• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.1073-1078
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• 2003

This paper presents the vibration characteristics of a cantilever beam in contact with a fluid using a PZT actuator and PVDF film. dynamic behaviors of a flexible beam-water interaction system are examined. The effect of the liquid level on free vibration of the composite beam in a partially liquid-filled circular cylinder is investigated. The coupled system is subject to an undisturbed boundary condition un the fluid domain. In the vibration analysis of a wetted beam. the decoupled analyses between beam and fluid have been conventionally employed by considering first the composite beam vibration in the all and secondly Performing the correction taking account for surrounding fluid effects. That is, this investigation was to look at how natural frequencies, mode shapes. and damping are affected by liquid level variations. The signals from the sensor according to the applied input voltage are digitalized and filtered in order to obtain the dynamic characteristics of the composite beam in contact with fluid. It was found that the coupled natural frequencies decreased with the fluid level for the identical composite beam due to added mass effect. In case of the free-free boundary condition, the natural frequency gently decreased at fluid water level between 20% and 80% in the first tending mode and we found out the bends of stair shape for added mass effect of the fluid.

• Transactions on Electrical and Electronic Materials
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• 제13권5호
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• pp.215-220
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• 2012

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.191-194
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• 2002

In optical pick-up, optical components such as objective lens, collimator, mirror, laser diode and photo diode are mounted on the pick-up base. These components must keep their original position during operation for proper transmittance of information from laser diode to optical disk and back to photo diode. However, micro thermal deformation of pick-up base which is induced by thermal environment during operation can deteriorate the performance of optical pick-up. Therefore, it is important to measure and analyze the thermal deformation behavior of pick-up base under thermal environment. In the present study, a measurement system using holographic interferometry was designed to measure micro thermal deformation of pick up base. The measurement system was verified by using the deformation of cantilever with prescribed motion actuated by PZT with 1 nm resolution. Interferometric measurement was compared quantitatively with that induced by PZT actuator. Finally, micro thermal deformation of pick-up base under actual thermal environment was measured using the present holographic interferometry and the results were analysed.

• 한국군사과학기술학회지
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• 제8권4호
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• pp.130-135
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• 2005

This paper presents application possibility of Lightweight Piezoceramic Composite Actuator(LIPCA) to suppress vibration of dynamic structures as an actuator. LIPCA is composed of a piezoelectric layer, a carbon/epoxy layer and glass/epoxy layers. When compared to the bare piezoelectric ceramic(PZT), LIPCA has advantages such as high performance, durability and reliability. In this study, performances of LIPCA have been estimated in an active vibration control system. Experiments were performed on an aluminum beam with cantilever configuration. In this test, strain gages and single LIPCA are attached on the aluminum beam with epoxy resin. Digital ON-OFF control algorithm is applied into the system to exhibit performance of LIPCA as actuator in active vibration control system. First, we performed static actuation test of bare PZT and LIPCA in order to show the superiority of LIPCA. Secondly, we carried out beam vibration control test using LIPCA. The results showed LIPCA could suppress free vibration of the aluminum beam, which means that LIPCA can be applied as an actuator to control vibration of dynamic structures.

• Smart Structures and Systems
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• 제16권5호
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• pp.759-780
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• 2015

