• 제목/요약/키워드: Pad temperature

검색결과 346건 처리시간 0.041초

가열에 의한 웨이퍼 형상 변화가 CMP에 미치는 영향 (Effects of Change of Wafer Shape through Heating on Chemical Mechanical Polishing Process)

  • 권대희;김형재;정해도
    • 한국정밀공학회지
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    • 제20권1호
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    • pp.85-90
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    • 2003
  • Removal rate and Within Wafer Non-Uniformity (WIWNU), the most critical issues in Chemical Mechanical Polish (CMP) process, are related to the pressure distribution, wafer shape, slurry flow, mechanical property of pad and etc. Among them, wafer warp generated by other various manufacturing process of wafer may induce the deviation of pressure distribution on the backside of wafer. In the convex shaped wafer the pressure onto the backside of wafer is higher than that of perfectly flat shaped wafer. Besides, such an added pressure is in proportion to the curvature of wafer. That is, the bigger the curvature of wafer becomes the higher the removal rate goes. And the WIWNU is known to be directly related to the pressure distribution on the wafer as well. In other words, the deviation of pressure distribution is in proportion to the WIWNU. In this paper, it is found that the wafer shape may be modified through heating the backside of it and thus properly changed pressure onto the backside of it may improve the WIWNU.

$ZrSiO_4$가 첨가된 마찰재의 마찰 안정성 (Friction Stability of Materials with $ZrSiO_4$ Addition)

  • 이동규;박상찬
    • 한국안전학회지
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    • 제14권3호
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    • pp.110-119
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    • 1999
  • This study was conducted to invent brake of non-steel material without using asbestos and disc pad added $ZrSiO_4$ was made. The physical properties and friction characteristics were investigated by varying methods. The physical properties were inspected of shear strength, hardness, heat expansion, specific gravity, % of gashole, thickness variation, weight variation and pH variation. The friction stability was measured by friction coefficient on variations of speed, temperature and deceleration condition. It was found that the physical properties were in general excellent. According to the friction characteristics tests, $ZrSiO_4$ had an abrasive property. As a results, the friction materials containing $ZrSiO_4$ 3~5vol% showed better resistance to fading and improved friction stability than the materials without ZrSiO$_4$.

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Diphenyl-2-ethanolamidophosphate의 합성과 폴리에스테르 직물에 대한 방염성에 관한 연구 (Studies on the Synthesis of Diphenyl-2-Ethanolamidophosphate (DPEOAP) and Flame Retardancy Effect of DPEOAP on polyester Fabrics)

  • 이광우;김영만
    • 한국의류산업학회지
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    • 제2권2호
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    • pp.123-131
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    • 2000
  • Diphenyl-2-ethanolamidophosphate (DPEOAP) was synthesized to treat polyester fabrics in order to improve its flame retardancy. The flame retardancy and physical properties of DPEOAP-treated polyester fabrics were investigated. The results were as follows: 1) polyester fabrics can be treated with DPEOAP by means of Pad-Dry-Cure method, because DPEOAP was easily soluble in benzene. 2) The most economic conditions of treatment were determined as 10% of DPEOAP cocentration, $140^{\circ}C$ of curing temperature, and 2 minutes of curing time. 3) Though the washablity of DPEOAP is low in comparison with the other products which are purchasable in a market, it has an excellent flame retardment effect 3 times more than in number of flame contact just with 0.66% add-on. 4) The physical properties of DPEOAP treated polyester fabrics were little changed as compared with non-treated fabric.

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디스크 브레이크의 방열구 형상비에 따른 열적 거동에 관한 연구 (A Study of Thermal Behaviors on the Effect of Aspect Ratio of Ventilation Hole in Disk Brake)

  • 김진택
    • Tribology and Lubricants
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    • 제18권6호
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    • pp.384-388
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    • 2002
  • The adequate design of a passenger car braking system, which is directly related to the safety of a car, is very important since the safety is an essential design parameter of a car to keep men and car from the damage. The thermal behaviors of the ventilated disk has been investigated based on the air cooling effects during repeat braking operations. In this study, the thermal behavior of ventilated disk brake system was investigated by numerical method. The 3-Dimensional unsteady model was simulated by using a general purpose software package “FLUENT” to obtain the temperature distributions of disk and pad. The model includes the more realistic braking method, which repeats braking and release. The effects of aspect ratio of ventilated hole on the heat dissipation was investigated.

온도에 의한 궤도의 후좌굴 거동 (Post-Buckling Behavior of the Track due to Temperature)

  • 임남형;이지하;강윤석;양신추
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 2003년도 추계학술대회 논문집(II)
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    • pp.442-447
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    • 2003
  • The actual behavior of the railroad track structure is suspected to be a complex interaction between the vertical, lateral, longitudinal, and torsional behaviors. A FE program are developed in the present study to be used for extensive nonlinear analysis of the track structures subjected to thermal load. Using the rigorous study on the deformed shape of the rail and tie, and stress resultants, characteristics of the three dimensional behavior are investigated. It is found that the flexural rigidity of the tie and the rotational stiffness of pad-fastener can be affect the behavior of the track structure and the postbuckling behavior in each rail, except lateral behavior, is not same.

