• Title/Summary/Keyword: Pd sputtering

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A Study on the Pd-Ni Alloy Hydrogen Membrane Using the Sputter Deposition (스퍼터 증착 방식으로 제조된 Pd-Ni 합금 수소 분리막 연구)

  • Kim Dong-Won;Park Jeong-Won;Kim Sang-Ho;Park Jong-Su
    • Journal of the Korean institute of surface engineering
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    • v.37 no.5
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    • pp.243-248
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    • 2004
  • A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCI activation. Pd coating layer was prepared by dc magnetron sputtering deposition after $H_2$ plasma surface treatment. Palladium-nickel alloy composite layer had a fairly uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature of 773 K and pressure of 2.2psi. The hydrogen permeance was 6 ml/minㆍ$\textrm{cm}^2$ㆍatm and the selectivity was 120 for hydrogen/nitrogen($H_2$/$N_2$) mixing gases at 773 K.

Improvement in Long-term Stability of Pd Alloy Hydrogen Separation Membranes (팔라듐 합금 수소분리막의 내구성 향상)

  • Kim, Chang-Hyun;Lee, Jun-Hyung;Jo, Sung-Tae;Kim, Dong-Won
    • Journal of the Korean institute of surface engineering
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    • v.48 no.1
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    • pp.11-22
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    • 2015
  • Pd alloy hydrogen membranes for hydrogen purification and separation need thermal stability at high temperature for commercial applications. Intermetallic diffusion between the Pd alloy film and the porous metal support gives rise to serious problems in long-term stability of Pd alloy membranes. Ceramic barriers are widely used to prevent the intermetallic diffusion from the porous metal support. However, these layers result in poor adhesion at the interface between film and barrier because of the fundamentally poor chemical affinity and a large thermal stress. In this study, we developed Pd alloy membranes having a dense microstructure and saturated composition on modified metal supports by advanced DC magnetron sputtering and heat treatment for enhanced thermal stability. Experimental results showed that Pd-Cu and Pd-Ag alloy membranes had considerably enhanced long-term stability owing to stable, dense alloy film microstructure and saturated composition, effective diffusion barrier, and good adhesive interface layer.

A Study on the Perpendicular Magnetic Anisotropy in Co/Pd artificial Superlattices Prepared by RF Magnetron Sputtering (고주파 마그네트론 스퍼터링에 의해 형성된 Co/Pd 인공초격자의 수직자기이방성에 관한 연구)

  • Park, Ju-Uk;Ju, Seung-Gi
    • Journal of the Korean Magnetics Society
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    • v.2 no.3
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    • pp.251-256
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    • 1992
  • Artificial superlattices of Co/Pd were prepared by RF magnetron sputtering Multilayered structure and compositional modulation were analyzed with a side angle x-ray diffractometer. It has been found that expansion of Co lattice occured in this artificial superlattice due to the lattice mismatch between Co and Pd. Perpendicular magnetic anisotropy could be observed when the Co layer thickness became less than 8${\AA}$ and maximum coercivity of 2350 Oe could be obtained in [Co(2.5 ${\AA}$)/Pd(9.3 ${\AA})]_{50}$/Pd$(200\;{\AA})$ with a perfect squareness of magnetic hysteresis loop. Characteristic of perpendicular magnetic anisotropy in Co/Pd superlattices could be related to the expansion of Co lattice caused by Pd layer and it turned out that as the thickness of Pd layer increased, perpendicular magnetic anisotropy increased. The interface anisotropy energy and volume anisotropy energy were calculated to be 0.29 ergs/$cm^2$ and -$6.9{\times}10^6$ ergs/$cm^3$ respectively, which are consistent with the values reported elsewhere.

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Structural properties of Pd-barium zirconate dense membrane synthesized by dual sputtering method (동시 증착 스퍼터링 공정에 의해 증착된 Pd-barium zirconate membrane의 구조분석)

  • Byeon, Myeong-Seop;Kang, Eun-Tae;Cho, Woo-Seok;Kim, Jin-Ho;Hwang, Kwang-Taek
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.1
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    • pp.19-24
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    • 2012
  • Barium zirconate exhibits good thermo-chemical stability and proton conduction at high temperatures, but shows poor electron conductivity. Therefore, for high efficiency of hydrogen separation, a very thin and dense Pd-Barium zirconate membrane has to be coated on a porous substrate. A thin and dense Pd-Barium zirconate membrane was successfully synthesized on a porous substrate by means of dual sputtering method. The structural and chemical features of the $BaZr_{0.85}Y_{0.15}O_{3-{\delta}}$ membranes sputtered at $300^{\circ}C$ and $400^{\circ}C$ were investigated by X-ray diffractometry, and it was found that a well-crystallized membrane, Pm-3m space group of $BaZrO_3$, was synthesized. The surface and cross-sectional morphologies of membrane were assessed by SEM (scanning electron microscopy) and TEM(transmission electron microscopy) of the surface and of cross sections. The cross sectional observation of Pd-$BaZr_{0.85}Y_{0.15}O_{3-{\delta}}$ membrane by dual sputtering shows that the coating is quite dense with columnar structure.

