• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.11
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• pp.3023-3030
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• 2009

In this paper, a prediction and compensation method for the error in the phase measured by using the proportionality between two wavelengths in the TW-PMP (Two-wavelength Phase Measuring Profilometry) is proposed and experimental results are shown to verify the usefulness of the proposed method. For sample object, firstly, a phase-shifting with a quite large number of steps is adopted in measurement, compared with the conventional phase-shifting method, secondly, a 3-3 step phase-shifting method is used to measure the same object which is applied to high-speed 3D shape measurement, and then, measured results from these two phase-shifting methods are compared to calculate measurement noises. From the experimental results applying the proposed compensation method to the measured beat phase and absolute phase, it has proven that noises are decreased by 90% and 17.2% for each case.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.10
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• pp.12-21
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• 2003

• The Journal of Korean Academy of Prosthodontics
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• v.37 no.6
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• pp.800-808
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• 1999

To compare several porcelains made by various manufacturers in shrinkage after firing and investigate the effect of condensation on shrinkage, specimens were prepared and the volume of each body was measured by the phase-shifting profilometry. Baseplate wax was cut by $2.5cm{\times}2cm$ and cast in nonprecious metal(Verabond, U.S.A.), then any surfaces of specimens were abrased and polished on the SiC abrasing papers, preparing 120 specimens. Specimens were divided into six groups according to the porcelain used, and the porcelain used in each group were as follows. Group I : Ceramco dentin porcelain Group B : Creation dentin porcelain Group III : Creation margin porcelain Group IV : Vintage margin porcelain Group V : Vita dentin porcelain Group VI : Vintage dentin porcelain Porcelain was built up on the metal plates using a small spoon and then solution matching to each porcelain was added. The six groups are subdivided into a and b. In subgroup a, only excessive solution was absorbed with tissue and in subgroup b, porcelain was condensed sufficiently. When build-up was completed, the shape was measured using the phase-shifting profilometry. After that, specimens were fired in the furnace programed for each porcelain and then their changed shape were measured again. Using the difference between the two above measurements, the ratio of shrinkage was calculated. Obtained results were as follows ; 1. Regardless of condensation, the volume of fired specimens were not different significantly between the two subgroups a and b in the same group. 2. The ratios of shrinkage were significantly higher in the groups porcelain built-up was condensed than in the groups not condensed 3. The ratios of shrinkage were in the range of 36.81-27.19% in the groups porcelain built up was condensed and 44.52-37.54% in the other groups not condensed.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2016.10a
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• pp.389-392
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• 2016

As technologies evolve, 3D measurement techniques using cameras have been developed continuously. In 3D measurement, high accuracy, fast speed, and easy implementation are very important factors. Recently, 3D measurement using multi-frequency fringes has been widely used. This method is generally a method of measuring the height of a image obtained by projecting a sine wave through the projector. The sine wave is produced by software. However, this sine wave is not a perfect sine wave by gamma of projector. This is given a bad influence on the height measurement, and can not measure the correct height. In this paper, we propose a method for correcting the phase of the sine wave to avoid being affected gamma. Through this method it will be able to make more accurate height measurement.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.6
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• Proceedings of the Optical Society of Korea Conference
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• 2002.07a
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• pp.26-27
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• 2002

광학식 3차원 형상측정 기술은 산업현장과 의료분야에서 광범위하게 사용되어지고 있으며, 이에 대한 연구도 활발히 진행되고 있다. 본 연구에서는 비접촉식 3차원 형상측정 방법인 위상측정법(Phase Measuring Profilometry; PMP)을 실험적으로 구현하였으며 위상추출 알고리즘으로는 위상이동방법(Phase shifting method)과 푸리에 변환법(Fourier Transform)을 사용하여 그 결과를 비교 및 고찰하였다. (중략)

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.170-175
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• 1999

Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and its's high sensitivity. Especially, when projecting a grid pattern over the object the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, new method for grid pattern generation system by polygonal mirror and Laser Diode. This system is applied the projection moire and the PMP.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.335-341
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• 2005

The development of Shadow Moire in many kinds of methods for acquiring 3-dimensional information from an object is written in this paper. The fringe is appeared, when a grating mask makes its shadow on the object. The object is moved along x-axis more then 3 times to get phases from its fringe that contains data of the object's height. PMP{Phase Measuring Profilometry) is used for analyzing these images from a CCD camera. The calculated phase is remedied for expending the restricted results due to range of the $tan^{-1}$.

• Proceedings of the Korea Information Processing Society Conference
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• 2010.11a
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• pp.629-632
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• 2010

본 논문에서는 Fringe Pattern profilometry(FPP)을 이용한 높이 측정 시스템을 구현하고, R, G, B 각 컬러 채널별로 위상이 다른 파형을 인가함으로써 Phase shifting 방법을 이용한 실시간 위상 정보를 획득할 수 있게 한다. 디지털 프로젝터의 비선형성으로 인해 필연적으로 발생하는 하모닉스 성분을 근사화된 정현파를 인가함으로써 높이 정보에서 가장 큰 문제를 발생하는 2차 하모닉스 성분을 줄인다. 이렇게 구한 위상 값을 Digital Phase Loop Lock(DPLL)회로에 인가함으로써 3차원 모양 정보를 실시간으로 획득 가능하게 한다.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.1
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• pp.59-65
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• 2016

As modern electronic devices get smaller and smaller, high-resolution, large Field-Of-View (FOV), fast, and cost-effective 3-dimensional (3-D) measurement is requested more and more. In particular, defect inspection machines using machine-vision technology nowadays require 3-D inspection as well as the conventional 2-D inspection. Phase Measuring Profilometry (PMP) is one of the fast non-contact 3-D shape measuring methods currently being extensively investigated in the electronic component manufacturing industry. The PMP system is well known and is successfully applied to measuring complex surface profiles with varying reflectance properties. However, for highly reflective surfaces, such as Ball Grid Arrays (BGAs), it has difficulty accurately measuring 3-D shapes. In this paper, we propose a new fast optical system that can eliminate the highly reflective saturated regions in BGA ball images. This is achieved by utilizing four Low Intensity Grating (LIG) images together with the conventional High Intensity Grating (HIG) images. Extensive experiments using BGA samples show a repeatability of under ${\pm}20um$ in standard deviation, which is suitable for most 3-D shape measurements of BGAs.