• Title/Summary/Keyword: Piezoelectric properties

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A Study on the ZnO Piezoelectric Thin Film SAW Filter for High Frequency (ZnO 압전 박막을 이용한 고주파 SAW 필터 연구)

  • 박용욱;신현용
    • Journal of the Korean Ceramic Society
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    • v.40 no.6
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    • pp.547-552
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    • 2003
  • ZnO thin films on glass substrate were deposited by RF magnetron reactive sputtering at 100 W, 1.33 Pa, Ar/O2=50 : 50, 200$^{\circ}C$, and a target/substrate distance of 4 cm. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, SEM, AFM, RBS, and electrometer. All films showed a strong preferred c-axis orientation and the chemical stoichiometry. The propagation velocity of ZnO/IDT/glass of single electrode and double electrode types SAW filter was about 2,589 m/sec, 2,533 m/sec and insertion loss was a minimum value of about -11 dB and -21 dB, respectively.

Fabrication of $PbTiO_3$ Thin Film by Chemical Vapor Deposition Technique (화학증착법에 의한 $PbTiO_3$ 박막의 재료)

  • 윤순길;김호기
    • Journal of the Korean Ceramic Society
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    • v.23 no.6
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    • pp.33-36
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    • 1986
  • The $PbTiO_3$is well known materials having remarkable ferroelectric piezoelectric and pyro-electric properties. Thin films of the lead titanite has been successfully fabricated by Chemical Vapor Deposition on the borosilicate glass and titanium substrate. The $PbTiO_3$ thin film deposited on the borosilicate glass using the $PbCl_2$, $TiCl_4$ dry oxygen and wet oxygen at different temperatures (50$0^{\circ}C$-$700^{\circ}C$) grows along the (001) preferred orientation. On the other hand the $PbTiO_3$ thin film deposited on the titanium substrate using the PbO grows along the (101) preferred orientation. Growth orientation of deposited $PbTiO_3$ depends on the reaction species irrespective of substrate materials. Maximum dielectic constant and loss tangent of the $PbTiO_3$ thin film deposited on the titanium substrate are about 90 and 0.02 respectively, . Deposition rates of $PbTiO_3$ deposited on the borosilicate glass and titanium substrate are 10-15 ${\mu}{\textrm}{m}$/hr. Titanium dioxide interlayer formed be-tween $PbTiO_3$ film and titanium substrate material, It improved the adhesion of the film.

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A study on the dynamic properties of piezoelectric ultrasonic linear motor (초음파 선형 모터의 동특성 향상에 관한 연구)

  • Ko, Hyun-Phill;Yoo, Kyoung-Ho;Kang, Chong-Yun;Kim, Sang-Sig;Yoon, Seok-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.757-760
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    • 2004
  • Shaking beam을 이용한 초음파 선형모터는 모터 구동부에서 발생하는 타원궤적이 선형 slider 와 마찰이 되어 선형운동을 발생시킨다. 이러한 초음파 선형모터에서 설계변수는 모터의 효율과 추력(thrust force) 등 동특성을 결정한다. 특히 초음파 모터 동작부의 tip 과 선형 slider 의 contact point와 압착은 모터의 속도, 추력 동작 주파수, 효율에 직접적인 영향을 주는 중요한 parameter 로 작용된다. 본 연구에서는 모터와 선형 slider 의 압착과 contact point둥의 설계변수가 초음파 선형 모터의 성능에 주는 영향을 고찰하였다. 모터으구동부와 선형 slider 사이의 압착력 ($10N{\sim}50N$)과 4가지 곡률을 갖는 tip을 설계변수로 취하였다. Tip 의 형태에 따른 곡률과 모터 구동부와 선형 slider 사이의 압착력 변화에 따른 모터의 동작특성이 변화되는 것을 확인할 수 있었다.

