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http://dx.doi.org/10.14478/ace.2018.1121

Study on Treatment Characteristics of Perfluorinated Compounds Using a High Temperature Plasma  

Moon, Gi-Hak (Department of Environmental Engineering, Chungbuk National University)
Kim, Jae-Yong (Department of Environmental Engineering, Chungbuk National University)
Publication Information
Applied Chemistry for Engineering / v.30, no.1, 2019 , pp. 108-113 More about this Journal
Abstract
In this study, the decomposition characteristics of perfluorinated compounds generated in semiconductor manufacturing process were investigated by using a high temperature plasma. The analysis results revealed that $CF_4$ and $SF_6$ showed the highest efficiency at 12.8 kW power, but no significant difference was observed at the power above. Experimental results showed that the maximum efficiency was obtained at the flow rate of about 14 mL/min and the treatment efficiency decreased as the flow rate increased or decreased with respect to the flow rate of 14 mL/min. As a result, the decomposition characteristics of perflurocompounds (PFCs) using a high temperature plasma could be grasped, and also the basis for the treatment of PFCs and greenhouse gases generated in the semiconductor manufacturing process could be obtained.
Keywords
Perflurocompounds; Greenhouse gas; High temperature plasma; Semiconductor;
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Times Cited By KSCI : 1  (Citation Analysis)
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