• Title/Summary/Keyword: Phase diagram

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Monolithic 3D-IC 구현을 위한 In-Sn을 이용한 Low Temperature Eutectic Bonding 기술

  • Sim, Jae-U;Park, Jin-Hong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.338-338
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    • 2013
  • Monolithic three-dimensional integrated circuits (3D-ICs) 구현 시 bonding 과정에서 발생되는 aluminum (Al) 이나 copper (Cu) 등의 interconnect metal의 확산, 열적 스트레스, 결함의 발생, 도펀트 재분포와 같은 문제들을 피하기 위해서는 저온 공정이 필수적이다. 지금까지는 polymer 기반의 bonding이나 Cu/Cu와 같은 metal 기반의 bonding 등과 같은 저온 bonding 방법이 연구되어 왔다. 그러나 이와 같은 bonding 공정들은 공정 시 void와 같은 문제가 발생하거나 공정을 위한 특수한 장비가 필수적이다. 반면, 두 물질의 합금을 이용해 녹는점을 낮추는 eutectic bonding 공정은 저온에서 공정이 가능할 뿐만 아니라 void의 발생 없이 강한 bonding 강도를 얻을 수 있다. Aluminum-germanium (Al-Ge) 및 aluminum-indium (Al-In) 등의 조합이 eutectic bonding에 이용되어 각각 $424^{\circ}C$$454^{\circ}C$의 저온 공정을 성취하였으나 여전히 $400^{\circ}C$이상의 eutectic 온도로 인해 3D-ICs의 구현 시에는 적용이 불가능하다. 이러한 metal 조합들에 비해 indium (In)과 tin (Sn)은 각각 $156^{\circ}C$$232^{\circ}C$로 굉장히 낮은 녹는점을 가지고 있기 때문에 In-Sn 조합은 약 $120^{\circ}C$ 정도의 상당히 낮은eutectic 온도를 갖는다. 따라서 본 연구팀은 In-Sn 조합을 이용하여 $200^{\circ}C$ 이하에서monolithic 3D-IC 구현 시 사용될 eutectic bonding 공정을 개발하였다. 100 nm SiO2가 증착된 Si wafer 위에 50 nm Ti 및 410 nm In을 증착하고, 다른Si wafer 위에 50 nm Ti 및 500 nm Sn을 증착하였다. Ti는 adhesion 향상 및 diffusion barrier 역할을 위해 증착되었다. In과 Sn의 두께는 binary phase diagram을 통해 In-Sn의 eutectic 온도인 $120^{\circ}C$ 지점의 조성 비율인 48 at% Sn과 52 at% In에 해당되는 410 nm (In) 그리고 500 nm (Sn)로 결정되었다. Bonding은 Tbon-100 장비를 이용하여 $140^{\circ}C$, $170^{\circ}C$ 그리고 $200^{\circ}C$에서 2,000 N의 압력으로 진행되었으며 각각의 샘플들은 scanning electron microscope (SEM)을 통해 확인된 후, 접합 강도 테스트를 진행하였다. 추가로 bonding 층의 In 및 Sn 분포를 확인하기 위하여 Si wafer 위에 Ti/In/Sn/Ti를 차례로 증착시킨 뒤 bonding 조건과 같은 온도에서 열처리하고secondary ion mass spectrometry (SIMS) profile 분석을 시행하였다. 결론적으로 본 연구를 통하여 충분히 높은 접합 강도를 갖는 In-Sn eutectic bonding 공정을 $140^{\circ}C$의 낮은 공정온도에서 성공적으로 개발하였다.

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PHOTOELECTRIC OBSERVATIONS AND UBVRI LIGHT CURVES ANALYSIS OF ALGOL (Algol의 광전측광관측과 UBVRI 광도곡선의 분석)

