• Title/Summary/Keyword: PLT

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Preparation of Paraelectric PLT Thin Films Using Reactive Magnetron Sputtering of Multicomponent Metal Target

  • Kim, H.H.;Sohn, K.S.;Casas, L.M.;Pfeffer, R.L.;Lareau, R.T.
    • Electrical & Electronic Materials
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    • v.11 no.10
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    • pp.53-59
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    • 1998
  • Paraelectric lead landthanum titanate(PLT) thin films have been prepared by a reactive dc magnetron sputtering system using a multicomponent metal target. The surface area control of each element on the target markedly facilitates the fabrication of thin films of complex ceramic compounds. A postdeposition heat-treatment was applied to all as-deposited PLT thin films at annealing temperatures up to 75$0^{\circ}C$ for crystalization. The composition of the PLT(28) thin filmannealed at $650^{\circ}C$ was: Pb, 0.73; La, 0.28; Ti, 0.88; O, 2.9. The dielectric constant and dissipation factor of the thin film(200 nm) at low filed measurements (500 Vcm-1) are 1216 and 0.018, respectively. The charge storage density using a typical Sawyer-Tower circuit with a 500 Hz sine wave was 12.5 $\mu$Ccm-2 at the electric field of 200 kVcm-1.

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Effect Of Variation Of Laser Wavelength OH Properties of ($Pb_{0.72}La_{0.28}$)$Ti_{0.93}O_{3}$Thin Films Fabricated by Pulsed Laser Deposition (펄스레이저 증착법으로 제작된 ($Pb_{0.72}La_{0.28}$)$Ti_{0.93}O_{3}$박막의 레이저 파장 변화에 따른 특성 연구)

  • 한경보;허창회;이상렬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.170-173
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    • 2001
  • Thin films of phase-pure perovskite (P $b_{0.72}$L $a_{0.28}$) $Ti_{0.93}$ $O_3$(PLT) were deposited in-situ onto Pt/Ti/ $SiO_2$/Si substrates by pulsed laser deposition. We have systematically investigated the variation of grain sizes depending on the process condition. Both in-situ annealing and ex-situ annealing treatments have been compared depending on the annealing time. Two-step process to grow (P $b_{0.72}$L $a_{0.28}$) $Ti_{0.93}$ $O_3$(PLT) films was adopted and verified to be useful to enlarge the grain size of the film and to enhance the leakage current characteristics. The grain sizes of PLT thin films were successfully controlled 260 to 350 nm by changing process parameters. Electrical properties including dielectric constant, ferroelectric characteristics, crystallization and leakage current of PLT thin films were shown to be strongly inf1uenced by grain size. Also PLT thin films on p-type(100) Si substrate will be fabricated by pulsed laser deposition technique using a Nd:YAG laser with different wavelengths of 355, 532 and 1064 nm. Effect of the variation of laser wavelength on dielectric properties will be discussed. Microstructural and electrical properties of the film were investigated by C-V measurement leakage current measurement and SEM.ent and SEM.

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Characteristics of Quasi-MFISFET Device with Various Ferroelectric Thin Films (강유전체 박막의 특성에 따른 Quasi-MFISFET 소자의 특성)

  • Lee, Guk-Pyo;Yun, Yeong-Seop;Gang, Seong-Jun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.3
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    • pp.166-173
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    • 2001
  • Hysteresis loops of the ferroelectric thin films such as PLZT(10/30/70), PLT(10) and PZT(30/70) was simulated using the field-dependent polarization model and compared to the measured loops. In case of PZT(30/70) thin film, as the real saturation or polarization at the applied voltage or larger than 5V appears slack and its value is quite different from the simulated one, it is deduced that the ferroelectric polarization of PZT(30/70) is generated not only by the pure dipoles but also by various electric charges. The drain current of quasi-MFISFET is expressed by using the square-law FET and field-dependent polarization models. The modeling results are analogous to the experimental values. The channel of quasi-MFISFET using PZT(30/70) forms more quickly compared to that of quasi-MFISFET using PLZT(10/30/70) or PLT(10) in the state of 'write' gate voltage of -10V. This may be because the decrease rate of the polarization in the PZT(30/70) thin film is 3~4 times more rapid than that of the polarization in the PLZT(10/30/70) or the PLT(10) thin film in the retention characteristics.

