• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.1
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• pp.38-44
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• 2000

The background of this study lies in he investigation of the formation mechanism of ductile mode(nkanometer-size) chips of brittle materials such as fine ceramics glass and silicon. As the first step to achieve this purpose this paper intends to observe the micro-deformation behavior of these materials in sub${\mu}{\textrm}{m}$ depth indentation tests using a diamond indentor. In this study it was developed Ultra-Micro Indentation. Device using the PZT actuator. Experimentally by using the Ultra-Micro Indentation device the micro fracture behavior of the silicon wafer was investigated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation appartus.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.4 s.247
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• Smart Structures and Systems
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• v.16 no.5
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• pp.835-851
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• 2015

This paper presents theoretical and experimental evaluation of the structural health monitoring (SHM) capability of piezoelectric wafer active sensors (PWAS) at elevated temperatures. This is important because the technologies for structural sensing and monitoring need to account for the thermal effect and compensate for it. Permanently installed PWAS transducers have been One of the extensively employed sensor technologies for in-situ continuous SHM. In this paper, the electro-mechanical impedance spectroscopy (EMIS) method has been utilized as a dynamic descriptor of PWAS behavior and as a high frequency standing wave local modal technique. Another SHM technology utilizes PWAS as far-field transient transducers to excite and detect guided waves propagating through the structure. This paper first presents how the EMIS method is used to qualify and quantify circular PWAS resonators in an increasing temperature environment up to 230 deg C. The piezoelectric material degradation with temperature was investigated and trends of variation with temperature were deduced from experimental measurements. These effects were introduced in a wave propagation simulation software called Wave Form Revealer (WFR). The thermal effects on the substrate material were also considered. Thus, the changes in the propagating guided wave signal at various temperatures could be simulated. The paper ends with summary and conclusions followed by suggestions for further work.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.21-27
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• 2023

In this article, a plate-type megasonic cleaning system with cooling pins is proposed for the sliced ingot, which is a raw material of silicon (Si) wafers. The megasonic system is operated with a lead zirconate titanate (PZT) actuator, which has high electric resistance, thus when it is being operated, it dissipates much heat. So this article proposes a megasonic system with cooling pins. In the design process, finite element analysis was performed and the results were used for the design of the waveguide. The frequency with the maximum impedance value was 998 kHz, which agreed well with the measured value of 997 kHz with 0.1 % error. Based on the results, the 1 MHz waveguide was fabricated. Acoustic pressures were measured, and analyzed. Finally, cleaning tests were performed, and 90 % particle removal efficiency (PRE) was achieved over 10 W power. These results imply that the developed 1 MHz megasonic will effectively clean sliced ingot wafer surfaces.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.24 no.5
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• pp.553-567
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• 2011

During the last three years, the possibility of the time reversal Lamb waves has been paid attention to for structural health monitoring of a plate. This study proposes a numerical scheme which can simulate the spatial focusing of time reversal Lamb waves on a rectangular plate. In this scheme, a time reversal process is formulated in the frequency domain using active virtual sensors being equivalent to the mirror effects of an actual sensor due to wave reflection on the plate boundary. Forward and backward Lamb wave propagations are represented by scalar functions for simulating the spatial focusing of time reversal Lamb waves. The validity of the proposed scheme is demonstrated through the comparison to the results of finite element analysis in which the spatial focusing of time reversal Lamb waves is realized by wafer-type piezoelectric(PZT) transducers collocated on a rectangular plate.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.10
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• pp.1514-1519
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• 2001

