• 방사성폐기물학회지
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• 제14권4호
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• pp.321-329
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• 2016

가상의 심층처분 부지의 지하수 유동 모의 결과를 통해 처분 심도에 위치하는 처분공 지점에서의 지하수 유동량 및 해당 지점에서 지표 환경까지 지하수가 유동하는 경로의 거리와 경로를 통과하는데 걸리는 시간에 대한 수량적, 공간적 분포를 분석하여 그 결과를 처분공의 위치 결정에 이용할 수 있는 방안을 제시하였다. 지하수 유동량은 처분공 위치에서 계산된 지하수위를, 유동 거리와 경과 시간은 입자 추적 기법(particle tracking)을 이용하여 계산하였다. 지하수 유동량 및 유동 거리와 경과 시간의 공간적 분포를 이용하여 처분시설의 성능을 유지하는데 상대적으로 유리한 위치를 선별하고 특정한 제한 조건이 주어진 경우 제외되어야 하는 처분공 위치를 결정하여 처분공 배치에 이용할 수 있은 방안을 제시하였다. 또한 세 가지 정보를 함께 고려하여, 추가적인 처분공의 위치를 선정할 필요가 있을 경우 보다 유리한 확장 방향을 제시할 수 있는 방안도 논의되었다. 처분 심도에서의 지하수 유동 정보를 활용하여 처분공의 배치 방안을 결정하는 것은 처분시설의 성능 및 안전성 확보를 위해 기여할 수 있을 것으로 생각된다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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• pp.21-24
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• 2001

We studied aluminum cluster deposition using molecular dynamics simulation. We investigated the variations of the cluster momentum and the impulse force during collisions, and found that the close-packed cluster impact has some of properties of the single particle collision and the linear chain collisions. We also simulated the series of energetic cluster deposition with energy Per atom. When energy Per atom in cluster has some eV rather than very low, the intermixing occurred easily in growth film and we can obtain a good film without subsequent annealing process.

• 한국입자에어로졸학회지
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• 제6권3호
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• pp.131-138
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• 2010

Flexible electronics are the electronics on flexible substrates such as a plastic, fabric or paper, so that they can be folded or attached on any curved surfaces. They are currently recognized as one of the most innovating future technologies especially in the area of portable electronics. The conventional vacuum deposition and photolithographic patterning methods are well developed for inorganic microelectronics. However, flexible polymer substrates are generally chemically incompatible with resists, etchants and developers and high temperature processes used in conventional integrated circuit processing. Additionally, conventional processes are time consuming, very expensive and not environmentally friendly. Therefore, there are strong needs for new materials and a novel processing scheme to realize flexible electronics. This paper introduces current research trends for flexible electronics based on (a) nanoparticles, and (b) novel processing schemes: nanomaterial based direct patterning methods to remove any conventional vacuum deposition and photolithography processes. Among the several unique nanomaterial characteristics, dramatic melting temperature depression (Tm, 3nm particle~$150^{\circ}C$) and strong light absorption can be exploited to reduce the processing temperature and to enhance the resolution. This opens a possibility of developing a cost effective, low temperature, high resolution and environmentally friendly approach in the high performance flexible electronics fabrication area.

• Bulletin of the Korean Chemical Society
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• 제33권10호
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• pp.3331-3337
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• 2012

Ru-modified Pt nanoparticles of various sizes on platelet carbon nanofiber toward methanol oxidation were investigated in terms of particle size effect. The sizes of Pt nanoparticles, prepared by polyol method, were in the range of 1.5-7.5 nm and Ru was spontaneously deposited by contacting Pt nanoparticles with the Ru precursor solutions of 2 and 5 mM. The Ru-modified Pt nanoparticles were characterized using transmission electron microscopy, X-ray photoelectron spectroscopy and cyclic voltammetry. The methanol oxidation activities of Ru-modified Pt nanoparticles, measured using cyclic voltammetry and chronoamperometry, revealed that when the Pt particle size was less than 4.3 nm, the mass specific activity was fairly constant with an enhancement factor of more than 2 at 0.4 V. However, the surface area specific activity was maximized on Pt nanoparticles of 4.3 nm modified with 5 mM Ru precursor solution. The observations were discussed in terms of the enhancement of poison oxidation by Ru and the population variation of Pt atoms at vertices and edges of Pt nanoparticles due to selective deposition of Ru on the facets of (111) and (100).

• 한국입자에어로졸학회지
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• 제11권4호
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• pp.93-98
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• 2015

Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.

• Journal of Radiation Protection and Research
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• 제28권4호
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• pp.353-360
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• 2003

The concentration of $^{137}Cs$, the particle size, and the contents of TOC, H, N and S were measured for sediments collected in the adjacent sea to Yangnam, Korea. The concentrations of $^{137}Cs$ in sediments are in the range of $^{137}Cs$ for sediments strongly depend on particle size and TOC content of sediments. The results of multiple regression analysis suggest that humic substances may have great influence on the deposition of $^{137}Cs$ in sediment.

