• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.132-132
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• 2015

Virtual metrology (VM) model based on plasma information (PI) parameter for C4F8 plasma-assisted oxide etching processes is developed to predict and monitor the process results such as an etching rate with improved performance. To apply fault detection and classification (FDC) or advanced process control (APC) models on to the real mass production lines efficiently, high performance VM model is certainly required and principal component regression (PCR) is preferred technique for VM modeling despite this method requires many number of data set to obtain statistically guaranteed accuracy. In this study, as an effective method to include the 'good information' representing parameter into the VM model, PI parameters are introduced and applied for the etch rate prediction. By the adoption of PI parameters of b-, q-factors and surface passivation parameters as PCs into the PCR based VM model, information about the reactions in the plasma volume, surface, and sheath regions can be efficiently included into the VM model; thus, the performance of VM is secured even for insufficient data set provided cases. For mass production data of 350 wafers, developed PI based VM (PI-VM) model was satisfied required prediction accuracy of industry in C4F8 plasma-assisted oxide etching process.

• 반도체디스플레이기술학회지
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• 제18권4호
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• pp.30-34
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• 2019

We analyzed how the features in plasma information based virtual metrology (PI-VM) for SiO₂ etching depth with variation of 5% contribute to the prediction accuracy, which is previously developed by Jang. As a single feature, the explanatory power to the process results is in the order of plasma information about electron energy distribution function (PI_EEDF), equipment, and optical emission spectroscopy (OES) features. In the procedure of stepwise variable selection (SVS), OES features are selected after PI_EEDF. Informative vector for developed PI-VM also shows relatively high correlation between OES features and etching depth. This is because the reaction rate of each chemical species that governs the etching depth can be sensitively monitored when OES features are used with PI_EEDF. Securing PI_EEDF is important for the development of virtual metrology (VM) for prediction of process results. The role of PI_EEDF as an independent feature and the ability to monitor variation of plasma thermal state can make other features in the procedure of SVS more sensitive to the process results. It is expected that fault detection and classification (FDC) can be effectively developed by using the PI-VM.

• 대한한의진단학회지
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• 제14권2호
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• pp.85-100
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• 2010

Objectives: The purpose of this study was to evaluate diagnostic value of Transcranial Doppler Ultrasound about risk factor of stroke by comparing blood flow between patients with metabolic syndrome(MS group) and Normal group. Methods: 62 metabolic syndrome patients and 106 healthy adults were selected who had no cerebrovascular diseases, cardiovascular diseases and other systemic diseases. We measured the mean velocity(Vm), peak systolic velocity(Vs) and pulsatility index(PI) of MCA, ACA, PCA, VA, ICA in two groups using TCD. All subjects were divided by gender and age. Results: In comparing Ms group with normal group, Vm in the MCA, ACA, PCA, ICA and Vs in the MCA, ICA were lower in MS group. In all vessels, PI of MS group were higher than that of Normal group. In all vessels, Vm and Vs revealed negative correlation with age and PI revealed positive correlation with age. In 20-39 year olds, there was decrease in the Vs and Vm and increase of PI of MS group in comparison with normal group. There was significant difference in the Vm of PCA, ICA, Vs of MCA, PCA, ICA and PI of MCA, ACA. In 40-59 year olds, Vm in the MCA, ACA, ICA and Vs in the MCA, ACA were lower in MS group. PI in the MCA, ACA, PCA, ICA were higher in MS group. In 60-79 year olds, Vm of MCA, PCA, ICA was decreased in MS group than Normal group with no statistical signification. Vs in the MCA was lower and PI in the PCA was higher in MS group. In male, Vm of PCA and Vs of MCA were lower and PI of MCA, ACA, PCA, ICA were higher in MS group. In female, Vm of MCA, PCA, ICA and Vs of MCA, ICA were lower and PI of ACA, PCA, VA, ICA were higher in MS group. Conclusions: The significant difference in Vm, Vs, PI between MS group and normal group suggests hemodynamic disorder. Screening and prognosing high risk group can be done through TCD and this can be used to prevent stroke. More detailed study will be needed.

