• Title/Summary/Keyword: Pattern repair

Search Result 163, Processing Time 0.027 seconds

EUVL Mask Defect Isolation and Repair using Focused Ion Beam (Focused Ion Beam을 이용한 EUVL Mask Defect Isolation 및 Repair)

  • 김석구;백운규;박재근
    • Journal of the Semiconductor & Display Technology
    • /
    • v.3 no.2
    • /
    • pp.5-9
    • /
    • 2004
  • Microcircuit fabrication requires precise control of impurities in tiny regions of the silicon. These regions must be interconnected to create components and VLSI circuits. The patterns to define such regions are created by lithographic processes. In order to image features smaller than 70 nm, it is necessary to employ non-optical technology (or next generation lithography: NGL). One such NGL is extreme ultra-violet lithography (EUVL). EUVL transmits the pattern on the wafer surface after reflecting ultra-violet through mask pattern. If particles exist on the blank mask, it can't transmit the accurate pattern on the wafer and decrease the reflectivity. It is important to care the blank mask. We removed the particles on the wafer using focused ion beam (FIB). During removal, FIB beam caused damage the multi layer mask and it decreased the reflectivity. The relationship between particle removal and reflectivity is examined: i) transmission electron microscope (TEM) observation after particle removal, ii) reflectivity simulation. It is found that the image mode of FIB is more effective for particle removal than spot and bar mode.

  • PDF

A Study on the Improvement of Aircraft Contract Maintenance System (항공장비 외주정비체계 개선방안 연구)

  • Suh Sung-chul;Park Seung-hwan
    • Journal of the military operations research society of Korea
    • /
    • v.30 no.2
    • /
    • pp.96-107
    • /
    • 2004
  • This paper deals with $\ulcorner$Requirement Decision Model for Repair Parts supplied by the Government$\lrcorner$ which is to reduce Aircraft Contract Maintenance Cost. It aims to find solutions to the fundamental problems of the Aircraft Contract Maintenance System. Under the current Aircraft Contract Maintenance System, it is hard to forecast the exact demand of repair parts, so support rate of Repair Parts supplied by the Government is restricted under 50 percent. It is inevitable to purchase Repair Parts from the firm with much higher price than those of Government source. However, absence of fixed demand pattern makes it difficult to improve accuracy of demand forecast. As a solution to these problems, this model prevents a cost increase due to the unit price difference between Repair Parts supplied by the Government and Repair Parts purchased by the Firm. It also reflects demand characteristics of each repair part, and prevents continual stock increase by setting an upper limit on the amount of Repair Parts supplied by the Government. The effectiveness of this model is verified by empirical analysis using the latest raw data. By applying this model to real situation, we expect to reduce about 4 billion won every year.

The Characteristics of the Repair Cost Distribution in Apartment Housing

  • Lee, KangHee;Chae, ChangU
    • KIEAE Journal
    • /
    • v.15 no.6
    • /
    • pp.19-26
    • /
    • 2015
  • Purpose: The repair would require to conserve and improve the building function and performance since built. Each household is responsible for maintaining the public facilities and paying the required cost. Therefore, it needs to get the tool or method to forecast the required cost in the future. Before the repair cost is provided, it needs to catch the repair cost distribution and provide the unit cost for the repair cycle. In this study, it aimed at providing the repair cost unit and analyzing the repair cost distribution in a roof proofing work, elevator work and building painting, which are divided into a fully work and partly change. Results of this study are shown that first, the average repair cost for roof proofing work is provided with $166.59{\times}10^3won/household$ and $1.59{\times}10^3won/m^2$ of a full change, $33.22{\times}10^3won/household$ and $0.33{\times}10^3won/m^2$ for a partly work. In addition, elevator work is $557.45{\times}10^3won/household$ and $5.38{\times}10^3won/m^2$ for a full change, $32.92{\times}10^3won/household$ and $0.56{\times}10^3won/m^2$ for a partly repair. Painting has a $304.48{\times}10^3won/household$ and $2.94{\times}10^3won/m^2$. Second, the distribution pattern of repair unit cost has a weibull-typed distribution which has a long tail to the right.

