PZT Patterning using Ion Milling Process for Micro Piezoelectric Actuator Fabrication (마이크로 압전 엑츄에이터 제조를 위한 PZT 박막의 이온 밀링 식각 공정 연구)

• 박준식;김대식;박광범;박효덕;장연태;강성군
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.05a
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  • pp.61-61
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  • 2001
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The study on the degradation of surface properties of PZT thin films with time (PZT박막의 시간에 따른 표면특성열화에 관한 연구)

• 송한욱;홍종인;노광수;신정규;신현정
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.05a
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  • pp.103-103
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  • 2001
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A study on the properties and formation of PZT thin film by RTA (급속열처리법을 사용한 PZT박막의 형성 및 특성에 관한 연구)

• 백상훈;백수현;황유상;하용해;마재평;조현춘
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1992.05a
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  • pp.41-42
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  • 1992
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A study on the property of PZT Thin Film by RF magnetron sputtering (RF Magnetron Sputtering 으로 형성시킨 PZT 박막 특성 연구)

• 하용해;백수현;백상훈;최진석;이주현;조현춘;마재평
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1992.05b
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  • pp.138-139
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  • 1992
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Epitaxial PZT Thin Films with Coexisting Tetragonal and Rhombohedral Phases (정방정상과 능면체정상이 공존하는 에피형 PZT 박막)

• Jang, Hyeon-Myeong;O, Seong-Hun
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.04a
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  • pp.153.2-153.2
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  • 2000
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A Study on Electrical properties and stress of PZT Film capacitors (PZT박막캐패시터의 전기적성질과 응력에 관한 연구)

• Im, Wang-Gyu;An, Jeong-Ryeol;Lee, Jae-Chan
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.04a
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  • pp.53.2-53.2
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  • 2000
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Fabrication of PZT Thin-film Diaphragm and their Properties (PZT박막을 이용한 Diahragm 제작 및 특성)

• Song, Sang-Geun;Sin, Sang-Hun;Jeon, Jeong-Jin;Lee, Jae-Chan
• • Proceedings of the Korean Ceranic Society Conference
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  • 2003.04a
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  • pp.137.1-137
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  • 2003
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Growth Characteristics of PZT thin films by MOCVD using Ultrasonic Nebulization (초음파분무 MOCVD법에 의한 PZT 박막의 성장특성)

• Sin, Ho-Sik;Lee, Chun-Ho
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.10a
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  • pp.65.1-65
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  • 2000
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Study on ferroelectric properties of PZT thin films by stress effect (응력의 영향에 따른 PZT박막의 강유전체 특성에 관한 연구)

• Im, Wang-Gyu;Kim, Ju-Ho;Kim, Yong-Seong;Lee, Jae-Chan
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.10a
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  • pp.46.2-46
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  • 2000
• PDF

Dependence of electric and Piezoelectric properties on film thickness in sol-gel derived PZT thin films (Sol-Gel법으로 제조한 PZT 박막의 두께에 따른 특성변화)

• Park, Geun-Tae;Kim, Hyeon-Lee
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.10a
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  • pp.177.2-177
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  • 2000
• PDF

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