• Journal of Korean Society of Coastal and Ocean Engineers
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• v.20 no.4
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• pp.372-389
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• 2008

In this study, we formed a detailed grid at the estuary area of the Nakdong and collected the surface sediments. Particle size analysis and comparison with existing data were conducted to investigate the characteristics of seasonal and long-term changes in the sediments. As a result of investigation, the distribution of the sediments showed a great change per season and was greatly influenced by the quantity of outfall discharge at the Nakdong estuary barrier and the incident wave climate. The sandy sediments showed dominant movement toward the front of Jinwoodo west of the estuary area of the Nakdong due to the influence of the ENE wave, the annually-dominant wave. And the muddy sediments showed deposition by being moved toward the deep open sea along with a current. The present conditions of the sediments at the estuary area of the Nakdong showed great differences from the results of previous studies.

• International Journal of Aeronautical and Space Sciences
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• v.14 no.2
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• pp.122-132
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• 2013

In this research the development of unstructured grid discretization solution techniques is presented. The purpose is to describe such a conservative discretization scheme applied for experimental validation work. The objective of this paper is to better establish the effects of mesh generation techniques on velocity fields and particle deposition patterns to determine the optimal aerodynamic characteristics. In order to achieve the objective, the mesh surface discretization approaches used the VLA prototype manufacturing tolerance zone of the outer surface. There were 3 schemes for this discretization study implementation. They are solver validation, grid convergence study and surface tolerance study. A solver validation work was implemented for the simple 2D and 3D model to get the optimum solver for the VLA model. A grid convergence study was also conducted with a different growth factor and cell spacing, the amount of mesh can be controlled. With several amount of mesh we can get the converged amount of mesh compared to experimental data. The density around surface model can be calculated by controlling the number of element in every important and sensitive surface area of the model. The solver validation work result provided the optimum solver to employ in the VLA model analysis calculation. The convergence study approach result indicated that the aerodynamic trend characteristic was captured smooth enough compared with the experimental data. During the surface tolerance scheme, it could catch the aerodynamics data of the experiment data. The discretization studies made the validation work more efficient way to achieve the purpose of this paper.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.23-23
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• 2011

Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.

• Journal of Korea Water Resources Association
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• v.40 no.9
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• pp.723-734
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• 2007

This study was to investigate the settling velocity which is an important factor for the prediction of cohesive deposition under the various densities of particle and dissolved ion addition$(Na^+,\;Cl^-,\;OH^-,\;H^+)$ in rivers, ports, reservoirs and lakes. Settling velocity of suspended fine particles in still water was measured with a pressure sensor (maximum 10 mbar). At the initial concentration of 20g/l of alumina and quartz the average settling velocities were high due to the aggregation behaviour of particles. At this point it was 0.185 mm/s (alumina) and 0.022 mm/s (quartz). Above this initial concentration it was on the decrease owing to the hindered settling. The higher the salinity is, the faster the settling velocity of alumina and quartz is. Furthermore, in an acid condition the average settling velocity of alumina was on the decrease. In an alkaline water, which causes strong flocculation, the average settling velocity of alumina it was observed on the increase. However, in an alkaline medium the low average settling velocity of quartz powder was measured.

• Proceedings of the KIEE Conference
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• 1991.07a
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• pp.753-756
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• 1991

This paper aimed to analyse dose sensitivity to the controllable parameters of in-door radon $(^{222}Rn)$ and its decay products(Rn-D) by applying the input-output linear system theory. Physical behaviors of $^{222}Rn$ & Rn-D were analyzed in terms of $^{222}Rn$ gas generation, -migation and - infiltration to indoor environments, and the performance output-function(i.e. mean dose equivalent to Tracho-Bronchial(TB) lung region was assessed to the following ranges of the controllable parameters; a) the ventilation rate constant $({\lambda}_v)$ : $0{\sun}500[h^{-1}]$. b) the attachment rate constant$({\lambda}_a)$ : 0-500 $[h^{-1}]$. c) deposition rate constant $({\lambda}{_{d}^{u}})$: 0-50$[h^{-1}]$. A linear input-output model was reconstructed from the original models in literatures, as follows, which was modified into the matrices consisting of 111 nodal equations. a) indoor ${222}Rn$ & Rn-D Behaviour: jacobi- Porstendorfer- Bruno model. b) lung dosimerty : Jacobi-Eisfeld model. Some of the major findings, which identify the effectiveness of this model, were as follows. a) ${\lambda}_v$ is most effective, dominant controllable parameters in dose reduction, if mechanical ventilation is applied. b) ${\lambda}_v$, depending on the air particle-concentration, reduces the dose somewhat within ${\lambda}_v$<1 $h^{-1}R range. However, the dose increases conversely, ${\lambda}_v$>1 $h^{-1}R range range. c) ${\lambda}{_{d}^{4}}$ reduces the dose linearly as ${\lambda}_v$ dose. Such dose(z-axis) sentivities are shown with three-dimensional plots whoes x,y-axes are combined 2out the 3 parameter${\lambda}_v{\lambda}_s,\;{\lambda}_d^s$.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.4
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• pp.1-8
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• 2005

Plasma researches using parallel-plate electrodes are widely used in semiconductor application such as etching and thin film deposition. Therefore, a quantitative understanding and control of plasma behavior are becoming increasingly necessary because their important applications and simulation techniques have been actively carried out in order to solve such problems above. In this paper, we developed a two-dimensional(2D) self-consistent fluid model, because 2D models can deal with real reactor geometries. The fluid model is based on particle continuity equations for taking account of an electrode system in a cylindrical geometry. An pure Ar gas was used at 500[mTorr] and radio-frequency (13.56(MHz)). Four models were simulated under the different electrode geometries which have chamber widths of 5.25, 6.0, 8.0, and 10.0[cm] and we compared their results with each other. Plasma uniformity and a do self-bias voltage were also discussed.

