• Tribology and Lubricants
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• v.20 no.5
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• pp.278-283
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• 2004

O-ring seal is widely used for sealing pressure vessels and oil containers in various applications of mechanical equipments. The doughnut shape of the O-ring is very important components in most of the system assembly of mechanical apparatus. This paper presents the sealing force of a pressurized perfluoroelastomer O-ring, which is very important contact seal in sealing the semiconductor equipment. The sealing pressure is measured by experimental method and analyzed numerically by using the non-linear MARC finite element program. The seal tester is made to measure the contact force and displacement of the O-ring with an automatic control system of the working temperature. The results show the reasonable agreements between the computed FEM results and measured ones when the operating temperature is moderate temperature. But the compared values between the computed and tested results show a difference because of the increased temperature, which is related to the non-linear parameter of the O-ring material.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.335-340
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• 2003

This paper presents contact behavior of a perfluoroelastomer bonded door seal by a non-linear finite element method using the mechanical and thermal analysis. The shape effects are investigated for sealing performance of bonded door seal. Also maximum stress, temperature distribution and contact force are investigated. A bonded door seal was modeled three shape. The highest contact force occurs at model III(sunflower shape). The maximum stress of model III is lower than that of the others. The calculated FEM results show that the model III has excellent performance compared with other seal models.