• Title/Summary/Keyword: PbS-CuS

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Purification and Enzymatic Characteristics of the Bacillus pasteurii Urease Expressed in Escherichia coli (Escherichia coli에서 발현된 Recombinant Bacillus pasteurii Urease의 정제 및 효소학적 특성)

  • 이은탁;김상달
    • Microbiology and Biotechnology Letters
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    • v.20 no.5
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    • pp.519-526
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    • 1992
  • The gene coding for urease of alkalophilic Bacillus pasteurii had been cloned in Escherichia coli previously. The urease protein was purified 63.1-fold by TEAE-cellulose, DEAE-Sephadex A-50, Sephadex G-150 and Sephadex G-200 chromatographies with a 7.3% yield from the sonicated fluid of the E. coli HB1Ol(pBUll) encoding B. pasteurii urease gene. The ureases of E. coli (pBUll) and B. pasteurii possessed as a $K_m$ for urea, 42.1 mM and 40.4 mM, respectively. They hydrolyzed urea with $V_{max}$ of 86.9$\mu$mol/min and 160$\mu$mol/min, respectively. Both ureases were composed with four subunits (Mrs 67,000) and a subunit (Mr 20,000). The molecular weight of both native enzymes was Mr 280,OOO$pm$10,000 determined by gel filtration chromatography and Coomassie blue staining of the subunits. The optimal reaction pH of both ureases were pH 7.5. The ureases were stabled in pH 5.5-10.5. The optimal reaction temperature of both ureases were $60^{\circ}C$, and the ureases were stable for an hour at $50^{\circ}C$, 40min at $60^{\circ}C$ and 10 min at $70^{\circ}C$ The activity of both enzymes were inhibited completely by $Ag^{2+}$, $Hg^{2+}$, $Zn^{2+}$, $Cu^{2+}$, and were inhibited 60% by CoH, 30% by $Fe^{2+}$ and 10% by $Pb^{2+}$. However it was increased by the addition of $Sn^{2+}$, $Mn^{2+}$, $Mg^{2+}$ at concentration of $1{\times}10^{-3}$M. Both ureases were inhibited completely by p-CMB and acetohydroxamic acid. The urease expressed in E. coli (pBU11) was inhibited 70% by SDS. The urease of B. pasteurii was inhibited 40% by hydroxyurea, whereas the recombinant urease of E. coli strain was inhibited 17%. Both enzymes were not inhibited by cyclohexanediaminetetraacetic acid (CDTA) and ethylendiaminetetraacetic acid (EDTA).

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Agroenvironmental Characteristics and N.P Demand of Paddy Fields Irrigated with the Water of Nagdong River (낙동강 물 관개논의 농업환경 특성과 질소, 인산 요구량)

  • Kang, Ui-Gum;Lee, jae-Saeng;Ko, Ji-Yeon;Park, Chang-Young;Jung, Ki-Yeul
    • Korean Journal of Environmental Agriculture
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    • v.23 no.3
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    • pp.170-177
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    • 2004
  • Agroenvironmental characteristics in paddy fields irrigated with the water of Nagdong river were analyzed along the river watershed for two years from 1999. The sites monitored from upper reaches of the river were Andong, Sangju, Gumi, Goryeong, Changnyeong, Milyang and Pusan. In paddy soils, the contents of heavy metals such as Cd, Cr, Cu, Pb, Ni, Zn and As were around natural values showing the highest values in Pusan followed by Goryeong. In brown rice, the contents of heavy metals were lower than natural values. Soil chemical properties appeared higher values in the lower reaches including Goryeong than the upper ones. The highest parameters in Goryeong were pH ($5.9{\sim}6.1$), EC ($0.8{\sim}0.9\;dS/m$), $Av.P_2O_5$ ($155{\sim}201\;mg/kg$), exchangeable Ca ($6.7{\sim}7.4\;cmol^+/kg$), Mg ($1.92{\sim}2.50\;cmol^+/kg$), K ($0.18{\sim}0.21\;cmol^+/kg$) and those in Pusan were organic matter ($23.0{\sim}29.1\;g/kg$) and T-N ($1.6{\sim}1.8\;mg/kg$). In conclusion, the recommended rates of N fertilizer for rice cropping were 21.4%, 11.8% and 8.8% high for Andong, Sangju and Gumi, respectively and 14.9%, 4.6%, 4.5% and 11.5% low for Goryeong, Changnyeong, Milyang and Pusan, respectively reflecting the chemical properties of soils and the quality of irrigation water on the basis of 110 kgN/ha. In the case of phosphorous, the rates were 18.9% and 33.3% low for Changnyeong and others, respectively on the basis of $45\;kgP_2O_5/ha$. The populations of bacteria, fungi, actinomycetes, Bacillus, fluorescent Pseudomonas and Biomass C were high at the lower reaches including Goryeong, which showed relatively much nutrient contents of organic matter, total N and phosphorous etc.

