• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.130-130
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• 2004

본 논문에서는 RF 스위치의 엑추에이터로 사용하기 위한 수평구동형 박막형 PZT 엑추에이터의 설계, 제작 및 시험에 관한 것이다 기존의 RF 스위치들은 대부분 수직 방향의 접촉 방식을 채택하고 있고, 대부분 구조체가 두껍지 않은 막으로 이루어져 있어서, 엑추에이터로부터 힘을 충분히 전달받지 못한다. 이로 인해, 접촉력이 상대적으로 작게 되어, 접촉저항을 줄이기 위한 접촉압력을 내기 위해 접촉 면적을 줄일 수밖에 없게 된다. 따라서, 본 연구에서는 효과적인 힘의 전달이 가능한 수평방향의 접촉 방식과 상대적으로 큰 힘을 낼 수 있는 PZT 엑추에이터를 사용하고자 한다.(중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.467-468
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• 2006

In this work, we present the comparison between $d_{31}\;and\;d_{33}$ mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for $d_{31}\;and\;d_{33}$ mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d31 mode was $12.2{\mu}m$ at 10V, the actuation characterization of d31 was better than that of d33 mode. We estimated that displacement of d33 mode would be larger than that of d31 above 30V.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.37-38
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• 2011

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.48-52
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• 2001

In this paper presents an accurate AFM used that is free from the Z-directional distortion of a servo actuator is described. Two mathematical correction methods by the in-situ self-calibrationare employed in this AFM. One is the method by the integration, and the other is the method by inverse function of the calibration curve. The in situ self-calibration method by the integration, the derivative of the calibration curve function of the PZT actuator is calculated from the profile measurement data sets which are obtained by repeating measurements after a small Z-directional shift. Input displacement at each sampling point is approximately estimated first by using a straight calibration line. The derivative is integrated with reference to the approximate input to obtain the approximate calibration curve. Then the approximation of the input value of each sampling point is improved using the obtained calibration curve. Next the integral of the derivative is improved using the newly estimated input values. As a result of repeating these improving process, the calibration curve converges to the correct one, and the distortion of the AFM image can be corrected. In the in situ self-calibration through evaluating the inverse function of the calibration curve, the profile measurement data sets were used during the data processing technique. Principles and experimental results of the two methods are presented.

• Korean Journal of Optics and Photonics
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• v.22 no.1
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• pp.46-52
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• 2011

A confocal microscope was developed utilizing a scanning sample stage based on a home-built double-compound flexure guide. A scanning sample stage with nano-scale resolution consisted of a double leaf spring based flexure, a displacement amplifying lever, a Piezo-electric Transducer(PZT) actuator and capacitance sensors. The performance of the two-axis stage was analyzed using a commercial finite element method program prior to the implementation. A single line laser was employed as the light source along with the Photo Multiplier Tube(PMT) that served as the detector. The performance of the developed confocal microscope was evaluated with a mouse ear skin imaging test. The designed scanning stage enabled us to build the confocal microscope without the two optical scanning mirror modules that are essential in the conventional laser scanning confocal microscope. The elimination of the scanning mirror modules makes the optical design of the confocal microscope simpler and more compact than the conventional system.