• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.156-159
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be fabricated as monolithic integrated devices with compatibility to semiconductor process, leading to small size, low cost and high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible Suspended FBAR using surface micromachining. It is possible to make Si$_3$N$_4$/SiO$_2$/Si$_3$N$_4$membrane by using surface micromachining and its good effect is to remove the substrate silicon loss. FBAR was made on 2$\mu\textrm{m}$ multi-layered membrane using CVD process. According to our result, Fabricated film bulk acoustic wave resonator has two adventages. First, in the respect of device Process, our Process of the resonator using surface micromachining is very simple better than that of resonator using bull micromachining. Second, because of using the multiple layer, thermal expansion coefficient is compensated, so, the stress of thin film is reduced.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 B
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• pp.1059-1060
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• 2006

In this study, vibration mode multilayer piezoelectric transformer was designed and thickness simulated using ANSYS of finite element method simulator for investigating its optimum conditions ist. As a results, resonant frequency was decreased with the increase of output layer thickness, Output voltage, maximum displacement and maximum stress at 0.34mm thickness transformer were 228.1 V, $0.42{\mu}m,\;8.78[N/m^2]$ respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.307-310
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• 1998

Finite element analysis was investigated on the stress distribution at the 2-D model of piezoelectric ceramic actuators. The y direction maximum stress decreased with a(internal electrode gap) size until 0.4 mm and is not much difference with c(external electrode thickness) size. The stress distribution with internal layers is almost same, and the stress distribution of load condition is higher than that of no load condition. The y direction maximum stress increased exponentially with the number of layer and saturated at 260 layers. In the case of defective actuator, the stress distribution is smaller than that of normal actuator.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.346-347
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• 2007

Aluminum nitride (AlN) thin films were deposited on Polycrystalline (poly) 3C-SiC buffer layers using pulsed reactive magnetron sputtering. Characteristics of AlN films were investigated experimentally by means of FE-SEM, X-ray diffraction, and FT-IR, respectively. As a result, highly (002) oriented AlN thin films with almost free residual stress were achieved using 3C-SiC buffer layers. Therefore, AlN thin films grown on 3C-SiC buffer layers can be used for various piezoelectric fields and M/NEMS applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.304-307
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• 2003

In this paper, stacked piezoelectric ceramics were used for obtaining a large vibration for a small ultrasonic motor which is useable for the both linear drive and rotational drive. We studied this motor through the finite element analysis method and the simulated driving characteristics were presented. As results, the displacement of the tip of the stator was increased when the layers of the ceramics were increased. Also, by inserting additional aluminum plates between the ceramics and the aluminum bar, the displacement were amplified. In this model, two voltages which have 90 degree phase difference were applied for the bi-directional movement.

• Coupled systems mechanics
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• 제10권2호
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• pp.185-198
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• 2021

An analytical model is consider to scrutinize axisymmetric wave propagation in multiferroic hollow cylinder with rotating and initial stressed forces, where a piezomagnetic (PM) material layer is bonded to a piezoelectric (PE) cylinder together by Linear elastic materials with voids. Both distinct material combos are taken into account. Three displacement potential functions are introduced to uncouple the equations of motion, electric and magnetic induction. The numerical calculations are carried out for the non-dimensional frequency by fixing wave number and thickness. The arrived outputs are plotted as the dispersion curves for different layers. The results obtained in this paper can offer significance to the application of PE/PM composite hollow cylinder via LEMV and CFRP layers for the acoustic wave and microwave technologies.

• Composites Research
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• 제16권2호
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• pp.41-47
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• 2003

본 논문은 몇 가지 종류의 압전 복합재료 작동기 LIPCA의 성능 시험 및 비교에 관한 것이다. LIPCA는 압전 세라믹을 중심으로 상층부는 탄성계수가 크면서 열팽창계수가 낮은 섬유강화 복합재료 층이, 하층부는 탄성계수가 작으면서 열팽창계수가 큰 섬유강화 복합재료 층으로 구성되어 있다. 작동기의 성능 검증을 위해 작동 지그 및 전압 공급 장치 그치고 비접촉 레이저 센서로 이루어진 실험 시스템을 구성하였다 성능 비교시험 결과 검증실험으로부터 압전 작동기의 작동성능은 전기 작동 재료층이 중립면으로부터 멀리 벗어나게 위치하면서, 동시에 적층판의 전체 굽힘 강성을 작게 하면 극대화할 수 있다는 사실을 입증하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.237-237
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• 2009

Zinc oxide (ZnO) thin film was deposited on Si substrates using polycrystalline (poly) 3C-SiC buffer layer, in which the ZnO film was grown by sol-gel method. Physical characteristics of the grown ZnO film was investigated experimentally by means of SEM, XRD, FT-IR (Furier Transform-Infrared spectrum), and AFM. XRD pattern was proved that the grown ZnO film on 3C-SiC layers had highly (002) orientation with low FWHM (Full width of half maxium). These results showed that ZnO thin film grown on 3C-SiC buffer layers can be used for various piezoelectric fields and M/NEMS applications.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1427-1429
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• 1997

In this study, piezoelectric transducer were designed and manufactured using PZT-5A which have relatively high electromechanical coefficient. A epoxy is a good material as matching and backing layers. The envelope was reduced 60% as using matching layer and 76% as using matching and backing layer. NDT was successfully carried out for aluminum test pieces. Distance error and resolution of PZT-5A probe were improved as increasing frequency. Envelope was effectively reduced by backing layer but sensitiveness was poor.

• 동력기계공학회지
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• 제1권1호
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• pp.124-143
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• 1997

본 논문은 능동 구속층 감쇠(active constrained layer damping) 처리된 관의 동적 모델링과 정식화를 제시한다. 판의 운동방정식은 Hamilton정리를 이용하여 전개된 판, piezoelectric film 및 점탄성층의 운동방정식을 조합하므로서 유도된다. 이 운동방정식은 외부인가전압의 영향하에서 적층판의 해석적 모델을 제공할 뿐만이 아니라, 판 구조내에서 진동에너지를 감소시킬 수 있는 전단층의 효과에 대한 변위관계식을 나타낸다. 그리고 운동방정식에 대응하는 경계조건도 유도되었다. 또한 판과 능동구속층감쇠계의 동특성을 설명하기 위한 유한요소모델이 유도되었다. 이 모델의 타당성을 실온조건에서 실험적으로 입증하였다. 개발된 이론 및 실험적인 결과들은 판과 능동구속층 감쇠계가 구조진동의 감쇠를 위한 매우 유효한 수단으로 사용될 수 있음을 나타내었다.