• Journal of the Korean institute of surface engineering
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• v.39 no.3
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• pp.137-141
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• 2006

Process window for infinite etch selectivity of silicon nitride $(Si_3N_4)$ layers to ArF photoresist (PR) was investigated in dual frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters such as low frequency power $(P_{LF})$, $CH_2F_2$ and $H_2$ flow rate in $CH_2F_2/H_2/Ar$ plasma. It was found that infinite etch selectivities of $Si_3N_4$ layers to the ArF PR on both blanket and patterned wafers can be obtained for certain gas flow conditions. The etch selectivity was increased to the infinite values as the $CH_2F_2$ flow rate increases, while it was decreased from the infinite etch selectivity as the $H_2$ flow rate increased. The preferential chemical reaction of the hydrogen with the carbon in the polymer film and the nitrogen on the $Si_3N_4$ surface leading to the formation of HCN etch by-products results in a thinner steady-state polymer and, in turn, to continuous $Si_3N_4$ etching, due to enhanced $SiF_4$ formation, while the polymer was deposited on the ArF photoresist surface.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.3
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• pp.39-45
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• 1998

SrBi$_{2}$Ta$_{2}$O$_{9}$ (SBT) ferroelectric thin films for nonvolatile memory were prepared on Pt/Ti/SiO$_{2}$/Si and RuO$_{2}$/SiO$_{2}$/Si substrates by RF magnetron sputtering. The dependences of crystalline and electrical properties on the lower electrode type(Pt and RuO$_{2}$) and the annealing temperatures were investigated. SBT films regardless of their electrode types showed typeical Bi layered peroviskite crystal structures. The crystalline quality of as-deposited SBT films was improved by the rapid thermal annealing at 650.deg. C for 30 sec. The remanetn polarization of 2Pr (Pr+-Pr-) of the annealed SBT films deposited on Pt/Ti/SiO$_{2}$/Si substrates were about 11 .mu.C/cm$^{2}$ and 3 .mu.C/cm$^{2}$, respectively. The leakage currents at 3 V bias voltage were about 0.8 .mu.A/cm$^{2}$ for SBT/ Pt/Ti/SiO$_{2}$/Si and about 1 .mu.A/cm$^{2}$ for SBT/RuO$_{2}$/SiO$_{2}$/Si sample. SBT films annealed at 650 .deg. C showed no degradation in Pr values after 10$^{11}$ polarization switching cycles, indicating good fatigue properties. In addition, for SBT samples deposited on Pt/Ti/SiO$_{2}$/Si, Pr values increased to more than that of initial state, suggesting the increament of leakage current caused by repeated polarization.

• Korean Journal of Materials Research
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• v.13 no.10
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• pp.645-650
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• 2003

The microstructure and electrical characteristics of $Pr_{6}$ $O_{11}$ -based ZnO varistor ceramics composed of $ZnO-Pr_{6}$ $O_{ 11}$/$-CoO-Cr_2$$O_3$-$Dy_2$$O_3$-based ceramics were investigated with $Dy_2$$O_3$content in the range of 0.0∼2.0 mol%. As $Dy_2$$O_3$content was increased, the average grain size was decreased in the range of 18.6∼4.7 $\mu\textrm{m}$ and the density of the ceramic was decreased in the range of 5.53∼4.34 g/㎤. While, the varistor voltage was increased in the range of 39.4∼436.6 V/mm and the nonlinear exponent was in the range of 4.5∼66.6 with increasing $Dy_2$$O_3$content. The addition of $Dy_2$$O_3$highly enhanced the nonlinear properties of varistors, compared with the varistor without $Dy_2$$O_3$. In particular, the varistor with $Dy_2$$O_3$ content of 0.5 mol% exhibited the highest nonlinearity, in which the nonlinear exponent is 66.6 and the leakage current is 1.2 $\mu\textrm{A}$. The donor concentration and the density of interface states were decreased in the range of $(4.19∼0.33) ${\times}$10^{18}$ //㎤ and $(5.38∼1.74) ${\times}$10^{12}$ $\textrm{cm}^2$, respectively, with increasing $Dy_2$$O_3$content. The minimum dissipation factor of 0.0302 was obtained from 0.5mol% $Dy_2$$O_3$.

