• Title/Summary/Keyword: Particle Mobility

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Development of Particle Deposition System for Cleaning Process Evaluation in Semiconductor Fabrication (반도체 세정 공정 평가를 위한 나노입자 안착 시스템 개발)

  • Nam, Kyung-Tag;Kim, Young-Gil;Kim, Ho-Joong;Kim, Tae-Sung
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.4
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    • pp.49-52
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    • 2007
  • As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using SMPS (Scanning Mobility Particle Sizer) and deposited on the wafer by electrostatic force. The Experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

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Comparison of Alpha Particle Signals with respect to Incident Direction onto n-Si:H pin diodes

  • Kim, Ho-Kyung;Gyuseong Cho;Hur, Woo-Sung;Lee, Wanno;Hong, Wan-Shick
    • Proceedings of the Korean Nuclear Society Conference
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    • 1996.05d
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    • pp.133-138
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    • 1996
  • For the application of hydrogenated amorphous silicon (a-Si:H) p-i-n structural diode as the alpha particle spectroscopy, the induced charge collection was simulated based on a relevant non-uniform charge generation model. The simulation was accomplished for two extreme cases of the incident direction of alpha particle, p-and n-side, respectively. As expected, for the complete charge collection, the hole collection should be severely considered due to its poor mobility and the full depletion bias required. For the comparison of signal corresponding to the detector configuration or structure, although n-i-p configuration shows a wider range of linearity to the energy, p-i-n configuration is more suitable in the viewpoint of linearity and signal value for the considering energy range.

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Aerosol Wall Loss in Teflon Film Chambers Filled with Ambient Air

  • Lee Seung-Bok;Bae Gwi-Nam;Moon Kil-Choo
    • Journal of Korean Society for Atmospheric Environment
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    • v.20 no.E1
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    • pp.35-41
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    • 2004
  • Aerosol wall loss is an important factor affecting smog chamber experiments, especially with chambers made of Teflon film. In this work, the aerosol wall loss was investigated in 2.5 and $5.8-m^3$ cubic-shaped Teflon film chambers filled with ambient air. The natural change in the particle size distribution was measured using a scanning mobility particle sizer in a dark environment. The rate of aerosol wall loss was obtained from the deposition theory suggested by Crump and Seinfeld (1981). The measured rates of aero-sol wall loss were In a good agreement with the theoretical and experimental values given by McMurry and Rader (1985), implying that the electrostatic effect enhances particle deposition on the chamber wall. The significance of aerosol wall loss correction was demonstrated with the photochemical reaction experiments using the ambient air.

Enhancement OLSR Routing Protocol using Particle Swarm Optimization (PSO) and Genrtic Algorithm (GA) in MANETS

  • Addanki, Udaya Kumar;Kumar, B. Hemantha
    • International Journal of Computer Science & Network Security
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    • v.22 no.4
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    • pp.131-138
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    • 2022
  • A Mobile Ad-hoc Network (MANET) is a collection of moving nodes that communicate and collaborate without relying on a pre-existing infrastructure. In this type of network, nodes can freely move in any direction. Routing in this sort of network has always been problematic because of the mobility of nodes. Most existing protocols use simple routing algorithms and criteria, while another important criterion is path selection. The existing protocols should be optimized to resolve these deficiencies. 'Particle Swarm Optimization (PSO)' is an influenced method as it resembles the social behavior of a flock of birds. Genetic algorithms (GA) are search algorithms that use natural selection and genetic principles. This paper applies these optimization models to the OLSR routing protocol and compares their performances across different metrics and varying node sizes. The experimental analysis shows that the Genetic Algorithm is better compared to PSO. The comparison was carried out with the help of the simulation tool NS2, NAM (Network Animator), and xgraph, which was used to create the graphs from the trace files.

A Study on the Particles Density Estimation in Seoul Metropolitan (서울시 미세먼지의 밀도 추정에 관한 연구)

  • Kim, Shin-Do;Kim, Chang-Hwan;Hwang, Ui-Hyun
    • Journal of Environmental Health Sciences
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    • v.34 no.2
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    • pp.131-136
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    • 2008
  • The variation of the particle size distribution and density as well as the chemical composition of aerosols is important to evaluate the particles. This study measured and analyzed airborne particles using a scanning mobility particle sizer (SMPS) system and an aerodynamic particle sizer (APS) at the University of Seoul during every season. The highest particle number concentration of airborne particles less than $0.9\;{\mu}m$, occurred in winter, while the highest particle number concentration of airborne particles more than $0.9\;{\mu}m$, occurred in spring. Mass concentration appeared highest at spring. Also, when we compared $\beta$-ray's mass concentration with calculated mass concentration by using the SMPS-APS system during each season, density of the winter is $1.92\;g/cm^3$, spring density is $1.64\;g/cm^3$, fall density is $1.57\;g/cm^3$. We found out that PM10 density was differ every season. However, while the calculated density is whole density for PM10 the density of each diameter was different. In this study the density estimation equation of the QCM cascade impactor measured mass concentration of each diameter.

