• 한국전기전자재료학회논문지
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• 제15권4호
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• pp.356-360
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• 2002

The piezoelectric properties of $0.05Pb(Al_{0.5}Nb_{0.5})O_3-0.95Pb(Zr_{0.52}Ti_{0.48})O_3+0.7wt%Nb_2O_5+o.5wt%MnO_2$ ceramics with the additive of BaCO$_3$were investigated. As the addition of BaCO$_3$increased from 0 to 0.4 wt%, the dielectric constant ($\epsilon^T _{33}$), piezoelectric constant ($d_33$), electromechanical coupling factor ($k_p$), and mechanical quality factor ($Q_m$) increased, while the dielectric loss ($tan\delta$) decreased. The highest piezoelectric and dielectric properties were observed at $1200^{\circ}C$ of the sintered temperature with 0.4 wt% of $BaCO_3$, and the properties of $d_33$, $k_p$, and $Q_m$ were 339 pC/N, 60% and 1754, respectively.

• 한국세라믹학회지
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• 제52권1호
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• pp.77-82
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• 2015

The effect of the electrode type on the dielectric and piezoelectric properties of $Pb(Mg_{1/3}Nb_{2/3})O_3-PbZrO_3-PbTiO_3$ (PMN-PZT) single crystals was investigated in an effort to improve their properties for various piezoelectric applications. First, three different types of PMN-PZT single crystals [PMN-PZT-A (piezoelectrically soft type; dielectric constant ~ 10,000), PMN-PZT-B (piezoelectrically soft type; phase-transition temperature between the rhombohedral and tetragonal phases ($T_{RT}$) ~ $145^{\circ}C$), PMN-PZT-C (piezoelectrically hard type; high mechanical quality factor ($Q_m$) ~ 1,000)] were fabricated using the solid-state single crystal growth (SSCG) method. Then, four different types of electrodes [sputtered Au, sputtered Cr/Au, sputtered Ti/Au, and fired Ag] were formed on the single crystals, and their dielectric and piezoelectric properties were measured. The single crystals with a sputtered Ti/Au electrode showed the highest dielectric and piezoelectric constants but the lowest coercive electric field ($E_C$). The single crystals with a fired Ag electrode showed the lowest dielectric and piezoelectric constants but the highest coercive electric field ($E_C$). This dependence on the type of electrode was most significant in the piezoelectrically hard PMN-PZT-C single crystals. However, the effects of the electrode type on the phase transition temperatures ($T_C$, $T_{RT}$) and dielectric loss were negligible. These results clearly demonstrate that it is important to select an appropriate electrode so as to maximize the dielectric and piezoelectric properties of single crystals in each type of piezoelectric application.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.656-658
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• 2004

Pb$(Zr_{0.8}Ti_{0.2})TiO_3$ powder were prepared by the sol-gel method using a solution of Pb-acetate, Zr n-propoxide and Ti iso-propoxide. PZT thick film were fabricated by the screen printing method, and the structural and ferroelectric properties asafunting of the sintering temperature were studied. PZT film thickness, obtained by four screen printing, was approximately $70\sim90{\mu}m$. The relative dielectric constant and the dielectric loss of the PZT thick film sintered at $1050^{\circ}C$t were approximately 676 and 1.4%, respectively. The remanent polarization and the coercive field of the PZT thick film sintered at $1050^{\circ}C$ were $21.15{\mu}C/cm^2$ and 10.1 kV/cm, mapetively

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.229-233
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• 2000

In this study, the temperature coefficient of resonant frequency($TCF_r$), dielectric and piezoelectric properties of $Pb_{1-x}Sr_x[(Sb_{1/2}Nb_{1/2})_{0.035}(Mn_{1/3}Nb_{2/3})_{0.065}(Zr_{0.49},Ti_{0.51})_{0.90}]O_3$ ceramics were investigated with the Sr substitution to Pb site. The dielectric constant was increased according to the increase of Sr substitution and electromechanical coupling factor($k_t$) also showed the highest values of 0.485 when the Sr substitution was 5 mol%. Moreover, the mechanical quality factor($Q_{mt}$) showed the highest value of 233 when the Sr substitution was 2 mol%.

• 공업화학
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• 제8권2호
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• pp.292-300
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• 1997

본 연구에서는 출발물질을 변화시켜 입방체의 PZT(Lead Zirconate Titanate) 분말을 수열합성법으로 제조하였으며 합성된 분말을 이용하여 소결특성을 조사하였다. 출발물질에 관계없이 입방체 형태를 갖는 PZT 결정분말이 형성되었으나 $Pb(NO_3)_2$, $Ti(OC_4H_9)_4$와 $Zr(OC_4H_9)_4$을 출발물질로 사용한 경우 다른 여러 출발물질을 사용한 경우보다 상대적으로 작은 입자가 생성되었다. 수열합성시 교반을 시키면서 합성한 경우 교반없이 반응시킨 경우에 비해 핵생성을 위한 수열 반응온도가 낮아졌으며 상대적으로 입경이 큰 입자들의 수가 늘어났다. Zr대Ti의 조성비를 변화시켜 수열합성한 반응물을 XRD 분석한 결과, 조성비가 40대60인 경우 정방정상이 주상(major phase)으로 형성되었으며 조성비가 60대40인 경우에는 주상의 결정형이 능면체정상으로 바뀌었다. 여러 조건에서 합성된 PZT 분말을 PbO 분위기에서 소결시키면서 소결온도 및 소결시간 변화에 따른 소결밀도의 변화를 분컥하였으며, $1150^{\circ}C$에서 2시간 소결시켰을 때 최적의 소결밀도, $7.6g/cm^3$을 갖는 소결체가 제조되었다.

