• Journal of the Korean Ceramic Society
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• v.23 no.4
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• pp.55-61
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• 1986

Phosphosilicate glass(PSG) films have been used as fusable deposited dielectrics in silicon gate MOS integrated circuits. But in this experiment BPSG(borophosphosilicate glass) will be optimized for more efficient utilization of the reactants. The BPSG films were deposited on silicon wafers by the oxidation of the hydrides at 430$^{\circ}$C in conventional atmospheric-pressure chemical-vapor-deposition (CVD) systems. Physical and chemical properties of CVD BPSG films have been characterized both for as-deposited and for fused films The. relationship between deposited BPSG film composition and infra-red absorption solution etch rate and fusion temperature is discussed and examples of BPSG composition that can be fused at 900~95$0^{\circ}C$ and 800~85$0^{\circ}C$ are given. In addition to having lower fusion temperature than PSG films BPSG films have lower as-deposited intrinsic tensile stress and low aqueous chemical etch rate they have been considered for applications where these characteristics are advantageous.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.73-74
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• 2006

Carbon nanotubes (CNTs) have recently attracted great attention because of their excellent physical properties, such as high mechanical strength, thermal stability, and electronic properties. These useful properties of carbon nanotubes make themselves good candidates for various application field, such as a transistor, battery, field emission display, nanoscale inter-connects, and so on. Gas-phase techniques offer the unique ability to synthesize well-oriented arrays of CNTs. However, it is seldom reported that the pressure influences on the growth of CNTs under low substrate temperature. In this work, the effect of the working pressure and the influence of the catalyst preparation on the properties of CNTs grown by microwave plasma chemical vapor deposition (MPCVD) were investigated.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.10a
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• pp.136-137
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• 2003

In this study, in order to fabricate sintered dental implant, the effects of HA, Ti and TiN on corrosion and biocompatibility, cell toxicity, osseointegration of electroless Cu-plated and sintered stainless steel implant were investigated using various characteristics. The effects of Ti/TiN/HA coating on the interface activation and surface characteristics of sintered stainless steels(SSS) by electron-beam physical vapor deposition(EB-PVD) method have been studied. Stainless steel compacts containing 2, 4, and 10 wt%Cu were prepared by electroless Cu-plating method which results in the increased homogenization in alloying powder. The specimens were coated with HA, Ti and TiN with few $\mu\textrm{m}$ thickness respectively by EB-PVD method. The microstructures and phase analysis were conducted by using SEM. Biocompatibility were investigated in experimental dog. The corrosion behaviors were investigated using potentiosat in 0.9% NaCl solution and corrosion surface was observed using SEM and XPS.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2011.05a
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• pp.65-66
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• 2011

금속:유전체 나노복합체 박막에서 발현되는 국소 표면 플라즈몬 공진특성을 효과적으로 제어하기 위해 코어-쉘 구조를 갖는 나노입자 형성 공정이 물리기상증착법을 이용하여 시도되었다. 선택적 증착 현상에 착안하여 Au와 강한 결합력을 나타내는 sulphur를 포함하는 ZnS 반도체 재료를 모델시스템으로 선정하였다. 교번증착법의 상대적 순서를 변화시켜 가며 Au입자 및 Au-ZnS 코어-쉘 입자의 형성거동을 광흡수 곡선과 TEM 분석을 통해 관찰하였다. Au단일입자에 비해 Au-ZnS 코어-쉘 나노입자는 ZnS 층의 상대적 두께조절에 의해 공진파장의 광범위한 제어가 용이해지고 국부전기장 증폭현상도 강화되는 것으로 확인되었다.

• Journal of the Korean institute of surface engineering
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• v.34 no.1
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• pp.39-48
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• 2001

Fe-Cr-Al alloy has been studied for application in automobile muffler materials due to good corrosion and oxidation resistance. In order to develop the automobile muffler materials, corrosion behaviors of electron beam physical vapor deposition (EB-PVD) coated surface of muffler matericls of muffler materials were investigated using potentiostat. For 0.1M NaCl solution, corrosion potential and pitting potential of Fe-20Cr-10Al was higher than that of Fe-5Cr- 10Al samples. Especially, in the case of Ti and Nb coated samples, pitting potential increased remarkably compared with non-coated samples. For 0.1M $CaCl_2$ solution, Ti-coated Fe-20Cr-10Al showed remarkably improved pitting corrosion resistance in comparison with non-coated Fe-20Cr-10Al and Fe-5Cr-10Al. The number and size of pits were decreased in the case of Ti coated samples in the 0.1M NaCl and 0.1M $CaCl_2$ solution.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.134-135
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• 2007