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회귀분석에 의한 모터싸이클 브레이크 디스크의 열변형량에 관한 연구 (A Study on Thermal Deformation Volume of Motorcycle Brake Disk using Regression Analysis)

  • 류미라;변상민;박흥식
    • Tribology and Lubricants
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    • 제25권2호
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    • pp.102-107
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    • 2009
  • The thermal deformation volume of motorcycle break disk was studied using a disk-on-pad type friction tester. Thermal deformation volume of motorcycle break disk have an effect on the frictional factor such as applied load, sliding speed, sliding distance and number of ventilated disk hole. However, it is difficult to know the mutual relation of these factors on thermal deformation volume. In this study, the thermal deformation volume with ANSYS workbench are obtained by application of temperature from mechanical test. From this study, the result was shown that the motorcycle break disk with ventilated hole 3 have the most excellent thermal deformation characteristics. The regression equation with frictional factors which have a trust rate of 95% for prediction of thermal deformation volume of motorcycle break disk was composed.

Diamond Conditioner Wear Characterization for a Copper CMP Process

  • Boruckia, L.;Zhuang, Y.;Kikuma, R.;Rikita, N.;Yamashita, T.;Nagasawa, K.;Lee, H.;Sun, T.;Rosales-Yeomans, D.;Philipossian, A.;Stout, T
    • Transactions on Electrical and Electronic Materials
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    • 제8권1호
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    • pp.15-20
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    • 2007
  • Conditioner wear, copper polish rates, pad temperature and coefficient of friction (COF) are measured for two novel Mitsubishi Materials Corporation designs during an extended wear and polishing test. Both designs are coated with a $Teflon^{TM}$ film to reduce substrate wear and chemical attack. Using optical interferometry, changes in the coating that result in gradual changes in diamond exposure are measured. Theories of the COF, conditioning, and polishing are applied to explain the observed performance differences between the designs.

모터싸이클 브레이크 디스크의 열 해석에 관한 연구 (A Study on Thermal Analysis of Motorcycle Brake Disk)

  • 류미라;김영희;변상민;박흥식
    • 한국기계가공학회지
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    • 제8권4호
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    • pp.34-40
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    • 2009
  • The effect of frictional factors on thermal stress and deformation volume of motorcycle brake disk was studied by using a disk-on-pad type friction tester. It has an effect on the frictional factor such as applied load, sliding speed, sliding distance and number of ventilated disk hole. However, it is difficult to know the mutual relation of these factors. In this study, thermal stress and deformation volume by using design of experiment with 4 elements were investigated for thermal analysis with regression analysis. Thermal stress and thermal deformation are obtained by the application of temperature from mechanical test. From this study, the result showed that the motorcycle brake disk with ventilated hole 3 had the most excellent thermal stress and deformation volume. The regression equation had a trust rate of 95% for the prediction of thermal stress and deformation volume of motorcycle brake disk was composed.

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다구찌 로버스트 실험계획법에 의한 자동차용 마찰재의 성형조건과 마찰특성과의 상관관계에 환한 연구 (The Correlation between Manufacturing Parameters and friction Characteristics of Automotive Friction Materials by Taguchi Robust Experimental Design)

  • 김광석;장호
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1999년도 제30회 추계학술대회
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    • pp.225-232
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    • 1999
  • The effect of manufacturing parameters such as molding and curing conditions on friction characteristics of friction materials was studied using a pad-on-disk type friction tester. Friction materials containing 15 ingredients were investigated for an optimal manufacturing condition for the best friction characteristics employing Taguchi robust experimental design. The main effects were different for mechanical properties and friction characteristics and were strongly influenced by manufacturing conditions. An optimum manufacturing condition was obtained to achieve the best friction characteristics concerning mechanical properties(hardness, porosity, wear resistance), friction stability, and change of rotor temperature.

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모터싸이클 브레이크 디스크의 열응력 해석에 관한 연구 (A Study on Thermal Stress Analysis of Motorcycle Disk Brake)

  • 류미라;문성동;박흥식
    • Tribology and Lubricants
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    • 제24권6호
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    • pp.308-314
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    • 2008
  • The thermal stress have an effect on the frictional factor such as applied load, sliding speed, sliding distance and number of ventilated disk hole. However, it is difficult to know the mutual relation of these factors on thermal stress of motorcycle break disk. For this, temperature of motorcycle break disk is measured using a disk-on-pad type friction tester with full factorial design containing above 4 elements. and the thermal stress analysis of it was carried out using with ANSYS workbench. From this study, the result was shown that the regression equation which have a trust rate of 95% for thermal stress presumption of motorcycle break disk with frictional factor was composed. It is possible to apply for another automobile parts.