• 설비공학논문집
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• 제15권4호
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• pp.305-311
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• 2003

DOP aerosol particles with geometric mean diameter of 0.5-3.0 ${\mu}{\textrm}{m}$, geometric standard deviation of 1.1-1.3 and total number concentration of 1,500-8,000 Particles/㎤ were used to determine collection efficiencies of a packed wet scrubber with respect to particle size. The tested operating variables included air velocity and water injection rate. It was shown from the experimental results that the collection efficiencies increased with increasing water injection rate and decreasing air velocity. Meanwhile, as for the particle size variation, all of the collection efficiency curves increased rapidly between 0.57-1.41${\mu}{\textrm}{m}$ for the range of water injection rate above 30 L/min. It was also seen that the collection efficiency of a packed wet scrubber is mainly governed by the mechanism of inertial impaction.

• 한국대기환경학회지
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• 제23권6호
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• pp.744-751
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• 2007

Wet scrubber is widely used to remove toxic gaseous contaminants in various industries such as semi-conductor industry, display manufacturing industry and so on. In this study, to optimize a packed bed scrubber as one of typical wet scrubber size while keeping its performance, four different packing materials were investigated at different air flow rates, liquid-gas ratios and pH values. Ammonia, hydrochloric acid and hydrofluoric acid were used as test gases to characterize the scrubber performance. Gas removal efficiency increased as the packing size decreased, which resulted in the increase of specific surface area. The increase of air flow rate led to the decrease of gas removal efficiency, while the increase of liquid-gas ratio led to the increase of gas removal efficiency. For the case of $NH_3$ gas, lower pH, and for the cases of HCl and HF, higher pH contributed to higher gas removal efficiency. Gas removal efficiency of a wet scrubber increased in the order of HCl < $NH_3$ < HF according to its water solubility.

• 한국분무공학회지
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• 제24권1호
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• pp.8-14
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• 2019

The purpose of this study is to develop a packing-free wet scrubber to prolong the maintenance interval compared with the conventional packed bed wet scrubbers with which frequent operation stops are unavoidable to clean the packing materials. The main- and interaction-effects were quantitatively analyzed by regression analysis for the measured ammonia scrubbing data from the experiments prepared by experimental design. The scrubbing efficiency of the newly developed wet scrubber was found to be over 95% under the condition of flue gas flow rate of 90CMM and liquid-to-gas ratio $2l/m^3$ for all considered trials of experimental design. The interaction effect between the inlet duct spray and the filter was found to be important, which controls the droplet growth due to the droplet collisions between the duct- and scrubbing tower-spray. The presented methodology to analyze the impacts of operational and design factors on the scrubber efficiency showed potential for applications to optimize the future flue gas abatement process in semiconductor plants.

• 한국안전학회지
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• 제35권6호
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• pp.85-92
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• 2020

Wet Scrubber reacts the incoming pollutant gas with cleaning water (water + absorbent) to absorb pollutants and release the clean air to the atmosphere. Wet scrubbers and packed tower scrubbers using this principle are widely used in businesses that emit acid gases. In particular, in the etching process using hydrochloric acid (HCl), alkaline washing water (NaOH) having a pH of about 8 to 11 is used to absorb a large amount of acid gas. However, These salts are attached to the injection nozzle (nozzle), filling material (packing), and the demister (Demister), causing air pollution, human damage, and inoperability due to clogging and acid gas discharge. Therefore, In this study, an improvement plan was proposed to manage the washing water with pH 3~4 acidic washing water. The test method takes samples from the Wet Scrubber flue measurement laboratory twice a month for 1 year. Hydrogen chloride (HCl) concentration (ppm) was measured, and nozzle clogging and scale conditions were measured, compared, and analyzed through a differential pressure gauge and a pressure gauge. As a result of the check, it was visually confirmed that the scale was reduced to 50% or less in the spray nozzle, filler, and demister. In addition, the emission limit of hydrogen chloride in accordance with the Enforcement Regulation of the Air Quality Conservation Act [Annex 8] met 3 ppm or less. Therefore, even if the washing water is operated in an acidic pH range of 3 to 4, it is expected to reduce air pollution and human damage due to clogging of internal parts, and it is expected to reduce maintenance costs such as regular cleaning or replacement of parts.

• 한국대기환경학회지
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• 제34권4호
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• pp.554-566
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• 2018

The rice husk contains nutrients which can be easily utilized by microorganisms, and also has a water retaining ability, which played a crucial part in enabling it to become a biofilter media. In this study, we evaluated the applicability of rice husk pellet bio-scrubber as a microbiological carrier. The pelletization experiment of rice husk as a biological media was performed using PVA and EVA binder. Also, the feasibility tests of rice husk as a biological media for odor removal were carried out in order to know whether rice-husk contains useful components as a media for microbiological growth or not. Lastly, a combined test for odor gas absorption and biological oxidation was conducted using a lab scale bio-filter set-up packed with rice-husk pellets as wet-scrubber. The major components of the rice husk were carbon, hydrogen, nitrogen, and oxygen, while carbon acted as the main ingredient which comprised up to 23.00%. The C : N : P ratio was calculated as 45 : 1 : 2. Oxygen uptake rate, yield and decay rate of the rice husk eluent was calculated to be $0.0049mgO_2/L/sec$, 0.24 mgSS/mgCOD and 0.004 respectively. The most stable form of rice husk pellets was produced when the weight of the rice husk, EVAc, PVAc, and distilled water was 10 : 2 : 0.2 : 10. The prepared rice husk pellets had an apparent density of 368 g/L and a porosity of 59.00% upon filling. Dry rice husks showed high adsorption capacity for ammonia gas but low adsorption capacity for hydrogen sulfide. The bio-filter odor removal column filled with rice husk pellets showed more than 99.50% removal efficiency for NH3 and H2S gas. Through the analysis of circulation water, the prime removal mechanism is assumed to be the dissolution by water, microbial nitrification, and sulfation. Finally, it was confirmed that the microorganisms could survive well on the rice husk pellets, which provided them a stable supply of nutrients for their activity in this long-term experiment. This adequate supply of nutrients from the rice husk enabled high removal efficiency by the microorganisms.