• Journal of Oriental Neuropsychiatry
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• v.23 no.3
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• pp.47-62
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• 2012

Objectives : This study is to figure the relations of the heart rate variability, body component analysis and accompanying symptoms of 350 insomnia patients. Methods : For this study we evaluated Heart Rate Variability(HRV) and body component analysis on 350 insomnia patients who visited Dongeui oriental hospital of Dongeui university from January 2008 to March 2012. The accompanying symptoms was collected based on each patient's progress note. Results : 1. There was no difference between PR, LF and VLF of male and female groups. HF was higher in the patients' of female group and LF/HF ratio was higher in the male group. The patients' group of age under 39 had higher HF, LF, VLF and LF/HF ratio than the group over 39. 2. The average of LF was the smallest, and the average of VLF was in the middle, while the average of HF was the largest. 3. Regarding patients' age and gender, as the patients' age increased, their HF, LF, VLF and LF/HF ratio decreased significantly. HF, LF, VLF, and LF/HF ratios were, however, independent on the patients' gender. As the patients' age increased, their BMI increased, while the patients' gender did not affect on their BMI. The amount of visceral fat increased with the patients' age, but wasn't dependent on the patients' gender. 4. As the patients' BMI increased, PR and LF decreased. As the patients' amount of visceral fat increased, PR, HF, LF and VLF decreased. 5. The most frequent accompanying symptoms of the insomnia patients was headache. Neither HF nor LF/HF ratio was dependant on any of the accompanying symptoms. Patients with anxiety showed significantly higher LF than those without anxiety. Patients with fatigue and physical pain showed significantly higher VLF than those without either of them. Conclusions : The study showed that as the insomnia patients age increased, the HF, LF, VLF, LF/HF ratio significantly decreased, but the BMI and visceral fat increased. The HF, LF, VLF, LF/HF ratio BMI, or the visceral fat was independent on the gender. As BMI increased, PR and LF decreased. As visceral fat increased, PR HF, LF and VLF decreased. Patients presenting anxiety had higher LF. Patients either with fatigue or physical pain had higher VLF. Neither HF nor LF/HF ratio had any significant correlation with any of the accompanying symptoms.

• Journal of the Korean Ceramic Society
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• v.40 no.10
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• pp.943-948
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• 2003

The microstructure and electrical characteristics of Zn-Pr-Co-Cr-Dy oxides-based varistors were investigated with Dy$_2$ $O_3$ content in the range of 0.0∼2.0 ㏖%. As Dy$_2$ $O_3$ content is increased, the average grain size was decreased in the range of 18.2∼4.6 $\mu\textrm{m}$ and the ceramic density was decreased in the range of 5.49∼4.64 g/㎤. The incorporation of Dy$_2$ $O_3$ markedly enhanced the nonlinear properties of varistors more than 9 times in nonlinear exponent, compared with the varistor without Dy$_2$ $O_3$ The varistor with 0.5∼1.0 ㏖% Dy$_2$ $O_3$ exhibited the high nonlinearity, in which the nonlinear exponent is above 55 and the leakage current is below 1.0 ${\mu}\textrm{A}$. The donor concentration and the density of interface states were decreased in the range of (4.66∼0.25)${\times}$10$\^$18//㎤ and (5.70∼1.39)${\times}$10$\^$12//$\textrm{cm}^2$, respectively, with increasing Dy$_2$ $O_3$ content. The minimum dielectric dissipation factor of 0.0023 was obtained for 0.5 ㏖% Dy$_2$ $O_3$, but further addition of Dy$_2$ $O_3$ increased it.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.39C no.7
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• pp.608-614
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• 2014

A pattern recognition (PR) system is addressed for non-intrusive load monitoring. To effectively recognize two appliances (for example, an electric iron and a cook top), we propose a novel feature extraction method based on high order moments of power signals. Simulation results confirm that the PR system with the proposed high order moment features and kernel discriminant analysis can effectively separate two appliances.

