• 제목/요약/키워드: Pad thickness

검색결과 197건 처리시간 0.027초

MMIC Capacitor를 위한 PECVD $Si_3N_4$ 박막에 관한 연구 (A Study on the $Si_3N_4$ Thin Films Deposited by PECVD for MMIC Capacitor)

  • 성호근;송민종;김용갑;박춘배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.412-415
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    • 2003
  • [ $Si_3N_4$ ] thin film is the good material to fabricate the capacitors at MMIC processes. Normally, $Si_3N_4$ thin films is used to dielectric in the MIM capacitor and film thickness is $2000\;{\AA}$. Insulator(or dielectric) was deposited by PECVD at our MIM structure with air bridge which connect between top metal and contact pad. We optimized PECVD process to fabricate the good capacitors which can be applied at the true MMIC. The thickness of our $Si_3N_4$ thin films was $1000\;{\AA}$ shallower than $2000\;{\AA}$, and their breakdown voltages were above 70V.

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고체윤활막 형상에 따른 마찰특성의 변화에 관한 연구 (A Study of Friction Characteristics according to the Morphology of Solid Transfer Film)

  • 임현우;장호
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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    • pp.310-317
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    • 2000
  • Tribological properties of friction materials containing different volume ratios of solid lubricants (graphite and MoS$_2$) were studied using a pad-on-disk type friction tester. Morphology and thickness of the friction film were carefully examined to correlate the friction performance with the property of the friction film. Results showed that the friction materials containing 16vo1. % of graphite and 5 vol. % of MoS$_2$exhibited best friction stability among others. In particular, the thickness of the friction film decreased as the amount of MoS$_2$increased and severe friction oscillation was observed when the friction material contained MoS$_2$only (21 vol. %). Microscopic observations and friction tests suggested that the coherent thick transfer film improved the friction stability.

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근위 족저 근막염의 비수술적 치료 결과 : 족저 근막 두께에 따른 비교 분석 (Outcome of Nonoperative Treatment for Proximal Plantar Fasciitis: Comparative Analysis According to Plantar Fascia Thickness)

  • 윤광섭;정홍근;배의정;김태훈
    • 대한족부족관절학회지
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    • 제12권2호
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    • pp.122-127
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    • 2008
  • Purpose: To evaluate the clinical outcome of proximal plantar fasciitis after nonoperative treatment, and also to find the correlation of the heel pain with the plantar fascia thickness measured by ultrasonography. Materials and Methods: The study is based on 41 patients, 46 feet of the proximal plantar fasciitis that were treated conservatively with at least 12 months follow-up. All were treated with heel pad, Achilles and plantar fascia stretching and pain medications for at least 3 months. Heel ultrasonography was performed at the beginning of the treatment to measure the plantar fascia (PF) thickness and the echogenicity. PF thickness over 4 mm and less were grouped in to group A and B respectively to compare the clinical outcome. Results: Average thickness of the PF at the calcaneal attach was 5.2 mm. Symptom duration before the treatment was average 13.2 month; group A being 14.6 months and group B being 9.0 months with no significant difference (p=0.09). As functional evaluation, Roles-Maudsley score improved from 3.4 initially to 2.3 at final follow-up, while morning heel pain also improved from average VAS pain score of 7.2 to 4.0. However Maudsley and VAS score both didn't show statistical difference between the 2 groups (p>0.05). Conclusion: Plantar fasciitis improved substantially with the nonoperative treatments. However, the 2 groups, divided according to 4 mm thickness by ultrasonography, didn't show significant difference in either symptom duration or in the clinical outcomes.

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에틸렌-프로필렌-디엔 삼원 공중합 (EPDM) 발포체의 충격음 저감 특성에 관한 연구 (A Study on Impact Sound Insulation Properties of EPDM Micro Cellular Pad)

  • 이경원;이정희;손호성
    • Elastomers and Composites
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    • 제35권2호
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    • pp.138-148
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    • 2000
  • EPDM 발포체의 정적/동적 특성을 측정하여 재료 특성과 진동 특성과의 연관성을 알아보고 이로부터 충격음 저감재로서의 적용 가능성을 검토하였다. 정적/동적 특성은 material test system (MTS)를 사용하여 시편의 형상, 두께, 초기하중, 발포도 등에 따라 정적 탄성계수, 동적 탄성계수, 전달율의 변화를 조사하였다. 정적 탄성계수와 동적 탄성계수의 경우, 형상이 단순하고 두께가 얇을수록 큰 값을 나타냈고, 전달율과 동적 탄성계수는 상호 비례 관계에 있음을 확인할 수 있었다. 특징적으로 동적 탄성계수가 증가하면, 전달율의 특성 피크치는 같은 주파수 영역에서의 증가 혹은 고주파수 영역으로의 전이의 형태로 일어나게 되는 것을 알 수 있었다. 실험실적 모사 시험장치를 통해 충격에 따른 주파수별 진동 속도측정과 유한 요소 해석 모델을 사용하여 mode shape에 의한 충격 해석 결과를 알아보았는데, EPDM 발포체를 사용함으로써 2.5-3.5배의 진동 속도 저감이 이루어짐을 알 수 있었고, mode shape의 경우 몰타르와 콘크리트만으로 구성된 구조물에 비해 진동 충격에 대한 변위가 급감함으로써 충격음 저감재로서의 EPDM 발포체의 적용 가능성은 상당히 높은 것을 확인할 수 있었다.

