• Analytical Science and Technology
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• v.25 no.5
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• pp.313-323
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• 2012

We have developed analysis method of PFCs in river water and sediment, and determined seven species of PFCs such as PFBS, PFHxS, PFOS, PFHpA, PFOA, PFNA and PFDA. Water and sediment samples were collected from 21 and 13 different sites along the Nakdong, Seomjin and Nam River, respectively. The water samples were pretreated with HLB cartridge and sediment samples were concentrated after extracted by sonication, and the levels of PFCs were determined by LC-MS/MS. The coefficient of determination ($R^2$) values of calibration curves were higher than 0.99. The method detection limits ranged 0.09~0.63 ng/L in water and 0.013~0.020 ng/g in sediment. The recovery rates of PFCs was found to be 74~98% for water and 87~111% for sediment. PFOA was the major species in water samples and followed by PFHpA and PFOS. In sediment, PFOA, PFOS and PFDA showed similar levels. Both water and sediment samples collected from the Nakdong River showed the highest concentrations of PFCs among the three rivers.

• Air Cleaning Technology
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• v.14 no.3 s.54
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• pp.23-32
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• 2001

• Air Cleaning Technology
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• v.17 no.4 s.67
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• pp.39-57
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• 2004

첨단산업으로 불리는 반도체, LCD, PDP, 유기EL(OLED) 등의 생산 공정은 고도의 청정상태를 요구하며, 때문에 이들의 생산공정 중 대부분이 클린룸 내에서 이루어진다. 클린룸 내에서의 주요공정은 크게 박막형성(Layering), 노광(Photo Lithography), 식각(Etching) 등 3가지 공정으로 나눌 수 있으며, 반도체 제조공정의 경우 특별히 도핑(Doping) 공정이 추가된다. 오염물질을 함유하는 클린룸 배기는 일반적으로 산, 알칼리, Toxic(PFCs, Flammable), VOC 등으로 분류하며, 각각의 배기는 각 배기특성에 맞는 오염제어 장치를 통해, 정화된 후, 대기로 방출된다. 산, 알칼리 배기는 일반적으로 최종 단계에서 중앙집중식 습식스크러버에 의해 흡수, 중화 처리되며, VOC의 경우 농축기(Concentrator) & 축열식 열 산화장치(RTO) 설비에 의해 연소 처리된다. 하지만 CVD공정으로부터의 배기가 주를 이루는 Toxic배기의 경우, 다량의 PFCs(과불소화합물) 가스를 함유하고 있는 이유로, 대부분 클린룸 내부에 P.O.U(Point of use) 처리장치가 설치되며, P.O.U에 의해 1차 처리된 후 최종적으로 중앙집중식 습식스크러버를 거쳐 대기로 방출된다. 알칼리배기의 주성분으로는 암모니아($NH_3$), HMDS (Hexa Methyl DiSilazane), TMAH (Tetra Methyl Ammonium Hydroxide), LGL, CD 등이며 흡수액에 황산(Sulfuric Acid)용액을 공급, 중화처리하고 있다. 탄소성분을 먹이로 하는 미생물의 번식에 의한 막힘 문제를 제외하고는 큰 문제가 없다. 하지만 Toxic배기 및 산배기의 경우 처리효율이, 가스흡수 이론에 의한 계산결과와 비교할 때, 매우 저조하게 나타나는 효율부족 현상을 겪고 있으며, 이는 잔여 PFCs 가스성분 및 반응에어로졸, 응축에어로졸 등의 영향으로 추정하고 있다. 최근 Toxic 배기의 경우, P.O.U 설비를 Burn & Wet type으로 변경하여, 배기 중 PFCs 및 반응에 에어로졸($SiO_2$)의 농도를 원천적으로 감소시키는 노력이 진행 중이다. 산배기의 경우, 산결로 현상에 의한, 응축에어로졸이 문제가 되고 있으나 내식열교환기(Anti-Corrosive Heat Exchanger), 하전액적스크러버 시스템(Charged Droplets Scrubber System), Wet ESP(Wet Electrostatic Procipitator) 등의 도입을 통해 문제해결을 위한 노력을 경주하고 있다.

