• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.528-531
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• 2000

Deposition of PZT with UV laser ablatio was applied for realization of thin film sensors and actuators. Deposition rate of more than 20nm/min was attained by pulsed KrF excimer laser deposition, which is fairly better than those obtained by the other methods. Perovskite phase was obtained at room temperature deposition with Fast Atom Beam(FAB) treatment and annealing. Smart MEMS(Micro electro-mechanical system) is now a suject of interest in the field of micro optical devices, micro pumps, AFM cantilever devices etc. It can be fabricated by deposition of PZT thin films and micromachining. PZT films of more than 1 micron thickness is difficult to obtain by conventional methods. This is the reason why we applied excimer laser ablation for thin film deposition. The remanent polarization Pr of 700nm PZT thin film was measured, and the relative dielectric constant was determined to about 900 and the dielectric loss tangent was also measured to be about 0.04. XRD analysis shows that, after annealing at 650 degrees C in 1 hour, the perovskite structure would be formed with some amount of pyrochlore phase, as is the case of the annealing at 750 degrees C in 1 hour.

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.152-153
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• 2007

This paper describes a resonant driving piezoelectric micro cantilever practicable to ultrasound thrombolysis device for the treatment of ischemic stroke. The proposed piezoelectric cantilever was designed to be a unimorph structure of Si/$SiO_2$/Ti/Pt/PZT/Pt, and fabricated by top-down sequence etching process. The red blood cell (RBC) lysis experiment was carried out to confirm the usability of the proposed cantilever. Total 87.76 % of RBCs were ruptured using the ultrasound generated by up-down actuations of the fabricated cantilever with AC voltage having the frequency of 19.36 Hz and the magnitude of $30V_{p-p}$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.375-378
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• 2002

In this paper, the frequency response separation scheme is proposed for high scanning speed and simple structure of non-contact type of AFM. A self-sensing cantilever is attached on the actuator for detect the atomic force between tip and the media surface. VCM or PZT are used for actuator. This paper presents the method to simplify the actuator structure and the performance of each actuator for non-contact type AFM. Based on the frequency response separation scheme, the only one actuator plays roles 1311owing low frequency surface and modulating self-sensing cantilever tip in contrast with convention non-contact type AFM. 10 ${\mu}{\textrm}{m}$ standard grid sample imaged to verify proposed scheme. This result shows the possibility simplifying the actuator structure and reducing cost of non-contact type AFM.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.567-568
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• 2010

• Transactions of the Society of Information Storage Systems
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• v.2 no.2
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• pp.96-99
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• 2006

In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.144-149
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• 2003

Carbon tips were grown on Si cantilevers by applying an electron beam to them directly with Scanning Electron Microscope. A carbon tip was fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump. A number of control parameters for SEM, including exposure time, acceleration voltage, emission current, and beam probe current, were allowed to make various aspect ratio feature. The growth of carbon tips was not affected by the surface morphology of substrates. We could acquired the tip whose effective length is 0.5 $\mu\textrm{m}$, bottom diameter is 90 nm and cone half angle $3.5^{\circ}$ The growth technique of the high aspect ratio carbon tips on the tip-free cantilevers is available to reduce the complexities of fabricating sub-micron scale tips on the PZT thin film actuator integrated AFM cantilevers.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.5
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• pp.73-82
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• 2004

This paper presents the study on damage diagnosis of an intelligent cantilevered beams using PZT actuator and PVDF sensor This study provides the theoretical and experimental verification to examine structural damage. Time domain analysis for the non-destructive detection of damage is presented by parameterized partial differential equations and Galerkin approximation techniques. The time histories of the vibration response of structure were used to identify the presence of damage. Furthermore, this systematic approach permits one to use the piezomaterials to both excite and sense the vibration of structures. We also carried out the experimental verification about reliability of theoretical methods fur detecting the damage of a composite beam with PZT actuator and PVDF sensor. Experimental results are presented from tests on cantilevered composite beams which is damaged at different location and different dimensions. The results were compared with the simulation results. Good agreement between the results was found for the time shifts and amplitude difference in transients response of the cantilevered beam.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.97.3-97
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• 2002

This paper presents the vibration characteristics of an intelligent cantilever beam in contact with a fluid using a PZT actuator and PVDF film. The dynamic behaviors of a flexible beam-water interaction system are examined. The effect of the liquid level on free vibration of the composite beam in a partially liquid-filled circular cylinder is investigated. The coupled system is subject to an undisturbed boundary condition in the fluid domain. It was found that the coupled natural frequencies decreased with the fluid level for the identical composite beam due to added mass effect. In case of the free-free boundary condition, the natural frequency gently decreased at fluid water level betw...

• Journal of electromagnetic engineering and science
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• v.8 no.1
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• pp.6-11
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• 2008

Advances in low power design open the possibility to harvest energy from the environment to power electronic circuits. Electrical energy can be harvested from piezoelectric transducer. Piezoelectric materials can be used as mechanisms to transfer mechanical energy usually vibrating system into electrical energy that can be stored and used to power other devices. Micro- to milli-watts power can be generated from vibrating system. We developed definitive and analytical models to predict the power generated from a cantilever beam attached with piezoelectric transducer. Analytical models are pin-force method, enhanced pin-force method and Euler-Bernoulli method. Harmonic oscillations and random noise will be the two different forcing functions used to drive each system. It has been selected the best model for generating electric power based upon the analytical results obtained.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.220-221
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• 2008

With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device. The made 31 type triple-morph cantilever was resulted from the conditions of 100k$\Omega$, 0.25g, 154Hz respectively. The thick film was prepared at the condition of $6.57V_{rms}$, and its power was $432.31{\mu}W$ and its thickness was $50{\mu}m$.