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Characterization of (Na,K)$NbO_3$-Based Ph-free Piezoelectrics Doped with Cu-oxides ((Na,K)$NbO_3$ 계의 무연 압전체에서 cu 산화물 도핑에 따른 특성 평가)

  • Lee, Yun-Gee;Ryu, Sung-Lim;Ur, Soon-Chul;Kweon, Soon-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.324-324
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    • 2010
  • 최근에는 압전체의 환경오염 문제의 해결 및 가격경쟁력을 갖추기 위해서 비납계 압전체에 대한 연구가 활발히 진행되고 있다. (Na,K)$NbO_3$ 계는 페로브스카이트 구조를 가지는 비납계 세라믹스로 현재 가장 많이 연구되고 있는 물질 중의 하나이다. 본 연구에서는 압전성이 우수한 $(Na_{0.44}K_{0.52}Li_{0.04})(Nb_{0.9}Ta_{0.04}Sb_{0.06})O_3$ 조성에 CuO, $Cu_2O$ 등의 Cu 산화물을 첨가하였을 때의 전기기계결합계수, 기계적품질계수, 비유전율, 압전전하상수, 문극-전계 이력곡선 (P-E hysteresis curve) 등을 변화를 평가하고자 하였다.

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Generation Properties of Bimorph Energy Harvester through Spring Structure (바이몰프 에너지하비스터의 스프링 지지구조에 따른 발전특성)

  • Kim, Chang-Il;Jeong, Young-Hun;Lee, Young-Jin;Paik, Jong-Hoo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.211-211
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    • 2008
  • 태양열, 바람, 지열, 진동 등의 우리주변에서 쉽게 얻을 수 있는 에너지를 모아서 필요로 하는 전자기기의 에너지원으로 사용하는 개념의 에너지하비스팅에 대한 연구가 활발히 진행되고 있다. 기계적인 변경으로 전압이 발생하는 압전체는 오래전 알려져 있었지만 발생전압이 낮아 에너지발전용으로 적용이 힘들었다. 하지만 전자기기의 소형화와 함께 필요로 하는 전력도 수 ${\mu}W$로 낮아짐으로 압전체를 이용한 에너지하비스팅이 주목 받고 있다. 전선으로 연결하여 전원을 공급하기 힘든 위치에 있는 전자기기는 주기적으로 배터리를 교환해 주어야한다. 이는 시간적, 금전적, 인적자원의 낭비이며 반영구적으로 전원을 공급할 장치개발이 필요하다. 구조물은 수~ 수십 Hz로 진동을 하며 이 진동으로 압전체에 변형을 주어 전압을 발생시킨다. 변형이 클 때 발생전압도 크게 되므로 압전체를 칸틸레버형태로 제작했다. 더 큰 전압발생을 위해 메탈을 사이에 두고 양면에 압전체를 둔 바이몰프 형태로 캔틸레버를 제작했다. 이때 진동의 충격을 완화시켜 압전체에 인가되도록 하고 구조물의 고유진동수모다 큰 진동수로 압전체가 진동하도록 하기위해 스프링을 사용하여 제작하였다. 이 스프링 지지구조 및 가진 조건에 따른 발전특성을 알아보았다.

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Characteristics analysis of Piezoelectric Thin Film SAW filter using Mg-doped GaN/Sapphire Structure (Mg-Doped GaN/Sapphire 구조로 제작된 압전 박막 SAW 필터의 특성분석)

  • 장철영;정은자;정영철;최현철;이정희;이용현
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.759-762
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    • 2003
  • The epitaxially grown Mg-doped GaN thin film was prepared by MOCVD (Metal Organic Chemical Vapor Deposition) for a SAW(Surface Acoustic Wave) filter. Mg-doped GaN thin film had enough properties for a SAW filter which include crystallinity and morphology. The surface morphology and crystalline of the Mg-doped GaN thin films were characterized using AFM and an X-ray rocking curve. The SAW filter, which was fabricated by lift-off process and frequency response, was measured by HP 8753C network analyzer. Center frequency was 96.687 MHz and SAW velocity was 5801 m/s when wavelength(λ) was 60${\mu}{\textrm}{m}$. Insertion loss was over -10 dB, Q was factor over 200, and side lobe attenuation was over 22 dB which was suitable for use as a SAW filter. Electro-mechanical coupling coefficient (k$^2$) was calculated from the measured data. k$^2$ was from 1 % to 1.44 %. The fabricated SAW filter using Mg-doped GaN/sapphire structure has good qualities as a filter and will be used as a SAW filter for operating RF frequency.

