• Title/Summary/Keyword: Phase Measuring Profilometry

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The measurement for micro shape by Phase Shift method I (단파장 위상천이를 이용한 미세형상 측정 I)

  • Park Youn-chang;Kim Ho-yul
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2005.05a
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    • pp.335-341
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    • 2005
  • The development of Shadow Moire in many kinds of methods for acquiring 3-dimensional information from an object is written in this paper. The fringe is appeared, when a grating mask makes its shadow on the object. The object is moved along x-axis more then 3 times to get phases from its fringe that contains data of the object's height. PMP{Phase Measuring Profilometry) is used for analyzing these images from a CCD camera. The calculated phase is remedied for expending the restricted results due to range of the $tan^{-1}$.

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Improvement of the Accuracy of Fringe Pattern Profilometry 3D Measurements through Phase Correction (위상 보정을 통한 Fringe Pattern Profilometry 3D 측정의 정확성 개선)

  • Kim, Ho-Joong;Cho, Tai-Hoon
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2016.10a
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    • pp.389-392
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    • 2016
  • As technologies evolve, 3D measurement techniques using cameras have been developed continuously. In 3D measurement, high accuracy, fast speed, and easy implementation are very important factors. Recently, 3D measurement using multi-frequency fringes has been widely used. This method is generally a method of measuring the height of a image obtained by projecting a sine wave through the projector. The sine wave is produced by software. However, this sine wave is not a perfect sine wave by gamma of projector. This is given a bad influence on the height measurement, and can not measure the correct height. In this paper, we propose a method for correcting the phase of the sine wave to avoid being affected gamma. Through this method it will be able to make more accurate height measurement.

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3-Dimensional Shape Measurement System for BGA Balls Using PMP Method (PMP 방식을 이용한 BGA 볼의 3차원 형상측정 시스템)

  • Kim, Hyo Jun;Kim, Joon Seek;Joo, Hyonam
    • Journal of Institute of Control, Robotics and Systems
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    • v.22 no.1
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    • pp.59-65
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    • 2016
  • As modern electronic devices get smaller and smaller, high-resolution, large Field-Of-View (FOV), fast, and cost-effective 3-dimensional (3-D) measurement is requested more and more. In particular, defect inspection machines using machine-vision technology nowadays require 3-D inspection as well as the conventional 2-D inspection. Phase Measuring Profilometry (PMP) is one of the fast non-contact 3-D shape measuring methods currently being extensively investigated in the electronic component manufacturing industry. The PMP system is well known and is successfully applied to measuring complex surface profiles with varying reflectance properties. However, for highly reflective surfaces, such as Ball Grid Arrays (BGAs), it has difficulty accurately measuring 3-D shapes. In this paper, we propose a new fast optical system that can eliminate the highly reflective saturated regions in BGA ball images. This is achieved by utilizing four Low Intensity Grating (LIG) images together with the conventional High Intensity Grating (HIG) images. Extensive experiments using BGA samples show a repeatability of under ${\pm}20um$ in standard deviation, which is suitable for most 3-D shape measurements of BGAs.

A Study on the Grating Projection Method using Polygon Mirror (회전다면경을 이용한 줄무늬 격자 영사방법에 관한 연구)

  • Park, Yoon-Chang;Jeong, Kyung-Min;Jang, Seok-Jun;Park, Kyung-Keun
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.6
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    • pp.159-165
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    • 2001
  • Recently Moire and PMP(Phase Measuring Profilometry) are adopted as a practical methodology for non-contact 3-D measurement of free surface. These methods extract the 3-D informations from the images of the object projected with stripe-pattern light. This paper presents a simple projector generating stripe-pattern light using expensive polygon mirror. In this projector, slit-beam is generated with a Laser diode and a rod lens and the laser diode is switched on/off synchronizing with the rotation of the polygon mirror. So its structure is very simple and light-weighted compared to the existent projection methods using several lenses and it is also easy to change the pitch and the phase of the stripe pattern. Experimental results show that the intensity profile of the stripe pattern can be approximated with sinusoidal curve by reducing the pitch of the stripe pattern.