• Progress in Superconductivity
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• v.9 no.1
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• pp.96-101
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• 2007

[ $YBa_2Cu_3O_{7-{\delta}}$ ] films have been prepared on $LaAlO_3$ (100) single-crystal substrates by a metalorganic deposition using dichloroacetate precursors (DCA-MOD). Calcination conditions were varied in order to optimize the microstructure and the superconducting properties of YBCO film. Coated films were calcined at various temperatures ranging from $400{\sim}700^{\circ}C$ in flowing humid oxygen atmosphere. Ramping rate to calcination tempertures was $2.22^{\circ}C/min$. Conversion heat treatment was performed at $800^{\circ}C$ for 2 h in flowing Ar gas containing 1000 ppm oxygen with a humidity of 9.45%. Observations of surface and cross sectional SEM microstructure showed that the particle size in the calcined film increased in the range of 100-200 nm with heating rate and the calcination temperature. SEM EDS analysis showed that 13 a/o of chlorine was contained in the calcined film. It was also observed that the porosity increased with the heating rate and temperature. Porous microstructure was developed when YBCO films were prepared using porous calcined film. Dense microstructure and high $J_c$ over $1\;MA/cm^2$ was obtained when calcination was carried out at the temperature of $500^{\circ}C$ with a heating rate of $2.22^{\circ}C/min$.

• Korean Journal of Soil Science and Fertilizer
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• v.15 no.4
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• pp.207-212
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• 1982

Soils and sediments have been uniquely tagged by radioactive isotopes as a result of nuclear test explosions in the 1950's and 1960's. Fallout $^{137}Cs$ strongly fixed to fine soil particles, was measured in sediment profiles in Larto Lake to calculate the sedimentation rate as a time dependence. The Lake sediment profiles indicated an average rate of 1.6 to 3.1 cm/yr of sediment deposition since 1958. The rate of sediment depositions clearly decreased with time. Particle size distribution in sediment was reflected almost fine particles in lake.

• Journal of Korean Society for Atmospheric Environment
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• v.16 no.5
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• pp.487-497
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• 2000

Spring time is a favorable season to be easily observed the Yellow Sand phenomenon in East Asia. In particular most of the phenomenon tend to occur in April. However, Yellow Sand phenomenon was observed from almost the whole country of Korea in winter of 1966, 1977 and 1999. The features of the synoptic weather pattern in the source regions, air stream flow between the source region and Korea, the measurement of TSP concentration, aerosol size distribution, and chemical composition of snow samples associated with Yellow Sand phenomenon were investigated. The result showed the characteristic evolutionary feature of the synoptic system associated with Yellow Sand phenomena, that is, a strong low level wind mobilized the dust within 2 or 3 days before Yellow Sand phenomenon being observed in Seoul. The wind was remarkably intensified in the source region on January 24, 1999 under the strong pressure gradient, A trajectory analysis showed that the Yellow Sand particle could be reached to Korea within 2 days from the source region, Gobi desert, through Loess plateau and Loess deposition region. The TSP concentration at the top of Kwanak mountain during the Yellow Sand phenomenon is abruptly increasing than the monthly mean concentration. The size resolved number concentration of aerosols ranging from 0.3 to 25${\mu}{\textrm}{m}$ was analyzed during Yellow Sand episode. It was evident that aerosols were distinguished by particles in the range of 2-3 ${\mu}{\textrm}{m}$ to result in the abrupt increase in January 1999, After Yellow Sand phenomenon, there was heavy snow in Seoul. By the analysis of snow collected during that time, it was observed that both the Ca(sup)2+ concentration and pH were increased abnormally compared to those in the other winter season.

• Journal of Powder Materials
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• v.18 no.2
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• pp.112-121
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• 2011

This study investigated the effect of solvent on the fabrication of Ni-free Fe-based alloy nano powders by employing the PWE (pulsed wire evaporation) in liquid and compared the alloy particles fabricated by three different methods (PWE in liquid, PWE in Ar, plasma arc discharge), for high temperature oxidation-resistant metallic porous body for high temperature soot filter system. Three different solvents (ethanol, acetone, distilled water) of liquid were adapted in PWE in liquid process, while X-ray diffraction (XRD), field emission scanning microscope (FE-SEM), and transmission electron microscope (TEM) were used to investigate the characteristics of the Fe-Cr-Al nano powders. The alloy powder synthesized by PWE in ethanol has good particle size and no surface oxidation compared to that of distilled water. Since the Fe-based alloy powders, which were fabricated by PWE in Ar and PAD process, showed surface oxidation by TEM analysis, the PWE in ethanol is the best way to fabricate Fe-based alloy nano powder.