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.146-150
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• 2021

Plasma information based virtual metrology (PI-VM) that predicts wafer-to-wafer etch rate variation after wet cleaning of plasma facing parts was developed. As input parameters, plasma information (PI) variables such as electron temperature, fluorine density and hydrogen density were extracted from optical emission spectroscopy (OES) data for etch plasma. The PI-VM model was trained by stepwise variable selection method and multi-linear regression method. The expected etch rate by PI-VM showed high correlation coefficient with measured etch rate from SEM image analysis. The PI-VM model revealed that the root cause of etch rate variation after the wet cleaning was desorption of hydrogen from the cleaned parts as hydrogen combined with fluorine and decreased etchant density and etch rate.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.7-12
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• 2023

The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO₂ hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.

• 대한의생명과학회지
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• 제11권3호
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• pp.397-405
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• 2005

Noise may cause damage of the auditory system, hypertension, and cardiovascular disease. However, we haven't the data enough to be available for understanding various effects of noise on the human body. The current study was prospectively designed to investigate the changes of the cardiac factors and cerebral hemodynamics following a transient exposure to noise in young people. 80 subjects (mean aged $23.45\pm2.40$ years) participated in this experiment and were exposed to excavator-noise with 90 decibels for 15 minutes using ear-phone. Cardiac factors such as heart rate (HR), blood pressure (BP) and heart rate-systolic pressure product (RPP), and cerebral hemodynamics such as mean blood flow velocities (Vm), pulsatility indexes (PI), resistance indexes (RI) and mean blood flow velocities at breathing-hold (Vh) in the middle (MCA), anterior (ACA) and posterior cerebral arteries (PCA) were measured before (baseline) and during the noise-exposure. Although there were individual differences in above mentioned parameters, HR, systolic and diastolic BP, RPP, MCA-Vm, MCA-PI, MCA-RI, ACA-Vm, ACA-PI, ACA-RI, PCA-Vm, PCA-PI, and PCA-RI during the noise-exposure decreased compared with the baselines (P<0.05 or P<0.01), The findings of the present study suggest that a transient exposure to excavator-noise at rest causes changes in the cardiac factors and cerebral hemodynamics with individual differences. Further studies need to be carried out for clarifying the effects of longer exposure and combined mental activity with noise exposure.

• Journal of Korean Neurosurgical Society
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• 제39권1호
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• pp.20-25
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• 2006

Objective : The authors analyze prospectively the result of transcranial doppler[TCD] in normal pressure hydrocephalus and compared its cerebral blood flow parameters to radionuclide cerebrospinal fluid[CSF] flow study, postoperative brain computed tomography[CT] findings and clinical outcome, and studied the relationship between cerebral hemodynamics and clinical performance. Methods : Twenty five patients with hydrocephalus undertook pre- and post-operative TCD but only preoperative CSF flow study was performed. Mean flow velocity[Vm], pulsatility index[PI] and resistance index[RI] were assessed through TCD and changes in ventricle size and cortical gyral atrophy were checked through brain CT. Results : Postoperative hydrocephalus showed an increase in Vm[ACA P=0.037, MCA P=0.034], decrease in PI[ACA P=0.019, MCA P=0.017] and decrease in RI [ACA P=0.017, MCA P=0.021] compared to preoperative TCD parameters in the postoperative improvement group. In the postoperative improvement group, postoperative TCD parameters correlated with CSF flow study grade [Vm : $R^2=-0.75$, PI : $R^2=0.86$, RI : $R^2=0.78$] and ventriculocranial ratio change correlated with PI change [$R^2=0.73$]. The convexity gyral atrophy and initial TCD parameters showed close relationship to outcome. Conclusion : PI and RI can be used as an indicator of post operative prognosis, and with the addition of CSF flow study values, can also be used as a tool to predict pre-op and post-op patient status and successful shunt surgery.