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Sn-3.5Ag 무연 솔더를 이용한 Si-wafer와 FR-4기판의 상온접합 (Ultrasonic bonding between Si-wafer and FR-4 at room temperature using Sn-3.5Ag solder)

  • 김정모;조선연;김규석;이영우;정재필
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2005년도 춘계학술발표대회 개요집
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    • pp.54-56
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    • 2005
  • Ultrasonic soldering using of Si-wafer to FR-4 PCB atroom temperature was investigated. Sn3.5Ag foil rolled $100{\mu}m$ was used for solder. The UBM of Si-die was Cu/ Ni/ Al from top to bottom and its thickness was $0.4{\mu}m$, $0.4{\mu}m$, $0.3{\mu}m$ respectively. Pad on FR-4 PCB comprised of Au/ Ni/ Cu from top to bottom and its thickness was $0.05{\mu}m$, $5{\mu}m$, $18{\mu}m$ respectively. The ultrasonic soldering time was changed from 0.5sec to 3.0sec and its power 1400W. As experimental result, reliable bond joint by ultrasonic at room temperature was obtained. The shear strength increased with soldering time up to 2.5 sec. That means at 2.5sec, the shear strength showed maximum rate of 65.23N. The strength decreased to 33.90N at 3.0 sec because the cracks generated along the intermetallic compound between Si-wafer and Sn-3.5mass%Ag solder. intermetallic compound produced by ultrasonic between the solder and the Si-die was $(Cu, Ni)_{6}Sn_{5}$ and the intermetallic compound between solder and pad on FR-4 was $(Ni, Cu)_{3}Sn_{4}$.

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Bi-10Cu-20Sb-0.3Ni 고온용 무연 솔더와 Cu와의 계면 반응 특성 (Interfacial Reaction Characteristics of a Bi-20Sb-10Cu-0.3Ni Pb-free Solder Alloy on Cu Pad)

  • 김주형;현창용;이종현
    • 마이크로전자및패키징학회지
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    • 제17권1호
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    • pp.1-7
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    • 2010
  • 본 연구에서는 $430^{\circ}C$에서 Bi-10Cu-20Sb-0.3Ni 조성의 솔더 합금과 Cu간의 리플로루 솔더링 시 생성되는 계면 반응층을 분석하였고, 솔더링 시간에 따른 계면 반응층의 성장 속도를 측정하였다. 리플로우 솔더링 후 Bi-10Cu-20Sb-0.3Ni/Cu의 계면 반응층을 분석한 결과, $(Cu,Ni)_2Sb$$Cu_4Sb$ 금속간 화합물층, 그리고 Bi 조성과 $Cu_4Sb$ 상이 주기적으로 존재하는 아지랑이 형상층이 연속적으로 생성되었다. 또한 120 s까지의 솔더링 시간 영역에서는 계면 반응층의 총 두께가 솔더링 시간에 대해 직선적으로 증가하는 경향이 관찰되었다. 합금원소로 첨가된 Ni은 가장 두꺼운 $Cu_4Sb$ 반응층의 형성에 참여하지 않아 계면 금속간 화합물의 성장 속도를 억제시키는 작용을 나타내지 못했다.

Polyimide Film을 이용한 일체형 탐침 패드의 제작 (Fabrication of Single Body Probe Pad using Polyimide Film)