Geochemistry and Genesis of the Guryonsan(Ogcheon) Uraniferous Back Slate (구룡산(九龍山)(옥천(決川)) 함(含)우라늄 흑색(黑色) 점판암(粘板岩)의 지화학(地化學) 및 성인(成因))

  • Kim, Jong Hwan
    • Economic and Environmental Geology
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    • v.22 no.1
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    • pp.35-63
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    • 1989
  • Geochemical characteristics of the Guryongsan (Ogcheon) uraniferous black slate show that this is an analogue to the conventional Chattanooga and Alum shales in occurrences. Whereas, its highest enrichment ratio in metals including uranium, among others, is explained by the cyclic sedimentation of the black muds and quartz-rich silts, and the uniform depositional condition with some what higher pH condition compared to the conditions of the known occurrences. The cyclic sedimentation, caused by the periodic open and close of the silled basin, has brought about the flush-out) of the uranium depleted water and the recharge with the new metal-rich sea water, which consequently contributed to the high concentration of metals in mud. The metal-rich marine black muds, which mostly occur in the early to middle Palaeozoic times, is attributed by the geologic conditions which related to the atmospheric oxygen contents, and these are scarcely met in the late Precambrian and/or with the onset of Palaeozoic era in the geologic evolution of the earth.

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Study of Trace Element and PAHs Distribution for Extensive Regulation Establishment in Raw Material of Compost on Organic Resource (퇴비원료기준 확대설정을 위한 유기성자원의 미량원소 및 PAHs 분포 연구)

  • Lim, Dong-Kyu;Lee, Seung-Hwan;Kwon, Soon Ik;Seong, Ki-Seog;Lee, Jeong-Taek;Song, Beom-Heon
    • Korean Journal of Soil Science and Fertilizer
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    • v.39 no.6
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    • pp.339-344
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    • 2006
  • A lot of organic wastes have been produced from diverse industries, they must be tested by the regulation of fertilizer control act if reuse the organic wastes for agricultural utilization. The regulation has had only two criteria; the content of organic matter and 8 heavy metals. This study was conducted to evaluation trace element (boron, cobalt, molybdenum, and selenium) and distribution of organic compounds with different classification for complement the regulation in 16 organic waste materials(62 samples) collected from different regions and industries. Contents of boron(leather industry sludge, $154.2mg\;kg^{-1}$; food company sludge, $57.1mg\;kg^{-1}$), cobalt(industrial area sewage sludge, $95.2mg\;kg^{-1}$; metropolitan sewage sludge, $22.9mg\;kg^{-1}$), molybdenum(metropolitan sewage sludge, $40.1mg\;kg^{-1}$; food company sludge, $16.8mg\;kg^{-1}$), selenium (fiber industry sludge, $28.1mg\;kg^{-1}$; leather industry sludge, $16.9mg\;kg^{-1}$; food company sludge, $15.9mg\;kg^{-1}$) were highest compare to the other organic wastes. Total PAHs contents were the highest in paper-mill manufacture($3,462ug\;kg^{-1}$), and among the 16 PAHs, naphthalene, phenanthrene, pyrene, fluoroanthene, Anthracene and acenaphthene were detected more clearly than others in all kinds of organic resources.

