• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.118-118
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• 2009

Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• 한국항공우주학회지
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• 제36권1호
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• pp.7-13
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• 2008

본 논문에서는 유한요소법을 기반으로 한 소프트웨어 COMSOL Multiphysics를 이용하여 압전 복합재료 작동기를 이용하여 제작한 무밸브 마이크로펌프의 성능을 연구하였다. 압전 마이크로펌프는 4층의 경량 압전 복합재료 작동기, PDMS으로 된 챔버와 2개의 디퓨저로 이루어졌다. 시뮬레이션에서는 압전 재료 영역, 구조 영역과 유체 영역을 완전 연성하여 해를 계산하였다. 물을 유체로 사용하였으며, 유량을 마이크로펌프의 구조적 파라미터에 대하여 계산하였다. 이 연구에 기초하여 보다 성능이 좋은 마이크로펌프를 제시하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1067-1071
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• 1997

A new type of gripper for micrometer-size objects is developed using piezoelectric multi-layer benders. It is composed of three chopsticks, two of which are designed to grip micro-objects. The third one is reserved for helping the two when objects are released from the chopsticks. It is well known that a micro object is much easier to grasp than to release it after holding it. The electrostatic force between the chopsticks and an object is believed to be the main cause of adhesion in a dry environment. The surface tension becomes very important when liquids are present or in a liquid. The third auxiliary chopsticks is introduced to solve there surface effects. All the three chopsticks are made of tungsten wires with sharpened ends by etching. When grasping microparts, the two chopsticks are utilized, and, when releasing them anywhere the parts are located, the third one reduces the electrostatic force between the objects and the chopstick may be to help the other two chopsticks to hold an objects in a desired orientation. We constructed the three chopstick gripoer for micro objects and test their function by holding and releasing an object of a diameter of 100 micrometers. We make use of open loop voltage control. The bender displacement resolution is sub-micrometer. The gripping forces, about tens of mN are obtained. The experiment shows that the third auxiliary chopstick functions effectively.

• 한국소음진동공학회논문집
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• 제15권7호
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• pp.836-842
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• 2005

Nonlinear dynamic characteristics of active piezolaminated plates are investigated with respect to the thermopiezoelastic behaviors. For largely deformed structures with small strain, the incremental total Lagrangian formulation is presented based on the virtual work principles. A multi-field layer-wise finite shell element is proposed for assuring high accuracy and non-linearity of displacement, electric and thermal fields. For dynamic consideration of thermopiezoelastic snap-through phenomena, the implicit Newmark's scheme with the Newton-Raphson iteration is implemented for the transient response of various piezolaminated models with symmetric or eccentric active layers. The bifurcate thermal buckling of symmetric structural models is first investigated and the characteristics of piezoelectric active responses are studied for finding snap-through piezoelectric potentials and the load-path tracking map. The thermoelastic stable and unstable postbuckling, thermopiezoelastic snap-through phenomena with several attractors are proved using the nonlinear time responses for various initial conditions and damping loss factors. Present results show that thermopiezoelastic snap-through phenomena can result in the difficulty of buckling and postbuckling control of intelligent structures.

• 전자공학회논문지SC
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• 제43권4호
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• pp.30-34
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• 2006

외접형 초음파 유량센서용 압전 트랜스듀서의 송수신 특성을 개선하기 위하여 구성 부품의 재질 및 형상에 따른 특성 변화를 유한요소법으로 해석하였으며, 실제 실험을 통해 그 결과를 검증하였다. 두께모드 중심주파수가 1MHz가 되도록 직경 10mm의 압전소자를 제작하고, 매칭 레이어의 재질 및 구조 변화를 통하여 유량센서의 지향각을 $25^{\circ}$로 조절하였다. 이상의 결과를 통해 개발된 외접형 초음파 유량센서용 압전 트랜스듀서를 실제 산업용 배관에 적용 평가한 결과 기존 상엽용 센서에 비해 10배 이상의 감도를 나타내었다.