The evaluation of diesel emission reduction characteristics by DOC in light-duty vehicle (소형디젤산화촉매의 배출가스 성능평가)

  • 엄명도;류정호;임철수
    • Transactions of the Korean Society of Automotive Engineers
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    • v.7 no.8
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    • pp.34-42
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    • 1999
  • In late 1997, the portion of registered light-duty diesel vehicle was 25.3% and its emission rate was 17.1% in Korea. Especially, diesel particulate matters(DPM) and NOx are hazardous air pollutants to human health and environment in urban area. The reduction technologies of exhaust emissions from diesel engines are improvement of engine combustion, fuel quality and development of diesel exhaust after treatment , In this study , a light-duty diesel oxidation catalyst(DOC) that is one of the diesel exhaust after treatment was made for performance evaluation and the emission characteristics were tested on CVS-75 mode. And the analysis of the particle size distribution with scanning mobility particle 100, 67.6% and 66.7, 10.0% for Pt and Pt-V catalyst .And for Pt catalyst, the PM increased 7.8% because of increasing sulfate but Pt-V catalyst reduced the PM to 23.0% . Test results of particle size distribution showed that peak values of number and mass densities are respectively 100∼200nm their distribution trend independent of vehicle speed.

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Comparison of Dustiness of Eleven Nanomaterials using Voltex Shaker Method (볼텍스쉐이커를 이용한 11개 나노물질의 분진날림 비교)

  • Lee, Naroo;Park, Jinwoo
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.28 no.3
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    • pp.273-282
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    • 2018
  • Objectives: Dustiness of nanomaterials is considered as exposure index of essential material. Research on dustiness of nanomaterial is needed to control exposure in workplaces. Method: Dustiness measurement using vortex shaker were installed in the laboratory. Nanomaterials, 1 g, was put in the glass test tube and shaked using vortex shaker. Aerosol dispersed was measured using scanning mobility particle sizer(SMPS) and optical particle counter(OPC). Mass concentration using PVC filter and cassette was measured and TEM grid sampling was conducted. Total particle concentration and size distribution were calculated. Image and chemical composition of particles in the air were observed using transmission electron microscopy and energy dispersive X-ray spectrometer. Eleven different test nanomaterials were used in the study. Results: Rank of mass concentration and particle number concentration were coincided in most cases. Rank of nanomateirals with low concentration were not coincided. Two types of fumed silica had the highest mass concentration and particle number concentration. Indium tin oxide, a mixture of indium oxide and tin oxide, had high mass concentration and particle number concentration. Indium oxide had very low mass concentration and particle number concentration. Agglomeration of nanoparticles in the air were observed in TEM analysis and size distribution. In this study, mass concentration and particle number concentration were coincided and two index can be used together. The range of dustiness in particle number concentration were too wide to measure in one method. Conclusion: Particle number concentration ranged from low concentration to high concentration depend on type of nanomaterial, and varied by preparation and amount of nanomaterial used. Further study is needed to measure dustiness of all nanomaterial as one reference method.

Investigation of the Optical and Cloud Forming Properties of Pollution, Biomass Burning, and Mineral Dust Aerosol