• Journal of Environmental Health Sciences
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• v.35 no.4
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• pp.334-342
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• 2009

Perfluorinated compounds (PFCs) have a wide range of domestic and industrial applications, but they are persistent in the environment. Perfluorooctanoic acid (PFOA) and perfluorooctanesulfonate (PFOS) are among the metabolites of PFCs and occur at high concentration in the environment. Korea is the largest importer of PFC compounds in the world, therefore, the accumulation of these compounds is possible. In this study, the concentrations of PFOS and PFOA were determined in water samples taken from sewage treatment plants (STPs) and the Han River in Seoul, Korea. After extraction with a HLB cartridge, PFCs in the samples were analyzed by HPLC with an ion trap mass spectrometry in electrospray negative mode. Limits of detection was between 1 and 1.6 ng/l. The result showed that the concentrations of PFOS and PFOA in effluent and influent of the four STPs in Seoul were 60~570 ng/l, and not detected (nd)~254 ng/l, respectively. The levels of PFOS and PFOA were higher in the effluents which passed through the treatment process than in influent water samples which was against expectation. The concentration of PFOA and PFOS in the Han River was 60~570 ng/l and nd~254 ng/l, respectively. PFOA was detected in every sample, but PFOS was only detected in the downstreams of the Han River. This result indicates that there is comprehensive contamination of PFCs in the aquatic environment in Korea.

• Analytical Science and Technology
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• v.23 no.4
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• pp.331-346
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• 2010

Perfluorinated compounds have characteristics of resistance to heat, acidic, basic conditions and also resist water, oil, grease, pollutant. Futhermore they are used by various industrial material, nowadays, they produced in large scale for indutrial and commercial areas. However, they also resist metabolizing and degrading in environmental system (plant, animal, even human body). Moreover, in animal's bodies, PFCs can be accumulated in organ (eg; liver) and lead to liver cell necrosis even oncogenesis. Perfluorinated compounds are newly registered as new persistent organic pollutants (POPs) on Stockholm convention in 2009. Therefore necessity for analytical methodology for determination of PFCs in various environmental samples is even more increased. This study discussed sample preparation and instrumental conditions for the analysis of PFCs in environmental and biota samples.

• Clean Technology
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• v.17 no.3
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• pp.250-258
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• 2011

Thermal plasma has been presented for the decomposition of perfluorocompounds (PFCs) which are extensively used in the semiconductor manufacturing and display industry. We developed pilot-scale equipment to investigate the large scale treatment of PFCs and called it a "thermal plasma scrubber". PFCs such as $CF_4$, $C_2F_6$, $SF_6$, and $NF_3$ used in experiments were diluted with $N_2$. There were two different types of experiment setup related to the water spray direction inside the thermal plasma scrubber. The first type was that the water was sprayed directly into the gas outlet located at the exit of the reaction section. The second type was that the water was sprayed on the wall of the quenching section. More effective decomposition took place when the water was sprayed on the quenching section wall. For $C_2F_6$, $SF_6$, and $NF_3$ the maximum destruction and removal efficiency was nearly 100%, and for $CF_4$ was up to 93%.

• Applied Chemistry for Engineering
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• v.30 no.1
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• pp.108-113
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• 2019

In this study, the decomposition characteristics of perfluorinated compounds generated in semiconductor manufacturing process were investigated by using a high temperature plasma. The analysis results revealed that $CF_4$ and $SF_6$ showed the highest efficiency at 12.8 kW power, but no significant difference was observed at the power above. Experimental results showed that the maximum efficiency was obtained at the flow rate of about 14 mL/min and the treatment efficiency decreased as the flow rate increased or decreased with respect to the flow rate of 14 mL/min. As a result, the decomposition characteristics of perflurocompounds (PFCs) using a high temperature plasma could be grasped, and also the basis for the treatment of PFCs and greenhouse gases generated in the semiconductor manufacturing process could be obtained.

