• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.5
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• pp.405-410
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• 2009

The conventional ultrasonic nozzle produces a mist by applying an ultrasonic vibration into a non-flowering liquid. In this paper, we first present a novel designed nozzle type sprayer that is able to apply an ultrasonic vibration directly to the moving liquid and generate a mist instantly. For the novel nozzle, a ring-type actuator of the novel nozzle was designed and built using the PZW-PMN-PZT ceramics. This paper will describe a variety of physical, mechanical, and electrical characteristics of the ultrasonic nozzle. The characteristics of the mist particles was also measured as the amount of the outflow liquid was varied.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.126-129
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• 1999

Dielectric and piezoelectric properties of perovskite materials such as La modified $Pb(Zr,Ti)O_3$ ceramics and $Pb(Zn_{1/3}Nb_{2/3})O_3-PbTiO_3$ single crystals were investigated for cryogenic capacitor and actuator applications. Enhanced extrinsic contributions resulted in piezoelectric coefficient (d33) as high as 250 pC/N at 30 K, superior to that of PZT ($d_{33}$ ~ 100 pC/N). This cryogenic property enhancement was associated with retuning the MPB (or cryogenic temperatures. PZN-PT single crystals exhibited dramatic property improvements such as $d_{33}$ > 500 pC/N at 30 K as a result of an engineered domain state.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.838-841
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• 2003

This paper shows results on the application of optical fiber sensors(OFS) for locations of ultrasonic signals in silicon insulating oil. The OFS system based on the principle of Sagnac interferometry has been designed and established for this work. The hollowed cylindrical mandrel wound by single mode optical fiber was used as a sensing component and ultrasonic signals which simulate the partial discharge In the oil have been generated by PZT actuator operated with function generator. The experimental results shows that the OFS has a excellent performance for the PD location with resolutions less than 1$^{\circ}C$ error range in the miniature insulating oil tank.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.419-423
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• 2005

In microfactory, loading/unloading mechanism supply the row material to processing machines for manufacturing process such as pressing, cutting, plastic deformation. This mechanism for rnicrofactory is designed as modularity robot. Microfactory system have to be flexible structure for variety product item. For system flexibility, applied mechanisms are developed as moduality. Robot moduality needs the specific characteristics which are different from one of macro, typical robot system. In this paper, we discussed about the modularity robot. and proposed the loading/unloading mechanism for working in microfactory system.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.11
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• pp.622-626
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• 2000

In this paper, an optical fiber sensor(OF sensor) utilizing the principal of Sagnac interferometer was proposed to detect the discharge signals. The needle-sphere electrode system in insulating oil generated the signals. The performance of OF sensor was checked by sinusoidal calibration signal generated by PZT actuator at 198KHz. The detected discharge signals consisted of acoustic signal and the electrical noise. The noise signal could be removed by digital low pass filter. It was demonstrated that the OF sensor in this research had a possibility to detect the discharge signals in power apparatus.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.314-317
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• 2005

As demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. The ultra precision stage wasn't yet applied in the optical alignment and the optical element alignment was taken too many times. In this paper, the optical element alignment of ultra precision positioning stage was studied. The alignment algorithm is comprised of field search and peak search algorithms. The procedure of the alignment algorithms applied to the ultra precision positioning stage are developed by LabView programming.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.21-27
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• 2023

In this article, a plate-type megasonic cleaning system with cooling pins is proposed for the sliced ingot, which is a raw material of silicon (Si) wafers. The megasonic system is operated with a lead zirconate titanate (PZT) actuator, which has high electric resistance, thus when it is being operated, it dissipates much heat. So this article proposes a megasonic system with cooling pins. In the design process, finite element analysis was performed and the results were used for the design of the waveguide. The frequency with the maximum impedance value was 998 kHz, which agreed well with the measured value of 997 kHz with 0.1 % error. Based on the results, the 1 MHz waveguide was fabricated. Acoustic pressures were measured, and analyzed. Finally, cleaning tests were performed, and 90 % particle removal efficiency (PRE) was achieved over 10 W power. These results imply that the developed 1 MHz megasonic will effectively clean sliced ingot wafer surfaces.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.206-206
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• 2008