Janggunite, a New Mineral from the Janggun Mine, Bonghwa, Korea (경북(慶北) 봉화군(奉化郡) 장군광산산(將軍鑛山産) 신종광물(新種鑛物) 장군석(將軍石)에 대(對)한 광물학적(鑛物學的) 연구(硏究))

  • Kim, Soo Jin
    • Economic and Environmental Geology
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    • v.8 no.3
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    • pp.117-124
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    • 1975
  • Wet chemical analysis (for $MnO_2$, MnO, and $H_2O$(+)) and electron microprobe analysis (for $Fe_2O_3$ and PbO) give $MnO_2$ 74.91, MnO 11.33, $Fe_2O_3$ (total Fe) 4.19, PbO 0.03, $H_2O$ (+) 9.46, sum 99.92%. 'Available oxygen determined by oxalate titration method is allotted to $MnO_2$ from total Mn, and the remaining Mn is calculated as MnO. Traces of Ba, Ca, Mg, K, Cu, Zn, and Al were found. Li and Na were not found. The existence of (OH) is verified from the infrared absorption spectra. The analysis corresponds to the formula $Mn^{4+}{_{4.85}}(Mn^{2+}{_{0.90}}Fe^{3+}{_{0.30}})_{1.20}O_{8.09}(OH)_{5.91}$, on the basis of O=14, 'or ideally $Mn^{4+}{_{5-x}}(Mn^{2+},Fe^{3+})_{1+x}O_{8}(OH)_{6}$ ($x{\approx}0.2$). X-ray single crystal study could not be made because of the distortion of single crystals. But the x-ray powder pattern is satisfactorily indexed by an orthorhombic cell with a 9.324, b 14.05, c $7.956{\AA}$., Z=4. The indexed powder diffraction lines are 9.34(s) (100), 7.09(s) (020), 4.62(m) (200, 121), 4.17(m) (130), 3.547(s) (112), 3.212(vw) (041), 3.101(s) (300), 2.597(w) (013), 2.469(m) (331), 2.214(vw)(420), 2.098(vw) (260), 2.014 (vw) (402), 1.863(w) (500), 1.664(w) (314), 1.554(vw) (600), 1.525(m) (601), 1.405(m) (0.10.0). DTA curve shows the endothermic peaks at $250-370^{\circ}C$ and $955^{\circ}C$. The former is due to the dehydration: and oxidation forming$(Mn,\;Fe)_2O_3$(cubic, a $9.417{\AA}$), and the latter is interpreted as the formation of a hausmannite-type oxide (tetragonal, a 5.76, c $9.51{\AA}$) from $(Mn,\;Fe)_2O_3$. Infrared absorption spectral curve shows Mn-O stretching vibrations at $515cm^{-1}$ and $545cm^{-1}$, O-H bending vibration at $1025cm^{-1}$ and O-H stretching vibration at $3225cm^{-1}$. Opaque. Reflectance 13-15%. Bireflectance distinct in air and strong in oil. Reflection pleochroism changes from whitish to light grey. Between crossed nicols, color changes from yellowish brown with bluish tint to grey in air and yellowish brown to grey through bluish brown in oil. No internal reflections. Etching reactions: HCl(conc.) and $H_2SO_4+H_2O_2$-grey tarnish; $SnCl_2$(sat.)-dark color; $HNO_3$(conc.)-grey color; $H_2O_2$-tarnish with effervescence. It is black in color. Luster dull. Cleavage one direction perfect. Streak brownish black to dark brown. H. (Mohs) 2-3, very fragile. Specific gravity 3.59(obs.), 3.57(calc.). It occurs as radiating groups of flakes, flower-like aggregates, colloform bands, dendritic or arborescent masses composed of fine grains in the cementation zone of the supergene manganese oxide deposits of the Janggun mine, Bonghwa-gun, southeastern Korea. Associated minerals are calcite, nsutite, todorokite, and some undetermined manganese dioxide minerals. The name is for the mine, the first locality. The mineral and name were approved before publication by the Commission on New Minerals and Mineral Names, I.M.A.