  • 오민섭;김창교;이재홍
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.1704-1705
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    • 2011
  • MEMS(Micro Electro Mechanical Systems) 기술과 니켈 전기도금공정을 이용하여 수십 내지 수백개의 탐침을 갖는 일체형 탐침 패드(Probe Pad)를 제작하였다. PI(Polyimide) Film은 일본 UBE사의 $50{\mu}m$ 두께를 갖는 유피렉스를 사용하였다. 일체형 탐침 패드는 Polyimide Film에 Cu를 증착 후 사진식각공정을 통하여 PR Mold 형성한 후 전류가 흐르는 Cu 라인(line) 배선을 형성하기 위해 Cu를 식각하였으며 형성된 Cu Line 위에 니켈 전해도금공정을 실시하여 니켈 배선을 형성하였다. Ni 배선 위에 니켈 범프를 형성하기 위하여 PR Strip을 실시한 후 다시 PR Mold를 형성하였다. PR Mold 형성 후 다시 니켈 전해도 금을 실시하여 니켈 범프(bump)를 형성하였다. 제작된 탐침패드의 니켈배선의 폭은 $18.0{\mu}m$이고 피치(Pitch)는 $35{\mu}m$이며, 니켈 범프의 두께(Thickness)는 $10.0{\mu}m$로 제작되었다. 본 연구에서 제작된 탐침패드를 더욱 더 고집적화(Fine Pitch)하여 일체형 탐침 패드를 제작하게 되면 이를 사용하는 프로브유니트의 제작에 있어서 비용 절감 및 생산성(Throughput)을 크게 향상 시킬 수 있을 것이다.

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정렬불량에 따른 틸팅 패드 스러스트 베어링의 운전 성능 한계 검토 (Operating Performance Limitations of Tilting Pad Thrust Bearings Due to Misalignment)

  • 송애희;최성필;김선진
    • Tribology and Lubricants
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    • 제36권2호
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    • pp.82-87
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    • 2020
  • In thrust bearings, the thrust collar and bearing surface need to be parallel to each other to ensure that all pads share the same load. In rotating machines, the shaft system cannot achieve perfect alignment. Misalignment of the thrust collar results in some pads supporting a higher load than others and excessive loads being placed on some pads. Consequently, high loads and high temperatures may occur in the bearing. Thus, in this study, we aim to analytically evaluate the performance of a misaligned non-equalizing direct lubricated tilting pad thrust bearing. We define the oil film thickness of the misaligned thrust bearing using the Byrant angle. Additionally, we calculate the pressure distribution and temperature distribution of the thrust bearing using the generalized Reynolds equation and energy equation. The design limit of the thrust bearing is defined by the load and temperature. Therefore, we evaluate the allowable misalignment angle as the limit of the maximum load and temperature. The analysis results demonstrate that an increase in the speed and load corresponds to a smaller allowable misalignment angle. However, as this is not the same for all thrust bearings, evaluating the allowable misalignment angle at each thrust bearing is essential.

Measurment of Fluid Film Thickness on The Valve Plate in Oil Hydraulic Axial Piston Pumps (Part II : Spherical Design Effects)

  • Kim Jong-Ki;Kim Hyoung-Eui;Lee Yong-Bum;Jung Jae-Youn;Oh Seok-Hyung
    • Journal of Mechanical Science and Technology
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    • 제19권2호
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    • pp.655-663
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    • 2005
  • Tribological characteristics in the sliding parts of oil hydraulic piston pumps are very important in increasing overall efficiency. In this study, the fluid film between the valve plate and the cylinder block was measured by using a gap sensor and the mercury-cell slip ring unit under real working conditions. To investigate the effect of the valve shape, we designed three valve plates each having a different shape. One of the valve plates was without bearing pad, another valve plate had bearing pad and the last valve plate was a spherical valve plate. It was noted that these three valve plates observed different aspects of the fluid film characteristics between the cylinder block and the valve plate. The leakage flow rates and the shaft torque were also investigated in order to clarify the performance difference between these three types of valve plates. From the results of this study, we found that the spherical valve plate estimated good fluid film patterns and good performance more than the other valve plates in oil hydraulic axial piston pumps.

거동 부자유 노인을 위한 일회용 기저귀 개발에 관한 연구(II) (A Study of the Development of Disposable Diapers for the Elderly in Need(II))

  • 조진숙;최진희;허은영
    • 대한가정학회지
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    • 제38권12호
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    • pp.73-84
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    • 2000
  • This article is a continuing report about a development of disposable diapers for the elderly in need. In previous report, the first prototypes of disposable diapers in two different categories have been developed. One was a panty type and the other was a pad type. These prototypes were results of property test and wear test of existing disposable diapers in each categories. Yet, in order to develop useable products, the second property and wear tests using the first prototype diapers were carried out. Considering the resets of the second tests, enhancements to the first prototypes were made to refine the second prototypes. The panty type diaper were altered to be longer to prevent evacuation from leaking and fit better. The pad type diapers were altered to reduce thickness for comfort and wearing appearance when get dressed. Ultimately a lot more disposable diapers will be required in future. Resulting suggestions are as follows. Anthropometric data around hip area of elderly in both sexes have to be collected to give meaningful information to diaper manufacturers, so that they can manufacture for different sizes and different sexes. Also we suggests that diapers for specific disease such as diabetics have to be designed accordingly.

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