• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• 제20권8호
• /
• pp.742-747
• /
• 2007

In 2-dimensional SCBF (Spherically Convergent Beam Fusion) device, the effect on neutron production rate of the grid cathode geometry was simulated. The motion of Particles was tracked using Monte Carlo Method including the atomic and molecular collision processes and potential distribution was calculated by Finite Element Method, Main processes of the discharge were the ionization of $D_2$ by fast $D_2^+\;ion$. As the number of cathode rings was small and the size of grid cathode decreased, the ion current increased and neutron production rate will also increase. The star mode discharge which is a very important characteristic in SCBF device, was confirmed by the ionization position.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 한국반도체및디스플레이장비학회 2006년도 춘계학술대회
• /
• pp.145-149
• /
• 2006

As the minimum feature size decreases, it is more difficult to control critical contaminant particles. For 16GB flash memory introduced by Samsung a few months ago, 50nm process was used and in this case, contaminant particles as small as 25nm should be control led. The particle beam mass spectrometer (PBMS) was developed to directly sample particles at pressures down to 100 mtorr. This instrument is sensitive to small particles (>5nm) produced in low concentrations ($>20cm^{-3}$). The PBMS has proved to be effect ive in measuring particles generated during semi-conductor fabrication processes, such as low-pressure chemical vapor deposition (LPCVD) of thin films. The operating principle of the PBMS and some measurement results are reviewed in this paper.

• Journal of Advanced Marine Engineering and Technology
• /
• 제23권4호
• /
• pp.523-532
• /
• 1999

This study is aimed to obtain fundamental knowledge of pulse laser welding phenomena the authors investigated the structure and composition of evaporated particles of Al alloys in air and in the Ar atmosphere during pulsed laser welding. The ultra-fine particles of 5 to 100nm diameter in a globular or irregular shape were formed in laser-induced plasma and the main structure was $MgAl_2O_4$ The composition of particles was ifferent depending on the power density of a laser beam; namely under the low power density conditions magnesium was predominant in the parti-cles while aluminium content increased with an increase in the power density. These results were attributed to evaporation phenomena of metals with different boiling points and latent heats of vaporization. On the other hand the number density of laser-induced plasma species was obtained by Saha's equation. it was confirmed that the number density depends upon the plasma tempera-ture and total pressures.

• Journal of Advanced Marine Engineering and Technology
• /
• 제23권4호
• /
• pp.514-522
• /
• 1999

The laser-induced plasma affects greatly on the results of welding process. moreover selective evaporation loss of alloying elements leads to change in chemical composition of weld metal as well as the mechanical properties of welded joint. this study was undertaken to obtain a fundamental knowledge of pulsed laser welding phenomena especially evaporation mechanism of different aluminum alloys. The intensities of molecular spectra of AlO and MgO were different each other depeding on the power density of a laser beam Under the low power density condition the MgO band spectrum was predominant in intensity while the AlO spectra became much stronger with an increase in the power density. These behaviors have been attributed to the difference in evaporation phenomena of Al and Mg metals with different boiling points and latent heats of vaporization. The time-averaged plasma temperature and electron number density were determined by spectroscopic methods and consequently the obtained temperature was $3,280{\pm}150K$ and the electron number density was $1.85{\times}10^{19}\;l/m^3$.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 한국해양공학회 2002년도 추계학술대회 논문집
• /
• pp.240-244
• /
• 2002

Mathematical and numerical modelling is proposed to evaluate the horizontal behavior of a wave-driven upwelling device and then, the horizontal behavior and the structural ability are inspected for the regular and irregular waves in East sea. Analysis results indicate that the buoy moves with the water particle and the pipe behaves cantilever beam. Also, it is found that the strength of pipe is sufficient to resist the internal moment

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• 제49권9호
• /
• pp.527-532
• /
• 2000

The performance of ac plasma display panels (PDP) is influenced strongly by the surface glow discharge characteristics on the MgO thin films. This paper deals with the surface glow discharge characteristics and some physical properties of MgO thin films prepared by reactive RF planar unbalanced magnetron sputtering in connection with ac PDP. The samples prepared with dc bias voltage of -10V showed lower discharge voltage and lower erosion rate byion bombardment than those samples prepared by conventional magnetron sputtering or E-beam evaporation. The main factor that improves the discharge characteristics by bias voltage is considered to be due to the morphology changes or crystal structure of the MgO thin film by ion bombardement during deposition process.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
• /
• pp.98-99
• /
• 2011

300 mm급 선형 이온원의 방전 간격에 따른 방전 및 이온빔 인출 특성 변화를 연구하였다. 방전 간격이 2 mm 에서 3 mm로 증가함에 따라 동일 방전 전압에서 방전 전류가 약 20% 증가하였으며, 이는 방전 공간 내 플라즈마 발생 증가에 의한 것임을 object oriented particle in cell 전산모사를 통해 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.239-239
• /
• 2010

Cobalt (Co) 박막은 낮은 저항과 우수한 열적 안정성에 의해 금속 배선공정에서 copper의 확산 및 산화를 방지하기 위해 사용된다. Co 박막을 증착하기 위해서는 유기화학 증착법이 많이 사용되고, 이를 위해 많은 Co 전구체들이 연구되어지고 있다. 본 연구에서는 $Co(hfac)_2$ 전구체의 플라즈마 및 반응가스에 따른 기상상태의 변화와 증착공정에서 발생되는 입자의 크기와의 상관관계를 연구하였다. 실험의 변수로 반응가스 ($H_2$, $H_2O$)와 플라즈마 파워 (0~50W)를 사용하였다. 또한 Co 전구체의 기상분해 및 반응을 분석을 위해 fourier transform infrared (FT-IR) spectroscopy를 사용하였다. 그리고 기상상태의 변화가 입자 형성에 끼치는 영향을 관찰하기 위해 저압에서 실시간으로 나노입자를 측정할 수 있는 장비인 particle beam mass spectrometer (PBMS)를 활용하였다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
• /
• pp.84-84
• /
• 2013

본 개발은 반도체 또는 디스플레이 공정상의 불량률을 최소화 하기 위하여 시작 되었다. PBMS를 이용하여 공정상에 발생하는 오염입자들을 모니터링하고자 하였으나 기존의 시스템은 크기, 감도, 교정등의 문제들로 현장적용에 무리가 있었던 것이 사실이다. 주식회사 이엘은 PBMS의 문제들을 개선 또는 제거하여 현장에 적용 가능하도록 하였으며 전용 프로그램을 개발하여 사용자의 편의성을 증대하였다.

• Laser Solutions
• /
• 제5권2호
• /
• pp.31-38
• /
• 2002

This paper describes the process of nanoparticle synthesis by laser ablation of consolidated microparticles. We have generated nanoparticles by high-power pulsed laser ablation of Al, Cu and Ag microparticles using a Q-switched Nd:YAG laser (wavelength 355 nm, FWHM 5 ㎱, fluence 0.8∼2.0 J/㎠). Microparticles of mean diameter 18∼80 ㎛ are ablated in the ambient air The generated nanoparticles are collected on a glass substrate and the size distribution and morphology are examined using a scanning electron microscope and a transmission electron microscope. The effect of laser fluence and collector position on the distribution of particle size is investigated. The dynamics of ablation plume and shock wave is analyzed by monitoring the photoacoustic probe-beam deflection signal. Nanosecond time-resolved images of the ablation process are also obtained by laser flash shadowgraphy. Based on the experimental results, discussions are made on the dynamics of ablation plume.