• 한국음향학회지
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• 제21권7호
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• pp.592-599
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• 2002

본 연구에서는 상용 유한요소 해석 프로그램인 PZflex를 이용하여 초음파 탐촉자를 설계하고 이에 따라 제작하였다. 제작된 탐촉자는 복부 진단용에 적합한 크기와 형태로 중심 주파수 5 ㎒에 128개의 압전 소자가 곡면상에 1차원 배열된 컨벡스 (convex)형이며 두 층의 음향정합층, 하나의 후면층 그리고 각 압전소자 간의 커프로 구성된다. 제작된 탐촉자의 성능을 평가하여 설계치의 타당성을 검증하였으며, 등가회로 해석법에 의한 결과와 비교하여 유한 요소 해석법에 의한 설계법의 우수성을 확인하였다

• E2M - 전기 전자와 첨단 소재
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• 제9권7호
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• pp.652-659
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• 1996

Sintering characteristics and electrical properties of xPb(Mg$_{1}$8/Te$_{1}$8/Mn$_{1}$4/Nb$_{1}$2/) $O_{3}$-(1-x) Pb (Zr$_{1}$2/ $Ti_{1}$2/) $O_{3}$ (x=0.075, 0.1, 0.125) ceramics are investigated. A sintering temperature of ceramics could be reduced to 950.deg. C by a reaction between PbO and B site compound material. The physical properties of 0.1Pb(Mg, Te, Mn, Nb) $O_{3}$ - 0.9Pb(Zr, Ti) $O_{3}$ bulk ceramic with 3wt% glass frit(0.857PbO-0.143W $O_{3}$) were following : den = 7.95 g/cm$^{3}$, T$_{c}$=340.deg. C, .epsilon.$_{33}$= 754, k$_{31}$=0.3 and Q.=1780. The 3-layer piezoelectric transformer by using a tape casting method showed a good monolithic structure, and its voltage setup ratio was 2.5 times higher than that of a single device by using bulk ceramics.s.s.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.49-49
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• 2010

Nanopiezotronics is an emerging area of nanotechnology with a variety of applications that include piezoelectric field-effect transistors and diodes, self-powered nanogenerators and biosystems, and wireless nano/biosensors. By exploiting coupled piezoelectric and semiconducting characteristics, it is possible for nanowires, nanobelts, or nanorods to generate rectifying current and potential under external mechanical energies such as body movement (handling, winding, pushing, and bending) and muscle stretching, vibrations (acoustic and ultrasonic waves), and hydraulic forces (body fluid and blood flow). Fully transparent, flexible (TF) nanogenerators that are operated by external mechanical forces will be presented. By controlling the density of the seed layer for ZnO nanorod growth, transparent ZnO nanorod arrays were grown on ITO/PES films, and a TF conductive electrode was stacked on the ZnO nanorods. The resulting integrated TF nanodevice (having transparency exceeding 70 %) generated a noticeable current when it was pushed by application of an external load. The output current density was clearly dependent on the force applied. Furthermore, the output current density depended strongly on the morphology and the work function of the top electrode. ZnO nanorod-based nanogenerators with a PdAu, ITO, CNT, and graphene top electrodes gave output current densities of approximately $1-10\;uA/cm^2$ at a load of 0.9 kgf. Our results suggest that our TF nanogenerators are suitable for self-powered TF device applications such as flexible self-powered touch sensors, wearable artificial skins, fully rollable display mobile devices, and battery supplements for wearable cellular phones.

• 한국산학기술학회논문지
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• 제13권8호
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• pp.3735-3740
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• 2012

본 연구는 다양한 에너지 하비스팅 기술들 중 압전 기술과 전자기 유도 방식을 조합한 에너지 블록 구조를 개발하고 발전성능 평가를 수행한다. 본 연구의 목적은 개발된 에너지 하비스팅 블록의 주택 도시 분야 적용성을 평가하기 위한 것이다. 본 연구는 동적 특성을 분석하기 위하여 유한요소 해석을 실시하고, 실험실 규모의 다층 에너지 하비스터의 현 발전수준을 평가하여 제시하였다. 그 다음으로 증폭기술이 적용된 프로토타입의 특징을 설명하고 개발된 프로토 타입 모듈의 발전성능을 다각적으로 평가하여 제시하였다.

• Advances in aircraft and spacecraft science
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• 제8권1호
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• pp.17-30
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• 2021

This is an investigation for a more electric regional aircraft, considering the ATR 72 aircraft as an example and the electrification of its four double slotted flaps, which were estimated to require an energy of 540 Wh for takeoff and 1780 Wh for landing, with a maximum power requirement of 35.6 kW during landing. An analysis and evaluation of three energy harvesting systems has been carried out, which led to the recommendation of a combination of a piezoelectric and a thermoelectric harvesting system providing 65% and 17%, respectively, of the required energy for the actuators of the four flaps. The remaining energy may be provided by a solar energy harvesting photovoltaic system, which was calculated to have a maximum capacity of 12.8 kWh at maximum solar irradiance. It was estimated that a supercapacitor of 232 kg could provide the energy storage and power required for the four flaps, which proved to be 59% of the required weight of a lithium iron phosphate (LFP) battery while the supercapacitor also constitutes a safer option.