• 한국전기전자재료학회논문지
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• 제22권4호
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• pp.303-306
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths, $10{\mu}m$ width, and $0.4{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the $60{\sim}100{\mu}m$ long cantilevers, the fundamental frequency appeared at $373.4{\sim}908.1\;kHz$. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.250-250
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the 100 ~ $40{\mu}m$ long cantilevers, the fundamental frequency appeared at 147.2 kHz - 856.3 kHz. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5 kHz and 1.14 MHz. Therefore, polycrystalline 3C-SiC micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국공작기계학회논문집
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• 제16권4호
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• pp.51-56
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• 2007

Precision positioning system with magnetostrictive actuator(MA) has widely used in manufacturing devices to control the positioning accuracy to meet the high load and stroke requirements. It has many advantage in comparison with piezoelectric actuator; high force, high strain, high efficient etc. But, the performance of Terfenol-D, the commercially available magnetostrictive material, is highly dependent on the prestress, magnetic field intensity and temperature. This paper present an experimental investigation of the temperature effect on displacement characteristics of magnetostrictive actuator. In this paper, compressed cold air is proposed to improve of positioning accuracy of magnetostrictive actuator. The compressed cold air cooling system has good cooling effect Experimental results confirming the effectiveness of the proposed cooling system as high precision positioning system are also has presented in this paper.

• 한국염색가공학회:학술대회논문집
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• 한국염색가공학회 2009년도 학술발표대회
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• pp.118-119
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• 2009

As the rapid development of the electronics, the demand for portable electronics and wireless sensors is growing faster, also with the increased needs of one material which can power it automatically, and then power the electrical devices. The piezoelectric effect of the PVDF material can be used for this. So in this paper, PVDF multilayer films were made for this aim. Make the PVDF / DMAc solution in the 10% concentration; use the spin coater technique to make films with the optimum process parameters: the spin rate is 1260rpm; the spin time is 70s; the dry temperature is 100$^{\circ}C$; the dry time is 30mins. And also, for obtaining the higher $\beta$-phase crystallinity, put the Ca(NH3)2.4H2O into the PVDF / DMAc solution system.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2002년도 추계총회 및 연구발표회 초록집
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• pp.32.2-32
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• 2002

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.69-70
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• 2008

Micro resonators have been actively investigated for bio/chemical sensors and RF M/NEMS devices. Among various materials, SiC is a very promising material for micro/nano resonators since the ratio of its Young's modulus, E, to mass density, $\rho$, is significantly higher than other semiconductor materials, such as, Si and GaAs. Polycrystalline 3C-SiC cantilever with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and its fundamental resonance was measured by a laser vibrometer in air and vacuum at room temperature, respectively. For the cantilever with $100{\mu}m$ length, $10{\mu}m$width and $1.3{\mu}m$ thickness, the fundamental frequency appeared at 147.2 kHz.

• 한국전기전자재료학회논문지
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• 제14권9호
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• pp.726-730
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• 2001

Temperature stabilities of dielectric constraints and resonant frequencies of the substrates are very important in piezoelectric ceramics oscillators and filters. In this study, it was investigated temperature stability of the length-extensional vibration mode of Pb(Zr$\_$y/Ti$\_$1-y/)O$_3$+x[wt%]Cr$_2$O$_3$ ceramics. The mode can be utilized in fabricating ultra-small 455 kHz IF devices. Addition of Cr$_2$O$_3$ in morphotrophic phase PZT decreased the variations of dielectric constant, electro-mechanical coupling factor k$\_$31/ and resonant frequency by thermal shock. As additive weight of Cr$_2$O$_3$increased, the temperature coefficient of resonant frequency changed from positive number to negative one. And the composition tith temperature coefficient of resonant frequency was shifted to the one with increased Cr$_2$O$_3$ additive weigh by thermal aging.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2458-2460
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• 1998

To drive motor or heating machine, it needs the electric power system like the apparatus of inverter. This electric power system obviously comprises power switching devices and drivers to run them. And this system has the topology comprised one/many arm(s), - each arm has high side switching device and low side switching device. Transformer, photocoupler, and HVIC having functions of isolation and level shift which are important thing to drive high side switching device are used as component of drivers in conventional apparatus. Piezoelectric transformers are proposed in this paper, and applied to drive high side swiching device. Through experiments, the possiblities of driving high side switching device are presented and the problems are mooted concurrently. But, we also consider a counterplan for solving the mooted trouble issues.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2788-2793
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• 2008

A numerical analysis has been conducted for flow characteristics and performance of a micropump with piezodisk and MHD(Magnetohydrodynamics) fluid. Various micro systems which could not be considered in the past have been recently growing with the development of MEMS(Micro Electro Mechanical System) and micro machining technology. Especially, micropumps, essential part of micro fluidic devices, are being lively studies by many researchers. In the present study, the piezo electric micropump with electromagnetic resistance for electrically conducting fluids is considered. The prescribed grid deformation method is used for the displacement of the membrane. The change of the performance of the micropump and flow characteristics of the electrically conducting fluid with the magnitude of the magnetic fields, duct size, the position of the inlet and outlet duct are investigated in the present study.

• E2M - 전기 전자와 첨단 소재
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• 제5권1호
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• pp.14-27
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• 1992

핫프레스법으로 제작된 0.05Pb(M $n_{1}$3/N $b_{2}$3/) $O_{3}$+ 0.95Pb(Z $r_{0.47}$ $Ti_{0.53}$) $O_{3}$ 세라믹스에 있어서 C $r_{2}$ $O_{3}$의 첨가량이 그 시편의 구조적특성, 유전특성, 압전특성, 온도안정성 및 포아손비에 미치는 영향이 조사되었다. C $r_{2}$ $O_{3}$의 첨가량의 범위가 0.3~0/75[wt%]인 시편만이 포아손비가 1/3이상으로 주파수저하형 에너지포획소자의 기판으로 사용될 수 있으며 이 중에서 C $r_{2}$ $O_{3}$의 첨가량이 0.5[wt%]인 시편이 보다 우수한 압전특성과 안정된 주파수 온도특성을 갖고 있다. 있다.