• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.257-257
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• 2007

압전 액츄에이터의 효율적 작동을 위해서는 변위량이 크고 이력이 없으며 응답이 빠르고 온도특성이 좋아야 하는 등의 여러 조건들을 만족시켜야 한다. 따라서 본 실험은 압전 효율은 높이고 압전 손실은 낮추기 위하여 Pb$[(Mn_{1/3}Sb_{2/3})_{0.04}\;Zr_x\;Ti_y]O_3$, 세라믹스를 선정하였으며 Zr/Ti의 변화(x=0.47~0.5, y=0.46~0.49)에 따른 각각의 압전 특성 및 강유전 특성을 조사하였다. 일반적인 산화물 합성법을 이용하여 압전 분말을 제조하였고 EMAS standard(6001)에 근거하여 시편을 제조하였다. XRD 관찰결과 모든 조성에서 perovskite구조의 단일상만을 나타내는 소결체를 얻을 수 있었으며 FE-SEM 관찰결과 $1250^{\circ}C$의 소결시편이 $2-3{\mu}m$의 grain size를 갖는 치밀한 미세구조를 나타내었다. 가장 우수한 압전특성을 나타내는 조성은 Zr/Ti의 비가 0.485/0.475 조성이었으며 그때의 전기기계 결합계수(Kp) 값은 62.5%였고, 기계적 품질계수(Qm) 값은 1004였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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• pp.193-195
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• 1994

In this study, the structural, dielectric and piezoelectrical properties of $xPb(Mg_{1/2}W_{1/2})O_3-(1-x)[0.41Pb(Ni_{1/3}Nb_{2/3})O_3-0.36PbTiO_3-0.23P Zr)_3]$ (x=0, 0.01, 0.02, 0.03, 0.04, 0.05) system ceramics were investigated. The dielectric constant ${\varepsilon_{33}}^{\tau}$ at loon temperature increased up to 3mol% PMW and decreased with further PMW content. The specimen with 1mol% $Pb(Mg_{1/2}W_{1/2})O_3$, which has the ${\varepsilon_{33}}^{\tau}=5509$, kp=59[%] and $d_{33}=758{\times}10^{-12}[C/N]$, exhibits good characteristics.

• E2M - 전기 전자와 첨단 소재
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• 제10권2호
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• pp.126-133
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• 1997

In order to apply for the gas sensing layer and the piezoelectric thin film devices, we studied the effects of magnetron sputtering conditions and annealing temperature on the electrical and structual characteristics of the ZnO thin film. The optimal deposition conditions, in order to obtain a c axis of the ZnO (002) phase thin film which is perpendicular to SiO$_{2}$/Si substrate, were like these ; substrate temperature 150.deg. C, chamber pressure 2 mtorr, R.F. power 300 watts, gas flow ratio 0.4[O$_{2}$(Ar + $O_{2}$)]. When the ZnO thin film was annealed in 600.deg. C, $O_{2}$ gas ambient for 1 hr, the resistivity was 2.6 x 10$^{2}$.ohm.cm and the grain size of ZnO thin film was less than 1 .mu.m. So the ZnO thin film acquired from above conditions can apply for the gas sensing layer which require a c axis perpendicular to the substrate surface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.374-375
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• 2006

This paper describes anodic bonding characteristics of MCA to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with the same properties were deposited on MCA under optimum RF sputter conditions (Ar 100 %, input power $1\;W/cm^2$). After annealing at $450^{\circ}C$ for 1 hr, the anodic bonding of MCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in $110^{-6}$ Torr vacuum condition. Then, the MCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation and simulation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity being 0.05-0.08 %FS. Moreover, any damages or separation of MCNSi bonded interfaces did not occur during actuation test. Therefore, it is expected that anodic bonding technology of MCNSi-wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.684-687
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• 2004

일반적으로 적층형 압전 액츄에이터의 변위는 액츄에이터의 내부 적층수와 압전정수($d_{33}$)에 비례적으로 증가한다. 그러나 압전현상을 이용한 액츄에이터는 전기적, 기계적 부하에 의한 dipole 거동을 보이기 때문에 domain wall에 의한 압전정수의 비선형 거동을 보인다. 본 논문에서는 PMN-PZ-PT 세라믹스를 이용하여 $2{\times}3{\times}10$ (mm)의 적층형 세라믹 액츄에이터를 제조 후 1kV/mm의 일정한 전계를 인가하고 $0\sim990N$의 기계적 부하 인가하에서 적층형 세라믹 액츄에이터의 비선형 특성을 조사하였다. 압전 액츄에이터의 비선형 거동은 기계적 응력에 의한 유전 및 전왜 특성에 영향주고, 액츄에이터의 변위 특성은 유전 및 전왜 특성의 영향에 크게 의존한다.

• 센서학회지
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• 제27권6호
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• pp.407-413
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• 2018

Most sleep apnea patients exhibit severe snoring, and long-lasting sleep apnea may cause insomnia, hypertension, cardiovascular diseases, stroke, and other diseases. Although polysomnography is the typical sleep diagnostic method to accurately diagnose sleep apnea by measuring a variety of bio-signals that occur during sleep, it is inconvenient as the patient has to sleep with attached electrodes at the hospital for the diagnosis. In this study, a diagnostic pillow is designed to measure respiration, heart rate, and snoring during sleep, using only one polyvinylidene fluoride (PVDF) sensor. A PVDF sensor with piezoelectric properties was inserted into a specially made instrument to extract accurate signals regardless of the posture during sleep. Wavelet analysis was used to identify the extractability and frequency domain signals of respiration, heart rate, and snoring from the signals generated by the PVDF sensor. In particular, to separate the respiratory signal in the 0.2~0.5 Hz frequency region, wavelet analysis was performed after removing 1~2 Hz frequency components. In addition, signals for respiration, heart rate, and snoring were separated from the PVDF sensor signal through a Butterworth filter and median filter based on the information obtained from the wavelet analysis. Moreover, the possibility of measuring sleep apnea from these separated signals was confirmed. To verify the usefulness of this study, data obtained during sleeping was used.

