• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1600-1604
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• 2004

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2$-CMP process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis of used slurry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.93-96
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• 2004

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2$-CMP process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis of used slurry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.184-187
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• 2003

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) lyaer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2-CMP$ process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis or used slurry.

• 한국전기화학회:학술대회논문집
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• 한국전기화학회 2001년도 연료전지심포지움 2001논문집
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• pp.203-208
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• 2001

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1998년도 추계종합학술대회 논문집
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• pp.903-906
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• 1998

We propose a new method for merging partical regions which have similar motion characteristics. In the proposed method, the trajectories of each partial regions are computed and the regions consisting a same object are merged by a similarity function defined in this paper. The similarity function is defined to take into consideration the motion characteristics of the trajectories. The proposed method shows good performance when the regions of an object show little variation in size and shape.

• 한국세라믹학회지
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• 제22권1호
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• pp.60-66
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• 1985

Hard shaped bodies are made by sintering a cold-pressed compact of a boron carbide compound which contains a densification aid. Titanium diboride and carbon were used as a densification aid in a range of 1% to 10% by weight. The effects of sintering temperature and additives on linear shrinkage porosity hardness bend strength and microstructure were examined. The initial partical size dependence on the sintered density was also discussed.

• The Korean Journal of Ceramics
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• 제5권4호
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• pp.395-399
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• 1999

MgO/metal nanocomposite powder mixtures were prepared by solution chemical processes to obtain suitable structure for ceramic/metal nanocomposites. Nickel or cobalt nitrate, as a source of metal dispersion, was dissolved into alcohol and mixed with magnesia powder. After calcined in air, these powders were reduced by hydrogen. Densified nanocomposites were successively obtained by Pulse Electric Current Sintering (PECS) process. The dispersed metal partical size depended on temperature and time in calcination and reduction processes. The phase analyses in the synthesized powders as a functioni of temperature were tracked using a dynamic high temperature X-ray diffractioni (HTXRD) system. Phase and crystallite size analyses were done using X-ray diffractioni and TEM. The MgO/metal nanocomposites were successfully fabricated, and ferromagnetic responses with enhanced coercive force were also investigated for these composites.

• 대한금속재료학회지
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• 제47권9호
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• pp.550-557
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• 2009

In this study, bronze or SUS304 powders blended with 10 wt.% diamond particles were used to prepare metal/diamond composite materials deposited by cold spraying. The effects of matrix metal, diamond partical size, and the thickness of the Ni coating on the diamond were studied on Al 6061 substrate. The results showed that the hardness of the metal/diamond composite coating layers was higher than that of the same composite materials when using the sintering method. The fraction of diamond content in the coated layer increased when the metal matrix was soft. When the size of the diamond particles was reduced, the fraction of the diamond particles increased. In addition, in the case of diamond with a thicker Ni-coated layer, the fracturing of diamonds was mitigated in the composite coating layers.

• Nuclear Engineering and Technology
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• 제46권6호
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• pp.817-824
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• 2014

To ensure the safety of research reactors, the water level must be maintained above the required height. When a pipe ruptures, the siphon phenomenon causes continuous loss of coolant until the hydraulic head is removed. To protect the reactor core from this kind of accident, a siphon breaker has been suggested as a passive safety device. This study mainly focused on two variables: the size of the pipe rupture and the timing of air entrainment. In this study, the size of the pipe rupture was increased to the guillotine break case. There was a region in which a larger pipe rupture did not need a larger siphon breaker, and the water flow rate was related to the size of the pipe rupture and affected the residual water quantity. The timing of air entrainment was predicted to influence residual water level. However, the residual water level was not affected by the timing of air entrainment. The experimental cases, which showed the characteristic of partical sweep-out mode in the separation of siphon breaking phenomenon [2], showed almost same trend of physical properties.

• 대한전자공학회논문지
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• 제26권11호
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• pp.1691-1698
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• 1989

Gas sensing effects produced by adsorptive reaction between specimen surface and gases are expected to be influenced greatly by the state of the speimen surface. In this study, Co1-xMgxO ceramics oxygen sensors were prepared by pressing at 0.3-1.5ton/cm\ulcornerwith or without binder, intending to change porosity and average grain size on the surface purposely. The composition ratio of CoO to MgO was fixed at 1:1(mol.%). Microstructure of prepared Co0.5Mg0.5O ceramics were observed, the electrical properties and the sensitivity characteristics for oxygen gas were investigated in the device temperature range of 700-1000\ulcorner and for oxygen partical pressure range of 1-10**-4 atm. Temperature dependence of the resistivity of the specimen showed NTC behavior, average grain size increased and porosity decreased with increasing compaction pressure. The slope of the resistivity of the specimen on the oxygen partial pressure decreased with increasing average grain size and with decreasing porosity. Particularly, specimen pressed by 0.3 and 0.5 ton/cm\ulcornershowed the highest sensitivity to oxygen gas.