• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.127-127
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.15-16
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• 2008

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.6
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.19-22
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• 2000

Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and its's high sensitivity. Especially, when projecting a grid pattern over the object the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, new method for grid pattern generation system by polygonal mirror and Laser Diode. This system is applied the projection moire and the PMP.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.05a
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• pp.187-192
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• 1999

Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and its's high sensitivity. Especially when projecting a grid pattern over the object, the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, the projection moire are compared with the PMP mathematically, and it is shown that PMP can generate moire image with simple mathematical computations. Experimental works are also carried out showing the same results. It is shown that using a single gird pattern, moire image can be obtained directly without any mathematical operation when some conditions are satisfied.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.1
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• pp.59-65
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• 2016

As modern electronic devices get smaller and smaller, high-resolution, large Field-Of-View (FOV), fast, and cost-effective 3-dimensional (3-D) measurement is requested more and more. In particular, defect inspection machines using machine-vision technology nowadays require 3-D inspection as well as the conventional 2-D inspection. Phase Measuring Profilometry (PMP) is one of the fast non-contact 3-D shape measuring methods currently being extensively investigated in the electronic component manufacturing industry. The PMP system is well known and is successfully applied to measuring complex surface profiles with varying reflectance properties. However, for highly reflective surfaces, such as Ball Grid Arrays (BGAs), it has difficulty accurately measuring 3-D shapes. In this paper, we propose a new fast optical system that can eliminate the highly reflective saturated regions in BGA ball images. This is achieved by utilizing four Low Intensity Grating (LIG) images together with the conventional High Intensity Grating (HIG) images. Extensive experiments using BGA samples show a repeatability of under ${\pm}20um$ in standard deviation, which is suitable for most 3-D shape measurements of BGAs.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.11
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• pp.3023-3030
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• 2009

In this paper, a prediction and compensation method for the error in the phase measured by using the proportionality between two wavelengths in the TW-PMP (Two-wavelength Phase Measuring Profilometry) is proposed and experimental results are shown to verify the usefulness of the proposed method. For sample object, firstly, a phase-shifting with a quite large number of steps is adopted in measurement, compared with the conventional phase-shifting method, secondly, a 3-3 step phase-shifting method is used to measure the same object which is applied to high-speed 3D shape measurement, and then, measured results from these two phase-shifting methods are compared to calculate measurement noises. From the experimental results applying the proposed compensation method to the measured beat phase and absolute phase, it has proven that noises are decreased by 90% and 17.2% for each case.

• Proceedings of the Optical Society of Korea Conference
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• 2002.07a
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• pp.26-27
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• 2002

광학식 3차원 형상측정 기술은 산업현장과 의료분야에서 광범위하게 사용되어지고 있으며, 이에 대한 연구도 활발히 진행되고 있다. 본 연구에서는 비접촉식 3차원 형상측정 방법인 위상측정법(Phase Measuring Profilometry; PMP)을 실험적으로 구현하였으며 위상추출 알고리즘으로는 위상이동방법(Phase shifting method)과 푸리에 변환법(Fourier Transform)을 사용하여 그 결과를 비교 및 고찰하였다. (중략)

• Journal of the Korea Fashion and Costume Design Association
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• v.11 no.2
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• pp.11-21
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• 2009

Recently, as custom-made demand about female underwear is increased, securing of a various dimension system is urgent, and satisfaction of each customer cannot be heightened with established dimensions. If we could measure shape of a living body with a fast and simple method, the custom-made demand of customers could be satisfied in the underwear as well as a clothing industry by using the method. One of the alternatives is shape measurement of the living body by a Moire fringe method. If we put a grating in front of an object to be measured and illuminate light, a Moire fringe with contour line shape is generated in the object, so we can conveniently measure object shape without touching directly by using the pattern. The Moire fringe and three-dimensional shape of the breast of the living body was acquired by a PMP method using a polygon mirror, and height and bottom width of the breast of the living body were measured by using obtained data in this study. Data of breast shape measurement through a mannequin was collected in a previous step as basic material for measuring the breast shape measurement of the living body. Three women in the twenties were selected as one of methods for measuring breast shape of a woman. As a result of the breast shape measurement of a living body A, it was measured that height of the breast was about 67.24mm and the bottom width was $13781.60mm^2$. This study is expected to contribute for collecting basic data of a female underwear industry and establishing a specification of a dimension system.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.335-341
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• 2005

The development of Shadow Moire in many kinds of methods for acquiring 3-dimensional information from an object is written in this paper. The fringe is appeared, when a grating mask makes its shadow on the object. The object is moved along x-axis more then 3 times to get phases from its fringe that contains data of the object's height. PMP{Phase Measuring Profilometry) is used for analyzing these images from a CCD camera. The calculated phase is remedied for expending the restricted results due to range of the $tan^{-1}$.