• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.101-102
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• 2006

PZT thin films, which are the representative ferroelectric materials in ferroelectric random access memory (FRAM), have some serious problem such as the imprint, retention and fatigue which ferroelectric properties are degraded by repetitive polarization. BL T thin film capacitors were fabricated by plasma etching, however, the plasma etching of BLT thin film was known to be very difficult. In our previous study, the ferroelectric materials such as PZT and BLT were patterned by chemical mechanical polishing (CMP) using damascene process to top electrode/ferroelectric material/bottom electrode. It is also possible to pattern the BLT thin film capacitors by CMP, however, the CMP damage was not considered in the experiments. The properties of BLT thin films were changed by the change of polishing pressure although the removal rate was directly proportional to the polishing pressure in CMP process.

• Journal of Biomedical Engineering Research
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• v.43 no.5
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• pp.319-330
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• 2022

In this study, the optimal driving frequency was derived through finite element analysis (FEA) to optimize the developed piezoelectric ultrasonic medical devices(PUMD) for bone surgery. The core of the PUMD is the piezoelectric ceramic (PZT), which is a vibrator that generates vibration energy. The piezoelectric ceramic shows the maximum current value with respect to the input voltage at the resonance frequency, which generates the maximum mechanical vibration. In the past, various studies have been conducted related to the analysis of PUMD, but most of the research so far has been limited to free vibration analysis. However, in order to derive the accurate resonant frequency, the initial stress generated by bolt tightening in the bolt-clamped Langevin type transducer (BLT) must be considered. In this study, after designing a PUMD, the driving performance according to the bolt tightening value was analyzed through FEA, and this was experimentally verified. First, the resonance mode and frequency response were confirmed through modal and harmonic analysis at 20-40 kHz, which is known as the optimal driving frequency band of PUMD for bone surgery. In addition, the design of the PUMD was confirmed by checking the mechanical behavior of the tip and the piezoelectric ceramic at the resonant frequency. Consequentially, the characteristic evaluation was performed, and it was confirmed that the resonant frequency result derived through the FEA was reasonable. Through this study, we presented a more rational FEA method than before for BLT transducers. We expect that this will shorten the time and cost of developing a PUMD, and will enable the development of more stable and high-quality products.

• Transactions of the Korean Society of Automotive Engineers
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• v.7 no.5
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• pp.31-39
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• 1999

A good atomization in uniform size brings the elevation of thermal efficiency in spray combustion, the beautiful painting on surfaces, and the economical sprinkling of chemicals. Ultrasonic atomization has been expected as a good uniform atomization mechanism due to its uniform size distribution. Influx, load, and physical properties of liquids are the effecting factors to atomize liquids. In this study, distilled water and city water are selected as reference liquids and gasoline, kerosene, and petroleum as fuel liquids. Characteristics and affinity to get the maximum effect for the ultrasonic atomization are observed by using the two ultrasonic transducers with 28kHz and 2MHz. Results show that the size distributions of liquid spray dorplet by the direct vibration method prevail over those by the aerosol method in uniform droplet size and as a whole, sizes of spray liquid droplets are increased slightly according to increasing influx in the direct vibration method and quantities of spray droplets in the aerosol method decreasing according to increasing liquid load h.

• Journal of ILASS-Korea
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• v.3 no.4
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• pp.50-57
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• 1998

The utilization of resonance should be considered to get the maximum effect of ultrasonic to atomize liquid. The ultrasonic generator, transducer, horn, and all attached parts are used to produce the resonance, and specially the characteristics of liquids such as liquid load, property, and etc., for the liquid atomization affinity are considered. In this study, the variable device of liquid load was made and distilled water and city water selected as experimental liquids were sprayed by a twin-fluid spray method and their diameters, distributions, and spray quantum of spray droplets were measured by the light scattering system. And all data were observed, compared and considered relatively. In results, a lot of phenomena of liquid atomization affinity by ultrasonic appeared in accordance with liquid loads, namely head h.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.151-152
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• 2006

Nowadays, great attention has been shown to the question of ultrasonic linear motor for accomplishing the high positioning accuracy and high driving force in the semiconductor and optical industry. Ultrasonic linear motors have many advantages such as simple structure, quick response, ability to maintain position without energy consumption, and electromagnetic effect. And BLT has attracted attention to accomplish large vibration amplitude and large mechanical force. Authors designed and developed the new type of ultra sonic linear motor with multi support mechanism, achieved 75N of output force and 0.45m/s of velocity.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.09a
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• pp.68-72
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• 2005

