• 제목/요약/키워드: PIM Process

검색결과 63건 처리시간 0.021초

Real-Time Small Exposed Area $SiO_2$ Films Thickness Monitoring in Plasma Etching Using Plasma Impedance Monitoring with Modified Principal Component Analysis

  • 장해규;남재욱;채희엽
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.320-320
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    • 2013
  • Film thickness monitoring with plasma impedance monitoring (PIM) is demonstrated for small area $SiO_2$ RF plasma etching processes in this work. The chamber conditions were monitored by the impedance signal variation from the I-V monitoring system. Moreover, modified principal component analysis (mPCA) was applied to estimate the $SiO_2$ film thickness. For verification, the PIM was compared with optical emission spectroscopy (OES) signals which are widely used in the semiconductor industry. The results indicated that film thickness can be estimated by 1st principal component (PC) and 2nd PC. Film thickness monitoring of small area $SiO_2$ etching was successfully demonstrated with RF plasma harmonic impedance monitoring and mPCA. We believe that this technique can be potentially applied to plasma etching processes as a sensitive process monitoring tool.

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분말사출 성형공정에서의 수치해석기술의 응용 (Applications of Numerical Analysis Technology in Powder Injection Molding Process)

  • 강태곤;권태헌;박성진;정성택
    • 한국분말재료학회지
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    • 제9권4호
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    • pp.261-266
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    • 2002
  • CAE technology is an integrated tool including all aspects such as powder, binder system, mixing, injection molding, debinding and sintering. Therefore, CAE technology is considered as one of core technologies for PIM industry in the future. Recently many researchers are developing not only CAE software itself but also application procedures of CAE software. In this study, the applications for CAE technology in PIM industry are presented including feedstock mixing effect, several cases of troubleshooting and optimization procedure.

분말사출성형된 17-4 PH STS 소결체의 밀도에 따른 인장 특성 (Effect of Relative Density on the Tensile Properties of Powder Injection Molded PH 17-4 Stainless Steel)

  • 성환진;하태권;안상호;장영원
    • 한국분말재료학회지
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    • 제9권4호
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    • pp.211-217
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    • 2002
  • It is well known that the powder injection molding(PIM) process can overcome the shape limitations of traditional powder compaction, the costs of machining, the productivity limits of isostatic pressing and slip casting, and the defect and tolerance limitations of conventional casting. Increasing demands from industry for not only the dimensional accuracy nut mechanical strength in PIMed parts have had much effort focused on the investigation of mechanical properties of mechanical strength in PIMed parts have had much effort focused on the investigation of mechanical properties of sintered parts formed with high-strength metallic powders. The 17_4 PH $10\mu{m}$ were injection-molded into flat tensile specimens. Sintering of the compacts was carried out at the various temperatures ranging from 900 to $1350^{\circ}C$. Sintering behavior of the compacts and tensile properties of sintered specimens were investigated.

컴포넌트 기반의 MDA 공학 프로세스 (Component-Based MDA Engineering Process)

  • 유태권;라현정;김수동
    • 한국정보과학회:학술대회논문집
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    • 한국정보과학회 2005년도 한국컴퓨터종합학술대회 논문집 Vol.32 No.1 (B)
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    • pp.325-327
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    • 2005
  • 컴포넌트는 컴포넌트 기반 개발(Component Based Development, CBD)기술에서 재사용되는 기본 단위로서 OOP(Object Oriented Programming, OOP)의 객체보다 상대적으로 큰 단위의 기능성을 제공하며 재사용성이 뛰어나다. 모델 기반 아키텍처(Model Driven Architecture, MDA)는 모델들 간의 다양한 변환(Transformation)을 활용하여 어플리케이션 개발을 자동화하는 새로운 패러다임으로서 소프트웨어의 생산성을 향상시킨다. 그러나 MDA 는 컴포넌트와 같은 어플리케이션들 간의 공통성과 가변성을 활용한 재사용성을 직접적으로 지원하지는 않는다. 본 논문에서는 CBD 와 MDA 의 장점과 한계점을 알아보고 서로의 단점을 보완할 수 있도록 컴포넌트 PIM 과 컴포넌트 기반의 MDA 공학 프로세스를 제안한다. 제안된 컴포넌트 PIM 과 프로세스를 이용하면 어플리케이션들 간의 공통성과 가변성을 이용한 뛰어난 재사용성과 자동화를 통한 생산성의 ,향상 및 높은 유지보수성을 가질 수 있다.