Characteristics of Nafion Membranes with Pd Thin Films Deposited by DC Magnetron Sputtering Technique (DC마그네트론 스퍼터링으로 Pd박막 입힌 Nafion막의 특성)

  • Hwang, Gi-Ho;Cho, Won-Il;Cho, Byung-Won;Yoon, Sung-Ryul;Ha, Heung-Yong;Oh, In-Hwan;Kim, Kwang-Bum
    • Journal of the Korean Electrochemical Society
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    • v.5 no.2
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    • pp.68-73
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    • 2002
  • Modified polymer electrolyte membranes were fabricated by the applying dc magnetron sputter-deposited Pd thin layers on the surface of the $Nafion^{TM}$ membranes in argon atmosphere. The Pd thin films were characterized by investigating its morphology, methanol permeability, and protonic conductivity. The performance of a direct methanol fuel cell(DMFC) with the modifed polymer electrolyte membrane was also tested by the measurement of its currents and voltages under flowing methanol. The Pd thin film could be a barrier layer to methanol crossover, but the protonic conductivity of the modified polymer membrane was reduced. By using the modified polymer eletrolyte membranes, both the methanol permeability and the protonic conductivity were decreased with increasing the thickness of Pd thin film. However, the performances of DMFC were almost independent on the thickness of Pd thim films. The efffcts of methanol concentration in a feeding fuels on the protonic conductivity and the cell performance were also investigated.

Preparation and Characterization of $Pd/CeO_2/Ta/Si$ model catalysts

  • 김도희;우성일
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.145-145
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    • 2000
  • M-CeO2 (M : noble metal) catalysts have been widely studied as three-way catalysts and methanol synthesis catalysts. Ceria is thought to play a number of roles in these catalysts. The Ce(IV)/Ce(III) redox pair may store/release gases under oxidizing/reducing conditions, extending the operational window. Additionally, metal-ceria interactions lead to several effects, including the dispersion of the active components and promoting the activation of molecules such as CO or NO. Pd is a promising component to current TWC formulations and behaves particularly well when compared with Pt and Rh-based catalysts for low-temperature oxidation of Co and hydrocarbon. However the effect of Pd-ceria interactions on the physicochemical properties of Pd and the redox properties of Ce is not elucidated yet. In order to know exactly about the metal-ceria interactions, the model study are expecting to give a better environment, resulting in the wide use of the surface science tools. The substrate was Si(100) wafer, on which Ta metal was sputtered as a thickness of 100nm. The CeO2 thin film of 30nm was deposited by using the magnetron sputtering. Spin coating and magnetron sputtering methods were used to make the Pd thin film layer. The prepared sample was investigated by in-situ XPS, AES, SEM and AFM analysis.

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Hydrogen Gas Sensing Properties in Air on PdO Thin Films

  • Kim, Yeon-Ju;Lee, Young-Taek;Lee, Jun-Min;Lee, Woo-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.04b
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    • pp.91-91
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    • 2009
  • In the past decade, Pd based thin films have been studied far hydrogen gas sensors due to their high possibility for energy industry and environmental applications. In this work, we report a navel method to fabricate highly sensitive hydrogen gas sensors based on PdO thin films. The films were deposited on Si substrates in Ar and $O_2$ ambient using reactive sputtering system. A semiconductor process has been utilized to fabricate PdO films with t=40nm. We observed the resistance changes of the PdO films with various $H_2$ concentrations. It was found that the electrical properties of the thin films depend on the composition of oxygen. The sensitivity is defined as $S\;=\;(R_0-R)/R{\times}100%$, where R and $R_0$ are the resistances in the presence of exposing the hydrogen gas and air, respectively. The sensitivity of the thin films was found to be as high as about 95%. After exposing to hydrogen gas, we discovered that the nano-sized cracks formed on the surface of the PdO thin films. The nano-cracks formed in deoxidized PdO thin films were known by playing a key role to reduce more than 4 times the response time of absorption. Our results illustrate that the deoxidized PdO thin films can be used as hydrogen sensors.

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