• Electrical & Electronic Materials
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• v.10 no.2
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• pp.126-133
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• 1997

In order to apply for the gas sensing layer and the piezoelectric thin film devices, we studied the effects of magnetron sputtering conditions and annealing temperature on the electrical and structual characteristics of the ZnO thin film. The optimal deposition conditions, in order to obtain a c axis of the ZnO (002) phase thin film which is perpendicular to SiO$_{2}$/Si substrate, were like these ; substrate temperature 150.deg. C, chamber pressure 2 mtorr, R.F. power 300 watts, gas flow ratio 0.4[O$_{2}$(Ar + $O_{2}$)]. When the ZnO thin film was annealed in 600.deg. C, $O_{2}$ gas ambient for 1 hr, the resistivity was 2.6 x 10$^{2}$.ohm.cm and the grain size of ZnO thin film was less than 1 .mu.m. So the ZnO thin film acquired from above conditions can apply for the gas sensing layer which require a c axis perpendicular to the substrate surface.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.374-375
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• 2006

This paper describes anodic bonding characteristics of MCA to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with the same properties were deposited on MCA under optimum RF sputter conditions (Ar 100 %, input power $1\;W/cm^2$). After annealing at $450^{\circ}C$ for 1 hr, the anodic bonding of MCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in $110^{-6}$ Torr vacuum condition. Then, the MCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation and simulation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity being 0.05-0.08 %FS. Moreover, any damages or separation of MCNSi bonded interfaces did not occur during actuation test. Therefore, it is expected that anodic bonding technology of MCNSi-wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.684-687
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• 2004

일반적으로 적층형 압전 액츄에이터의 변위는 액츄에이터의 내부 적층수와 압전정수($d_{33}$)에 비례적으로 증가한다. 그러나 압전현상을 이용한 액츄에이터는 전기적, 기계적 부하에 의한 dipole 거동을 보이기 때문에 domain wall에 의한 압전정수의 비선형 거동을 보인다. 본 논문에서는 PMN-PZ-PT 세라믹스를 이용하여 $2{\times}3{\times}10$ (mm)의 적층형 세라믹 액츄에이터를 제조 후 1kV/mm의 일정한 전계를 인가하고 $0\sim990N$의 기계적 부하 인가하에서 적층형 세라믹 액츄에이터의 비선형 특성을 조사하였다. 압전 액츄에이터의 비선형 거동은 기계적 응력에 의한 유전 및 전왜 특성에 영향주고, 액츄에이터의 변위 특성은 유전 및 전왜 특성의 영향에 크게 의존한다.

• Journal of Sensor Science and Technology
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• v.27 no.6
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• pp.407-413
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• 2018

Most sleep apnea patients exhibit severe snoring, and long-lasting sleep apnea may cause insomnia, hypertension, cardiovascular diseases, stroke, and other diseases. Although polysomnography is the typical sleep diagnostic method to accurately diagnose sleep apnea by measuring a variety of bio-signals that occur during sleep, it is inconvenient as the patient has to sleep with attached electrodes at the hospital for the diagnosis. In this study, a diagnostic pillow is designed to measure respiration, heart rate, and snoring during sleep, using only one polyvinylidene fluoride (PVDF) sensor. A PVDF sensor with piezoelectric properties was inserted into a specially made instrument to extract accurate signals regardless of the posture during sleep. Wavelet analysis was used to identify the extractability and frequency domain signals of respiration, heart rate, and snoring from the signals generated by the PVDF sensor. In particular, to separate the respiratory signal in the 0.2~0.5 Hz frequency region, wavelet analysis was performed after removing 1~2 Hz frequency components. In addition, signals for respiration, heart rate, and snoring were separated from the PVDF sensor signal through a Butterworth filter and median filter based on the information obtained from the wavelet analysis. Moreover, the possibility of measuring sleep apnea from these separated signals was confirmed. To verify the usefulness of this study, data obtained during sleeping was used.

• Structural Engineering and Mechanics
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• v.71 no.5
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• pp.485-502
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• 2019

In this research, the nonlinear static, buckling and vibration analysis of viscoelastic micro-composite beam reinforced by various distributions of boron nitrid nanotube (BNNT) with initial geometrical imperfection by modified strain gradient theory (MSGT) using finite element method (FEM) are presented. The various distributions of BNNT are considered as UD, FG-V and FG-X and also, the extended rule of mixture is used to estimate the properties of micro-composite beam. The components of stress are dependent to mechanical, electrical and thermal terms and calculated using piezoelasticity theory. Then, the kinematic equations of micro-composite beam using the displacement fields are obtained. The governing equations of motion are derived using energy method and Hamilton's principle based on MSGT. Then, using FEM, these equations are solved. Finally the effects of different parameters such as initial geometrical imperfection, various distributions of nanotube, damping coefficient, piezoelectric constant, slenderness ratio, Winkler spring constant, Pasternak shear constant, various boundary conditions and three material length scale parameters on the behavior of nonlinear static, buckling and vibration of micro-composite beam are investigated. The results indicate that with an increase in the geometrical imperfection parameter, the stiffness of micro-composite beam increases and thus the non-dimensional nonlinear frequency of the micro structure reduces gradually.