• Transactions on Electrical and Electronic Materials
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• v.13 no.5
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• pp.262-265
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• 2012

The Microstructure and nonlinear electrical properties of the ZPCCYT (ZnO-$Pr_6O_{11}$-CoO-$Cr_2O_3$-$Y_2O_3$-$Tb_4O_7$) varistors were investigated for different amounts of $Tb_4O_7$. The addition of $Tb_4O_7$ has a significant effect on microstructure and electrical properties. Analysis of the microstructure indicated that the ceramics consisted of ZnO grain as a main phase and a few secondary phases as a mix of $Pr_6O_{11}$, $Y_2O_3$, and $Tb_4O_7$. As the amount of $Tb_4O_7$ increased, the sintered densities of pellets increased from $\rho$ = 5.70 to $5.78g/cm^3$ and the average grain size decreased from d = 4.8 to $3.6{\mu}m$. The increase in the amount of $Tb_4O_7$ increased from $E_B$ = 7,473 to 10,035 V/cm and from ${\alpha}$ = 39.7 to 52.2. In particular, it was found that the ceramics modified with 1.0 mol% in the amount of $Tb_4O_7$ are suited for the varistors for high voltage in the light of a high sintered density and a high voltage gradient.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.641-643
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• 2003

The ferroelectric properties of PZT(53/47) thin film was investigated by methoxy enthanol solution based on sol-gel method. The thickness of each layer by spincoating 0.25M sol at one time was $0.1{\mu}m$ and crack-free film was formed. $LaNiO_3/Si(100)$ electrode and $Pt/Ti/SiO_2/Si(100)$ electrode was coated by PZT sol at several times. PZT orientation was confirmed as a method of XRD and coercive field(Ec) as well as remnant polarization(Pr) was investigated from hysterisis curve. As a result of XRD analysis, we can know that the orientation of on PZT/LNO/Si(100) is better than on $Pt/Ti/SiO_2/Si(100)$. The remnant polarization(Pr) in LNO electrode was $87.5{\mu}C/cm^2$ and $39.8{\mu}C/cm^2$ in Pt. From this figures, it is investigated that the Pr in LNO electrode was better than in Pt.

• Bulletin of the Korean Chemical Society
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• v.17 no.6
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• pp.511-514
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• 1996

The interactions between Ln(dpm)3 [Ln3+=Eu3+, Yb3+, Pr3+, Sm3+, Tb3+and Ho3+; dpm=tris 2,2,6,6-tetramethylheptane-3,5-dionate] and acetamide in CCl4 solution were investigated using near IR absorption spectroscopy. From the measured 2 νC=O+ amide Ⅲ combination band of acetamide in the region of 2130-2180 nm(4695-4587 cm-1), it was found that acetamide is coordinating through its carbonyl oxygen atom to Ln(dpm)3[C=O…Ln(dpm)3)] and forms only 1 : 1 stoichiometric Ln(dpm)3- acetamide complex. The ΔHo values for the formation of Ln(dpm)3-acetamide obtained from the temperature studies are -39.1, -28.4, -25.5, -24.7, -21.1 and -17.7 kJ mol-1 for Eu(dpm)3, Yb(dpm)3, Pr(dpm)3, Sm(dpm)3, Tb(dpm)3 and Ho(dpm)3, respectively, which are larger than those of the hydrogen bond between amide and various hydrogen acceptors. Except Eu(dpm)3 and Yb(dpm)3, -ΔHovalue increases as the ionic size increases.

• International Journal of Computer Science & Network Security
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• v.21 no.11
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• pp.287-293
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• 2021

The purpose of this article is to consider the distance education system, its principles, features and means. One of its existing and promising tools is video conferencing. The article discusses the types of video conferencing, hardware and software, features and requirements for communication channels, types of information transmitted through these channels.