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Limno-Biological Investigation of Lake Ok-Jeong (옥정호의 육수생물학적 연구)

  • SONG Hyung-Ho
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.15 no.1
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    • pp.1-25
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    • 1982
  • Limnological study on the physico-chemical properties and biological characteristics of the Lake Ok-Jeong was made from May 1980 to August 1981. For the planktonic organisms in the lake, species composition, seasonal change and diurnal vertical distribution based on the monthly plankton samples were investigated in conjunction with the physico-chemical properties of the body of water in the lake. Analysis of temperature revealed that there were three distinctive periods in terms of vertical mixing of the water column. During the winter season (November-March) the vertical column was completely mixed, and no temperature gradient was observed. In February temperature of the whole column from the surface to the bottom was $3.5^{\circ}C$, which was the minimum value. With seasonal warming in spring, surface water forms thermoclines at the depth of 0-10 m from April to June. In summer (July-October) the surface mixing layer was deepened to form a strong thermocline at the depth of 15-25 m. At this time surface water reached up to $28.2^{\circ}C$ in August, accompanied by a significant increase in the temperature of bottom layer. Maximum bottom temperature was $r5^{\circ}C$ which occurred in September, thus showing that this lake keeps a significant turbulence Aehgh the hypolimnial layer. As autumn cooling proceeded summer stratification was destroyed from the end of October resulting in vertical mixing. In surface layer seasonal changes of pH were within the range from 6.8 in January to 9.0 in guutuost. Thighest value observed in August was mainly due to the photosynthetic activity of the phytoplankton. In the surface layer DO was always saturated throughout the year. Particularly in winter (January-April) the surface water was oversaturated (Max. 15.2 ppm in March). Vertical variation of DO was not remarkable, and bottom water was fairly well oxygenated. Transparency was closely related to the phytoplankton bloom. The highest value (4.6 m) was recorded in February when the primary production was low. During summer transparency decreased hand the lowest value (0.9 m) was recorded in August. It is mainly due to the dense blooming of gnabaena spiroides var. crassa in the surface layer. A. The amount of inorganic matters (Ca, Mg, Fe) reveals that Lake Ok-Jeong is classified as a soft-water lake. The amount of Cl, $NO_3-N$ and COD in 1981 was slightly higher than those in 1980. Heavy metals (Zn, Cu, Pb, Cd and Hg) were not detectable throughout the study period. During the study period 107 species of planktonic organisms representing 72 genera were identified. They include 12 species of Cyanophyta, 19 species of Bacillariophyta, 23 species of Chlorophyta, 14 species of Protozoa, 29 species of Rotifera, 4 species of Cladocera and 6 species of Copepoda. Bimodal blooming of phytoplankton was observed. A large blooming ($1,504\times10^3\;cells/l$ in October) was observed from July to October; a small blooming was present ($236\times10^3\;cells/l$ in February) from January to April. The dominant phytoplankton species include Melosira granulata, Anabaena spiroides, Asterionella gracillima and Microcystis aeruginota, which were classified into three seasonal groups : summer group, winter group and the whole year group. The sumner group includes Melosira granulate and Anabaena spiroides ; the winter group includes Asterionella gracillima and Synedra acus, S. ulna: the whole year group includes Microtystis aeruginosa and Ankistrodesmus falcatus. It is noted that M. granulate tends to aggregate in the bottom layer from January to August. The dominant zooplankters were Thermocpclops taihokuensis, Difflugia corona, Bosmina longirostris, Bosminopsis deitersi, Keratelle quadrata and Asplanchna priodonta. A single peak of zooplankton growth was observed and maximum zooplankton occurrence was present in July. Diurnal vertical migration was revealed by Microcystis aeruginosa, M. incerta, Anabaena spiroides, Melosira granulata, and Bosmina longirostris. Of these, M. granulata descends to the bottom and forms aggregation after sunset. B. longirostris shows fairly typical nocturnal migration. They ascends to the surface after sunset and disperse in the whole water column during night. Foully one species of fish representing 31 genera were collected. Of these 13 species including Pseudoperilnmpus uyekii and Coreoleuciscus splendidus were indigenous species of Korean inland waters. The indicator species of water quality determination include Microcystis aeruginosa, Melosira granulata, Asterionelta gracillima, Brachionus calyciflorus, Filinia longiseta, Conochiloides natans, Asplanchna priodonta, Difflugia corona, Eudorina elegans, Ceratium hirundinella, Bosmina longirostris, Bosminopsis deitersi, Heliodiaptomus kikuchii and Thermocyclops taihokuensis. These species have been known the indicator groups which are commonly found in the eutrophic lakes. Based on these planktonic indicators Lake Ok-Jeong can be classified into an eutrophic lake.