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분말사출성형을 통해 제조된 PH 17-4 STS 강의 소결온도에 따른 인장 특성 (Effect of Sintering Temperature on the Tensile Properties of Powder Injection Molded PH 17-4 STS)

  • 성환진;하태권;안상호;장영원
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2001년도 추계학술대회 논문집
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    • pp.305-308
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    • 2001
  • Powder injection molding (PIM) uses the shaping advantage of injection molding but is applicable to metals and ceramics. This process combines a small quantity of polymer with an inorganic powder to form a feedstock that can be molded. After shaping, the polymeric binder is extracted and the powder is sintered often to near-theoretical densities. Accordingly, PIM delivers structural materials in a shaping technology previously restricted to polymers. The process overcomes the shape limitations of traditional powder compaction, the costs of machining, the productivity limits of isostatic pressing and slip casting, and the defect and tolerance limitations of casting. The 17-4 PH stainless steel powders with average diameter of $10{\mu}m$ were injection-molded into flat tensile specimens. Sintering of the compacts was carried out at the various temperatures ranging from 900 to $1350^{\circ}C$. Sintering behavior of the compacts and tensile properties of sintered specimens were investigated.

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Performance of an acidic extractant (D2EHPA) incorporated in IM used for extraction and separation of Methylene Blue and Rhodamin B

  • Aitali, S.;Kebiche-Senhadji, O.;Benamor, M.
    • Membrane and Water Treatment
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    • 제7권6호
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    • pp.521-537
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    • 2016
  • Laboratory-scale experiments were carried out to investigate the adsorption equilibrium, the adsorption kinetics and facilitated transport of two cationic dyes (Methylene Blue (MB) and Rhodamine B (RB)) on Polymer Inclusion Membrane (D2EHPA-PIM). Different adsorption isotherms (Freundlich, Langmuir and Temkin models) as well as kinetics models indicated that the adsorption process is spontaneous and exothermic. Under the optimal conditions, the adsorption removal efficiencies reach about 93% and 97% for MB and RB respectively. Different extraction values by D2EHPA-PIM were obtained for the two cationic dyes: MB is weakly extracted at pH 2.0 (E% = 18.7%) whilst E% = 82.4% was observed for RB at the same pH. This difference was exploited in a mixture containg both the 2 cationic dyes for the selective extraction of RB at pH 2. Desorption of both dyes was achieved from the membrane by using acidic aqueous solutions and desorption ratio up to 90% was obtained. The formulas of the extracted complexes by the PIMs were, determined by the method of slopes. The dyes transport was elucidated using mass transfer analysis where in it found relatively high values of the initial flux ($J_0$) as 41.57 and $18.74{\mu}mol.m^2.s^{-1}$ for MB and RB respectively.

분말사출성형 시 분말 혼합체의 유동성 시뮬레이션을 통한 투광성 알루미나 소결체의 특성 연구 (A study on the Powder Injection Molding of Translucent Alumina via Flowability Simulation of Powder/Binder Mixture)

  • 김형수;변종민;김세훈;김영도
    • 한국분말재료학회지
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    • 제21권3호
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    • pp.215-221
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    • 2014
  • Translucent alumina is a potential candidate for high temperature application as a replacement of the glass or polymer. Recently, due to the increasing demand of high power light emitting diode (LED), there is a growing interest in the translucent alumina. Since the translucent property is very sensitive to the internal defect, such as voids inside or abnormal grain growth of sintered alumina, it is important to fabricate the defect-free product through the fabrication process. Powder injection molding (PIM) has been commonly applied for the fabrication of complex shaped products. Among the many parameters of PIM, the flowability of powder/binder mixture becomes more significant especially for the shape of the cavity with thin thickness. Two different positions of the gate were applied during PIM using the disc type of die. The binder was removed by solvent extraction method and the brown compact was sintered at $1750^{\circ}C$ for 3 hours in a vacuum. The flowability was also simulated using moldflow (MPI 6.0) with two different types of gate. The effect of the flowability of powder/binder mixture on the microstructure of the sintered specimen was studied with the analysis of the simulation result.