  • 정장해;이용삼;임조령;양감징
    • Journal of Astronomy and Space Sciences
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    • v.10 no.2
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    • pp.123-145
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    • 1993
  • UBVRi photometry of Algol was carried out from December of 1988 to March of 1991 at Chungbuk National University Observatory and a total of 3465 observations in U, B, V, R, I were obtained. Three times of primary minimum light of JDH el 2447898.0938, JEH el 2448265.1205 and JDH el 2448288.0598, and two secondary minimum light of JDH el 2447808.1014 and JDH el 2448275.146 were determined from our observations. We analyzed simultaneously the UBVRI light curves of the Algol system with the Wilson-Devinney method for the determination of the photometric parameters. Indivisual masses for the 3 components of Algol are derived as $m_1$=3.36, $m_2$=0.76, $m_3$=1.6 in solar mass and radii as $R_1$=2.97, $R_2$=0.76 in solar radinus using i=$82.{\circ}47$, q=0.227, $r_1$=0.2102, $r_2$=0.2512 of our solution and some parameters of the spectroscopic solution of Hill et al. (1971). Our results is simiar to those reported by Kim (1989). The temperature of Algol C, $T_3$=8800 was obtained by means of fitting $l_1$, $l_2$, and $l_3$ of five colors to Planckian curve, and $R_3$=$1.6R_\odot$ is derived from its result. It is believed that its semidetached configuration of Algol A and B is the consequence of case B mass transfer. According to its location in a mass-radius diagram. Algol b may have evolved significantly in its Hburnning phase.

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A Study on Iron Manufacturing and Technology through Analysis Reports of Iron artifacts in the Baekje Area (유물분석 자료를 통한 백제지역의 제철과 철기 제작기술 연구)

  • Kim, Soo-Ki
    • Journal of Conservation Science
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    • v.30 no.4
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    • pp.335-343
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    • 2014
  • This study classified the result of non-metallic inclusion analysis and result of microstructure investigation on the ironware excavated in the Baekje region into Han River, Geum River, and Yeongsan River to estimate the iron making temperature and study the characteristics of regional and temporal characteristics of the heat treatment technology and steel making technology. Regardless of era, bloom iron and sponge iron are judged to be the major method for making as a directreduction process in all three regions. The result of the reinterpretation of the non-metallic inclusion by the oxide ternary constitutional diagram suggest that the temperature inside of the furnace is estimated to be between $1,100{\sim}1,300^{\circ}C$ while making the steel. The magnetic iron ores are the major raw material of steel ore and irons with high $TiO_2$ are estimated to use iron sands. Ironware with $CaO/SiO_2$ rate higher than 0.4% are considered to have artificially added the flux of calcareous materials. It was found that the iron making method is the solid caburizing-steel which caburizes low-carbon steels by the CO gas and $CO_2$ gas created when heating the forging furnace with charcoal. Also, the ironware manufacturers in the Baekje during 3rd century recognized the heat treatment technology as they performed carburizing process and quenching to intentionally increase the strength of necessary parts.

Effect of Heat Treatments on the Microstructures and Mechanical Properties of OCTG (유정용 강관의 미세조직 및 기계적 성질에 미치는 열처리의 영향)

  • Choi, Jong-Min;Noh, Sang-Woo;Yi, Won-Jae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.5
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    • pp.252-261
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    • 2017
  • This study examined the effect of heat treatment on the microstructure and mechanical properties of J55 line pipe steel. The experiments were carried out at under the following various conditions: austenization temperature($880^{\circ}C$, $910^{\circ}C$, $940^{\circ}C$), cooling methods(water quenching, oil quenching) and tempering temperature(none, $550^{\circ}C$, $650^{\circ}C$). The phase diagram and CCT curve were simulated based on the chemical composition of J55 steel to predict the microstructures. In the results, A1, A3 temperature decreased. As the austenization temperature increased, existing austenite grains grew exponentially which seriously degraded their mechanical properties. Various microstructures, including martensite, bainite, ferrite, and pearlite, developed in accordance with the heat treatments and were closely correlated with hardness, tensile strength and toughness. Martensite was formed after water quenching, but bainite and ferrite appeared after oil quenching. FeC precipitation formed and coarsened during tempering, which improved their toughness.

Microstructures and Mechanical Properties of API J55 steel with Heat treatment conditions and Alloying elements(B, Ti) (API J55강의 미세조직과 기계적 특성에 미치는 열처리 및 합금원소(B, Ti)의 영향)

