• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.1
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• pp.38-44
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• 2000

The background of this study lies in he investigation of the formation mechanism of ductile mode(nkanometer-size) chips of brittle materials such as fine ceramics glass and silicon. As the first step to achieve this purpose this paper intends to observe the micro-deformation behavior of these materials in sub${\mu}{\textrm}{m}$ depth indentation tests using a diamond indentor. In this study it was developed Ultra-Micro Indentation. Device using the PZT actuator. Experimentally by using the Ultra-Micro Indentation device the micro fracture behavior of the silicon wafer was investigated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation appartus.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.228-233
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• 2002

General modeling of a resonant shunting damper has been made from piezoelectric sensor/actuator equation. It is found that an additional damping, which is augmented to a system, is generated by the shunt damping effect. The transfer function of the tuned electrical absorber is derived for both series and parallel shunt circuit. The governing equations and associated boundary conditions are derived using Hamilton's Principle. The shunt voltage equation is also derived from the charge generated in PZT due to beam vibration. The frequency response function of the obtained mathematical model is compared with that of the tuned electrical absorber and experimental work. The vibration amplitude is reduced about 15 dB at targeted second mode frequency.

• Proceedings of the KAIS Fall Conference
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• 2010.11b
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• pp.631-633
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• 2010

최근 IT 및 반도체 산업이 발달함에 따라 많은 양의 반도체칩이 생산되어 그에 따른 반도체칩의 검사 요구가 급증하고 있다. 반도체칩의 전기적 특성을 검사하기 위해서는 리노핀을 이용한 탐침방법으로 통전검사를 통해 반도체칩의 이상유무를 판단하는 검사장비를 사용하고 있다. 많은 수의 반도체칩을 검사하기 위해서는 리노핀을 고속으로 구동할 수 있는 액튜에이터가 요구되는 바, 본 논문에서는 PZT 액튜에이터를 이용하여 리노핀을 고속으로 구동시키는 세라믹칩 성능검사용 액튜에이터를 개발했다.

• Proceedings of the KIEE Conference
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• 2004.07d
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• pp.2389-2391
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• 2004

This paper is concerned with the active vibration control of plate system using electromagnetic force actuator. The transfer function from the force input to the bending displacement was obtained via modal analysis results. Control algorithm are proposed and implemented on the experimental setups to show their efficacy. In this paper, the genetic algorithm is used to design a $H_2$ controller. Effectiveness and performance of the designed controller were verified by simulation and experiment results.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.97.2-97
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• 2002

A method for the non-destructive detection of damage using parameterized partial differential equations and Galerkin approximation techniques is presented. This method provides the theoretical and experimental verification of a nondestructive time domain approach to examine structural damage in smart structure. The time histories of the vibration response of structure were used to identify the presence of damage. Damage in a structure causes changes in the physical coefficients of mass density, elastic modulus and damping coefficient. This paper examines the beam-like structures with PVDF sensor and PZT actuator to perform identification of those physical parameters and to detect the...

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.97.3-97
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• 2002

This paper presents the vibration characteristics of an intelligent cantilever beam in contact with a fluid using a PZT actuator and PVDF film. The dynamic behaviors of a flexible beam-water interaction system are examined. The effect of the liquid level on free vibration of the composite beam in a partially liquid-filled circular cylinder is investigated. The coupled system is subject to an undisturbed boundary condition in the fluid domain. It was found that the coupled natural frequencies decreased with the fluid level for the identical composite beam due to added mass effect. In case of the free-free boundary condition, the natural frequency gently decreased at fluid water level betw...

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1203-1206
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory, a micro-milling machine is developed for micro machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, air turbine spindle which has maximum 150.000 rpm. It is applicable to milling and drilling machining. This paper shows the possibility of micro machining and characteristics of micro end milling process by using micro machine. A machining of micro barrier ribs using 0.2 mm flat type end mill was achieved by micro-milling machine. As experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.328.2-328
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• 2002

General modeling of a resonant shunting damper has been made Iron piezoelectric sensor/actuator equation. It is found that an additional damping, which is augmented to a system, is generated by the shunt damping effect The transfer function of the tuned electrical absorber is derived for both series and parallel shunt circuit. The governing equations and associated boundary conditions are derived using Hamilton's Principle. The shunt voltage equation is also derived from the charge generated in PZT due to beam vibration. The frequency response function of the obtained mathematical model is compared with that of the tuned eledtrical absorber and experimental work. The vibration amplitude is reduced about 15 dB at targeted second mode frequency.

• The Journal of the Acoustical Society of Korea
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• v.17 no.2
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• pp.25-31
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• 1998

본 연구에서는 자동차 유리판에 초음파 대역 진동을 효율적으로 발생시킬 수 있는 압전 액츄에이터를 개발하고자 하였다. 자동차 유리판을 단순지지 평판으로 가정하였으며, 액츄에이터로는 PZT 진동자를 사용하였다. 유한 요소법(Finite Element Method)을 통하여 유리판의 최적 공진 주파수와 유리판에 부착할 압전 진동자의 구조 조건인 최적 위치와 개 수를 결정하였다. 설계 결과에 따라 자동차 유리판에 압전 진동자를 부착하여 임펄스 응답 해석(impulse response analysis)과 임피던스 해석(impedance analysis)을 수행하여 구동 주 파수를 확인하였다. 그 결과, 이 주파수로 가진하여 유리판 전면에 걸쳐 고른 초음파 진동이 분포함을 확인하였으며, 나아가 전기적 임피던스 매칭(impedance matching)을 통해 더 큰 효율의 진동을 발생시킬 수 있었다.