A SCANNING ELECTRON MICROSCOPIC STUDY OF THE ROOT RESORPTION AND REPAIR IN BICUSPID INTRUSION (소구치의 intrusion시 치근 흡수 및 회복에 대한 주사전자 현미경적 연구)

  • Ku, Mee-Sook
    • The korean journal of orthodontics
    • /
    • v.18 no.2
    • /
    • pp.387-404
    • /
    • 1988
  • The purpose of this study was to investigate the root resorption and repair pattern of human teeth under intrusive orthodontic loadings of varying magnitude and duration. 50 gms, 100 gms, 200 gms of force applied to the 96 experimental teeth with duration of 2, 5, 7, 10 weeks, after removing the arch wire and retaining during 2 and 6 weeks, experimental teeth were extracted. Results were as follows: 1. The initial resorption site was visible in the apex within 2 weeks with 50 gms, 100 gms samples. 2. The sites of resorption increased markedly with duration of the force. 3. The 50 grams samples of the all duration reveal the shallow resorption and the 100 gms samples of the all duration except 2 weeks reveal the shallow and deep resorption sites. 4. After 7 weeks with 50 gms and 100 gms, cellular cementum repair accompanied the continuing resorption. 5. 2 and 6 weeks after removing the force with 200 gms, the same cellular cementum repair accompanied with 50 gms, 100 gms samples.

  • PDF

Repair Cost Estimation Model of the Building Exterior and Outdoor Facilities in Apartment Housing (공동주택 건물 외부공간 및 옥외시설의 공종별 수선비용 산정모델)

  • Lee, Kang-Hee;Chae, Chang-U
    • KIEAE Journal
    • /
    • v.16 no.3
    • /
    • pp.129-135
    • /
    • 2016
  • Purpose: Building figuration is imperative to perceive the its value, environmental clean status and form. Therefore, maintenance activities of the building exterior are required to keep the housing condition and value. Each household should pay the repair cost which is brought out in the future. For this repair cost, the estimation model would needed to forecast and provide the required cost. This study aimed at providing the estimation model of the repair cost, using the repair survey data between the 2011 and 2014 in Seoul. Method: For these, it took various estimation function of repair cost such as 1st function, inverse function and so on. These above functions would be applied into the building exterior and outdoor facilities which figure the building shape and characteristics. Result: Results of this study are shown ; First, among 11 estimation models, the power function has a better statistics and goodness-of-fit than any other models. Second, the estimation model with a variable of household has a pattern in upward to the right. On the contrary, the model with management area is little downward to the right. Both of them are depended on the estimated parameter of the power function and the parameter smaller than 1.

Suture anchor selection

  • Lee, Gwang-Won
    • The Academic Congress of Korean Shoulder and Elbow Society
    • /
    • 2005.11a
    • /
    • pp.198-205
    • /
    • 2005
  • 1. Many design features including suture type, anchor size and geometry, and anchor material, play a role in the overall strength of the anchor. In addition, technical considerations such as implant orientation, pattern, and location may affect the ultimate success of the repair. 2. Multiple fixation points provide a biomechanically sounder construct in Bankart repair. The size of the glenoid and its rim make anchor size a critical consideration in implant selection and implementation.

  • PDF

A study on repairing construction of Registered Cultural Properties of Jollanamdo -In consideration of material and patterns by repairing project- (전라남도 등록문화재의 수리공사에 관한 조사 연구 -수리공사에 따른 재료 및 형태 변화를 중심으로-)

  • Shin, Woong-Ju;Gill, Jong-Won
    • Journal of the Korean Institute of Rural Architecture
    • /
    • v.12 no.4
    • /
    • pp.1-11
    • /
    • 2010
  • This study is a research examining reshaped pattern in the perspective of repairing parts and materials through repairing renovation of registered cultural properties constructed in modern times and results are as followings. Repairing construction of registered cultural properties of Jollanamdo according to parts is shown numerously in the order of roof, walls and windows, and mostly outworn as time passes on and leakage were the main cause of repair. Also when original shape was damaged by previous repair in the past, and this was another reason of repairing. It was surveyed that among the repairing job repair of damage occurred on the part of roofing area including water leakage, corrosion and damage of roofing material, and damage of groove channel were the most main cause of repair. Especially when roof leakage is occurred by outworn of roofing materials, this cause corrosion and damage of materials due to the damage of leakage parts and this cause repeating cycles of worse leakage again and again. Main repairing materials which deform the original shape of registered cultural properties were confirmed as copper plate used on the roof. Copper plate showing high frequency of application which replaces groove slate or cement roofing tile used on the roof before has high durability and anti-corrosion but it is considered improper material to recover original shape.