• 한국컴퓨터정보학회논문지
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• 제29권3호
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• pp.107-116
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• 2024

본 논문에서는 엣지 컴퓨팅 환경에서 MicroVM의 AI 애플리케이션 수행 시 성능을 분석하고, 이것이 현재 사용되고 있는 컨테이너 기술과 전통적인 가상머신을 대체할 수 있는지 알아본다. 이를 위해 라즈베리파이 4에서 Docker 컨테이너, Firecracker MicroVM, KVM 가상머신 환경을 각각 구축하고 대표적인 AI 애플리케이션들을 실행하였다. 그리고 실험 환경별로 추론 시간, 총 CPU 사용량 및 추세, 파일 I/O 성능을 분석하였다. 실험 결과, MicroVM에서 AI 애플리케이션을 수행하였을 때 컨테이너와의 큰 성능 차이는 없었으며, 오히려 반복적인 애플리케이션 수행에서 평균적으로 안정적인 추론 시간을 확인할 수 있었다. 따라서, 본 연구를 통해 엣지 컴퓨팅 환경에서 컨테이너와 가상머신을 대체하여 MicroVM을 사용한 AI 애플리케이션 운용이 적합할 수 있다는 것을 확인하였다.

• 한국농공학회지
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• 제17권3호
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• pp.3885-3893
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• 1975

This work was intended to study the cutting graph and vibratory phenomina of a newly developed mower which may be suitable for mowing agricultural product having large and hard stems like corn and sugar beet. The system consists of cutter-bar having Curvilinear-translation motion, which attached to drag-crank mechanism. The motion of equation developed for experimental vibratory system which equipped with the cutter-bar system was established and the parameters defining the system's vibratory motion were experimentally determined. The optimum balancing weight for the cutter-bar am vibratory characteristics of the cutter-bar for various counterweight were analyzed to provide the design and operational conditions. The results of the study are summarized as follows; (1) The cutting graph by the new cutter-bar system depends upon the magnitude of ratio of forward travel(Vm) to crank speed (R$\omega$); The cutting pitch for Vm/R$\omega$ 1 (whole cycle cutting) and Vm/R$\omega$=2/$\pi$ (a half cycle cutting) are 2$\pi$ Vm and 4R, respectively. (2) The experimental vibratory system had been proved to function adequately so that it can be used in determining the required counterweight to minimize the vibratory motion of cutter-bar. (3) Experimentally determined counterweight to give the least vibratory motion was a little greater than the theoretically determined one. With the optimum counterweight it was possible to reduce up to about 87% of the amplitude without counterweight, which may be considered to be within safe operational region. (4) To avoid the actual operation of the cutter-bar at resonance which occured in low frequency ratio, it was considered that the rotational speed of the crank for a specific design of mower should be determined separately in connection with the desired cutting graph.

• 대한의생명과학회지
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• 제12권4호
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• pp.375-383
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• 2006

The physiological responses following stress are different in individual or personality. We performed this study to clarify gender differences in influences of noise stress on physiological factors. 70 healthy subjects, which was divided man (n=30) and woman (n=40) groups, were exposed to 85 decibels of excavator noise for 15 minutes. Cardiac factors such as heart rate (HR), systolic and diastolic blood pressures (SBP and DBP, respectively), and heart rate-systolic pressure product (RPP) were determined. Transcranial Doppler ultrasound (TCD) was used to measure mean blood flow velocity (Vm), pulsatility index (PI), and resistance index (RI) in the middle, anterior and posterior cerebral arteries (MCA, ACA and PCA, respectively) before and during noise exposure. Cortisol level and hematological variables were also measured before (baseline) and immediately after the end of noise exposure. In the both groups HR, SBP, and RPP significantly decreased during noise exposure (P<0.05) but not significantly different between two groups (P>0.05). Vms of three cerebral arteries in man group decreased, whereas Vm of PCA in woman group fell during noise exposure (P<0.05). Vm, PI and RI in MCA and ACA during noise exposure were low in man group compared with woman group (P<0.05). Vm of PCA was low, whereas PI and RI of PCA were high in man group compared with woman group during noise exposure (P<0.05). Total leukocyte and red blood cell (RBC) counts slightly decreased during noise exposure but not significant (P>0.05). Levels in hematological variables decreased but not significant changed following noise exposure. Decreased rate of total leukocyte in man group was higher (P<0.05). Cortisol levels in the both groups decreased immediately after the end of noise exposure, while the decreased rate in man group was greater than that in woman group (p<0.05). These findings indicate that a transient exposure to experimental excavator noise may cause decreased changes in cardiac factors, cerebral hemodynamics and cortisol levels and the changes may be greater in men than in women.