• 한국재료학회지
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• 제9권12호
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• pp.1181-1187
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• 1999

diol을 기반으로 하는 Sol-Gel 방법으로 PZT (53/47) 1M sol 용액을 만들어 회전 코팅법으로 Pt/Ti/$SiO_2$/Si 기판위에 코팅하였고 한번 코팅으로 최대 0.9${\mu}m $의 PZT막을 얻었다. PZT는 비강유전성 pyrochlore상을 거쳐 강유전성 perovskite상으로 전이하며 따라서 PZT perovskite seed가 상전이에 미치는 영향을 규명하고자 하였다. 0.2${\mu}m $ 이하의 크기를 갖는 1wt% PZT분말을 propanol용액에 분산시켜 PZT sol 용액에 도입하여 seeded PZT 막을 제조하였다. Seeded PZT막을 열처리한 결과 perovskite상의 생성이 촉진되어 상전이 온도가 50$^{\circ}C$정도 낮아졌다.

• 한국전산구조공학회논문집
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• 제25권1호
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• pp.91-99
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• 2012

본 연구에서는 PZT 소자의 정압전 효과에 의한 동적 응답신호를 이용하는 보 구조물 손상 모니터링 기법을 제안하였다. 특히, 모드 변형에너지기반 보 구조물 손상 모니터링에 PZT 정압전 응답신호를 입력자료로 활용하는 방안에 대한 연구에 주안점이 있다. 먼저, PZT 소자의 정압전 효과 및 동적 변형률 응답의 이론적 배경을 요약하였다. 다음으로, 모드 변형에너지기반 보 구조물 손상위치 모니터링 기법을 제시하였다. 제시된 기법의 적합성을 검증하기 위해, 캔틸레버 보 모형을 대상으로 강제진동 실험을 수행하였으며, 세 종류의 센서(가속도계, PZT 센서, 변형률계)를 통해 동적 응답신호가 계측되었다. 손상 전후에 계측된 이들 진동신호들을 사용하여 모드 변형에너지기반의 손상위치 모니터링이 수행되었다.

• 한국통신학회논문지
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• 제34권11A호
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• pp.904-908
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• 2009

The PZT(lead, zirconium, titanium) based ceramics which, are reported to be ferroelectric materials have their important applications in the areas of surface acoustic waves (SAW), filters, infrared detectors, actuators, ferroelectric random acess memory, speakers, electronic switches etc. Moreover, these PZT materials possess the large electromechanical coupling factor, large spontaneous polarization, low dielectric loss and low internal stress etc. Hence, keeping in view the unique properties of PZT piezoelectric ceramics we also tried to synthesize indigenously the small sized PZT ceramic powder in the laboratory by using the modified sol-gel approach. In this paper, Propyl alcohol based sol-gel method was used for preparation of PZT piezoelectric ceramic. The powder obtained by this sol-gel process was calcined and sintering to reach a pyrochlore-free crystal phase. The characterization of synthesized material was carried out by the XRD analysis and the surface morphology was determined by high resolution scanning electron microscopy.

• Structural Monitoring and Maintenance
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• 제4권3호
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• pp.237-253
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• 2017

Among various structural health monitoring technologies, impedance-based damage detection has been recognized as a promising tool for diagnosing critical members of civil structures. Since the piezoelectric transducers used in the impedance-based technique should be bonded to the surface of the structure using bonding layers (e.g., epoxy layer), it is hard to maintain the as-built condition of the bonding layers and to reconfigure the devices if needed. This study presents an experimental investigation by using magnetically attached PZT-interface for the impedance-based damage detection in bolted girder connections. Firstly, the principle of the impedance-based damage detection via the PZT-interface device is outlined. Secondly, a PZT-interface attachment method in which permanent magnets are used to replace the conventional bonding layers is proposed. Finally, the use of the magnetic attraction for the PZT-interface is experimentally evaluated via detecting the bolt-loosening events in a bolted girder connection. Also, the sensitivity of impedance signatures obtained from the PZT-interface is analyzed with regard to the interface's material.

• 한국전기전자재료학회논문지
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• 제24권5호
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• pp.416-421
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• 2011

Nowadays, the increasing demands upon mobile devices such as wireless sensor networks and the recent advent of low power electrical devices such as MEMS make such renewable power sources attractive. A vibration-driven MEMS lead zirconate titanate $Pb(Zr,Ti)O_3$ (PZT) cantilever device is developed for energy harvesting application. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electron ic devices. The PZT cantilever is used d33 mode to get the electrical power. The PZT cantilever based energy harvester with the dimension of 7 mm${\times}$3 mm${\times}$0.03 mm is fabricated using micromachining technologies. This PZT cantilever has the mechanical resonance frequency with a 900 Hz. With these conditions, we get experimentally the 37 uW output power from this device with the application of 1g acceleration using the 900 Hz vibration. From this study, we show the feasibility of one of energy harvesting candidates using PZT based structure. This PZT energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.

