Browse > Article

CPW Phase Shifter and Shunt Stub with Air-Bridge Fabricated on Oxidized Porous Silicon(OPS) Substrate  

Sim, Jun-Hwan (Division of Radio and Information Communication Engineering, Korea Maritime University)
Park, Dong-Kook (Division of Radio and Information Communication Engineering, Korea Maritime University)
Kang, In-Ho (Division of Radio and Information Communication Engineering, Korea Maritime University)
Kwon, Jae-Woo (School of Electrical Engineering and Computer Science, Kyungpook National University)
Park, Jeong-Yong (School of Electrical Engineering and Computer Science, Kyungpook National University)
Lee, Jong-Hyun (School of Electrical Engineering and Computer Science, Kyungpook National University)
Jeon, Joong-Sung (Research Institute of Industrial Technology, Korea Maritime University)
Ye, Byeong-Duck (Division of Maritime Transportation Science, Korea Maritime University)
Publication Information
Abstract
This paper presents a CPW phase shifter and shunt stub with air-bridge on a 10-${\mu}m$-thick oxidized porous silicon(OPS) substrate using surface micromachining. The line dimensions of the CPW phase shifter was designed with S-W-Sg = 100-30-400 ${\mu}m$. And the width and length of the air-bridge with "ㄷ“ shape were 100 ${\mu}m$ and 400-460-400 ${\mu}m$, respectively. In order to achieve low attenuation, stepped air-bridge CPW phase shift was proposed. The insertion loss of the stepped air-bridge CPW phase shift is more improved than that of no stepped air-bridge CPW phase shift. The measured phase characteristic of the fabricated CPW phase shifter is close to 180$^{\circ}$ over a very broad frequency range of 28 GHz. The measured working frequency of short-end series stub is 28.7 GHz and the return loss is - 20 dB. And the measured working frequency of short-end shunt stub is 28.9 GHz and the return loss is - 23 dB at midband. As a result, the pattering of stub in the center conductor of CPW lines can offer size reduction and lead to high density chip layouts.
Keywords
Citations & Related Records
연도 인용수 순위
  • Reference
1 K. Hettak, N. Dib, A. Omar, G. Y. Delisle, M. G. Stubbs, S. Toutain, 'A useful new class of miniature CPW shunt stubs and its impact on millimeter-wave integrated circuits', IEEE Microwave Theory Tech., Vol. 47, No. 12, pp. 2340-2349, Dec. 1999   DOI   ScienceOn
2 K. Hettak, T. Laneve, and M. G. Stubbs, 'Size-reduction techniques for CPW and ACPS structures', IEEE Microwave Theory Tech., Vol. 49, No. 11, pp. 2112-2116, Nov. 2001   DOI   ScienceOn
3 C. M Nam and Y. S. Kwon, 'Coplanar waveguides on silicon substrate with thick oxidized porous silicon (OPS) layer', IEEE Microwave and Guided Wave Lett., Vol. 7, No. 8, pp. 236-238, Aug. 1997   DOI   ScienceOn
4 R. J. Welty, S. H. Park, P. M. Asbeck, K. -P. S. Dancil, and M. J. Sailor, 'Porous silicon technology for RF integrated circuit applications', in Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 1998, pp. 160-163   DOI
5 R. L. Peterson and R. F. Drayton, 'Dielectric properties of oxidized porous silicon in a low resistivity substrate', in IEEE MTT-S Dig., 2001, pp. 765-768   DOI
6 권재우, 박정용, 이동인, 이종현, 김진량, 이해영, 심준환, '산화된 다공질 실리콘 기판 위에 제작된 MMIC용 Air-Bridge Interconnect를 가진 Coplanar Waveguides', 2001년도 대한전자공학회 통신 소사이어티 및 신호처리 소사이어티 추계합동 발표회 논문집, Nov. 2001, pp. 357-360
7 N. S. Barker and G. M. Rebeiz, 'Optimization of distributed MEMS phase shifters', in IEEE MTT-S Dig., 1999, pp. 299-302   DOI
8 A Borgioli, Y. Liu, A. S. Nagra, and R. A. York, 'Low-loss distributed MEMS phase shifter', IEEE Microwave and Guided Wave Lett., Vol. 10, No.1, pp. 7-9, Jan. 2000   DOI   ScienceOn
9 S. Iordanescu, G. Bartolucci, S. Simion, and M. Dragoman, 'Coplanar waveguide stub/filters on thin membranes and standard substrates', in IEEE MTT-S Dig., 1997, pp. 357-360   DOI
10 J. Buechler, E. Kasper, P. Russer, and K Strohm, 'Silicon high-resistivity-substrate mlli-meter-wave technology', IEEE Microwave Theory Tech., Vol. MTT-34, pp. 1516-1521, Dec. 1986   DOI
11 C. Warns, W. Menzel, and H. Schumacher, 'Transmission lines and passive elements for multilayer coplanar circuits on silicon', IEEE Microwave Theory Tech, Vol. 46, No.5, pp. 616-622, May. 1998   DOI   ScienceOn
12 A. C. Reyes, S. M. El-Ghazaly, S. Dorn, M. Dydyk, and D. K. Schroder, 'Silicon as a microwave substrate', in IEEE MTT-S Dig., 1994, pp. 1759-1762   DOI