본 논문에서는 $Bi_{3}Ti_{4}O_{12}$에 Nd를 치환했을 때 향상되는 강유전체 특성을 sol-gel 방법을 이용하여 분석하였다. 이를 위해 $10\;wt\%$의 $12\%$과량의 Bi가 첨가된 $Bi_{3.15}Nd_{0.85}Ti_{13}O_{12}$ sol-gel 용액을 제작하였다. BNT 박막은 $Pt/TiO_2/SiO_2/Si$ 기판 위에 스핀 코팅 방법을 이용하여 증착하였으며, 최종 증착된 박막의 조성은 Rutherford backscattering spectroscopy 분석을 이용하여 $Bi_{3.15}Nd_{0.85}Ti_{13}O_{12}$임을 확인하였다. 200 nm 두께의 BNT 박막은 XRD 분석을 통해 (117)방향에서 강한 피크가 나오며, (001) 방향에서 Nd 치환에 따른 효과로 억제된 피크가 나오는 것을 확인하였다. Pt/BNT/Pt 구조를 이용하여 잔류분극을 측정한 결과 7 V에서 $48\;{\mu}\;C/cm^2$ 이 나왔다. 이것은 다른 강유전체 물질인 PZT, SBT, BLT보다 월등히 큰 값이다.

• Proceedings of the KSME Conference
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• 2002.08a
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• pp.299-302
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• 2002

Characteristics of the twin fluid spray with ultrasonic forcing are examined in order to obtain the high efficiency of cold fog spray of the automatic pest control machine which has been widely used for the equipment cultivation recently. An electrostrictive vibrator of PZT BLT and a magnetostrictive vibrator of ${\pi}type$ with 28 kHz are applied as the ultrasonic transducer. All experiments are made and observed in 4 methods of spray ; a conventional spray method without ultrasonic forcing, an indirect vibration method with ultrasonic forcing, an improving duality method by ultrasonic forced within liquid, and a combined use method with both of the indirect vibration method and the improving quality method. In results, It was clarified that the ultrasonic effects the atomization of spray droplets and its efficiency is about $10{\%}$ and especially much more in the case of the combined use method.

• Journal of Biosystems Engineering
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• v.27 no.4
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• pp.317-326
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• 2002

Characteristics of a twin-fluid spray with ultrasonic vibration were examined in order to obtain a high efficiency of cold-fog spray of the automatic pest control machine which has been widely used in protected horticulture recently. An electrostrictive vibrator of PZT BLT and a magnetostrictive $\pi$-type vibrator were used applied as the ultrasonic transducers with a frequency of 28 kHz. All experiments were conducted in 4 methods of spray ; a conventional spray method without ultrasonic forcing, an indirect vibration method with ultrasonic forcing, an improving-quality method by ultrasonic forced within liquid, and a combined-use method with both of the indirect vibration method and the improving quality method. It was found that the ultrasonic energy increased the atomization efficiency of spray droplets about 10% and especially much more in the case of the combined-use method.

• Journal of Biosystems Engineering
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• v.28 no.4
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• pp.351-360
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• 2003

This study was carried out to settle the plugging problem which occurs frequently when agricultural wettable powder is used in pest control work using the crushing and the dispersing effects caused by irradiation of ultrasonic wave. Sonication was applied to the wettable powder suspension in a beaker for 30 seconds using a 28 kHz, 200 W PZT BLT, and the image of suspension before and after sonication was observed using a microscope and a SEM. The image of tow commercial wettable powder suspensions in water observed using an optics microscope showed that the agglomerated particles were irregularly distributed over the whole observed region when stirred mechanically, while showing more uniform distribution composed of comparatively single particles in the whole observed region after sonication. Concerning the above, the projected areas of particles in the four suspensions after sonication were decreased distinctively in the observed range of the microscope and the atomization of crystals was much developed. Over the measured range of 5.6∼4,157 ${\mu}$m particle size, the overall projected area of particles was decreased to 58.3∼89.6% on the average after sonication. When the SEM images of sonicated wettable powder suspensions dissolved in water and CH$_3$OH were compared to the suspensions before sonication, such phenomena as the atomization of particles, the expansion of voids between particles, the reduction and the decrease of agglomerated particle groups, and the progress of crack developments on the surface of flake-shaped particles were observed. It seemed possible that the plugging problem that occurs frequently in pest control machine when using wettable powder would be settled by the use of sonication.