• E2M - 전기 전자와 첨단 소재
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• 제10권10호
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• pp.983-988
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• 1997

We investigated the structural and dielectric properties of PZT(20/80)/PZT(80/20) heterolayered thin films that fabricated by the alkoxide-based Sol-Gel method. PZT(20/80)/PZT(80/20) heterolayered thin films were spin-coated on the Pt/Ti/SiO$_2$/Si substrate with PZT(20/80) film of tetragonal structure and PZT(80/20) film of rhombohedral structure by turns. Each layers were dried to remove the organic materials at 30$0^{\circ}C$ for 30min and sintered at $650^{\circ}C$ for 1hr. This procedure was repeated several times to form PZT(20/80)/PZT(80/20) heterolayered films and thickness of the film obtained by one-times of drying/sintering process was approximately 80-90nm. PZt-1, 3, 5 films with top layer of PZT(20/80) film of tetragonal structure showed fine grain structure and PZT-2, 4, 6 films with top layer of PZT(80/20) film of rhombohedral structure showed the dense grain microstructure without rosette-type. Dielectric constant and dielectric loss of the PZT-6 film were approximaterly 1385 and 3.3% respectively. Increasing the number of coatings remanent polarization was increased and coercive field was decreased and the values of the PZT-6 film were 8.13$\mu$C/cm$^2$and 12.5kV/cm respectively.

• Smart Structures and Systems
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• 제9권6호
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• pp.489-504
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• 2012

For the safety of prestressed structures such as cable-stayed bridges and prestressed concrete bridges, it is very important to ensure the prestress force of cable or tendon. The loss of prestress force could significantly reduce load carrying capacity of the structure and even result in structural collapse. The objective of this study is to present a smart PZT-interface for wireless impedance-based prestress-loss monitoring in tendon-anchorage connection. Firstly, a smart PZT-interface is newly designed for sensitively monitoring of electro-mechanical impedance changes in tendon-anchorage subsystem. To analyze the effect of prestress force, an analytical model of tendon-anchorage is described regarding to the relationship between prestress force and structural parameters of the anchorage contact region. Based on the analytical model, an impedance-based method for monitoring of prestress-loss is conducted using the impedance-sensitive PZT-interface. Secondly, wireless impedance sensor node working on Imote2 platforms, which is interacted with the smart PZT-interface, is outlined. Finally, experiment on a lab-scale tendon-anchorage of a prestressed concrete girder is conducted to evaluate the performance of the smart PZT-interface along with the wireless impedance sensor node on prestress-loss detection. Frequency shift and cross correlation deviation of impedance signature are utilized to estimate impedance variation due to prestress-loss.

• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.458-464
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• 1998

This paper gives characterization of substrate and PZT(53/47) thin film deposited by metalorganic decomposition, which is concerned in deposition process and device fabrication process, to fabricate micro electro mechanical system (MEMS) device with piezoelectric material. The PZT thin films deposited by MOD at 700^{\circ}C$ for 30 minutes had a polycrystallinity, that is, no substrate dependence, while different interface were developed depending on the bottom electrodes. Such a structural variation could influence on not only the properties of the PZT film but also etching process for fabricating MEMS devices. Therefore the electrode structure is a very important factor in the deposition of the PZT film during etching process by HF acid for MEMS device with piezoelectric material. Piezoelectric coefficients of the PZT films on the different substrates were 40 and 80 pm/V at an applied voltage of 4V. Based in these results, it was possible for deposition of the PZT film by MOD to apply MEMS device fabrication process based on piezoelectricity after selection of proper bottom electrode.

• Smart Structures and Systems
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• 제11권2호
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• pp.217-240
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• 2013

In this paper, practical methods to utilize PZT's dual piezoelectric effects (i.e., dynamic strain and electro-mechanical (E/M) impedance responses) for damage detection in beam-type structures are presented. In order to achieve the objective, the following approaches are implemented. Firstly, PZT material's dual piezoelectric characteristics on dynamic strain and E/M impedance are investigated. Secondly, global vibration-based and local impedance-based methods to detect the occurrence and the location of damage are presented. Finally, the vibration-based and impedance-based damage detection methods using the dual piezoelectric responses are evaluated from experiments on a lab-scaled beam for several damage scenarios. Damage detection results from using PZT sensor are compared with those obtained from using accelerometer and electric strain gauge.

• Smart Structures and Systems
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• 제1권4호
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• pp.339-353
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• 2005

This paper presents the results of a feasibility study on an impedance-based damage detection technique using thickness modes of piezoelectric (PZT) patches for steel structures. It is newly proposed to analyze the changes of the impedances of the thickness modes (frequency range > 1 MHz) at the PZT based on its resonant frequency shifts rather than those of the lateral modes (frequency range > 20 kHz) at the PZT based on its root mean square (RMS) deviations, since the former gives more significant variations in the resonant frequency shifts of the signals for identifying localities of small damages under the same measurement condition. In this paper, firstly, a numerical analysis was performed to understand the basics of the NDE technique using the impedance using an idealized 1-D electro-mechanical model consisting of a steel plate and a PZT patch. Then, experimental studies were carried out on two kinds of structural members of steel. Comparisons have been made between the results of crack detections using the thickness and lateral modes of the PZT patches.