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Comparison of Elastic Moduli of Subgrade Soils Using Plate Loading Test, Soil Stiffness Gauge and Dynamic Cone Penetrometer (평판재하시험, 흙강성측정기 및 동적콘관입시험기를 이용한 노상토의 탄성계수 비교)

  • Kim, Kyu-Sun
    • Journal of the Korean Geotechnical Society
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    • v.31 no.3
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    • pp.63-72
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    • 2015
  • This paper describes the correlation and relationship between elastic moduli measured by three stiffness measurement methods with different mechanical characteristics to evaluate the compaction characteristics of subgrade soils. The Soil Stiffness Gauge (SSG) with very small strain (${\approx}0.001%$) ranges, static Plate Loading Test (PLT) with mid-level strain (${\approx}0.01{\sim}0.1%$) ranges, and Dynamic Cone Penetrometer (DCP) using penetration resistance were implemented to measure the elastic modulus. To use the elastic modulus measured by different measurement methods with a wide range of strain in practice, it is required to identify the correlation and relationship of measured values in advance. The comparison results of the measured elastic moduli ($E_{SSG}$, $E_{PLT}$, $E_{DCP}$) using the three measurement methods for domestic and overseas subgrade soils under various conditions indicate that the evaluated elastic modulus relies on the types of soils and the level of stress condition. The correlation analysis of the measured elastic moduli except the data of cement treated soils indicates that the static elastic modulus ($E_{PLT}$) is evaluated as about 60 to 80% of the dynamic elastic modulus ($E_{SSG}$). Unusual soils such as cement treated soils are required to be corrected by the stress correction during the correlation analysis with typical soils, because these types of soils are sensitive to the stress condition when measuring the static elastic modulus ($E_{PLT}$) of soils. In addition, when considering the use of DCP data for the evaluation of the elastic modulus ($E_{DCP}$), the measured data of the elastic modulus less than 200 MPa show more reliable correlation.

Using a Prosodic Labeling Text(PLT) in the Synthesis of Spoken Chinese

  • Wu, Zong-Ji
    • Proceedings of the KSPS conference
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    • 1996.10a
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    • pp.473-475
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    • 1996
  • The prosodic features of Spoken Chinese play the important roll of the naturalness, a list of prosodic labeling symbols represents all the prosodic features is given in this paper, and a paragraph of ' Prosodic Labeling Text '(PLT) is also attached for example.

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A Study on the Switching and Retention Characteristics of PLT(5) Thin Films (PLT(5) 박막의 Switching 및 Retention 특성에 관한 연구)

  • Choi Joon Young;Chang Dong Hoon;Kang Seong Jun;Yoon Yung Sup
    • Proceedings of the IEEK Conference
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    • 2004.06b
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    • pp.367-370
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    • 2004
  • We fabricated PLT(5) thin film on $Pt/TiO_x/SiO_2/Si$ substrate by using sol-gel method and investigated leakage current, switching and retention properties. The leakage current density of PLT(5) thin film was $3.56{\times}10^{-7}A/cm^2$ at 4V. In the examination of switching properties, pulse voltage and load resistance were $2V{\~}5V$ and $50{\Omega}{\~}3.3k{\Omega}$, respectively. Switching time had a tendency to decrease from 520ns to 140ns with the increase of pulse voltage, and also the time was increased from 140ns to $13.7{\mu}s$ with the increase of load resistance. The activation energy obtained from the relation of applied pulse voltage and switching time was about 143kV/cm. The error of switched charge density between hysteresis loop and experiment of polarization switching was about $10\%$. Also, polarization in retention was decreased as much as about $8\%$ after $10^5$s.

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Pyroelectric Properties of PLT Thin Films Prepared by Sol-Gel Method (Sol-Gel 법으로 제조한 PLT박막의 초전특성)

  • Chung, Jang-Ho;Lee, Moon-Kee;Park, In-Gil;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1488-1490
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    • 1997
  • $(Pb_{1-x}La_x)Ti_{1-x/4}O_3$ (x=0, 0.02, 0.04, 0.06, 0.08) ceramic thin films were fabricated by Sol-Gel method. A stock solution of (Pb,La)$TiO_3$ with excess Pb 10mol% was made and spin-coated on the Pt/Ti/$SiO_2$/Si substrate at 4000rpm for 30 seconds. Coated specimens were dried on the hot-plate at $350^{\circ}C$ for 10 min and sintered at $500{\sim}750^{\circ}C$ for 1 hour. The dielectric constant, remanent polarization and coercive field of the PLT(6 at.%) thin films sintered at $650^{\circ}C$ were 884, $13.95{\mu}C/cm^2$ and 8.7kV/cm, respectively. Pyroelectric coefficient, figure of merit of pyroelectric current, voltage responsivity and detectivity of PLT(6at.%) thin films were $3.2{\times}10^{-8}\;C/cm^2K$, $1.02{\times}10^{-8}\;C{\cdot}cm/J$, $2.9{\times}10^{-11}\;C{\cdot}cm/J$, $0.29{\times}10^{-8}\;C{\cdot}cm/J$, respectively.

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