• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.241-241
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• 2016

반도체 선폭이 20 nm급까지 감소함에 따라 기존에 수율에 문제를 끼치던 공정 외부 유입 입자뿐만 아니라, 공정 도중에 발생하는 수~수십 나노의 작은 입자도 수율에 악영향을 끼치게 되었다. 이에 따라 저압, 극청정 조건에서 진행되는 공정 중 발생하는 입자를 실시간으로 모니터링 할 수 있는 장비에 대한 수요가 발생하고 있다. Particle beam mass spectrometer (PBMS)는 이러한 요구사항을 만족할 수 있는 장비로 100 mtorr의 공정 조건에서 5 nm 이상의 입자의 직경별 수농도를 측정할 수 있는 장비이다. PBMS로 입자의 수농도를 측정하기 위해서는 PBMS 전단에서 입자를 중앙으로 집속할 필요가 있다. 공기역학렌즈는 PBMS 전단에서 입자를 집속시키기 위해 일반적으로 널리 사용되고 있는 장비로 여러 개의 오리피스로 이루어져 있다. 공기역학렌즈를 지나는 수송 유체와 입자는 이러한 연속 오리피스를 거치면서 팽창과 수축을 반복하며, 관성력의 차이로 인해 입자가 중앙으로 집속된다. 그러나 기존 공기역학렌즈는 고정된 직경의 오리피스를 사용하기 때문에 설계된 공정조건 이외에는 입자의 집속효율이 감소한다는 단점을 지닌다. 따라서 공정조건이 바뀔 경우 공기역학렌즈를 교체해야 되며, 진공이라는 환경하에서 이러한 교체는 많은 시간과 노력을 요구로 한다. 본 연구에서는 이러한 공기역학렌즈의 문제점을 해결하기 위해 다양한 공정조건에서 교체 없이 사용할 수 있는 새로운 형태의 직경 가변형 공기역학렌즈인 조리개형 공기역학렌즈를 제안하였다. 기존 연구를 통해 조리개형 공기 역학 렌즈가 다양한 압력 범위 내에서 나노입자를 성공적으로 집속할 수 있음을 보였지만, 장비를 상용화하기 위해서는 사용자가 좀 더 쉽게 렌즈직경을 결정 할 수 있어야 한다. 이에 본 연구에서는 조리개형 렌즈의 중공 직경에 따른 입자 집속 특성을 평가하였으며, 최종적으로 압력과 집속하고자 하는 직경에 따라 렌즈 중공 직경을 결정할 수 있게 해주는 데이터 베이스를 제작하였다.

• Journal of Environmental Science International
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• v.21 no.1
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• pp.1-9
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• 2012

A thermal-optical transmittance carbon analyzer has been developed to determine particulate organic (OC) and elemental (EC) carbon. Several analysis factors affecting the sensitivity of OC and EC determination were investigated for the carbon analyzer. Although total carbon (TC) is usually consistent in the determination, OC and EC split is sensitive to adopted analysis protocol. In this study the maximum temperature in oxygen-free He in the analysis was examined as a main cause of the uncertainty. Prior to the sensitivity analysis consistency in OC-EC determination of the carbon analyzer and the uniformity of carbonaceous aerosol loading on a sampled filter were checked to be in acceptable range. EC/TC ratios were slightly decreased with increasing the maximum temperature between $550-800^{\circ}C$. For the increase of maximum temperature from $500^{\circ}C$ to $800^{\circ}C$, the EC/TC ratio was lowered by 4.65-5.61% for TC loading of 13-44 ${\mu}g/cm^2$ with more decrease at higher loading. OC and EC determination was not influenced by trace amount of oxygen in pure He (>99.999%), which is typically used in OC and EC analysis. The facing of sample loaded surface to incident laser beam showed negligible influence in the OC-EC split, but it caused elevated PC fraction in OC for forward facing relative to backward facing.

• International Journal of Highway Engineering
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• v.8 no.1 s.27
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• pp.139-152
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• 2006