• 마이크로전자및패키징학회지
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• 제22권4호
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• pp.83-89
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• 2015

본 논문에서는 졸-침투와 직접-패턴 공정을 이용하여 향상된 압전 후막의 전기적 특성과 우수한 패터닝 특성을 동시에 만족할 수 있는 제작 방법을 제시한다. 저온(< $850^{\circ}C$) 공정 후 후막의 고밀도 및 직접-패턴의 목적을 달성하기 위해서, 감광성 티탄산 지르콘산 연 ($Pb(Zr,Ti)O_3$, PZT) 졸을 스크린인쇄된 PZT 후막 내부로 침투시켰다. 직접-패턴된 PZT막은 포토크롬마스크와 UV 조사에 의해서 일정한 간격으로 인쇄된 후막 위에 성공적으로 형성되었다. 스크린인쇄된 후막은 분말형태의 기공성 구조를 갖고 있어 조사된 UV빛이 산란되기 때문에, 감광성 졸-침투 공정을 할 때 PZT 후막의 특성을 증가시키기 위한 공정의 최적화가 필요하다. 침투된 감광성 PZT 졸의 농도, 조사된 UV 시간 및 용매 현상 시간을 최적화한 결과, 0.35 M의 PZT 농도, 4 분의 UV 조사시간과 15 초의 용매 현상시간으로 졸-침투된 PZT 후막은 $800^{\circ}C$ 소결 온도에서 입자들의 성장에 의해 치밀화 정도가 증가되었다. 또한 PZT후막의 강유전 특성(잔류분극 및 항복 전압)도 향상되었다. 특히 잔류분극값은 스크린인쇄된 후막보다 약 4배정도 증가되었다. 이렇게 제작된 후막은 어레이타입의 압전형 마이크로미터크기의 센서 및 액츄에이터 등에 응용 가능성을 제시할 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1439-1441
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• 2001

In this paper, the piezoelectric and dielectric properties as a function of x and r in $yPbZr_xTi_{1-x}O_3-(1-y)Pb(Mn_{1/3}Nb_{2/3})O_3$ piezoelectric ceramics is investigated. As a results, when y is 0.95 and x is 0.505, electromechanical coupling factor($k_p$), permittivity(${{\varepsilon}_{33}}^T/{\varepsilon}_0$), piezoelectric strain constant($d_{33}$) and mechanical quality factor($Q_m$) are 58[%], 1520, 272 [pC/N] and 1550, respectively. From XRD analysis, when x is 0.505, it is MPB which present rhombohedral and tetragonal phase in same quantity. Also, From SEM observation. when sintering temperature is 1150[$^{\circ}C$], grain size is about 2 [${\mu}m$]. As y decreases, piezoelectric and dielectric properties and curie temperature decreases, but mechanical quality factor and sintering temperature increases.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1997년도 제12회 학술발표회 논문개요집
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• pp.25-26
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• 1997

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권3호
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• pp.155-160
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• 2000

The piezoelectric properties and the doping effect for$0.95Pb(Zr_xTi_{1-x})O_3+0.05Pb(Mn1/3Nb2/3)O_3$ compositions were studied. Also, the heat generation and the change of electromechanical characteristics, the important problem in practical usage, were investigated under high electric field driving. As a experiment results under low electric field, the values of kp and $\varepsilon33T$ were maximized, but Qm was minimized(Kp=0.57, Qm=1550) in the composition of x=0.51. In order to increase the values of Qm $Nb_2O_5$ was used as a dopant. As the result of that, the grain size was suppressed and the uniformity of grain was improved. Also, the values of kp decreased, and the values of Qm increased with doping concentration of $Nb_2O_5$. As a experiment results under high electric field driving, when vibration velocity was lower than 0.6[m/s], the temperature increase was $20[^{\circ}C]$, and the change ratio of mechanical quality factor was less than 10[%]. So, its electromechanical characteristics was very stable. Conclusively, piezoelectric ceramic composition investigated at this paper is suitable for application to high power piezoelectric devices.

• 한국초전도ㆍ저온공학회논문지
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• 제12권3호
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• pp.44-48
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• 2010

Acoustic emission (AE) signal from an HTS tape has a low signal to noise ratio, due to the large amount of noise caused by the boiling of the liquid cryogen or mechanical vibration from the cryo-cooler. In an attempt to improve the sensitivity of the AE sensor, $Pb(Zr_{0.54}Ti_{0.46})O_3$ + 0.2 wt% $Cr_2O_3$ + 1.0 wt.% $Nb_2O_5$ ceramics sintered at $1200^{\circ}C$ was synthesized. In addition, the resonance ($f_r$) and anti-resonance frequencies ($f_a$) were measured using the specimens with various thicknesses (1.0, 1.5, 2.0, 2.5 and 3.0 mm). According to the test results, large AE signals with high frequencies were obtained from the AE sensor fabricated using a piezoelectric disc with a thinner thickness.