압전소자를 이용한 초음파 모터는 전자기적 원리로 동작하는 기존의 모터에 비해 구조가 간단하고 소형, 경량화가 가능하며 저속에서 큰 토크가 가능하고 ${\mu}m$단위 까지 정밀제어가 가능하다는 장점 등으로 인해 그 응용분야가 점차 확대되고 있다. 초음파 모터의 원리는 수평과 수직방향에서 변위가 타원형 운동을 형성하는 것이다. 따라서 선택한 타원운동의 방식에 의해서 모터의 형상이 달라진다. 초음파 모터는 액츄에이터를 사용하여 만들기 때문에 액츄에이터의 특성은 모터의 타원변위나 토크에 영향을 미친다. 단판형 액츄에이터에 비하여 적층 액츄에이터는 입력 임피던스를 낮추어 낮은 구동전압에서 구동이 가능하며 큰 변위와 토크를 발생하기 때문에 진동자의 수명 향상과 구동전압을 낮추기에 적합하다. 적층 액츄에이터는 변위량이나 응력 등을 개선하기 위해서 전기기계 결합계수(kp) 및 압전 d상수가 큰 재료가 요구되며, 고전압에서 장시간 구동 시 마찰에 의한 열손실을 감소시키기 위해 높은 기계적 품질계수(Qm)를 가져야한다. 적층 시 내부전극으로 사용하는 Pd, Pt가 함유된 전극은 가격이 비싸 제조비용을 상승시킨다. 상대적으로 값싼 Ag전극을 사용하면 비용절감을 할 수 있지만 융점이 낮아서 저온소결이 불가피하다. 따라서, 특성이 우수한 적층 액츄에이터를 제조하기 위해서 저손실, 저온소결 할 수 있는 액츄에이터 재료가 필요한 실정이다. L1-B4 혈 선혈 초음파 모터는 L1모드와 B4모드의 공진 주파수가 일치하여야 큰 변위를 얻을 수 있는데 이전의 논문에서 Atila를 이용한 시뮬레이션 결과를 분석한 봐 있다. 적층 액츄에이터의 층수를 5,7,9,11,13,15층으로 하여 L1-B4모드에서의 공진주파수를 비교한 결과 13 층일 때 두 모드가 비슷한 공진주파수를 보였고, 티원변위궤적도 다른 층수에 비해 크게 나타났다. 본 연구에서는 시뮬레이션 결과 가장 좋은 특성을 보인 13층 액츄에이터로 선형 초음파 모터를 제작하였다. 또한, 액츄에이터는 압전 및 유전특성이 우수한 저온소결 PZW-PMN-PZT세라믹을 이용하여 제작하였고, 내부전극으로 Ag전극을 사용하였다. 제작된 13 층 선형초음파모터를 가지고 프리로드 및 전압에 따른 속도를 조사하였고, 시뮬레이션 결과와 비교해 보았다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.8
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• pp.757-764
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• 2015

Mathematical modeling of focal plane compensation device in the small earth-observation satellite camera has been conducted experimently for compensation of micro-vibration disturbance. The PZT actuators are used as control actuators for compensation device. It is quite difficult to build up mathematical model because of hysteresis characteristic of PZT actuators. Therefore, the compensation device system is assumed as a $2^{nd}$ order linear system and modeled by using MATLAB System Identification Toolbox. It has been found that four linear models of compensation device are needed to meet 10% error in the input frequency range of 0~50Hz. These models describe accurately the dynamics of compensation device in the 4 divided domains of the input frequency range of 0~50Hz, respectively. Micro-vibration disturbance can be compensated by feedback control strategy of switching four models appropriately according to the input frequency.

• Smart Structures and Systems
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• v.8 no.3
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• pp.303-320
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• 2011

Comparing to active damage monitoring, impact localization on composite by using time reversal focusing method has several difficulties. First, the transfer function of the actuator-sensor path is difficult to be obtained because of the limitation that no impact experiment is permitted to perform on the real structure and the difficulty to model it because the performance of real aircraft composite is much more complicated comparing to metal structure. Second, the position of impact is unknown and can not be controlled as the excitation signal used in the active monitoring. This makes it not applicable to compare the difference between the excitation and the focused signal. Another difficulty is that impact signal is frequency broadband, giving rise to the difficulty to process virtual synthesis because of the highly dispersion nature of frequency broadband Lamb wave in plate-like structure. Aiming at developing a practical method for on-line localization of impact on aircraft composite structure which can take advantage of time reversal focusing and does not rely on the transfer function, a PZT sensor array based phase synthesis time reversal impact imaging method is proposed. The complex Shannon wavelet transform is presented to extract the frequency narrow-band signals from the impact responded signals of PZT sensors. A phase synthesis process of the frequency narrow-band signals is implemented to search the time reversal focusing position on the structure which represents the impact position. Evaluation experiments on a carbon fiber composite structure show that the proposed method realizes the impact imaging and localization with an error less than 1.5 cm. Discussion of the influence of velocity errors and measurement noise is also given in detail.