Based on the theory of piezoelasticity, the static performance of a piezoelectric bilayer cantilever fully covered with electrodes on the upper and lower surfaces is studied. Three models are considered, i.e., the sensor model, the driving displacement model and the blocking force model. By establishing suitable boundary conditions and proposing an appropriate Airy stress function, the exact solutions for piezoelectric bilayer cantilevers are obtained, and the effect of ambient thermal excitation is taken into account. Since the layer thicknesses and material parameters are distinguished in different layers, this paper gives unified solutions for composite piezoelectric bilayer cantilevers including piezoelectric bimorph and piezoelectric heterogeneous bimorph, etc. For some special cases, the simplifications of the present results are compared with other solutions given by other researches based on one-dimensional constitutive equations, and some amendments have been found. The present investigation shows: (1) for a PZT-4 piezoelectric bimorph, the amendments of tip deflections induced by an end shear force, an end moment or an external voltage are about 19.59%, 23.72% and 7.21%, respectively; (2) for a PZT-4-Al piezoelectric heterogeneous bimorph with constant layer thicknesses, the amendments of tip deflections induced by an end shear force, an end moment or an external voltage are 9.85%, 11.78% and 4.07%, respectively, and the amendments of the electrode charges induced by an end shear force or an end moment are both 1.04%; (3) for a PZT-4-Al piezoelectric heterogeneous bimorph with different layer thicknesses, the maximum amendment of tip deflection approaches 23.72%, and the maximum amendment of electrode charge approaches 31.09%. The present solutions can be used to optimize bilayer devices, and the Airy stress function can be used to study other piezoelectric cantilevers including multi-layered piezoelectric cantilevers under corresponding loads.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.97.2-97
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• 2002

A method for the non-destructive detection of damage using parameterized partial differential equations and Galerkin approximation techniques is presented. This method provides the theoretical and experimental verification of a nondestructive time domain approach to examine structural damage in smart structure. The time histories of the vibration response of structure were used to identify the presence of damage. Damage in a structure causes changes in the physical coefficients of mass density, elastic modulus and damping coefficient. This paper examines the beam-like structures with PVDF sensor and PZT actuator to perform identification of those physical parameters and to detect the...

• Smart Structures and Systems
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• 제19권4호
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• pp.403-413
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• 2017

The present article encompasses a nonlinear finite element (FE) and genetic algorithm (GA) based optimal vibration energy harvesting from nonprismatic piezo-laminated cantilever beams. Three cases of cross section profiles (such as linear, parabolic and cubic) are modelled to analyse the geometric nonlinear effects on the output responses such as displacement, voltage, and power. The simultaneous effects of taper ratios (such as breadth and height taper) on the output power are also studied. The FE based nonlinear dynamic equation of motion has been solved by an implicit integration method (i.e., Newmark method in conjunction with the Newton-Raphson method). Besides this, a real coded GA based constrained optimization scheme has also been proposed to determine the best set of design variables for optimal harvesting of power within the safe limits of beam stress and PZT breakdown voltage.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 D
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• pp.2123-2125
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• 2002

This paper presents the use of piezoelectric ceramics for sensing and actuation purposes for vibration control. The PZT sensors and actuators are designed and fabricated. The transfer function of the beam is obtained via the Lagrangian method.

• Journal of Electrical Engineering and Technology
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• 제5권2호
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• pp.337-341
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• 2010

In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

• 대한기계학회논문집A
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• 제22권4호
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• pp.868-878
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• 1998

There are recently increasing needs for precision XYZ-stage in the fields of nanotechnology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). Force measurements are made in the AFM by monitoring the deflection of a flexible element (usually a cantilever) in response to the interaction force between the probe tip and the sample and controlling the force neasyred constant topography can be obtained. The power of the STM is based on the strong distance dependence of the tunneling current in the vacuum chamber and the current is a feedback for the tip to trace the surface topography. Therefore, it is required for XYZ-stage to position samples with nanometer resolution, without any crosscouples and any parasitic motion and with fast response. Nanometer resolution is essential to investigate topography with reasonable shape. No crosscouples and parasitic motion is essential to investigate topography without any shape distortion. Fast response is essential to investigate topography without any undesirable interaction between the probe tip and sample surface ; sample scratch. To satisfy these requirements, this paper presents a novel XYZ-stage concept, it is actuated by PZT and has a monolithic flexible body that is made symmetric as possible to guide the motion of the moving body linearly. PZT actuators have a very fast response and infinite resolution. Due to the monolithic structure, this XYZ-stage has no crosscouples and by symmetry it has no parasitic motion. Analytical modeling of this XYZ-stage and its verification by FEM modeling are performed and optimal design that is to maximize 1st natural frequencies of the stage is also presented and with that design values stage is manufactured.