  • Lee Yong-Seop
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 2006.04a
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    • pp.55-56
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    • 2006
  • This thesis describes the use of measured aerosol size distributions and size-resolved hygroscopic growth to examine the physical and chemical properties of several particle classes. The primary objective of this work was to investigate the optical and cloud forming properties of a range of ambient aerosol types measured in a number of different locations. The tool used for most of these analyses is a differential mobility analyzer / tandem differential mobility analyzer (DMA / TDMA) system developed in our research group. To collect the data described in two of the chapters of this thesis, an aircraft-based version of the DMA / TDMA was deployed to Japan and California. The data described in two other chapters were conveniently collected during a period when the aerosol of interest came to us. The unique aspect of this analysis is the use of these data to isolate the size distributions of distinct aerosol types in order to quantify their optical and cloud forming properties. I used collected data during the Asian Aerosol Characterization Experiment (ACE-Asia) to examine the composition and homogeneity of a complex aerosol generated in the deserts and urban regions of China and other Asian countries. An aircraft-based tandem differential mobility analyzer was used for the first time during this campaign to examine the size-resolved hygroscopic properties of particles having diameters between 40 and 586 nm. Asian Dust Above Monterey (ADAM-2003) study was designed both to evaluate the degree to which models can predict the long-range transport of Asian dust, and to examine the physical and optical properties of that aged dust upon reaching the California coast. Aerosol size distributions and hygroscopic growth are measured in College Station, TX to investigate the cloud nucleating and optical properties of a biomass burning aerosol generated from fires on the Yucatan Peninsula. Measured aerosol size distributions and size-resolved hygroscopicity and volatility were used to infer critical supersaturation distributions of the distinct particle types that were observed during this period. The predicted CCN concentrations were used in a cloud model to determine the impact of the different aerosol types on the expected cloud droplet concentration. RH-dependent aerosol extinction coefficients are calculated at a wavelength of 550 nm.

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Urban Aerosol Number Concentration and Scattering Coefficient in Seoul, Korea, during Winter (서울지역 겨울철 대기 에어로졸의 수 농도 및 산란계수 분석)

  • Lee, Hyun-Hye;Kim, Jin Young;Lee, Seung-Bok;Bae, Gwi-Nam;Yum, Seong Soo
    • Particle and aerosol research
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    • v.6 no.2
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    • pp.91-103
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    • 2010
  • Size-segregated number concentration and scattering coefficient of urban aerosols were measured using an SMPS (scanning mobility particle sizer) and a nephelometer, respectively in Seoul, Korea, during the winter season of 2003. The average number concentrations of ultrafine particles (20~100 nm) and accumulation mode particles (100~600 nm) were $2,170\;particles\;cm^{-3}$ and $1,521\;particles\;cm^{-3}$, respectively. The scattering coefficient at the wavelength of 550 nm ranged from $62.6Mm^{-1}$ to $330.1Mm^{-1}$ and average value was $163.4Mm^{-1}$. The peak concentrations of ultrafine particles and accumulation mode particles were simultaneously recorded between 6:00 and 9:00 A.M., indicating the effect of vehicle emissions which are major air pollution sources in the urban atmosphere. On average, the number concentration of ultrafine particles was 1.4 times higher than that of accumulation mode particles, although it was a little higher during the morning peak time. The variation of aerosol scattering coefficient was in good agreement with that of accumulation mode particle number concentration rather than that of ultrafine particle number concentration.g coefficient was in good agreement with that of accumulation mode particle number concentration rather than that of ultrafine particle number concentration.

Comparison of Nano Particle Size Distributions by Different Measurement Techniques

  • Bae, Min-Suk;Oh, Joon-Seok
    • Journal of Korean Society for Atmospheric Environment
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    • v.26 no.2
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    • pp.219-233
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    • 2010
  • Understanding the Nano size particles is of great interest due to their chemical and physical behaviors such as compositions, size distributions, and number concentrations. Therefore, accurate measurements of size distributions and number concentrations in ultrafine particles are getting required because expected losses such as diffusion for the instrument system from ambient inlet to detector are a significant challenge. In this study, the data using the computed settling losses, impaction losses, diffusion losses for the sampling lines (explored different sampling line diameters, horizontal length, number of bending, line angles, flow rates with and without a bypass), and diffusion losses for the Scanning Mobility Particle Sizers are examined. As expected, the settling losses and impaction losses are very minor under 100 nm, however, diffusion loss corrections for the sampling lines and the size instrument make a large difference for any measurement conditions with high numbers of particles smaller mobility size. Both with and without the loss corrections, which can affect to size distributions and number concentrations are described. First, 80% or more of the smallest particles (less than 10 nm) can be lost in the condition of a flow rate of 0.3 liter per minute and the length of sampling line of 1.0 m, second, total number concentrations of measurements are quite significantly affected, and the mode structure of the size distribution changes dramatically after the loss corrections applied. With compared to the different measurements, statistically diffusion loss corrections yield a required process of the ambient particle concentrations. Based on the current study, as an implication, a possibility of establishing direct revelation mechanisms is suggested.