• Title/Summary/Keyword: PZT Pump

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Vibration analysis of characteristics and valveless Type Piezoelectric micro-pump (VALVELSS 압전펌프 진동 해석 및 특성)

  • Lim, Jong-Nam;Oh, Jin-Heon;Lim, Kee-Joe;Kim, Hyun-Hoo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.185-185
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    • 2009
  • Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

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Power Management Circuit for Self-Powered Systems Using Vibration and Solar Energy (진동 및 빛 에너지를 이용한 자가발전 시스템용 전력관리 회로)

  • Seo, Wan-Suck;Kim, Min-Kyu;Yu, So-Hyeon;Yoon, Eun-Jung;Park, Jun-Ho;Yu, Chong-Gun
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2011.10a
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    • pp.419-422
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    • 2011
  • In this paper a dual-input self-powered power management system is proposed for low-power applications. The system is powered by merging the energy from a PZT vibration element and a solar cell. The proposed system consists of a charge pump for increasing the output voltage of a solar cell, a rectifier for DC conversion of the PZT output and a power management circuit for merging and managing the harvested energy. The performance of the design circuit has been verified through extensive simulation using a 0.18um CMOS technology. The chip area is $295um{\times}275um$.

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Design and Characteristics of valveless micro-pump for small liquid delivery (미소유체 밸브리스 압전펌프의 설계 및 특성)

  • Lim, Jong-Nam;Oh, Jin-Heon;Lim, Kee-Joe;Kim, Hyun-Hoo
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1275_1276
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    • 2009
  • Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein.

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Vibration analysis of valveless Type Piezoelectric micro-pump by using ATILA (ATILA를 이용한 진행파 회전형 밸브리스 압전펌프의 진동 해석)

  • Lim, Jong-Nam;Oh, Jin-Heon;Park, Cheol-Hyun;Lim, Kee-Joe;Kim, Hyun-Hoo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.215-216
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    • 2008
  • Using the extensional vibration mode of PZT ring, a piezopump is successfully made. The PZT ring is polarized with thickness direction. The traveling extensional wave along the circumference of the ring is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic ring.

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바이오응용을 위한 압전 공진형 MEMS 소자

  • Kim Yong Bum;Kim Hyung Joon;Kang Ji-Yoon;Kim Tae Song
    • 한국가시화정보학회:학술대회논문집
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    • 2002.04a
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    • pp.1-7
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    • 2002
  • This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

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Design of Multi-Phase Shift Controller for Valveless PZT Pump (밸브리스 압전펌프 연동구동 제어기 설계)

  • 조정대;박경민;노종호;함영복;유진산
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.1282-1285
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    • 2004
  • The high voltage driving system with multi-phase shifter including piezoelectric actuators comprised a driving power unit for outputting the driving power by converting input alternate current into direct current, a frequency shifting unit for supplying the direct current power and shifting or generating a frequency, a high-voltage amplification unit for amplifying the input signal outputted from the driving power unit and the frequency shifting unit into a high-voltage signal, and a phase shifting unit for shifting the phase difference of the amplified signal applied to the high-voltage amplification unit and driving plural piezoelectric actuators sequentially. The results that the operating voltage was stable, the voltage loss ratio was low and the response velocity was fast could be obtained. An experiment on performance of the high voltage driving system with multi-phase shifter designed and manufactured as above described was conducted by using a piezoelectric pump having 3 sheets of round unimorph piezoelectric actuators laminated respectively in a rectangular case. It sucks any fluid by causing the first piezoelectric actuator to shift from the inlet porter side, the phase delay of 60$^{\circ}$ causes the second piezoelectric actuator to begin to shift, and the phase delay of 120$^{\circ}$ causes the third piezoelectric actuator to begin to shift. As a result of measuring each change in the outlet flow rate of the piezoelectric pump, it was shown that the frequency-flow rate characteristic, the voltage-flow characteristic, and the load pressure-flow rate characteristic were improved.

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Enhancement of Oxygen Transfer Efficiency Using Vibrating lung Assist Device in In-Vitro Fluid Flow (In-vitro 유동장에서 진동형 폐 보조장치를 이용한 산소전달 효율의 향상)

  • 권대규;김기범;이삼철;정경락;이성철
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1332-1335
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    • 2003
  • This paper presents the enhancement of oxygen transfer efficiency using the vibrating intravascular lung assist device (VIVLAD) in in-vitro experiments for patients having chronic respiratory problems. The test section was a cylinder duct with the inner diameter of 30 mm. The flow rate was controlled by the pump and monitored by a built-in flow meter. The vibration apparatus was composed of a piezo-vibrator, a function generator. and a power amplifier. The direction of vibration was radial to the fluid flow. Gas flow rates of up to 6 l/min through the 120-cm-Jong hollow fibers have been achieved by exciting a piezo-vibrator. The output of PVDF sensor were investigated by various frequencies in VIVLAD. The experimental results showed that VIVLAD would be enhance oxygen transfer efficiency.

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Fabrication of the Liquid Analyzer us ing Micro-stereolithography Technology (Micro-stereolithography 기술을 이용한 용액분석 소자 제작)

  • 이영태
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.12
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    • pp.994-1000
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    • 2001
  • In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.

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Vibration analysis of valveless Type Piezoelectric micro-pump (막대형 밸브리스 압전펌프의 변위 분포 해석)

  • Lim, Jong-Nam;Oh, Jin-Heon;Lim, Kee-Joe;Kim, Hyun-Hoo
    • Proceedings of the KIEE Conference
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    • 2008.10a
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    • pp.119-120
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    • 2008
  • Using the extensional vibration mode of PZT bar, a piezopump is successfully made. The traveling extensional wave along the circumference of the bar is obtained by dividing standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic bar.

  • PDF