Many experimental and numerical approaches have been developed to evaluate paving materials and to predict pavement response and distress. Micromechanical simulation modeling is a technology that can reduce the number of physical tests required in material formulation and design and that can provide more details, e.g., the internal stress and strain state, and energy evolution and dissipation in simulated specimens with realistic microstructural features. A clustered distinct element modeling (DEM) approach was implemented In the two-dimensional particle flow software package (PFC-2D) to study the complex behavior observed in asphalt mixture fracturing. The relationship between continuous and discontinuous material properties was defined based on the potential energy approach. The theoretical relationship was validated with the uniform axial compression and cantilever beam model using two-dimensional plane strain and plane stress models. A bilinear cohesive displacement-softening model was implemented as an intrinsic interface and applied for both homogeneous and heterogeneous fracture modeling in order to simulate behavior in the fracture process zone and to simulate crack propagation. A disk-shaped compact tension test (DC(T)) with heterogeneous microstructure was simulated and compared with the experimental fracture test results to study Mode I fracture. The realistic arbitrary crack propagation including crack deflection, microcracking, crack face sliding, crack branching, and crack tip blunting could be represented in the fracture models. This micromechanical modeling approach represents the early developmental stages towards a 'virtual asphalt laboratory,' where simulations of laboratory tests and eventually field response and distress predictions can be made to enhance our understanding of pavement distress mechanisms, such its thermal fracture, reflective cracking, and fatigue crack growth.

• Journal of Environmental Science International
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• v.13 no.7
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• pp.681-687
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• 2004

This study was focused on the manufacturing method of a dewatering aid, which would reduce the water content of the sludge cake by enhancing the dewaterability of sewage sludge. The pretreatment technology for sludge by using radiation and among diverse discarded resources were starfish selected as the material to manufacture the dewatering aid. Starfish went through the process of washing, drying, and pulverizing. The starfish powder made in this process was applied to the digested sludge generated at the sewage treatment plant of D City, and its effects were investigated. The starfish powder that was 300 ${\mu}m$ in particle size was added to the irradiated digested sludge. After the application of the condensation process, the sludge with the starfish powder added was dewatered using the belt press and centrifuge, which were the traditional pressure dewatering devices. As the result, it reduced the water content of the sludge 20% higher than the dewatered cake with no dewatering aid added and irradiation. When the powder was added, it contributed to less use of the coagulant added. The more irradiation dose, the lower water content did the dewatered cake have and the more coagulant was needed for condensation, which seems to be a disadvantage that can be compensated for by the starfish dewatering aid. A small-scaled treatment of the study to a radiation technology and dewatering aid using a discarded resource confirmed the potential of dewaterability. Based on the results saying that the dewatering aid and radiation technology can improve dewatering effects using the traditional dewatering devices, this pretreatment technology will be expected to be applied to sewage treatment plants.

• Journal of Korean Society for Atmospheric Environment
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• v.17 no.E1
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• pp.1-7
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• 2001

The elemental characteristics of atmospheric aerosols were investigated as a function of particle size and water solubility. The aerosol particles were samples at 12 individual size ranges between 0.01 and 30㎛. Collected aerosol particles were separated into both soluble and insoluble components. The concentrations of 15 elements in both components were determined by a PIXE analysis using a 2.0 MeV-proton beam. In general, the mass size distribution of particulate matter was represented as a bimodal distribution. The maximum rations of S in July and December were 5.5 and 3.8 %, and they appeared in the size range of 0.47∼1.17㎛(stage No. 6 or 7) . The ratios of a S at non-separated size were 3.1 and 2.2 % in July and December, respectively, On the other hand, the maximum rations of Si in July and December were 7.0 and 5.4% and they appeared in the size range of 5.1∼30㎛(stage No. 0∼2). The ratios of Si at the non-separated size were 2.1 and 1.8% in July and December, respectively, The mass diameter of 12 elements ranged between 0.59㎛ of S and 3.20 of Fe. More than 90% of atmospheric aerosols consisted of the light elements such as C, N, O, H and Al. The soluble component was dominant in the smaller size range and the insoluble component in the larger size range. Large portions of Si. Ti and Fe existed in insoluble state. By contrast, S, Cl, Ca, Zn and Br were dissolved in water.

• Molecules and Cells
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• v.25 no.2
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• pp.272-278
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• 2008

The carbon-ion beam (CIB) generated by the heavy-ion medical accelerator in Chiba (HIMAC) was targeted to 7-day-old rice. Physiological parameters such as growth, and gene expression profiles were examined immediately after CIB irradiation. Dose-dependent growth suppression was seen three days post-irradiation (PI), and all the irradiated plants died by 15 days PI. Microarray (Agilent rice 22K) analysis of the plants immediately after irradiation (iai) revealed effects on gene expression at 270 Gy; 353 genes were up-regulated and 87 down-regulated. Exactly the same set of genes was affected at 90 Gy. Among the highly induced genes were genes involved in information storage and processing, cellular processes and signaling, and metabolism. RT-PCR analysis confirmed the microarray data.

