• 제목/요약/키워드: PZT(Pb(Zr,Ti)O$_3$

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RF Sputtering method를 이용한 Pb$(Zr{_{0.7}}Ti_{0.3})O_3$ 세라믹스 박막의 구조적 특성 (The structural Properties of the Pb$(Zr{_{0.7}}Ti_{0.3})O_3$ Ceramics Thin Films by RF Sputtering method)

  • 남성필;이상철;임성수;이성갑;이영희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1586-1588
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    • 2003
  • The Pb$(Zr{_{0.7}}Ti_{0.3})O_3$[PZT(70/30)] thin films were fabricated on Pt/$TiO_2/SiO_2$/Si substrate by RF sputtering method. The effects of Ar/$O_2$ ratio on the structural and dielectric properties of PZT thin fillms were investigated. In the case of the PZT thin films deposited with condition of 50/50$(Ar/O_2) $ ratio, the grain of the PZT thin films were fine and uniform. Increasing of $O_2$ ratio, the dielectric constant was increased. In this case the dielectirc constant and dielectric loss of PZT thin fims were about 627 and 0.010, respectively.

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$Ba(La_{1/2}Nb_{1/2})O_3$의 고용량과 Zr/Ti 조성비가 $Ba(La_{1/2}Nb_{1/2})O_3-Pb(Zr, Ti)O_3$ 세라믹의 전기광학 특성에 미치는 영향 (Effects of $Ba(La_{1/2}Nb_{1/2})O_3$ content and Zr/Ti composition ratio on electrooptic properties of the $Ba(La_{1/2}Nb_{1/2})O_3-Pb(Zr, Ti)O_3$ ceramics)

  • 류기원;이성갑;배선기;이영희
    • 대한전기학회논문지
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    • 제44권5호
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    • pp.644-648
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    • 1995
  • Transparent xBa(La$_{1}$2/Nb$_{1}$2/)O$_{3}$-(1-x)Pb(Zr, Ti)O$_{3}$ (x=8.5, 9.0[mol.%], Zr/Ti=70/30~40/60) ceramics were fabricated by the two-stage sintering method, the electrooptic properties were investigated with Ba(La$_{1}$2/Nb$_{1}$2/)O$_{3}$ content and Zr/Ti composition ratio. Decreasing the Zr/Ti ratio, the electrooptic property was changed from a quadratic electrooptic effect to a linear electrooptic effcet. In the BLN-PZT 9.0/50/50 specimen having the tetragonal structure, the linear electrooptic coefficient had the highest value of 6.01*10$^{-10}$ [m/V] and in the BLN-PZT 9.0/55/45 specimen which located near the MPB region, the quadratic electrooptic coefficient had the highest value of 10.53*10$^{-16}$ [m$^{2}$/V$^{2}$].

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NiO 첨가 $Pb(Zr_{0.525} Ti_{0.475})O_3$ 세라믹스의 치밀화의 고용한계 (Solid Solution Limit and Densification of NiO Doped $Pb(Zr_{0.525} Ti_{0.475})O_3$)

  • 위성권;김호기
    • 한국세라믹학회지
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    • 제23권6호
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    • pp.52-58
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    • 1986
  • $Pb(Zr_{0.525} Ti_{0.475})O_3$ piezoelectric ceramics both unmodified and doped with NiO were prepared by the conventional oxide techniques using sintering temperature from 900 to to 125$0^{\circ}C$. The difference in densification process between unmodified and NiO doped PZT ceramics was studied by shrinkage vs. firing temperatures and it was caused by increasing defect concentration in calcining process of NiO doped PZT ceramics. And nickel oxide solubility limit for $Pb(Zr_{0.525} Ti_{0.475})O_3$ ceramics is shown to be at the range from 0.2wt% to 0.5wt% from this defect model micro-structures dielectric and piezolectric properties of Nio doped PZT ceramics.