Growth of cubic SiC has been carried out on oxided Si substrate using atmospheric pressure chemical vapor deposition (APCVD). Hexamethyldisilane (HMDS) was used as the single precursor and nonflammable mixture of Ar and $H_2$ was used as carrier gas. Epitaxial growth had performed depositions under the various $H_2$ conditions which were adjusted from 0 to 100 seem. The effects of $H_2$ was characterized by surface roughness, thickness uniformity, films quality and elastic modulus. Thickness uniformity and films quality were performed by SEM. Surface roughness and elastic modulus were investigated by AFM and Nano-indentor, respectively. According to the $H_2$ flow rate, Poly 3C-SiC thin film quality was improved not only physical but also mechanical properties.

• Journal of the Korean Vacuum Society
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• v.8 no.3A
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• pp.187-193
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• 1999

In this study, PVDF thin films which show the excellent piezoelectricity and pyroelectricity, are prepared by PVD (physical vapor deposition) method, and thir electrical conduction phenomena for analyses of the electrical conduction mechanism and TSC (Thermally Stimulated Current) for identification of the behavior of conductive carriers are investigated. As a result of FT-IR(Fourier Transform Infrared Spectroscopy) spectra, the crystalline phase transforms $\alpha$ type into $\beta$ type with increasing electric field. From XRD (X-Ray diffraction) analyses patterns, the degree of crystallinity increases from 49.8% to 67%, as the substrate temperature increases from $30^{\circ}C$ to $80^{\circ}C$. As a result of electrical conduction phenomena, the electrical conduction mechanism of PVDF thin films is identified as ionic conduction mechanism. From TSC analyses, there are three peaks as P1, P2, P3 with increasing temperature, and with increasing substrate temperature, the peak temperature of TSC increases and the peak intensity of TSC decreases.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.209-209
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• 2000

Carbon nanotubes have been intensively investigated for its fundamental and technical importances. Structural diversities and the related diverse physical properties with large aspect ratios are fascinating, For instance carbon nanotubes are metal and semiconductors depending on its chirality and furthermore the band gap can be tailored by the diamters. Several issues on its fundamental properties have been discussed. We will review some fundamental problems for band structures, molecular quantum wires, homojunctions, single electron tunneling, and quantum conductance. Several issues related to syntheis of carbon nanotubes including arc discharge, chemical vapor deposition, laser ablation will be extentively discussed. We will further review the applicability of carbon nanotubes on resonator, nanobalance, FET-type transistor, field emission displays electrode for secondary battery and hydrogen storage.

• Journal of the Semiconductor & Display Technology
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• v.17 no.4
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• pp.91-96
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• 2018

In this study temperature distribution and gas flow inside a planetary type reactor in which a number of satellites on a spinning susceptor were rotating were analyzed using numerical simulation. Effects of flow rates on gas flow and temperature distribution were investigated in order to obtain design parameters. The commercial computational fluid dynamics software CFD-ACE+ was used in this study. The multiple-frame-of-reference was used to solve continuity, momentum and energy conservation equations which governed the transport phenomena inside the reactor. Kinetic theory was used to describe the physical properties of gas mixture. Effects of the rotation speed of the satellites was clearly seen when the inlet flow rate was small. Thickness of the boundary layer affected by the satellites rotation became very thin as the flow rate increased. The temperature field was little affected by the incoming flow rate of precursors.

• Current Applied Physics
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• v.18 no.12
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• pp.1592-1599
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• 2018

The present study deals with the effect of dual cathode buffer layer (CBL) on the performance of bilayer of 4,4'-cyclohexylidenebis[N,N-bis(4-methylphenyl)benzenamine] (TAPC) and fullerene (C70)-based organic solar cell (OSC) with low donor concentration. OSC devices with CBLs have been fabricated using thermal vapor deposition technique. We report the use of lithium fluoride (LiF) and molybdenum trioxide ($MoO_3$) as CBLs. The insertion of LiF between C70 and aluminium (Al) electrode enhances the power conversion efficiency (PCE) of device from 1.89% to 2.47% but quenching of photogenerated excitons is observed at interface of C70 and LiF layers. Incorporation of $MoO_3$ between LiF and Al electrode further enhances PCE of device to 3.51%. This has also improved the material quality and device properties, by preventing the formation of gap states and diminishing exciton quenching.