• Structural Engineering and Mechanics
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• 제71권5호
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• pp.485-502
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• 2019

In this research, the nonlinear static, buckling and vibration analysis of viscoelastic micro-composite beam reinforced by various distributions of boron nitrid nanotube (BNNT) with initial geometrical imperfection by modified strain gradient theory (MSGT) using finite element method (FEM) are presented. The various distributions of BNNT are considered as UD, FG-V and FG-X and also, the extended rule of mixture is used to estimate the properties of micro-composite beam. The components of stress are dependent to mechanical, electrical and thermal terms and calculated using piezoelasticity theory. Then, the kinematic equations of micro-composite beam using the displacement fields are obtained. The governing equations of motion are derived using energy method and Hamilton's principle based on MSGT. Then, using FEM, these equations are solved. Finally the effects of different parameters such as initial geometrical imperfection, various distributions of nanotube, damping coefficient, piezoelectric constant, slenderness ratio, Winkler spring constant, Pasternak shear constant, various boundary conditions and three material length scale parameters on the behavior of nonlinear static, buckling and vibration of micro-composite beam are investigated. The results indicate that with an increase in the geometrical imperfection parameter, the stiffness of micro-composite beam increases and thus the non-dimensional nonlinear frequency of the micro structure reduces gradually.

• Advances in nano research
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• 제10권3호
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• pp.235-251
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• 2021

In the current study, the free vibrational behavior of a Porous Micro (PM) beam which is integrated with Functionally Graded Piezoelectric (FGP) layers with initial curvature is considered based on the two trigonometric shear deformation theories namely SSDBT and Tan-SDBT. The structure's mechanical properties are varied through its thicknesses following the given functions. The curved microbeam is exposed to electro-mechanical preload and also is rested on a Pasternak type of elastic foundation. Hamilton's principle is used to extract the motion equations and the MCST is used to capture the size effect. Navier's solution method is selected as an analytical method to solve the motion equations for a simply supported ends case and by validating the results for a simpler state with previously published works, effects of different important parameters on the behavior of the structure are considered. It is found that although increasing the porosity reduces the natural frequency, but enhancing the volume fraction of CNTs increasing it. Also, by increasing the central angle of the curved beam the vibrations of the structure increases. Designing and manufacturing more efficient smart structures such as sensors and actuators are of the aims of this study.

• Smart Structures and Systems
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• 제29권5호
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• pp.729-746
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• 2022

In this paper, a nonlinear structural model updating methodology based on the Deep Belief Network (DBN) is proposed. Firstly, the instantaneous parameters of the vibration responses are obtained by the discrete analytical mode decomposition (DAMD) method and the Hilbert transform (HT). The instantaneous parameters are regarded as the independent variables, and the nonlinear model parameters are considered as the dependent variables. Then the DBN is utilized for approximating the nonlinear mapping relationship between them. At last, the instantaneous parameters of the measured vibration responses are fed into the well-trained DBN. Owing to the strong learning and generalization abilities of the DBN, the updated nonlinear model parameters can be directly estimated. Two nonlinear shear-type structure models under two types of excitation and various noise levels are adopted as numerical simulations to validate the effectiveness of the proposed approach. The nonlinear properties of the structure model are simulated via the hysteretic parameters of a Bouc-Wen model and a Giuffré-Menegotto-Pinto model, respectively. Besides, the proposed approach is verified by a three-story shear-type frame with a piezoelectric friction damper (PFD). Simulated and experimental results suggest that the nonlinear model updating approach has high computational efficiency and precision.

• 한국재료학회지
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• 제34권9호
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• pp.432-438
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• 2024

Cu-Ti thin films were fabricated using a combinatorial sputtering system to realize highly sensitive surface acoustic wave (SAW) devices. The Cu-Ti sample library was grown with various chemical compositions and electrical resistivity, providing important information for selecting the most suitable materials for SAW devices. Considering that acoustic waves generated from piezoelectric materials are significantly affected by the resistivity and density of interdigital transducer (IDT) electrodes, three types of Cu-Ti thin films with different Cu contents were fabricated. The thickness of the Cu-Ti thin films used in the SAW-IDT electrode was fixed at 150 nm. As the Cu content of the Cu-Ti films was increased from 31.2 to 71.3 at%, the resistivity decreased from 10.5 to 5.8 × 10^-5 ohm-cm, and the density increased from 5.5 to 7.3 g/cm³, respectively. A SAW device composed of Cu-Ti IDT electrodes resonated at exactly 143 MHz without frequency shifts, but the full width at half maximum (FWHM) values of the resonant frequency gradually increased as the Cu content increased. This means that although the increase in Cu content in the Cu-Ti thin film helps to improve the electrical properties of the IDT electrode, the increased density of the IDT electrode deteriorates the acoustic performance of SAW devices.