This paper is concerned with design, manufacturing and performance test of LIPCA ( Lightweight Piezo- composite Curved Actuator) using a top carbon fiber composite layer with near -zero CTE(coefficient of thermal expansion), a middle PZT ceramic wafer and a bottom glass/epoxy layer with high CTE. The main point of this design is to replace the heavy metal layers of THUNDER by thigh tweight fiber reinforced plastic layers without losing capabilities to generate high force and large displacement. It is possible to save weight up to about 30% if we replace the metallic backing material by the light fiber composite layer. We can also have design flexibility by selecting the fiber direction and the size of prepreg layers. In addition to the lightweight advantage and design flexibility, the proposed device can be manufactured without adhesive layers when we use epoxy resin prepreg system. Glass/epoxy prepregs, a ceramic wafer with electrode surfaces, and a graphite/epoxy prepreg were simply stacked and cured at an elevated temperature (177 $^{circ}C$ after following an autoclave bagging process. It was found that the manufactured composite laminate device had a sufficient curvature after detached from a flat mold. The analysis method of the cure curvature of LIPCA using the classical lamination theory is presented. The predicted curvatures are fairly in agreement with the experimental ones. In order to investigate the merits of LIPCA, a performance test of both LIPCA and THUNDE$^{TM}$ were conducted under the same boundary conditions. From the experimental actuation tests, it was observed that the developed actuator could generate larger actuation displacement than THUNDERT$^{TM}$.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.37 no.1
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• pp.217-229
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• 2017

The high-frequency electro-mechanical signatures, which are excited and received by piezoelectric wafers mounted on a beam, are sensitive to incipient defect in a beam. Predicting the sensing range of the piezoelectric wafers is needed to effectively conduct damage assessment of a beam through utilizing their advantage. Damping of a beam plays the most important role in determining the sensing range among other features. This paper has proposed a scheme for estimating high-frequency damping of a beam through electro-mechanical signatures of piezoelectric wafers mounted on the beam. Considering damping effect while resonance of a beam evolves, wave perspective is adopted to formulate the electro-mechanical signatures of piezoelectric wafers. The damping of a beam is estimated through the least squares method minimizing the difference between the calculated and the measured damping ratio function values which are obtained from formulated and measured electro-mechanical signatures, respectively. The validity of the proposed scheme has been demonstrated through numerical and experimental examples using an aluminum beam with collocated piezoelectric wafers.

• Journal of Electrical Engineering and Technology
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• v.5 no.2
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• pp.337-341
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• 2010

In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.30 no.5
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• pp.94-100
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• 2002

This paper is concerned with the development, and performance test of LIPCA (Lightweight Piezo-composite Curved Actuator) that is lighter than other conventional piezo-composite type actuators. LIPCA is composed of top fiber composite layers with a high modulus and low CTE (Coefficient of Thermal Expansion), a middle PZT cermaic wafer, and base layers with a high modulus and high CTE. The performance of each actuator was evaluated using an actuator test system consisting of an actuator supporting jig, a high voltage actuating power supplier, and a non-contact laser measuring system. The simply supported condition actuator was excited by the power supplier with 1.0Hz cycle and up to $100\sim400V_{pp}$. The displacement at the center point of actuator was measured with non-contact laser displacement measuring system, It has been shown that the LIPCA-C2 can 34% decrease in mass and 13% increase in displacement compared to THUNDER.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.3
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• pp.270-280
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• 2016

This paper investigates the evolution of EM admittance of piezoelectric transducers mounted on a notched beam from wave propagation perspective. A finite element analysis is adopted to obtain numerical solutions for Lamb waves reverberating on the notched beam. The mode-converted Lamb wave signals due to a notch are extracted by using the polarization characteristics of piezoelectric transducers collocated on the beam. Then, a series of temporal spectrums are computed to demonstrate the evolution of EM admittance through fast Fourier transform of the mode-converted Lamb wave signals which are consecutively truncated in the time domain. When truncation time is relatively small, the corresponding temporal spectrum is governed by the characteristics of the input driving frequency. As truncation time becomes large, however, the modal characteristics of the notched beam play a crucial role in the temporal spectrum within the input driving frequency band. This implies that mode-converted Lamb waves reverberating on the beam contributes to the resonance of the beam. The root mean square values are computed for the temporal spectrums in the vicinity of each resonance frequency. The root mean square values increase monotonically with respect to truncation time for any resonance frequencies. Finally the implications of the numerical observation are discussed in the context of damage detection of a beam.