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Liquid-Composting Conditions of By-product Obtained from Degradation of Animal Carcass for Agriculture Recycling (폐가축사체의 농업적 재활용을 위한 가축사체 액상부산물의 액비화 조건 구명)

  • Seo, Young-Jin;Seo, Dong-Cheol;Kang, Se-Won;Lee, Sang-Gyu;Park, Ju-Wang;Choi, Ik-Won;Sung, Hwan-Hoo;Kang, Seog-Jin;Cho, Ju-Sik
    • Korean Journal of Environmental Agriculture
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    • v.32 no.4
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    • pp.348-354
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    • 2013
  • BACKGROUND: Globally, concern about emerging infectious diseases of livestock is growing. For the disposal of the animal carcass, it is necessary to recycle the carcass into an agriculturally usable product. The objective of this study was to investigate the composting conditions of liquid by-product obtained from degradation of animal carcass. METHODS AND RESULTS: Optimum conditions of liquid fertilizer were investigated using different microorganisms, pHs, and volumes of microorganisms (Lactobacillus rhamnosus+Pichia deserticola). Based on the results from the optimum conditions, compost maturity and quality of liquid fertilizer were evaluated for 112 days. The compost maturity of liquid fertilizer were higher in the order of LP(Lactobacillus rhamnosus + Pichia deserticola) > BC(Bacillus cereus) > BS(Bacillus subtilis). The optimum condition under different volumes of LP was injection of 0.5 mL/100 mL. The compost maturity under different pHs were higher in the order of pH 7 > $$5{\geq_-}9{\frac{._-}{.}}11$$. The liquid by-product at 56 days after composting was completely decomposed. The concentrations of T-N, T-P and $K_2O$ in liquid fertilizer at 56 days were 0.94, 0.17 and 3.78%, respectively, and the sum of those concentrations was 4.89%. CONCLUSION(S): Liquid fertilizer of by-product using pig carcass was decomposed with optimum conditions(LP, pH 7, injection of 0.5 mL/100 mL) in 56 days after composting, and was suitable for official standard of commercial fertilizer.

Hazard Analysis for the Application of Good Agricultural Practices(GAP) on Paprika During Cultivation (파프리카의 농산물우수관리제도(GAP)적용을 위한 재배단계의 위해요소 분석)

  • Nam, Min-Ji;Chung, Do-Yeong;Shim, Won-Bo;Chung, Duck-Hwa
    • Journal of Food Hygiene and Safety
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    • v.26 no.3
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    • pp.273-282
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    • 2011
  • This study established hazards which may cause risk to human at farm during cultivation stage of paprika. Samples of plants (paprika, leaf, stem), cultivation environments (water, soil), personal hygiene (hand, glove, clothes), work utensils (carpet, basket, box) and airborne bacteria were collected from three paprika farms (A, B, C) located in Western Gyeongnam, Korea. The collected samples were assessed for biological (sanitary indications and major foodborne pathogens), chemical (heavy metals, pesticide residues) and physical hazards. In biological hazards, total bacteria and coliform were detected at the levels of 1.9~6.6 and 0.0~4.610g CFU/g, leaf, mL, hand or 100 $cm^2$, while Escherichia coli was not detected in all samples. In major pathogens, only Bacillus cereus were detected at levels of ${\leq}$ 1.5 log CFU/g, mL, hand or 100 $cm^2$, while Staphylococuus aureus, Listeria monocytogenes, E. coli O157 and Salmonella spp. were not detected in all samples. Heavy metal and pesticide residue as chemical hazards were detected at levels below the regulation limit, physical hazard factors, such as insects, pieces of metal and glasses, were also found in paprika farms. Proper management is needed to prevent biological hazards due to cross-contamination while physical and chemical hazards were appropriate GAP criteria.

