• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.946-949
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• 2002

Particulate contamination is known to be a significant cause of failures of removable storage media. In this work, The effect of particles on the surface damage of removable hard disk media was investigated. The particles of different materials and size were introduced to the head-disk interface using a particle injection system. It was found that the particles of particulate size and property serious damaged the media. This study showed that cleaning pad is effective for reducing particle contamination, except for the particles of specific size and property. As a means to removed the particles of specific size, the concept of using a stepped taper at the leading edge of the slider is proposed.

• 한국입자에어로졸학회지
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• 제14권4호
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• pp.181-189
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• 2018

In this study, the risk rates of different contamination sources of the contaminant in a minienvironment were analyzed through Computational Fluid Dynamics (CFD) simulation. The airflow pattern characteristics can only predict the qualitative variation of contaminant concentration, but cannot evaluate the quantitative variations in the risk rate of sources. From the results, the ambient contamination sources mainly affect wafers in the Front Opening Unified Pod (FOUP), whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from contaminants transferred from the Fan Filter Unit (FFU). However, this system is unable to protect the wafers on the robot arm from internal contaminants and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.

• 대한기계학회논문집B
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• 제31권6호
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• pp.522-530
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• 2007

The practical studies on the method of particle contamination control for yield enhancement in the cleanroom were carried out. The method of the contamination control was proposed, which are composed of data collection, data analysis, improvement action, verification, and implement control. The partition check method and the composition analysis for data collection and data analysis were respectively used in the main board and the cellular phone module production lines. And these methods were evaluated by the variation of yield loss between before and after improvement action. In case that the partition check method was applied, the critical process step was selected and yield loss reduction through improvement actions was observed. While in case that the composition analysis was applied, the critical sources were selected and yield loss reduction through improvement actions was also investigated. From these results, it is concluded that the partition check and the composition analysis are effective solutions for particle contamination control in the cleanroom production lines.

• 상하수도학회지
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• 제23권1호
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• pp.97-105
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• 2009

Analysis was done on the particle size distribution of sediments flown into Saemangeum from the Mankyung and Dongjin River. The organic pollutants and heavy metal existing in the sediments were analyzed, which was further used to study the properties of pollution in the sediments according to the particle size distribution. Conclusions shown below were made from these analyses. The particle size distribution showed a big difference between the upriver areas of Mankyung and Dongjin River. Particles under $75{\mu}m$ showed to be around 85% at Dongjin River, while it showed to be around 70% at Mankyung River. This kind of distribution in particle size concluded in greatly affecting the contamination density of the sediments. From the analysis done on the soil type of sediments, deposition in Mankyung River categorized into Silty loam and Sandy loam, where Silty loam covered most of area and deposition in Dongjin River categorized into Sand, Loamy sand, Silty loam, Sandy loam. Considering the weight ratio, the density of contamination of the sediments by particle size at Dongjin and Mankyung River has been analyzed to show that organic pollutants and heavy metals occupy more than 70% of the whole contamination in the range under the particle size of $75{\mu}m$.

• 한국전기전자재료학회논문지
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• 제22권2호
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• pp.114-118
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• 2009

PVA (polyvinyl alcohol) brush cleaning method is a typical cleaning method for semiconductor cleaning process especially post-CMP cleaning. PVA brush contacts with the wafer surface and abrasive particle, generating the contact rotational torque of the brush, which is the removal mechanism. The brush rotational torque can overcome theoretically the adhesion force generated between the abrasive particle and wafer by zeta potential. However, after CMP (chemical mechanical polishing) process, many particles remained on the wafer because the brush was contaminated in previous post-CMP cleaning step. The abrasive particle on the brush redeposits to the wafer. The level of the brush contamination increased according to the cleaning run time. After cleaning the brush, the level of wafer contamination dramatically decreased. Therefore, the brush cleanliness effect on the cleaning performance and it is important for the brush to be maintained clearly.

• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.77-82
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• 2021

This numerical study focuses on the analysis of fume particle dispersion characteristics over the surface of target workpiece in laser micro-hole machining process. The effects of oblique stagnation flow over fume generating machining point are examined by carrying out a series of three-dimensional random particle simulations along with probabilistic particle generation model and particle drag correlation of low Reynolds number. Present computational model of fume particle dispersion is found to be capable of assessing and quantifying the fume particle contamination in precision hole machining which may influenced by different types of air flow patterns and their flow intensity. The particle size dependence on dispersion distance of fume particles from laser machining point is significant and the effects of increasing flow oblique angle are shown quite differently when slot blowing or slot suction flows are applied in micro-hole machining.

• 대한기계학회논문집B
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• 제29권7호
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• pp.795-804
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• 2005

As the flying height of a slider in a hard disk drive decreases, the slider and disk are more likely to come in contact and generate contamination particles. Since particle contamination can cause serious problems including thermal asperity, it must be prevented to increase storage capacity. When particles are generated in a HDD, particles can be charged and have a few number of elementary charges. In this paper, the size distribution of particles and electrical current due to particle according to the disk rotational speed were measured. Also, the average number of elementary charges was calculated from experimental data. SEM images of particles were obtained by using a particle sampler designed in our laboratory.

• 반도체디스플레이기술학회지
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• 제19권4호
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• pp.51-58
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• 2020

Many types of optical plastic films are essential in optoelectronics display unit fabrication and it is important to develop high precision laser cutting methods of optical films with extremely low level of film surface contamination by fume particles. This study investigates the effects of suction and blowing air motions with air flow misalignment in removing fume particles from laser cut line by employing random particle trajectory simulation and probabilistic particle generation model. The computational results show fume particle dispersion behaviors on optical film under suction and blowing air flow conditions. It is found that suction air flow motion is more advantageous to blowing air motion in reducing film surface contamination outside designated target margin from laser cut line. While air flow misalignment adversely affects particle dispersion in blowing air flows, its effects become much more complicated in suction air flows by showing different particle dispersion patterns around laser cut line. It is required to have more careful air flow alignment in fume particle removal under suction air flow conditions.

• 대한기계학회논문집B
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• 제29권5호
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• pp.599-608
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• 2005

Controlling particle contamination is important to increase storage capacity as the flying height of a slider in a hard disk drive decreases. Since precise detection and analysis of particles are primary steps of particle control in a HDD, many researchers have used sampling methods. In this paper, we newly designed a particle sampler and conducted performance evaluation of the sampler. Also, we conducted particle sampling from the HDD using the particle sampler and analysis of sampled particles by SEM and AES. Experimental results show that the particles generated by the slide-disk interaction mainly came from the disk surface.

• 한국정밀공학회지
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• 제21권6호
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• pp.102-108
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• 2004

This study addresses the contamination sensitivity test of a typical fuel pump for automotive vehicle. The objective of the study is to find the contamination sensitivity coefficient of fuel pump on specific contaminant particle sizes so that optimal fuel filter could be selected. To achieve the objective, the degradation of discharge flow rate of fuel pump was measured under the experiments of various contaminants size ranges of ISO test dust up to 80${\mu}{\textrm}{m}$. The fundamental theory of contamination sensitivity was introduced and the contamination sensitivity coefficients were estimated using the experimental data. Maximum contamination sensitivity coefficient of $5{\times}10^{-6}$ L/minㆍEa was found on the contaminant size range of 40${\mu}{\textrm}{m}$∼50${\mu}{\textrm}{m}$. The magnified picture of the surface of vane disc revealed that the abrasive wear was the principal cause of discharge flow rate degradation. Hence, this study revealed that high efficiency filter on the contaminant particle size range of 30${\mu}{\textrm}{m}$∼70${\mu}{\textrm}{m}$ especially should be used to maintain the service lift of the fuel filter.