• Advances in nano research
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• v.10 no.3
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• pp.235-251
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• 2021

In the current study, the free vibrational behavior of a Porous Micro (PM) beam which is integrated with Functionally Graded Piezoelectric (FGP) layers with initial curvature is considered based on the two trigonometric shear deformation theories namely SSDBT and Tan-SDBT. The structure's mechanical properties are varied through its thicknesses following the given functions. The curved microbeam is exposed to electro-mechanical preload and also is rested on a Pasternak type of elastic foundation. Hamilton's principle is used to extract the motion equations and the MCST is used to capture the size effect. Navier's solution method is selected as an analytical method to solve the motion equations for a simply supported ends case and by validating the results for a simpler state with previously published works, effects of different important parameters on the behavior of the structure are considered. It is found that although increasing the porosity reduces the natural frequency, but enhancing the volume fraction of CNTs increasing it. Also, by increasing the central angle of the curved beam the vibrations of the structure increases. Designing and manufacturing more efficient smart structures such as sensors and actuators are of the aims of this study.

• Smart Structures and Systems
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• v.29 no.5
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• pp.729-746
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• 2022

In this paper, a nonlinear structural model updating methodology based on the Deep Belief Network (DBN) is proposed. Firstly, the instantaneous parameters of the vibration responses are obtained by the discrete analytical mode decomposition (DAMD) method and the Hilbert transform (HT). The instantaneous parameters are regarded as the independent variables, and the nonlinear model parameters are considered as the dependent variables. Then the DBN is utilized for approximating the nonlinear mapping relationship between them. At last, the instantaneous parameters of the measured vibration responses are fed into the well-trained DBN. Owing to the strong learning and generalization abilities of the DBN, the updated nonlinear model parameters can be directly estimated. Two nonlinear shear-type structure models under two types of excitation and various noise levels are adopted as numerical simulations to validate the effectiveness of the proposed approach. The nonlinear properties of the structure model are simulated via the hysteretic parameters of a Bouc-Wen model and a Giuffré-Menegotto-Pinto model, respectively. Besides, the proposed approach is verified by a three-story shear-type frame with a piezoelectric friction damper (PFD). Simulated and experimental results suggest that the nonlinear model updating approach has high computational efficiency and precision.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.280.1-280.1
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• 2016

Generally InGaN/GaN green light emitting diode (LED) exhibits the low quantum efficiency (QE) due to the large lattice mismatch between InGaN and GaN. The QE of InGaN-based multiple quantum wells (MQWs) is drastically decreased when an emission wavelength shifts from blue to green wavelength, so called "green gap". The "green gap" has been explained by quantum confined Stark effect (QCSE) caused by a large lattice mismatch. In order to improve the QE of green LED, undoped graded short-period InGaN/GaN superlattice (GSL) and Si-doped GSL (SiGSL) structures below the 5-period InGaN/GaN MQWs were grown on the patterned sapphire substrates. The luminescence properties of InGaN/GaN green LEDs have been investigated by using photoluminescence (PL) and time-resolved PL (TRPL) measurements. The PL intensity of SiGSL sample measured at 10 K shows stronger about 1.3 times compared to that of undoped GSL sample, and the PL peak wavelength at 10 K appears at 532 and 525 nm for SiGSL and undoped GSL, respectively. Furthermore, the PL decay of SiGSL measured at 10 K becomes faster than that of undoped GSL. The faster decay for SiGSL is attributed to the increased wavefunction overlap between electron and hole due to the screening of piezoelectric field by doped carriers. These PL and TRPL results indicate that the QE of InGaN/GaN green LED with GSL structure can be improved by Si-doping.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.9
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• pp.541-545
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• 2017

$Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT) films with a thickness of $5{\sim}10{\mu}m$ at the morphotropic phase boundary were fabricated by aerosol-deposition (AD), and their phase evolution and electrical properties were investigated. The microstructure of the AD PZT films revealed nanosized grains with a low crystallinity and a dense structure at room temperature. The AD PZT films showed a mixture of tetragonal and rhombohedral phases. The post-annealing temperature was varied to study the phase transition behavior. The crystallinity of the AD PZT films was enhanced by annealing at 450, 550, and $650^{\circ}C$ for 2 h. At $650^{\circ}C$, the tetragonal and rhombohedral phases reacted to form a bridge phase between the two phases. The polarization-electric field hysteresis loops of the AD PZT film annealed at $650^{\circ}C$ exhibited a smaller cohesive field and a lower slim hysteresis than the films annealed at 450 and $550^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.11
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• pp.869-874
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• 2010

Magnetoelectric composites with compositions (1-x)[0.5PZT-0.25PNN-0.25PZN](ferroelectric) - x[$(Ni_{0.9}Zn_{0.1})Fe_2O_4$](ferrite) in which x varies as 0, 0.1, 0.2, 0.4, 0.6, 0.8, 1.0 were prepared by conventional ceramic process. The presence of two phases (ferroelectric phase with large grain and ferrite phase with small grain) in the particulate ceramic composites was confirmed by XRD, SEM and EDX. The ferroelectric and magnetic properties of the composites were studied by measuring the P-E and M-H hysterisis loop on the composite composition (x=0, 0.1, 0.2, 1), they were strongly affects of the phase content in composite. The magnetoelectric votage was measured as a function of DC magnetic field and the maximum magnetoelectric voltage coefficient of 14 mV/cm Oe was observed in x=0.2(80 mol% ferroelectric and 20 mol% ferrite phase).