• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1074-1078
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• 2005

In precision positioning applications, such as scanning tunneling microscopy and diamond turning machines [1], it is often required that actuators have nanometer resolution in displacement, high stiffness, and fast frequency response. These requirements are met by the use of piezoceramic actuators. A major limitation of piezoceramic actuators, however, is their lack of accuracy due to hysteresis nonlinearity and drift. The maximum error due to hysteresis can be as much as 10-15% of the path covered if the actuators are run in an open-loop fashion. Hence, the accurate control of piezoceramic actuators requires a control strategy that incorporates some form of compensation for the hysteresis. One approach is to develop an accurate model of the hysteresis and the use the inverse as a compensator. The Preisach model has frequently been employed as a nonlinear model for representing the hysteresis, because it encompasses the basic features of the hysteresis phenomena in a conceptually simple and mathematically elegant way. In this paper, a new numerical inversion scheme of the Preisach model is developed with an aim of compensating hysteresis in piezoceramic actuators. The inversion scheme is implemented using the first-order reversal functions and is presented in a recursive form. The inverted model is then incorporated in an open-loop control strategy that regulates the piezoceramic actuator and compensates for hysteretic effects. Experimental results demonstrate satisfactory regulation of the position of the piezoceramic actuator to the desired trajectories.