Prognostic biomarkers and molecular pathways mediating Helicobacter pylori-induced gastric cancer: a network-biology approach

  • Farideh Kamarehei;Massoud Saidijam;Amir Taherkhani
    • Genomics & Informatics
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    • 제21권1호
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    • pp.8.1-8.19
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    • 2023
  • Cancer of the stomach is the second most frequent cancer-related death worldwide. The survival rate of patients with gastric cancer (GC) remains fragile. There is a requirement to discover biomarkers for prognosis approaches. Helicobacter pylori in the stomach is closely associated with the progression of GC. We identified the genes associated with poor/favorable prognosis in H. pylori-induced GC. Multivariate statistical analysis was applied on the Gene Expression Omnibus (GEO) dataset GSE54397 to identify differentially expressed miRNAs (DEMs) in gastric tissues with H. pylori-induced cancer compared with the H. pylori-positive with non-cancerous tissue. A protein interaction map (PIM) was built and subjected to DEMs targets. The enriched pathways and biological processes within the PIM were identified based on substantial clusters. Thereafter, the most critical genes in the PIM were illustrated, and their prognostic impact in GC was investigated. Considering p-value less than 0.01 and |Log2 fold change| as >1, five microRNAs demonstrated significant changes among the two groups. Gene functional analysis revealed that the ubiquitination system, neddylation pathway, and ciliary process are primarily involved in H. pylori-induced GC. Survival analysis illustrated that the overexpression of DOCK4, GNAS, CTGF, TGF-b1, ESR1, SELE, TIMP3, SMARCE1, and TXNIP was associated with poor prognosis, while increased MRPS5 expression was related to a favorable prognosis in GC patients. DOCK4, GNAS, CTGF, TGF-b1, ESR1, SELE, TIMP3, SMARCE1, TXNIP, and MRPS5 may be considered prognostic biomarkers for H. pylori-induced GC. However, experimental validation is necessary in the future.

PIM기술을 이용한 마이크로 부품 성형기술 (Manufacturing technology of micro parts by powder injection molding)

  • 이원식;고세현;장진만;김일호
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 춘계학술대회 논문집
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    • pp.60-63
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    • 2009
  • Manufacturing technologies of micro spur gear and micro mold by micro PIM were studied with stainless steel feedstock. For molding of gears, micro mold with gear cavity of 1.2 mm in diameter was produced by wire EDM. The proper injection pressure was selected to 70bar by observation and measuring of shapes and shrinkage of gears before/after sintering. For fabrication of micro mold, a tiny polymer gear was produced by injection into the mold. Then, 316L feedstock was again injected/compressed on the polymer gear and debinded together with polymer gear followed by sintering. As a result, another metal mold with gear cavity reduced to about 20% was fabricated and through repetition of this process chain, micro gear mold with cavity about below 800 um was finally obtained. In reduction of size by injection/compression molding, height of gear tooth was shrunk more and the effort for decrease of roughness of micro cavity were carried out ultrasonic polishing and as a result, the roughness in cavity decreased from 3-4 um to about 200 nm.

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W-Cu의 마이크로 금속분말사출성형 (Micro Metal Powder Injection Molding in the W-Cu System)

  • 김순욱;양주환;박순섭;김영도;문인형
    • 한국분말재료학회지
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    • 제9권4호
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    • pp.267-272
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    • 2002
  • The production of micro components is one of the leading technologies in the fields of information and communiation, medical and biotechnology, and micro sensor and micro actuator system. Microfabrication (micromachining) techniques such as X-ray lithography, electroforming, micromolding and excimer laser ablation are used for the production of micro components out of silicon, polymer and a limited number of pure metals or binary alloys. However, since the first development of microfabrication technologies there have been demands for the cost-effective replication in large scale series as well as the extended range of available material. One such promising process is micro powder injection molding (PIM), which inherits the advantages of the conventional PIM technology, such as low production cost, shape complexity, applicability to many materials, applicability to many materials, and good tolerance. This paper reports on a fundamental investigation of the application of W-Cu powder to micro metal injection molding (MIM), especially in view of achieving a good filling and a safe removal of a micro mold conducted in the experiment. It is absolutely legitimate and meaningful, at the present state of the technique, to continue developing the micro MIM towards production processes for micro components.