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A Study on the Measurement of the Breast Shape on Living Body by Using a PMP Moire Method (가슴형상 측정을 위한 PMP Moire 방법 활용)

  • Lee, Ga-Na;Yuk, Keun-Cheol;Kim, Byeong-Mee
    • Journal of the Korea Fashion and Costume Design Association
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    • v.11 no.2
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    • pp.11-21
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    • 2009
  • Recently, as custom-made demand about female underwear is increased, securing of a various dimension system is urgent, and satisfaction of each customer cannot be heightened with established dimensions. If we could measure shape of a living body with a fast and simple method, the custom-made demand of customers could be satisfied in the underwear as well as a clothing industry by using the method. One of the alternatives is shape measurement of the living body by a Moire fringe method. If we put a grating in front of an object to be measured and illuminate light, a Moire fringe with contour line shape is generated in the object, so we can conveniently measure object shape without touching directly by using the pattern. The Moire fringe and three-dimensional shape of the breast of the living body was acquired by a PMP method using a polygon mirror, and height and bottom width of the breast of the living body were measured by using obtained data in this study. Data of breast shape measurement through a mannequin was collected in a previous step as basic material for measuring the breast shape measurement of the living body. Three women in the twenties were selected as one of methods for measuring breast shape of a woman. As a result of the breast shape measurement of a living body A, it was measured that height of the breast was about 67.24mm and the bottom width was $13781.60mm^2$. This study is expected to contribute for collecting basic data of a female underwear industry and establishing a specification of a dimension system.

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2D/3D Visual Optical Inspection System for Quad Chip (Quad Chip 외관 불량 검사를 위한 2D/3D 광학 시스템)

  • Han, Chang Ho;Lee, Sangjoon;Park, Chul-Geon;Lee, Ji Yeon;Ryu, Young-Kee;Ko, Kuk Won
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.1
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    • pp.684-692
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    • 2016
  • In the manufacturing process of the LQFP/TQFP (Low-profile Quad Flat Package/Thin Quad Flat Package), the requirement of a 3 dimensional inspection is increasing rapidly and a 3D inspection of the shape of a chip has become an important report of quality control. This study developed a 3 dimensional measurement system based on PMP (Phase Measuring Profilometry) for an inspection of the LQFP/TQFP chip and image processing algorithms. The defects of the LQFP/TQFP chip were classified according to the dimensions. The 2 dimensional optical system was designed by the dorm illumination to achieve constant light distribution, In the 3 dimensional optical system, PZT was used for moving 90 degree in phase. The problem of 2 ambiguity was solved from the measured moir? pattern using the ambiguity elimination algorithm that finds the point of ambiguity and refines the phase value. The proposed 3D measurement system was evaluated experimentally.

A Polarization-based Frequency Scanning Interferometer and the Measurement Processing Acceleration based on Parallel Programing (편광 기반 주파수 스캐닝 간섭 시스템 및 병렬 프로그래밍 기반 측정 고속화)

  • Lee, Seung Hyun;Kim, Min Young
    • Journal of the Institute of Electronics and Information Engineers
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    • v.50 no.8
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    • pp.253-263
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    • 2013
  • Frequency Scanning Interferometry(FSI) system, one of the most promising optical surface measurement techniques, generally results in superior optical performance comparing with other 3-dimensional measuring methods as its hardware structure is fixed in operation and only the light frequency is scanned in a specific spectral band without vertical scanning of the target surface or the objective lens. FSI system collects a set of images of interference fringe by changing the frequency of light source. After that, it transforms intensity data of acquired image into frequency information, and calculates the height profile of target objects with the help of frequency analysis based on Fast Fourier Transform(FFT). However, it still suffers from optical noise on target surfaces and relatively long processing time due to the number of images acquired in frequency scanning phase. 1) a Polarization-based Frequency Scanning Interferometry(PFSI) is proposed for optical noise robustness. It consists of tunable laser for light source, ${\lambda}/4$ plate in front of reference mirror, ${\lambda}/4$ plate in front of target object, polarizing beam splitter, polarizer in front of image sensor, polarizer in front of the fiber coupled light source, ${\lambda}/2$ plate between PBS and polarizer of the light source. Using the proposed system, we can solve the problem of fringe image with low contrast by using polarization technique. Also, we can control light distribution of object beam and reference beam. 2) the signal processing acceleration method is proposed for PFSI, based on parallel processing architecture, which consists of parallel processing hardware and software such as Graphic Processing Unit(GPU) and Compute Unified Device Architecture(CUDA). As a result, the processing time reaches into tact time level of real-time processing. Finally, the proposed system is evaluated in terms of accuracy and processing speed through a series of experiment and the obtained results show the effectiveness of the proposed system and method.