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An Effect on the Structural, Electrical Characteristis of PZN-BT-PT Ceramics according to the Variations of $La_2O_3$ Additon Amount ($La_2O_3$의 첨가가 PZN-BT-PT 세라믹스의 구조적, 전기적 특성에 미치는 영향)

  • Park, Sung-Hwan;Yoon, Hyen-Sang;Paik, Dong-Soo;Lee, Doo-Hee;Park, Chang-Yub
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.11a
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    • pp.42-45
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    • 1992
  • In this study, the structural, dielectric and electrical properties of $0.85Pb(Zn_{1/3}Nb_{2/3})O_3-0.1BaTiO_3-0.05PbTiO_3$ ceramics were investigated with respect to the variations of $La_2O_3$ addition amount. The specimen with 0.2 [wt%] $La_2O_3$ addition amount, which has the coupling constants with the value of $k_p$=44.8[%]. $k_{31}$=25.4[%] and the piezoelectric constant with $d_{31}=100{\times}10^{-12}$[C/N] respectively, exhibits the relatively good values in the applications of electrostriction actuators.

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Effect of 3C-SiC buffer layer on the characteristics of AlN films supttered on Si Substrates (3C-SiC 버퍼층이 Si 기판위에 스퍼터링된 AlN 막의 특성에 미치는 영향)

  • Ryu, Kyeong-Il;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.04b
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    • pp.3-6
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    • 2009
  • Aluminum nitride (AIN) thin films were deposited on a polycrystalline 3C-SiC intermediate layer by a pulsed reactive magnetron sputtering system. Characteristics of the AIN/SiC heterostructures were investigated by field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and Fourier transform infrared spectroscopy (FT-IR). The columnar structure of AIN thin films was observed by FE-SEM. The surface roughness of AlN films on the 3C-SiC buffer layer was measured using AFM. The XRD pattern of AlN films on SiC buffer layers was highly oriented at (002). Full width at half maximum (FWHM) of the rocking curve near (002) reflections was $1.3^{\circ}$. The infrared absorbance spectrum indicated that the residual stress of AIN thin films grown on SiC buffer layers was nearly negligible. The 3C-SiC intermediate layers are promising for the realization of nitride based electronic and mechanical devices.

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Rayleigh wave for detecting debonding in FRP-retrofitted concrete structures using piezoelectric transducers

  • Mohseni, H.;Ng, C.T.
    • Computers and Concrete
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    • v.20 no.5
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    • pp.583-593
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    • 2017
  • Applications of fibre-reinforced polymer (FRP) composites for retrofitting, strengthening and repairing concrete structures have been expanded dramatically in the last decade. FRPs have high specific strength and stiffness compared to conventional construction materials, e.g., steel. Ease of preparation and installation, resistance to corrosion, versatile fabrication and adjustable mechanical properties are other advantages of the FRPs. However, there are major concerns about long-term performance, serviceability and durability of FRP applications in concrete structures. Therefore, structural health monitoring (SHM) and damage detection in FRP-retrofitted concrete structures need to be implemented. This paper presents a study on investigating the application of Rayleigh wave for detecting debonding defect in FRP-retrofitted concrete structures. A time-of-flight (ToF) method is proposed to determine the location of a debonding between the FRP and concrete using Rayleigh wave. A series of numerical case studies are carried out to demonstrate the capability of the proposed debonding detection method. In the numerical case studies, a three-dimensional (3D) finite element (FE) model is developed to simulate the Rayleigh wave propagation and scattering at the debonding in the FRP-retrofitted concrete structure. Absorbing layers are employed in the 3D FE model to reduce computational cost in simulating the practical size of the FRP-retrofitted structure. Different debonding sizes and locations are considered in the case studies. The results show that the proposed ToF method is able to accurately determine the location of the debonding in the FRP-retrofitted concrete structure.

Free Vibration Analysis of a Stepped Cantilever Beam with a Mass and a Spring at the End (끝단에 스프링과 질량을 가진 단진보의 자유진동해석)

  • Yu, Chun-Seung;Hong, Dong-Pyo;Chung, Tae-Jin;Chung, Kil-To
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.9
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    • pp.2812-2818
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    • 1996
  • A cantilever beam with a mass and a spring at the end can be use to model a miniature flexible arm. It is necessary to know the natural frequencies and mode shapes to discuss its free vibration, especially when modal analysis is employed. A beam is clamped-free. In this paper we look at the lateral vibration of beams that have step changes in the properties of their cross sections. The frequency equation is derived by Bernoulli-Euler formulation and is sloved by the separation of variable. The parameters of the beam, 'mass and spring stiffness' are defined as nondimensionalized parameters for wide application of the results. According to the change of eigenvalues and mode shape are presented for this beam. The results presented are the eigenvalues and the natural frequencies for the first three modes of vibration. Results show that the parameters have a significant effect on the natural frequency.