CPW Phase Shifter and Shunt Stub with Air-Bridge Fabricated on Oxidized Porous Silicon(OPS) Substrate
![]() |
Sim, Jun-Hwan
(Division of Radio and Information Communication Engineering, Korea Maritime University)
Park, Dong-Kook (Division of Radio and Information Communication Engineering, Korea Maritime University) Kang, In-Ho (Division of Radio and Information Communication Engineering, Korea Maritime University) Kwon, Jae-Woo (School of Electrical Engineering and Computer Science, Kyungpook National University) Park, Jeong-Yong (School of Electrical Engineering and Computer Science, Kyungpook National University) Lee, Jong-Hyun (School of Electrical Engineering and Computer Science, Kyungpook National University) Jeon, Joong-Sung (Research Institute of Industrial Technology, Korea Maritime University) Ye, Byeong-Duck (Division of Maritime Transportation Science, Korea Maritime University) |
1 | K. Hettak, N. Dib, A. Omar, G. Y. Delisle, M. G. Stubbs, S. Toutain, 'A useful new class of miniature CPW shunt stubs and its impact on millimeter-wave integrated circuits', IEEE Microwave Theory Tech., Vol. 47, No. 12, pp. 2340-2349, Dec. 1999 DOI ScienceOn |
2 | K. Hettak, T. Laneve, and M. G. Stubbs, 'Size-reduction techniques for CPW and ACPS structures', IEEE Microwave Theory Tech., Vol. 49, No. 11, pp. 2112-2116, Nov. 2001 DOI ScienceOn |
3 | C. M Nam and Y. S. Kwon, 'Coplanar waveguides on silicon substrate with thick oxidized porous silicon (OPS) layer', IEEE Microwave and Guided Wave Lett., Vol. 7, No. 8, pp. 236-238, Aug. 1997 DOI ScienceOn |
4 | R. J. Welty, S. H. Park, P. M. Asbeck, K. -P. S. Dancil, and M. J. Sailor, 'Porous silicon technology for RF integrated circuit applications', in Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 1998, pp. 160-163 DOI |
5 | R. L. Peterson and R. F. Drayton, 'Dielectric properties of oxidized porous silicon in a low resistivity substrate', in IEEE MTT-S Dig., 2001, pp. 765-768 DOI |
6 | 권재우, 박정용, 이동인, 이종현, 김진량, 이해영, 심준환, '산화된 다공질 실리콘 기판 위에 제작된 MMIC용 Air-Bridge Interconnect를 가진 Coplanar Waveguides', 2001년도 대한전자공학회 통신 소사이어티 및 신호처리 소사이어티 추계합동 발표회 논문집, Nov. 2001, pp. 357-360 |
7 | N. S. Barker and G. M. Rebeiz, 'Optimization of distributed MEMS phase shifters', in IEEE MTT-S Dig., 1999, pp. 299-302 DOI |
8 | A Borgioli, Y. Liu, A. S. Nagra, and R. A. York, 'Low-loss distributed MEMS phase shifter', IEEE Microwave and Guided Wave Lett., Vol. 10, No.1, pp. 7-9, Jan. 2000 DOI ScienceOn |
9 | S. Iordanescu, G. Bartolucci, S. Simion, and M. Dragoman, 'Coplanar waveguide stub/filters on thin membranes and standard substrates', in IEEE MTT-S Dig., 1997, pp. 357-360 DOI |
10 | J. Buechler, E. Kasper, P. Russer, and K Strohm, 'Silicon high-resistivity-substrate mlli-meter-wave technology', IEEE Microwave Theory Tech., Vol. MTT-34, pp. 1516-1521, Dec. 1986 DOI |
11 | C. Warns, W. Menzel, and H. Schumacher, 'Transmission lines and passive elements for multilayer coplanar circuits on silicon', IEEE Microwave Theory Tech, Vol. 46, No.5, pp. 616-622, May. 1998 DOI ScienceOn |
12 | A. C. Reyes, S. M. El-Ghazaly, S. Dorn, M. Dydyk, and D. K. Schroder, 'Silicon as a microwave substrate', in IEEE MTT-S Dig., 1994, pp. 1759-1762 DOI |
![]() |