• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1491-1493
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• 2000

Continuing improvement of microprocessor performance involves in the device size. This allow greater device speed, an increase in device packing density, and an increase in the number of functions that can reside on a single chip. However this has led to propagation delay, crosstalk noise, and power dissipation due to resistance-capacitance(RC) coupling become significant due to increased wiring capacitance, especially interline capacitance between the metal lines on the same metal level. So, MSSQ which has the permittivity between 2.5-3.2 is used to prevent from these problems. For pattering MSSQ(Methylsilsequioxane), we use RIE(Reactive Ion Etching) and MERIE(Magnetically enhanced Reactive Ion Etching) which could provide good anisotropic etching. In this study, we optimized the flow rate of $CF_{4}/O_2$ gas, RF power to obtain the best etching rate and roughness and also analyzed the etching result using $\alpha$-step profilemeter, SEM, infrared spectrum and AFM.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.9
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• pp.11-18
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• 2002

This paper presents a CPW phase shifter and shunt stub with air-bridge on a 10-${\mu}m$-thick oxidized porous silicon(OPS) substrate using surface micromachining. The line dimensions of the CPW phase shifter was designed with S-W-Sg = 100-30-400 ${\mu}m$. And the width and length of the air-bridge with "ㄷ“ shape were 100 ${\mu}m$ and 400-460-400 ${\mu}m$, respectively. In order to achieve low attenuation, stepped air-bridge CPW phase shift was proposed. The insertion loss of the stepped air-bridge CPW phase shift is more improved than that of no stepped air-bridge CPW phase shift. The measured phase characteristic of the fabricated CPW phase shifter is close to 180$^{\circ}$ over a very broad frequency range of 28 GHz. The measured working frequency of short-end series stub is 28.7 GHz and the return loss is - 20 dB. And the measured working frequency of short-end shunt stub is 28.9 GHz and the return loss is - 23 dB at midband. As a result, the pattering of stub in the center conductor of CPW lines can offer size reduction and lead to high density chip layouts.

• Journal of the Korean Institute of Landscape Architecture
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• v.36 no.4
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• pp.48-64
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• 2008

The aim of this research is to set a systemic Ecological Landscape Planning Model to cope with the destroyed landscape problems which was caused by massive development project and thoughtless development in country areas. The summary of research result are as follows. As a result of analysis on domestic and international literature, there are 60 planning index items which are nature conservation area, landscape conservation area, and build and manage wetland biotope and so on. total number of planning index is 34 after finalizing the physical index items. As a result of on-spot research, all 34 planning index after literature analysis is existing. Also, there are 38 finally-selected index which includes 4 added planning index in the process of research like natural vegetation in frequently-used spot. As a result of importance analysis on detailed planning index, most are above 5 points, which is relatively high. As a result of factor analysis on patterning for the detailed planning index, it was classified with seven elements. The first Ecological Landscape Planning model was set with integrated analysis on result of pattering for the detailed planning index and importance of detailed planning index. Based on first model, to make more systematic landscape, the analysis of MCB was conducted. As a result of MCB analysis according to planning index, it is confirmed that each planning index shows maximum. As a result of importance analysis on the 9 plans keynote, the average importance point was 4.62 for conservation area and 4.54 for enrichment area respectively. By integrating the result of importance analysis on basic aims of the first model, MCB analysis and plans, we set the second Ecological Landscape Planning model. In vertical transition, for example, 'conservation area' showed the importance point above 5.2 for all planning index except setting recreational space. Also, the analysis on parallel structure showed that relation between 'additional improvement, management, and connection' and other planning index is above 5.3 and importance on correlation with 'the part which should be protected from nature and landscape' marked 6.07 which is the highest.