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GROWTH AND ELECTRICAL PROPERTIES OF (La,Sr)CoO$_3$/Pb(Zr,Ti)O$_3$/(La,Sr)CoO$_3$ HETEROSTRUCTURES FOR FIELD EFFECT TRANSISTOR

  • Lee, J.;Kim, S.W.
    • 한국표면공학회지
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    • 제29권6호
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    • pp.839-846
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    • 1996
  • Epitaxial (La, Sr)$CoO_3/Pb(Zr,\;Ti)O_3/(La,\;Sr)CoO_3$by pulsed laser deposition for ferroelectric field effect transistor. Epitaxial $LaCoO_3/Pb(Zr,\;Ti)O_3/(La,\;Sr)CoO_3$ heterostructures exhibited 70$\mu C/cm^2$ and 17 $\mu C/cm^2$at a positively and negatively poled states, respectively. On the other hand, epitaxial (La, Sr)$CoO_3/Pb(Zr,\;Ti)O_3/LaCoO_3$heterostructures show the remnant polarization states opposite to the $LaCoO_3/Pb(Zr,\;Ti)O_3/(La,\;Sr)CoO_3$ heterostructures. This indicates that the interface between (La, Sr)$CoO_3$ (LSCO) and $Pb(Zr, Ti)O_3(PZT)$ layers affects the asymmetric polarization remanence through electrochemical nature. The resistivity of $LaCoO_3$ (LCO) layer was found to be dependent on an ambient oxygen, primarily the ambient oxygen pressure during deposition. The resistivity of the LCO layer varied in the range of 0.1-100 $\Omega$cm. It is suggested that, with an appropriate resistivity of the LCO layer, the LCO/PZT/LSCO heterostructure can be used as the ferroelectric field effect transistor.

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이종접합 SrBi$_2Ta_2O_9$/Pb(Zr,Ti)O$_3$박막 케패시터의 강유전 특성 (Ferroelectric Properties of Hetero-Junction SrBi$_2Ta_2O_9$/Pb(Zr,Ti)O$_3$)

  • 이광배;김종탁
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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    • pp.217-221
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    • 1997
  • We have investigated the ferroelectric properties of multi-layered SrBi$_2$Ta$_2$$O_{9}$Pb(Zr,Ti)O$_3$, SBT/PZT, thin film capacitors. Specimens were prepared onto Pt-coated Si wafer by sol-gel method. Ferroelectric properties of these finns could be obtained only for thin SBT layers below 50nm in thickness. The values of dielectric constant and remnant polarization depend mainly on the thickness of SBT layer, which arises from the paraelectric interface layer between SBT and PZT due to the thermal diffusion of Pb. The value of remnant poarization of PZT/SBT is greater than that of SBT, and the plarization fatigue behaviors of PZT/SBT/Pt capacitors are somewhat improved as compared with those of PZT/Pt.t.

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PZT 특성에 미치는 불순물의 영향(I) (Effects of Impurity on Properties of PZT(I))

  • 임응극;정수진;김석영
    • 한국세라믹학회지
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    • 제19권4호
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    • pp.300-308
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    • 1982
  • A new perovskite type compound, (Pb1a-χKy□χ-y) (Zr0.33Ti0.67)O3-χ+y/2 was proposed and synthesized by "Wet-Dry Combination Technique". This defect ferroelectric material was characterized by partial substitutions of K+ for Pb+2 in Pb(Zr0.33Ti0.67)O3. This material was mono-phasic perovskite compound at 800℃ for 1hr., but ZrO2 was more or less isolated from the (Pb1a-χKy□χ-y) (Zr0.33Ti0.67)O3-χ+y/2. As a result, snitering temperature, sintered density, curie temperature, and dielectric constant of test pieces decreased and a-axis was nearly constant, while c-axis gradually decreased with the value x in the region of tetragonal phase of PZT. It was also recognized that the defect structure caused by adding K+ was found in both A-site cation and O-site anion vacancies in the defect PZT.

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Sol-Gel 법에 의한$ PbZrO_3$-$PbTiO_3$-$Pb(Ni_{1/3}Nb_{2/3})O_3$ (Electrical properties of sol-gel derived $ PbZrO_3$-$PbTiO_3$-$Pb(Ni_{1/3}Nb_{2/3})O_3$ thin film)

  • 임무열;구경완;한상옥
    • E2M - 전기 전자와 첨단 소재
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    • 제10권2호
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    • pp.134-140
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    • 1997
  • PbTiO$_{3}$-PbZrO$_{3}$-Pb(Ni$_{1}$3/Nb $_{2}$3/O$_{3}$)(PZT-PNN) thin films were prepared from corresponding metal organics partially stabilized with diethanolamine by the sol-gel spin coating method. Each mol rates of PT:PZ:PNN solutions were #1(50:40:10), #2(50:30:20), #3(45:35:20) and #4(40:40:20), respectively. The spin-coated PZT-PNN films were sintered at the temperature from 500.deg. C to 600.deg. C for crystallization. The P-E hysteresis curve was drawn by Sawyer-Tower circuit with PZT-PNN film. The coercive field and the remanent polarization of #4(40:40:20 mol%) PZT-PNN film were 28.8 kV/cm and 18.3 .mu.C/cm$^{2}$, respectively. Their dielectric constants were shown between 128 and 1120, and became maximum value in MPB(40:40:20 mol%). The leakage currents of PZT-PNN films were about 9.4x 10$^{-8}$ A/cm$^{2}$, and the breakdown voltages were about 0.14 and 1.1 MV/cm. The Curie point of #3(45:35:20 mol%, sintered at 600.deg. C) film was 330.deg. C.

