• 제목/요약/키워드: Physical Vapor Deposition(PVD)

검색결과 98건 처리시간 0.053초

Particle-in-Binder(PIB) 법을 이용한 다결정 $HgI_2$ 필름 제작 및 특성 연구 (Fabrication and Characterization of Polycrystalline Mereuric Iodide Films using Particle-in-Binder Methods)

  • 차병열;조성호;김소영;윤민석;남상희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.330-330
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    • 2007
  • Polycrystalline mercuric iodide $HgI_2$) films are being developed as a new detector technology for digital x-ray imaging. The $HgI_2$ is generally vacuum deposited by physical vapor deposition (PVD) process. But the PVD thick deposition has been caused any instability in the biasing due to any defects or cracks. In this work we present a new particle-in-binder (PIB) methodologies used for the $HgI_2$ thick films. These growth techniques can be easily extended to produce much larger film areas. This paper, for the first time, presents results and comparison of polycrystalline $HgI_2$ films derived by various PIB methods. We investigated the structural and morphological properties of the films using X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis. The films were characterized with respect to their electrical properties and in response to x-ray photons. Physical and electrical results were also compared between conventional polycrystalline PVD and our detectors. Leakage current as low as $350\;pA/cm^2$ at the bias voltage of ~ 200 V has been observed. And high sensitivity and good linearity in the response to x-rays was obtained in the film derived by PIB sedimentation method. Our future efforts will concentrate on optimization of film growth techniques for uniform large area deposition on image readout arrays.

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Polyimide 기판을 이용한 CVD-Cu 박막 형성기술 (Formation of CVD-Cu Thin Films on Polyimide Substrate)

  • 조남인;임종설;설용태
    • 한국산학기술학회논문지
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    • 제1권1호
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    • pp.37-42
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    • 2000
  • 유기금속 화학기상증착기술에 의해 폴리이미드 기판과 질화티탄 기판 위에 구리박막을 형성하였다. 구리박막을 화학기상증착기술에 의해 형성하면 종래의 물리적증착기술에 비하여 증착속도가 빠르고 층덮힘 성질이 좋아 산업체의 제품생산 응용에서 많은 장점이 있다. 이 장점은 제품의 생산성과 신뢰성에 영향을 미친다. 기판의 온도와 구리전구체 증기압력 조건을 변화시키며 반복실험을 실시하였으며, 시편에 따라서는 전기적 성질 향상을 위하여 후속 열처리를 수행하였다. 형성된 구리박막의 미세구조는 전자현미경으로 관찰하였으며, 전기비저항은 4점 프로브를 이용하여 측정하였다. 질화티탄을 기판으로 사용한 경우 구리박막에서는 섭씨 180도의 기판온도에서 만들어진 시편에서 가장 좋은 전기적 성질이 측정되었다. 한편, 폴리이미드 기판을 사용한 경우, 기상과 액상의 혼합상태 전구체를 이용하여 250 nm/min의 매우 높은 증착속도를 얻을 수 있었다.

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PVD처리한 티타늄 합금의 고속충격 거동에 관한 연구 (A Study on the high velocity impact behavior of titanium alloy by PVD method)

  • 손세원;이두성;홍성희
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집A
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    • pp.567-572
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    • 2001
  • In order to investigate the fracture behaviors(penetration modes) and resistance to penetration during ballistic impact of Titanium alloy laminates and nitrified Titanium alloy laminates which were treated by PVD(Physical Vapor Deposition) method, ballistic tests were conducted. Evaporation, sputtering, and ion plating are three kinds of PVD method. In this research, Ion plating was used to achieve higher surface hardness and surface hardness test were conducted using a Micro vicker's hardness tester. Resistance to penetration is determined by the protection ballistic limit($V_{50}$), a statistical velocity with 50% probability for complete penetration. Fracture behaviors and ballistic tolerance, described by penetration modes, are respectfully observed at and above ballistic limit velocities, as a result of $V_{50}$ test and Projectile Through Plates (PTP) test methods. PTP tests were conducted with $0^{\circ}$ obliquity at room temperature using 5.56mm ball projectile. $V_{50}$ test with $0^{\circ}$ obliquity at room temperature were conducted with projectiles that were able to achieve near or complete penetration during PTP tests. Surface hardness, resistance to penetration, and penetration modes of Titanium alloy laminates are compared to those of nitrified Titanium alloy laminates.