• Journal of Food Hygiene and Safety
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• v.36 no.4
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• pp.310-315
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• 2021

This study was carried out to monitor the level of 17 perfluorinated compounds (PFCs) present in liquid milk products sold on the Korean market. The liquid milk samples were extracted via liquid-liquid extraction and analyzed by LC-MS/MS. Excellent linearity over the calibration range (r²>0.99), and the limit of quantification of perfluorooctane sulfonate (PFOS) was 0.021 ng/g, and perfluorotetradecanoic acid (PFOA) was 0.057 ng/g. The accuracy was in the range of 72.5-115.3%, and the precision was under 20%. The preprocessing method for this experiment is considered appropriate for analysis of milk samples. The proposed analytical method was applied for the determination of PFCs in 98 liquid milk product samples, and the average content of total PFCs was 0.6576 ng/mL. PFOA and PFOS were detected in most samples, and their levels were less than 0.1 ng/mL, which was lower than those in other studies.

• Proceedings of KOSOMES biannual meeting
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• 2007.11a
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• pp.193-195
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• 2007

해양생태계로 유입되는 화학물질의 총합적인 평가 및 관리를 위해서는 동 화합물의 해양환경중의 거동 및 운영, 생태계에의 영향, 관리방안에 따른 화학물질의 변화 예측 및 리스크 평가 등을 행할 필요가 있으며, 이를 위하여는 화학물질에 대한 생태계 모델이 유용한 수단이 될 수 있다. 본 연구에서는 여러 화학물질에 적용할 수 있으며, 지역특성, 존재 데이터 상황, 대상 수산물의 특성을 고려하여 여러 상태함수 및 프로세스의 추가와 삭제가 가능한 3차원 생태계 모델(EMT-3D)을 사용하여 해양환경중의 PFCs 관련물질을 대상으로 그 적용성을 검토하였으며, 민감도 분석 및 시나리오 분석을 행하여 영향인자를 판별하고 대안에 따른 영향을 평가하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.119.2-119.2
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• 2014

대기환경 규제가 강화됨에 따라 기존 기술 대비 획기적인 성능과 가격 경쟁력을 갖춘 새로운 대기환경 기술에 대한 수요가 지속적으로 요구되고 있다. 특히 최근에는 종래의 분진, 이산화황가스 및 질소산화물에 대한 규제와 더불어 지구온난화가스인 이산화탄소, 과불화화합물 (Perfluorocompounds, PFCs), 메탄가스 등에 대한 규제가 강화되면서 이에 대응할 수 있는 대기환경 기술의 수요가 늘고 있다. 한국기계연구원에서는 지난 10 여 년간 지구온난화가스이자 난분해성 가스인 메탄 및 PFCs 가스를 플라즈마 화학반응 공정을 통해 분해하는 연구를 수행해왔으며, 이를 바탕으로 산업에 적용할 수 있는 기술개발도 병행하여 수행하였다. 현재 개발된 기술 가운데 일부는 산업에 실제로 적용되고 있으며, 이를 통해 산업현장에서는 지구온난화가스는 물론 질소산화물과 같은 다른 종류의 규제물질도 동시에 저감할 수 있었다. 본 발표에서는 플라즈마를 활용하여 난분해성 가스인 메탄과 PFCs를 분해하는 기술의 특성을 살펴보았으며, 이를 바탕으로 산업현장에 적용된 대기환경기술이 어떻게 활용되고 있는지를 소개하고 있다. 본 발표에서 다루게 될 플라즈마 발생기술은 펄스 코로나, 유전체장벽방전, 마이크로웨이브 토치, 아아크 토치 등이며, 플라즈마 발생조건은 수 torr 이하의 진공조건부터 및 대기압 조건에 이르고 있다.