Abstract
O-ring seal is widely used for sealing pressure vessels and oil containers in various applications of mechanical equipments. The doughnut shape of the O-ring is very important components in most of the system assembly of mechanical apparatus. This paper presents the sealing force of a pressurized perfluoroelastomer O-ring, which is very important contact seal in sealing the semiconductor equipment. The sealing pressure is measured by experimental method and analyzed numerically by using the non-linear MARC finite element program. The seal tester is made to measure the contact force and displacement of the O-ring with an automatic control system of the working temperature. The results show the reasonable agreements between the computed FEM results and measured ones when the operating temperature is moderate temperature. But the compared values between the computed and tested results show a difference because of the increased temperature, which is related to the non-linear parameter of the O-ring material.