• Journal of Advanced Marine Engineering and Technology
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• 제20권5호
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• pp.93-102
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• 1996

Laser-induced plume and laser-target interaction during pulsed laser deposition are demonstrated for a lead zirconate titanate (PZT). A KrF excimer laser (wavelength 248nm) was used and the laser was pulsed at 20Hz, with nominal pulse width of 20ns. The laser fluence was~$16J/cm^2,$ with 100mJ per pulse. The laser-induced plasma plume for nanosecond laser irradiation on PZT target has been investigated by optical emission spectra using an optical multichannel analyzer(OMA) and by direct observation of the plume using an ICCD high speed photography. OMA analysis showed two distinct ionic species with different expansion velocities of fast or slow according to their ionization states. The ion velocity of the front surface of the developing plume was about $10^7$cm/sec and corresponding kinetic energy was about 100eV. ICCD photograph showed another kind of even slower moving particles ejected from the target. These particles considered expelled molten parts of the target. SEM morphologies of the laser irradiated targets showed drastic melting and material removal by the laser pulse, and also showed the evidence of the molten particle ejection. The physics of the plasma(plume) formation and particle ejection has been discussed.

• 대한기계학회논문집B
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• 제26권3호
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• pp.474-481
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• 2002

Fouling deposits due to surface-coated particles have been calculated using CFD techniques. The sticking probabilities of the surface-coated particles are also evaluated on the basis of an energy balance. The sticking probabilities of the deposit surface are also included in the prediction of the deposition occurring through the multiple impaction of particles with the deposit surface. The sticking probability of an impacting particle is expressed in terms of such parameters as particle viscosity, surface tension, impact velocity, impact angle and the thickness of the sticky layer on a particle. Particulate behavior around a tube in cross flow was studied using the Lagrangian approach. Three important parameters i.e. impact velocity, impact angle, and particulate concentration, were used in the prediction of deposition rate. The computational predictions were found to be in good agreement with the experimental data.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.253-253
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• 2013

본 실험에서는 전구체(Precursor)로 TMA (Tris methyl Aluminum)를 사용한 ALD (Atomic Layer Deposition)와 PEALD (Plasma Enhanced Atomic Layer Deposition) 공정 중 발생하는 입자(particle)를 ISPM (In-Situ Particle Mornitor)로 관찰하였다. ALD과 PEALD 공정에서 Al2O3 박막을 형성하기 위해서 반응가스(Reactant)로 각 각 H2O와 O2 plasma를 사용하였다. 이러한 차이로 인해서 진공 챔버(Vacuum Chamber) 안에서의 각기 다른 매커니즘에 의해서 Al2O3의 박막이 형성된다. 또한 공정 중 발생할 수 있는 파티클(Particle) 생성 매커니즘의 차이점을 가진다. ALD의 경우 전구체와 반응가스 사이에 충분한 purge가 이루어지지 않거나 dead zone이 존재할 경우 라인과 챔버 상에 잔류한 전구체와 반응가스에 의해서 불완전한 반응물로 파티클이 생성될 수 있다. 반면 PEALD 경우는 반응가스(Reactant)로 O2 plasma를 극부(localization)적으로 형성하여 박막을 형성하므로 반응가스의 잔류의 영향은 없으나 고에너지의 플라즈마에 의해서 물리적 영향에 의한 파티클이 생성될 수 있다. 공정 중 발생하는 입자(Particle)은 수율 감소와 박막의 물성에 영향을 미칠 수 있다. 그러므로 두 공정 중 발생하는 파티클을 ISPM으로 관찰하였고, 각 공정에서 형성된 박막의 두께 균일도, 표면의 형상(morphology), 화학적 조성 및 전기적 특성을 측정하였다. 이를 통해서 ALD와 PEALD의 파티클과 박막특성을 비교하였다.

• 한국수소및신에너지학회논문집
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• 제21권5호
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• pp.390-397
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• 2010

0.5wt% Ru/$\alpha-Al_2O_3$ catalysts are prepared by deposition-precipitation method for the preferential CO oxidation In order to investigate the effect of pH on the Ru dispersion and particle size, the pH of precursor solution is adjusted to between 5.5 and 9.5. 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared at the pH of 6.5 has high Ru dispersion of 17.9% and small particle size of 7.7nm. In addition, 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared at the pH 6.5 is easily reduced at low temperatures below $150^{\circ}C$ due to high dispersion of $RuO_2$ particle and shows high CO conversion over 90% in the wide temperature range between $100^{\circ}C$ and $160^{\circ}C$. Moreover, the deposition-precipitation is a feasible method to improve the Ru dispersion as compared to the impregnation method. The 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared by deposition-precipitation exhibits higher CO conversion than 0.5wt% Ru/$\alpha-Al_2O_3$ catalysts prepared by impregnation due to higher metal dispersion and better reducibility at low temperature.