  • Choi, Jong-Min
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.4
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    • pp.69-76
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    • 2018
  • This study examined the effect of the heat treatment and alloying elements (B, Ti) on the microstructures and mechanical properties of API J55 steel. The experiments were carried out using various austenization temperatures ($880^{\circ}C$, $910^{\circ}C$, $940^{\circ}C$), cooling methods (water quenching, oil quenching) and tempering temperatures (none, $550^{\circ}C$, $650^{\circ}C$) with J55 and J55+B,Ti steels. The phase diagram and CCT curve were simulated based on the chemical compositions of the J55 and J55+B,Ti steels to predict the microstructures. The results showed that the A1 and A3 temperatures decreased and, as a result, the noses of the ferrite and bainite parts of the CCT curve moved to the right. Various microstructures were formed, namely martensite, bainite, ferrite and pearlite, in accordance with the heat treatment, which had an effect on the hardness, tensile strength and toughness. Martensite was formed after water quenching, but bainite and ferrite appeared after oil quenching with the J55 specimens. On the other hand, martensite was formed, regardless of the cooling method (water quenching, oil quenching), with the J55+B,Ti specimens, because of the improvement of the hardenability caused by the addition of boron. Therefore, the J55+B,Ti specimens exhibited much higher mechanical properties than the J55 specimens, even after the tempering treatment, since the addition of Ti caused fine precipitates to be formed, which inhibited grain growth at the recrystallization temperature.

Spectroscopy of Local Starburst Galaxies (가까운 폭발적 항성생성은하의 분광 관측)

  • Lee, Cheolhui;Shim, Hyunjin
    • Journal of the Korean earth science society
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    • v.38 no.3
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    • pp.209-221
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    • 2017
  • We investigate the star formation rate, stellar mass, and gas-phase metallicity of local starburst galaxies with different star formation time scales based on their optical spectra. The observation is made using the longslit spectrograph attached to the 4K CCD on the Bohyunsan Optical Astronomy Observatory 1.8m telescope, targeting 21 Wolf-Rayet galaxies as young starbursts and 13 UV excess galaxies as slightly older starbursts. A Baldwin-Phillips-Terlevich diagram analysis shows that 50% of the observed targets are pure star-forming galaxies while only 15% are classified as Active Galactic Nuclei. Fraction of galaxies that reside in composite region is higher in UV excess galaxies than in Wolf-Rayet galaxies, suggesting that the AGN development requires extra time after the onset of the star formation. Most of the observed starburst galaxies have stellar masses of $10^{9-11}M_{\odot}$ and stellar formation rates of $0.01-100M_{\odot}yr^{-1}$, and their star formation rates are consistent with that of the SDSS star forming main sequence galaxies of similar stellar mass. There is no significant difference between Wolf-Rayet galaxies and UV excess galaxies in terms of the stellar mass and star formation rate. We also see a mass-metallicity relation for local starbursts with slightly lower metallicity for a given stellar mass, which implies the existence of a strong feedback activity due to the star formation in these galaxies.

Characteristics of the Dalseong Acid Mine Drainage and the Role of Schwertmannite (달성폐광산 산성광산배수의 발달특징과 슈베르트마나이트의 역할)

  • Choo, Chang-Oh;Jeong, Gyo-Cheol;Lee, Jin-Kook
    • The Journal of Engineering Geology
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    • v.17 no.2 s.52
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    • pp.187-196
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    • 2007
  • The Dalseong acid mine drainage were studied focused on the characters of schwertmannite that controls geochemistry of the stream. Besides chemical analysis of stream water, particle size analysis, XRD SEM and TEM were performed on precipitates of streams and on wasted metalliferous ores. The AMD discharged from the abandoned mine reveals a decrease of pH and EC downward stream. Euhedral sulfur occurs as equigranular aggregates on the altered pyrite while fine acicula goethite coalesces to form cross, star, or starfish-like shapes. Water chemistry plotted on the Eh-pH diagram shows that schwertmannite and ferrihydrite are stable phases. Reddish brown precipitates consist of mostly schwertmannite with less goethite, whereas yellowish brown precipitates are composed of geothite with less schwertmannite. The particle size of precipitates ranges $d(0.1)\;0.861{\mu}m{\sim}3.769{\mu}m,\;d(0.5)\;3.984{\mu}m{\sim}15.255{\mu}m,\;and\;d(0.9)\;9.875{\mu}m{\sim}56.726{\mu}m$. Schwertmannite is characterized by equigranular spheric form. Pincushion or spicule with 100nm width and $200{\sim}300nm$length form on schwertmannite sphere with radial growth patterns. It is highly probable that reddish or yellowish brown precipitates formed in many AMDs may contain schwerhnannite. Because it can serve as sink for removing heavy elements by adsorption in AMD system, there is a need to correctly identify schwertmannite in precipitates and to characterize its phase stability.