• Applied Chemistry for Engineering
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• v.18 no.2
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• pp.173-177
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• 2007

EB irradiation method was used to prepare polyvinyl alcohol (PVA) capped silver nanoparticles under various conditions including PVA concentration, $AgNO_3$ concentration, IPA concentration, and EB dosage. The increase in the distribution of particles size was observed with an increase in the concentrations of PVA, $AgNO_3$, IPA, and EB dosage. $AgNO_3$ concentration, IPA concentration, and EB dosage were found to have a great effect on the amount of silver particles formed in PVA matrix by EB irradiation method. These results were confirmed by XRD, UV, and TEM. XRD (X-ray diffraction) technique confirmed the zero valent state of silver. Optical studies were done using UV-visible spectrophotometer to see the variation of silver particles formed in PVA matrix. Transmission Electron Microscopic (TEM) was employed to show the particle size and distribution of silver foamed in PVA matrix.

• Nuclear Engineering and Technology
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• v.48 no.3
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• pp.785-794
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• 2016

The Argonne National Laboratory of the United States and the Kharkov Institute of Physics and Technology of the Ukraine have been collaborating on the design, development and construction of a neutron source facility at Kharkov Institute of Physics and Technology utilizing an electron-accelerator-driven subcritical assembly. The electron beam power is 100 kW using 100-MeV electrons. The facility was designed to perform basic and applied nuclear research, produce medical isotopes, and train nuclear specialists. The biological shield of the accelerator building was designed to reduce the biological dose to less than 5.0e-03 mSv/h during operation. The main source of the biological dose for the accelerator building is the photons and neutrons generated from different interactions of leaked electrons from the electron gun and the accelerator sections with the surrounding components and materials. The Monte Carlo N-particle extended code (MCNPX) was used for the shielding calculations because of its capability to perform electron-, photon-, and neutron-coupled transport simulations. The photon dose was tallied using the MCNPX calculation, starting with the leaked electrons. However, it is difficult to accurately tally the neutron dose directly from the leaked electrons. The neutron yield per electron from the interactions with the surrounding components is very small, ~0.01 neutron for 100-MeV electron and even smaller for lower-energy electrons. This causes difficulties for the Monte Carlo analyses and consumes tremendous computation resources for tallying the neutron dose outside the shield boundary with an acceptable accuracy. To avoid these difficulties, the SOURCE and TALLYX user subroutines of MCNPX were utilized for this study. The generated neutrons were banked, together with all related parameters, for a subsequent MCNPX calculation to obtain the neutron dose. The weight windows variance reduction technique was also utilized for both neutron and photon dose calculations. Two shielding materials, heavy concrete and ordinary concrete, were considered for the shield design. The main goal is to maintain the total dose outside the shield boundary less than 5.0e-03 mSv/h during operation. The shield configuration and parameters of the accelerator building were determined and are presented in this paper.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1101-1106
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• 2014

Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

• International Union of Geodesy and Geophysics Korean Journal of Geophysical Research
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• v.26 no.1
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• pp.43-58
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• 1998

The Kwinana Shoreline Fumigation Experiment (KSFE) took place at Fremantle, WA, Australia between January 23 and February 8, 1995. The CSIRO DAR LIDAR measured plume sections from near the Kwinana Power Station (KPS) stacks to up to about 5 km downstream. It also measured boundary layer aerosols and the structure of the boundary layer on some occasions. Both stages A and C of KPS were used as tracers at different times. The heart of the LIDAR system is a Neodymium-doped Yttrium-aluminum-garnet (Nd:YAG) laser operating at a fundamental wavelength of 1064 nm, with harmonics of 532 nm and 355 nm. For these experiments the third harmonic was used because the UV wavelength at 355 nm is eye safe beyond about 50 m. The laser fires a pulse of light 6 ns in duration (about 1.8 m long) and with an energy (at the third harmonic) of about 70 mJ. This pulse subsequently scattered and absorbed by both air molecules and particles in the atmosphere. A small fraction of the laser beam is scattered back to the LIDAR, collected by a telescope and detected by a photo-multiplier tube. The intensity of the signal as a function of time is a measure of the particle concentration as a function of distance along the line of the laser shot. The smoke plume was clearly identifiable in the scans both before and after fumigation in the thermal internal boundary layer (TIBL). Both power station plumes were detected. Over the 9 days of operation, 1,568 plumes scans (214 series) were performed. Essentially all of these will provide instantaneous plume heights and widths, and there are many periods of continuous operation over several hours when it should be possible to compile hourly average plume statistics as well. The results of four days LIDAR observations of the dispersion of smoke plume in the TIBL at a coastal site are presented for the case of stages A and C.