Hazard Analysis of Tomato Farms at the Growing Stage for the Establishment of the Good Agricultural Practices (GAP) (토마토 농산물우수관리제도(GAP)모델 확립을 위한 재배단계 위해분석)

  • Park, Su-Hee;Kwon, Woo-Hyun;Heo, Rok-Won;Kim, Kyeong-Yeol;Shim, Won-Bo;Shim, Sang-In;Chung, Duck-Hwa
    • Journal of Food Hygiene and Safety
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    • v.27 no.2
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    • pp.152-160
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    • 2012
  • The objective of this study was to analyze hazards for the growing stage of 6 tomato farms (A, B, C; soli farms, D, E, F; Nutriculture farms) located in Gyeongsangnam-do to establish the good agricultural practices (GAP). A total of 144 samples for analyzing hazards collected from cultivation environments (irrigation water, soil, nutrient solution, and air) and personal hygiene (hands, gloves, and cloths) were assessed for biological (sanitary indications and major food borne pathogens) and chemical hazards (heavy metals). Total bacteria, coliform, and fungi were detected at levels of 0.2-7.2, 0.0-6.1, and 0.0-5.4 log CFU/g, mL, hand or 100 $cm^2$, respectively. Escherichia coli were only detected in the soil sample from B farm. In case of pathogens, Bacillus cereus was detected at levels of 0.0-4.4 log CFU/(g, mL, hand or 100 $cm^2$), whereas Staphylococuus aureus, Listeria monocytogenes, E. coli O157, and Salmonella spp. were not detected in all samples. Heavy metals as a chemical hazard were detected in soil and irrigation water, but levels of them were lower than the permit limit. In conclusion, chemical hazard levels complied with GAP criteria, but biological hazards at the growing stage of tomato farms were confirmed. Therefore a proper management to prevent microbial contamination is needed.