Microemulsion-based Hydrogel Formulation of Itraconazole for Topical Delivery

  • Lee, Eun-A;Balakrishnan, Prabagar;Song, Chung-Kil;Choi, Joon-Ho;Noh, Ga-Ya;Park, Chun-Geon;Choi, Ae-Jin;Chung, Suk-Jae;Shim, Chang-Koo;Kim, Dae-Duk
    • Journal of Pharmaceutical Investigation
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    • v.40 no.5
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    • pp.305-311
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    • 2010
  • The present study was aimed at preparing microemulsion-based hydrogel (MBH) for the skin delivery of itraconazole. Microemulsion prepared with Transcutol as a surfactant, benzyl alcohol as an oil and the mixture of ethanol and phasphatidyl choline (3:2) as a cosurfactant were characterized by solubility, phase diagram, particle size. MBHs were prepared using 0.7 % of xanthan gum (F1-1) or carbopol 940 (F1-2) as gelling agents and characterized by viscosity studies. The in vitro permeation data obtained by using the Franz diffusion cells and hairless mouse skin showed that the optimized microemulsion (F1) consisting of itraconazole (1% w/w), benzyl alcohol (10% w/w), Transcutol (10% w/w) and the mixture of ethanol and phospahtidylcholine (3:2) (10% w/w) and water (49% w/w) showed significant difference in the flux (${\sim}1{\mu}g/cm^2/h$) with their corresponding MBHs (0.25-0.64 ${\mu}g/cm^2/h$). However, the in vitro skin drug content showed no significant difference between F1 and F1-1, while F1-2 showed significantly low skin drug content. The effect of the amount of drug loading (0.02, 1 and 1.5% w/w) on the optimized MBH (F1-2) showed that the permeation and skin drug content increased with higher drug loading (1.5%). The in vivo study of the optimized MBH (F1-2 with1.5% w/w drug loading) showed that this formulation could be used as a potential topical formulation for itraconazole.

Geochemical Characteristics of Geothermal Water and Groundwater in the Dongrae Hot-Spring Area (동래온천지역의 지열수와 지하수의 지화학적 특성)

  • Suck Jong Han;Se-Yeong Hamm;Ig Hwan Sung;Byeong Dae Lee;Byong Wook Cho;Myong Hee Cho
    • The Journal of Engineering Geology
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    • v.9 no.3
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    • pp.207-225
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    • 1999
  • Twenty water samples (eleven groundwater and nine geothermal water samples) were collected to elucidate hydrogeochemical characteristics of the groundwater and geothermal water in the Dongrae hot-spring area and its vicinity. Major and minor elements were analyzed for ground and geothermal water samples. Physicochemical properties of the groundwater and the geothermal water were examined and chemical composition of the two waters were compared. Factor and correlation analyses were carried out to simplify the physicochemical data into grouping some factors and to find interaction between them. The groundwaters belong to $Ca-HCO_3$ type, while the geothermal waters belong to Na-Cl type. The Na and Cl concentrations in the Dongrae hot-spring area are higher than those of other granite areas in South Korea. The Na/Cl weight ratio ranges from 0.7 to 1.3 for the geothermal waters. On the phase stability diagram groundwaters fall effectively in the field of stability of kaolinite, while geothermal waters fall in the stability field of microcline or kolinite depending on the chemical composition system. Based on the Na-K, Na-K-Ca and Na-K-Ca-Mg geothermometers, the geothermal reservoir is estimated to have equilibrium temperature between 115 and $145^{\circ}C$.

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4D BIM based Workspace Planning Process in Building Construction Project (4D BIM 기반의 건설프로젝트 작업공간 계획 프로세스)

  • Choi, Byungjoo;Lee, Hyun-Soo;Park, Moonseo;Kim, Hyunsoo;Hwang, Sungjoo
    • Korean Journal of Construction Engineering and Management
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    • v.14 no.5
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    • pp.175-187
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    • 2013
  • Each participant in building construction project requires their own workspace to execute their activities. In this environment, inappropriate workspace planning in construction site causes workspace conflicts which result in a loss of productivity, safety hazard and poor-quality issues. Therefore, workspace should be regarded as one of the most important resources and constraints have to be managed at construction site. However, current construction planning techniques such as Gantt chart, network diagram and critical path method have proven to be insufficient to workspace planning. This paper contains formalized process for workspace planning in 4D BIM environment to prevent workspace related problems in construction project. The proposed process in this paper represents workspace occupation status for each activity and suitable solutions for identified workspace conflicts by integrating workspace attributes and activity execution plan. Based on the result of this study, project manager will be able to prevent probable workspace conflicts and negative effect on project performance by devising appropriate workspace plan during preconstruction phase.