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지르코늄 코팅공구의 절삭특성 (Cutting Characteristics of the ZrN Coated Tool)

  • 설한욱;김주현
    • 한국공작기계학회논문집
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    • 제15권1호
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    • pp.17-22
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    • 2006
  • Zirconium is widely applied in industrial area. In this study, the exeperiments are performed to investigate the differences in cutting characteristics of zirconium coated material which deposited on cutting tool using physical vapor deposition(PVD). For comparison, TiN coated tool is used to compare with zirconium coated tool. Experimental results were compared for tool wear, surface roughness and cutting force. The tool wear of PVD coated bites is affected by the various cutting conditions. This new stuff 'zirconium coated tool' wears $33\%$ less and improves surface roughness $23\%$ more in various cutting conditions. Cutting force is analyzed by using various workpiece, and the research strongly confirms that 'zirconium' remains better condition than 'titanium'. As a result 'zirconium' coated tool can be performed far better than 'titanium' coated tool on metal cutting.

선삭가공시 Ti-6Al-4V 합금의 절삭특성에 관한 연구 (A Study on the Cutting Characteristics of Ti-6Al-4V Alloy in Turning Operation)

  • 박종남;조규재;이승철
    • 한국기계가공학회지
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    • 제3권4호
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    • pp.81-87
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    • 2004
  • The titanium has many superior characteristics such as specific strength, heat resistance, corrosion resistance, organism compatibility, non-magnetic and etc. and their quantity are abundant. This study performed turning operation of Ti-6Al-4V alloy using the TiAlN coated tool which was treated with PVD. Experimental works were also executed to measure cutting force, chip figuration and surface roughness for different cutting conditions. As a result of study, tool wear was serious at the condition over 100m/min of cutting speed. The excellent cutting condition of cutting depth was at 1.0mm.

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EFFECT OF MULTILAYER COATING ON THE CORROSION RESISTANCE OF SINTERED STAINLESS STEELS

  • Choe, Han-Cheol;Ko, Yeong-Mu
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2003년도 추계학술발표회초록집
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    • pp.136-137
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    • 2003
  • In this study, in order to fabricate sintered dental implant, the effects of HA, Ti and TiN on corrosion and biocompatibility, cell toxicity, osseointegration of electroless Cu-plated and sintered stainless steel implant were investigated using various characteristics. The effects of Ti/TiN/HA coating on the interface activation and surface characteristics of sintered stainless steels(SSS) by electron-beam physical vapor deposition(EB-PVD) method have been studied. Stainless steel compacts containing 2, 4, and 10 wt%Cu were prepared by electroless Cu-plating method which results in the increased homogenization in alloying powder. The specimens were coated with HA, Ti and TiN with few $\mu\textrm{m}$ thickness respectively by EB-PVD method. The microstructures and phase analysis were conducted by using SEM. Biocompatibility were investigated in experimental dog. The corrosion behaviors were investigated using potentiosat in 0.9% NaCl solution and corrosion surface was observed using SEM and XPS.

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전자빔 진공증착기를 이용한 muffler재료의 표면코팅과 내식특성 (Corrosion Behavior and Surface Coating of Muffler Materials by Using EB-PVD)

  • 최한철
    • 한국표면공학회지
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    • 제34권1호
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    • pp.39-48
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    • 2001
  • Fe-Cr-Al alloy has been studied for application in automobile muffler materials due to good corrosion and oxidation resistance. In order to develop the automobile muffler materials, corrosion behaviors of electron beam physical vapor deposition (EB-PVD) coated surface of muffler matericls of muffler materials were investigated using potentiostat. For 0.1M NaCl solution, corrosion potential and pitting potential of Fe-20Cr-10Al was higher than that of Fe-5Cr- 10Al samples. Especially, in the case of Ti and Nb coated samples, pitting potential increased remarkably compared with non-coated samples. For 0.1M $CaCl_2$ solution, Ti-coated Fe-20Cr-10Al showed remarkably improved pitting corrosion resistance in comparison with non-coated Fe-20Cr-10Al and Fe-5Cr-10Al. The number and size of pits were decreased in the case of Ti coated samples in the 0.1M NaCl and 0.1M $CaCl_2$ solution.