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펄스 레이저 증착법에 의해 제작된 Laser pulse repetition rate의 변화에 따른 $Pb(Zr_{0.48}Ti_{0.52})O_3$ (PZT) 박막의 전기적 특성 (Effect of Laser Pulse Repetition Rate on the Electrical Properties of $Pb(Zr_{0.48}Ti_{0.52})O_3$ (PZT) Thin Films grown by Pulsed Laser Deposition)

  • 이동화;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.11-12
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    • 2005
  • [ $Pb(Zr_{0.48}Ti_{0.52})O_3$ ] (PZT) thin films were deposited on Pt(111)/Ti/$SiO_2$/Si substrates by pulsed laser deposition. In order to study the effect of different laser pulse repetition rate on the dielectric and ferroelectric properties of PZT thin films,2 Hz and 5 Hz of laser pulse repetition rate were selected. We compared the results of XRD pattern, dielectric constant and hysteresis characteristics. From the experimental data, we found that the electrical properties of PZT thin films which grown ar 2 Hz of laser pulse repetition rate were better than those which grown at 5 Hz of laser pulse repetition rate.

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소성 조건과 Zr/Ti 몰비에 따른 졸겔 $Pb(Zr_{1-x}Ti_x)O_3$ 박막의 구조 및 강유전 특성 (Structural and ferroelectric characteristics of sol-gel $Pb(Zr_{1-x}Ti_x)O_3$ thin films according to the sintering conditions and Zr/Ti mol%)

  • 김준한;윤현상;박정흠;장낙원;박창엽
    • E2M - 전기 전자와 첨단 소재
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    • 제9권8호
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    • pp.836-850
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    • 1996
  • In this study, we have analyzed structural analysis and measured ferroelectric characteristics of PZT thin films prepared by sol gel process with different sintering conditions and different Zr/Ti mot%. When the Zr mot% of PZT thin film was increased, it was found that the remanent. polarization and coercive field were decreased and increased, respectively. Also, the maxium dielectric constant of PZT(50/50) thin film was 786.8. We got double hysteresis(anti-fcrroelectric) curve from PbZrO$_{3}$ thin film. As heating rate goes up, pyrochlore phase of PZT thin film was decreased and dielectric and ferroelectric characteristics were improved. As a result of variation of sintering temperature and time 500.deg. C-800.deg. C and 5 sec.-8 hours, respectively, we got optimal sintering temperature and time. The optimium sintering temperature and time of conventional furnace method and rapid thermal processing method were 650.deg. C-700.deg. C for 30-60 minutes and 700.deg. C/20 seconds-2 minutes, respectively.

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2가 및 6가의 첨가제에 따른 PZT 자기의 유전적 성질에 관한 연구 (A Study on the Dielectric Properties of PZT Ceramics with 2 and 6 Valent Additives)

  • 안영필;이기옥
    • 한국세라믹학회지
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    • 제20권1호
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    • pp.19-24
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    • 1983
  • Dielectrics used as capacitor was studied in the system of $Pb(MgW)_{0.5} O_3-PbTiO_3-PbZrO_3$ Curie tempera-tures of $PbTiO_3 PbZrO_3$ and $Pb[MgW]_{0.5} O_3$ were 49$0^{\circ}C$ 23$0^{\circ}C$ and 39$0^{\circ}C$ respectively. When these materials formed solid solution the more amount of $Pb(MgW)_{0.5}O_3$ was increased the more Curie temperature lowered and dielectric constant increased. Higher dielectric constants were measured in the solid solution of which X-Ray diffraction patterns were changed. Especially Curie temperature and dielectric constant were 85$^{\circ}C$ and 4159 respectively in the composition of 60 $Pb(MgW)_{0.5}O_3-30 PbTiO_3-10PbZrO_3$. Also in this composition ferroeletric material with thermal stability was obtained.

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