybrid technique. But can be fully compatible with the RFIC's, MIC and MMIC due to its entirely planar structure.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.27 no.8
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• pp.709-716
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• 2016

In this paper, A duplexer module with temperature-insensitive electrical characteristics was proposed for remote wireless communication system. Duplexer modules are required to have performances of low insertion loss, high isolation between transmitted band and received band, harmonic suppression as well as high power durability in the system for transmitting guided information to missile flying a free space on the ground. The proposed duplexer module are consist of transmission bandpass filter and receiving bandpass filter which are connected to common antenna port, planar coupler for output power monitoring and low pass filter for harmonic attenuation of power amplifier and coaxial cavity resonator. The material and dimensions of the resonator are determined for minimum frequency shift by temperature variation using 3D EM simulation. The measured results of the prototype showed a good agreement with the simulation results, and it should be well applied not only for guided weapon systems but also for any other communication systems such as remote radio head.