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진공증착법에 의해 제조된 PVDF 박막의 전기전도현상과 열자격전류에 관한 연구 (A Study on the electrical condution phenomena and TSC of PVDF thin films fabricated by PVD method)

  • 이선우;박수홍;이덕출
    • 한국진공학회지
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    • 제8권3A호
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    • pp.187-193
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    • 1999
  • In this study, PVDF thin films which show the excellent piezoelectricity and pyroelectricity, are prepared by PVD (physical vapor deposition) method, and thir electrical conduction phenomena for analyses of the electrical conduction mechanism and TSC (Thermally Stimulated Current) for identification of the behavior of conductive carriers are investigated. As a result of FT-IR(Fourier Transform Infrared Spectroscopy) spectra, the crystalline phase transforms $\alpha$ type into $\beta$ type with increasing electric field. From XRD (X-Ray diffraction) analyses patterns, the degree of crystallinity increases from 49.8% to 67%, as the substrate temperature increases from $30^{\circ}C$ to $80^{\circ}C$. As a result of electrical conduction phenomena, the electrical conduction mechanism of PVDF thin films is identified as ionic conduction mechanism. From TSC analyses, there are three peaks as P1, P2, P3 with increasing temperature, and with increasing substrate temperature, the peak temperature of TSC increases and the peak intensity of TSC decreases.

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전자 빔 물리적 증착(EB-PVD)법으로 코팅된 YSZ 열차폐층의 압흔손상 거동에 대한 하부층의 영향 (Influence of Subsurface Layer on the Indentation Damage Behavior of YSZ Thermal Barrier Coating Layers Deposited by Electron Beam Physical Vapor Deposition)

  • 허용석;박상현;한인섭;우상국;정연길;백운규;이기성
    • 한국세라믹학회지
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    • 제45권9호
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    • pp.549-555
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    • 2008
  • The thermal barrier coating must withstand erosion when subjected to flowing gas and should also maintain good stability and mechanical properties while it must also protect the turbine component from high temperature, hot corrosion, creep, and oxidation during operation. In this study we investigated the influence of subsurface layer, $Al_2O_3$ or NiCrCoAIY bond coat layer, on the indentation damage behavior of YSZ thermal barrier coating layers deposited by electron beam physical vapor deposition (EB-PVD). The bond coat is deposited using different process such as air plasma spray (APS) or spray of high velocity oxygen fuel (HVOF) and the thickness is varied. Hertzian indentation technique is used to induce micro damages on the coated layer. The stress-strain behaviors are characterized by results of the indentation tests.

티타늄 합금 안경테홈선 제조에 관한 연구 (Study on The Manufacturing of The Titanium-Alloyed Eyerim)

  • 김상연
    • 한국산학기술학회논문지
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    • 제12권3호
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    • pp.1058-1062
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    • 2011
  • 티타늄합금 안경테 홈선을 제작하기 위한 냉간 압연 롤러를 설계하고 제작 후 그에 대한 성능 평가를 실시하였다. 롤러의 표면 거칠기 값은 $Ra=0.05-0.15{\mu}m$이고 $Rz=0.23-0.67{\mu}m$였다. 이 값은 티타늄안경테 PVD(Physical Vapor Deposition)도금을 위한 바렐 연마 후 측정한 표면 거칠기 값 $Ra=0.04{\mu}m$, $Rz=0.3{\mu}m$과 비교할 때 만족할만한 결과였다. Ti-3Al-2.5V(Half titanium)와이어를 냉간 압연한 결과 경도가 221Hv, 247Hv(1st), 270Hv(2nd)등으로 증가하므로 적절한 열처리와 다단압연공정이 필요함을 알 수 있었다.