휨 구조의 압전 마이크로-켄틸레버를 이용한 진동 에너지 수확 소자

  • Na, Ye-Eun;Park, Hyeon-Su;Park, Jong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.476-476
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    • 2014
  • 서론: 저 전력 소모를 필요로 하는 무선 센서 네트워크 관련 기술의 급격한 발달과 함께 자체 전력 수급을 위한 진동 에너지 수확 기술에 대한 연구가 활발히 이루어지고 있다. 다양한 구조와 소재를 압전 외팔보에 적용하여 제안하고 있다. 그 중에서도 진동 기반의 에너지 수확 소자는 주변 환경에서 쉽게 진동을 얻을 수 있고, 높은 에너지 밀도와 제작 방법이 간단하다는 장점을 가지고 있어 많은 분야에 응용 및 적용 가능하다. 기존 연구에서는 2차원적으로 진동 에너지 수확을 위한 휜 구조의 압전 외팔보를 제안 하였다. 휜 구조를 갖는 압전 외팔보는 각각의 짧은 두 개의 평평한 외팔보가 일렬로 연결된 것으로 볼 수 있다. 하나의 짧고 평평한 외팔보는 진동이 가해지면 접선 방향으로 응력이 생겨 최대 휨 모멘텀을 갖게 된다. 그러므로 휜 구조를 갖는 외팔보는 진동이 인가됨에 따라 길이 방향과 수직 방향으로 진동한다. 하지만, 이 구조는 수평 방향으로 가해지는 진동에 대한 에너지를 수확하기에는 한계점을 가진다. 즉, 3축 방향에서 임의의 방향에서 진동 에너지를 수확하기는 어렵다. 본 연구에서는 3축 방향에서 에너지를 효율적으로 수확할 수 있도록 헤어-셀 구조의 압전 외팔보 에너지 수확소자를 제안한다. 제안된 소자는 길이 방향과 수직 방향뿐만 아니라 수평 방향으로도 진동하여 임의의 방향에서 진동 에너지를 수확할 수 있다. 구성 및 공정: 제안하는 소자는 3축 방향에서 임의의 진동을 수확하기 위해서 길이를 길게 늘이고 길이 방향을 따라 휘어지는 구조의 헤어-셀 구조로 제작하였다. 외팔보의 구조는 외팔보의 폭 대비 길이의 비가 충분히 클 때, 추가적인 자유도를 얻을 수 있다. 그러므로 헤어-셀 구조의 에너지 수확 소자는 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향을 통해서 3차원적으로 임의의 주변 진동 에너지를 수확하여 전기적인 에너지로 생성시킬 수 있다. 제작된 소자는 높은 종횡비를 갖는 무게 추($500{\times}15{\times}22{\mu}m3$)와 길이 방향으로 길게 휜 압전 외팔보($1000{\times}15{\times}1.7{\mu}m3$)로 구성되어있다. 공정 과정은 다음과 같다. 먼저, 실리콘 웨이퍼 위에 탄성층을 형성하기 위해 LPCVD SiNx를 $0.8{\mu}m$와 LTO $0.2{\mu}m$를 증착 후, 각각 $0.03{\mu}m$$0.12{\mu}m$의 두께를 갖는 Ti와 Pt을 하부 전극으로 스퍼터링한다. 그리고 Pb(Zr0.52Ti0.48)O3 박막을 $0.35{\mu}m$ 두께로 졸겔법을 이용하여 증착하고 상부 Pt층을 두께 $0.1{\mu}m$로 순차적으로 스퍼터링하여 형성한다. 상/하부 전극은 ICP(Inductively Coupled Plasma)를 이용해 건식 식각으로 패턴을 형성한다. PZT 층과 무게 추 사이의 보호막을 씌우기 위해 $0.2{\mu}m$의 Si3N4 박막이 PECVD 공정법으로 증착되고, RIE로 패턴을 형성된다. Ti/Au ($0.03/0.35{\mu}m$)이 E-beam으로 증착되고 lift-off를 통해서 패턴을 형성함으로써 전극 본딩을 위한 패드를 만든다. 초반에 형성한 실리콘 웨이퍼 위의 SiNx/LTO 층은 RIE로 외팔보 구조를 형성한다. 이후에 진행될 도금 공정을 위해서 희생층으로는 감광액이 사용되고, 씨드층으로는 Ti/Cu ($0.03/0.15{\mu}m$) 박막이 스퍼터링 된다. 도금 형성층을 위해 감광액을 패턴화하고, Ni0.8Fe0.2 ($22{\mu}m$)층으로 도금함으로써 외팔보 끝에 무게 추를 만든다. 마지막으로, 압전 외팔보 소자는 XeF2 식각법을 통해 제작된다. 제작된 소자는 소자의 여러 층 사이의 고유한 응력 차에 의해 휨 변형이 생긴다. 실험 방법 및 측정 결과: 제작된 소자의 성능을 확인하기 위하여 일정한 가속도 50 m/s2로 3축 방향에 따라 입력 주파수를 변화시키면서 출력 전압을 측정하였다. 먼저, 소자의 기본적인 공진 주파수를 얻기 위하여 수직 방향으로 진동을 인가하여 주파수를 변화시켰다. 그 때에 공진 주파수는 116 Hz를 가지며, 최대 출력 전압은 15 mV로 측정되었다. 3축 방향에서 진동 에너지 수확이 가능하다는 것을 확인하기 위하여 제작된 소자를 길이 방향과 수평 방향으로 가진기에 장착한 후, 기본 공진 주파수에서의 출력 전압을 측정하였다. 진동이 길이방향으로 가해졌을 때에는 33 mV, 수평방향으로 진동이 인가되는 경우에는 10 mV의 최대 출력 전압을 갖는다. 제안하는 소자가 수 mV의 적은 전압은 출력해내더라도 소자는 진동이 인가되는 각도에 영향 받지 않고, 3축 방향에서 진동 에너지를 수확하여 전기에너지로 얻을 수 있다. 결론: 제안된 소자는 3축 방향에서 진동 에너지를 수확할 수 있는 에너지 수확 소자를 제안하였다. 외팔보의 구조를 헤어-셀 구조로 길고 휘어지게 제작함으로써 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향에서 출력 전압을 얻을 수 있다. 미소 전력원으로 실용적인 사용을 위해서 무게추가 더 무거워지고, PZT 박막이 더 두꺼워진다면 소자의 성능이 향상되어 높은 출력 전압을 얻을 수 있을 것이라 기대한다.

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